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He/O-ICR in HT-7’2007. J.S Hu, J.G Li 2007.5.31. 实验目的. GAP 中再沉积层清除 氧化后等离子体恢复 优化和加强清洗 硼化对氧化后等离子体恢复的影响. 实验进程. 4:1He/O 2 -ICR, 70’ Pumping with 3 cryo-pump, 15’ D2-ICR, 40’ Pumping with 3 cryo-pump, 15’ He-ICR,50’ Pumping with 3 cryo-pump, 15’ B-ICR+He-ICR, 70’+90’ - PowerPoint PPT Presentation
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He/O-ICR in HT-7’2007
J.S Hu, J.G Li
2007.5.31
实验目的• GAP中再沉积层清除• 氧化后等离子体恢复
–优化和加强清洗–硼化对氧化后等离子体恢复的影响
实验进程• 4:1He/O2-ICR, 70’• Pumping with 3 cryo-pump, 15’• D2-ICR, 40’• Pumping with 3 cryo-pump, 15’• He-ICR,50’• Pumping with 3 cryo-pump, 15’• B-ICR+He-ICR, 70’+90’• Pumping with 3 cryo-pump, 15’• Plasma discharge
– Temp.Limiter ~110OC– Temp.Liner ~200OC– 0.3s on/ 1.5s off
Vacuum
1 6 11 16 21 26 31 36 41 46 51 56 61 66 71 76 81 86 91 96-8-7.1x10
-71.9x10
-74.5x10
-77.1x10
-79.7x10
-61.2x10
-61.5x10
-61.7x10
-62.0x10
-62.3x10
Atomic Mass Units
Pa before oxidation, Tlimiter:36 May 31, 2007 08:46:37 AM --- Total Pressure
1 6 11 16 21 26 31 36 41 46 51 56 61 66 71 76 81 86 91 96-6-1.2x10
-65.2x10
-51.2x10
-51.8x10
-52.4x10
-53.1x10
-53.7x10
-54.4x10
-55.0x10
-55.6x10
-56.3x10
Atomic Mass Units
Pa after oxidation 4e-4Pa Tlimiter: 74 May 31, 2007 11:52:15 AM --- Total Pressure
1 6 11 16 21 26 31 36 41 46 51 56 61 66 71 76 81 86 91 96-7-8.2x10
-63.4x10
-67.6x10
-51.2x10
-51.6x10
-52.0x10
-52.4x10
-52.9x10
-53.3x10
-53.7x10
Atomic Mass Units
Pa After D2-ICR , Tlimiter: 84 May 31, 2007 12:59:33 PM --- Total Pressure
1 6 11 16 21 26 31 36 41 46 51 56 61 66 71 76 81 86 91 96-7-6.4x10
-62.7x10
-66.0x10
-69.3x10
-51.3x10
-51.6x10
-51.9x10
-52.2x10
-52.6x10
-52.9x10
Atomic Mass Units
Pa After He-ICR, Tlimiter 95 May 31, 2007 01:50:35 PM --- Total Pressure
After experiment
1 6 11 16 21 26 31 36 41 46 51 56 61 66 71 76 81 86 91 96-7-5.4x10
-62.2x10
-64.9x10
-67.6x10
-51.0x10
-51.3x10
-51.6x10
-51.8x10
-52.1x10
-52.4x10
Atomic Mass Units
Pa after B-ICR, Tlimiter 100 May 31, 2007 04:37:29 PM --- Total Pressure
He/O-ICR-1
00:00 00:07 00:14 00:21 00:28 00:35 00:42 00:49 00:56 01:03 01:10
Time (hh:mm)
-61.0x10
-51.0x10
-41.0x10
-31.0x10
-21.0x10
Pa diff during oxidation May 31, 2007 10:02:13 AM
H2HDHe/D2CH3H2OHDOD2OCOO2CO2
He/O-ICR 2
00:28 00:35 00:42 00:49 00:56 01:03 01:10 01:17 01:24 01:31 01:38
Time (hh:mm)
-61.0x10
-51.0x10
-41.0x10
-31.0x10
-21.0x10
Pa diff during oxidation May 31, 2007 10:02:13 AM
H2HDHe/D2CH3H2OHDOD2OCOO2CO2
He-ICR-1
00:00 00:05 00:10 00:15 00:20 00:25 00:30 00:35 00:40 00:45 00:50 00:55
Time (hh:mm)
-81.0x10
-71.0x10
-61.0x10
-51.0x10
-41.0x10
-31.0x10
-21.0x10
Pa diff during He-ICR May 31, 2007 01:01:09 PM
H2HDHe/D2CH3H2OHDOD2OCOO2CO2
He-ICR 2
00:00 00:01 00:02 00:03 00:04 00:05 00:06 00:07 00:08 00:09
Time (hh:mm)
-81.0x10
-71.0x10
-61.0x10
-51.0x10
-41.0x10
-31.0x10
-21.0x10
Pa diff during He-ICR May 31, 2007 01:51:37 PM
H2HDHe/D2CH3H2OHDOD2OCOO2CO2
B-ICR
00:00 00:07 00:14 00:21 00:28 00:35 00:42 00:49 00:56 01:03 01:10
Time (hh:mm)
-81.0x10
-71.0x10
-61.0x10
-51.0x10
-41.0x10
-31.0x10
-21.0x10
Pa diff during He/B-ICR May 31, 2007 02:01:28 PM
H2
HD
He/D2
11
H2O
28
32
44
71
143
He-ICR 3
01:10 01:17 01:24 01:31 01:38 01:45 01:52 01:59 02:06 02:13 02:20
Time (hh:mm)
-81.0x10
-71.0x10
-61.0x10
-51.0x10
-41.0x10
-31.0x10
-21.0x10
Pa diff during He/B-ICR May 31, 2007 02:01:28 PM
H2
HD
He/D2
11
H2O
28
32
44
71
143
Plasma discharge B&A
00:12 00:19 00:26 00:33 00:40 00:47 00:54 01:01 01:08 01:15 01:22
Time (hh:mm)
-81.0x10
-71.0x10
-61.0x10
-51.0x10
-41.0x10
-31.0x10
-21.0x10
Pa inner after oxidation 1.7E-5 May 31, 2007 04:39:46 PM
H2HDHe/D2CH3H2OD2OCOO2CO2143
00:00 00:07 00:14 00:21 00:28 00:35 00:42 00:49 00:56 01:03 01:10
Time (hh:mm)
-81.0x10
-71.0x10
-61.0x10
-51.0x10
-41.0x10
-31.0x10
-21.0x10
Pa inner before oxidation 8E-6 May 31, 2007 08:14:39 AM
H2HDHe/D2CH3H2OHDOD2OCOO2CO2
Plasma recovery95816-95830-95861-95866
Comparison with OH disruptive PD before oxidation
Comparison with OH after 3nd Boronization92131-9230298515-98566
Summary
• Successful experiment!
Thank you for attentionThank ICR, Vacuum Group and Dr.Gong for t
heir help.
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