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Isao H. Inoue
Inhomogeneous Current Distribution at Oxide Interface
National Institute of Advanced Industrial Science & Technology (AIST) (Tsukuba, Japan)
2
Quantum critical phenomena
Electrostatic carrier doping
Mott transistor Exotic phonomena
集中講義「モットトランジスタは実現できるのか?」
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
本来は金属であるはずの物質が、強い電子相関(電子どうしに働くクーロン斥力)のために絶縁体となっている物質を「モット絶縁体」と呼ぶ。モット絶縁体にキャリアをドープすると、局在していた全てのキャリアがいっせいに動き出して金属になる。いわゆるモット転移である。このモット転移を利用して、新概念のトランジスタを作れないだろうか。そのためには何が必要なのか? 本講義では、「強相関」「電界効果ドーピング」という二つのキーワードに関する基本的な物理を簡単に解説し、それに伴う物理現象を紹介する。そして、現状の半導体デバイスの問題点と「モットトランジスタ」の可能性について議論したい。
3
日時:2014年7月15日(火) 10:30-12:00 (90分), 13:15-14:45 (90分), 15:00-16:30 (90分) 同 16日(水) 10:30-12:00 (90分), 13:15-14:45 (90分), 15:00-16:30 (90分) (講演会) 場所:東京工業大学大岡山キャンパス
4
Quantum critical phenomena
Electrostatic carrier doping
Mott transistor Exotic phonomena ✔on the horizon!
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
Tem
p
Ordered State
Classical Critical Point
Quantum criticality
Quantum Critical Point
Physical Parameters(Pressure, Magnetic field,
Carrier number, etc.)
5i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/
Seminar @ TITech, 16 July 2014
Tem
p
Ordered State
Classical Critical Point
Pressure
Super
UGe2
Super
CeCu2Si2
Quantum Critical Point
Physical Parameters
Tem
p
Tem
p
Ferro Antiferro
What happens at QCP?
Pressure
6
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
Continuous and reversible control of electronic states on the verge
of the quantum critical point
Randomness-free method: quantum critical phenomena is
so vulnerable to disorders
7
For QCP study, we need …
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
Phys. Parameters are alwayseither Pressure or Mag. Field
UGe2
Saxena et al., Nature 406, 587 (2000) [ Coleman, Nature 406, 580 (2000) ]
Ferro
Super
Pressure
Tem
p
Yuan et al., Science 302, 2104 (2003)
CeCu2Si2
AFSuper
Pressure
Tem
p
8
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014 9
Electrostatic Carrier DopingWhy is electrostatic carrier
doping so difficult?
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
TiO2-x Co1-xO, Fe1-xO, Ni1-xO valence electron
1st electron ionisation
2nd electron ionisation
neutral composite
neutral composite
valence electron
Defects in transition-metal oxides
11
Transition-Metal Oxides ≈ ionic crystals (because of the strong electron correlations)
!
!
!
→ Defects form easily under large electric field.
Why is electrostatic carrier doping so difficult?
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014 13
10-2
10-3
10-4Cha
nnel
Res
istiv
ity (Ω
cm)
300220Temperature (K)
260
Nd0.5Sm0.5NiO3
VG = 0VVG = -2.5V
S. Asanuma et al., APL. 97, 142110 (2010)
VO2
10 2
10 6
Cha
nnel
Res
ista
nce
(Ω) 1010
300150 200 250100Temperature (K)
M. Nakano et al., Nature. 487, 459 (2012)
Good examples of electrostatic carrier doping?
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014 14
Electrochemical reaction…?
Science 339, 1402 (2013)
VO2VO2
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
Electron correlation
15i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/
Seminar @ TITech, 16 July 2014
Electrolytic colouration
16
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
Electrolytic colouration
M. M. Abraham et al., J. Solid State Chem. 51, 1 (1984)
Mn impurity of ~100ppm
MgO single crystal (transparent)
2.5mm thick
Pt cathod
Pt anode+ + + + + + + + + + + + +
apply 1.1kV for 2hrs at 1050ºC
17
-
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
€
MnO+ 2e− →Mn(metal)+ 12 O2
Electroreduction!
Electrolytic colouration
M. M. Abraham et al., J. Solid State Chem. 51, 1 (1984)
Mn impurity of ~100ppm
MgO single crystal (transparent)
2.5mm thick
Pt cathod
Pt anode+ + + + + + + + + + + + +
apply 1.1kV for 2hrs at 1050ºC
18
-
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
nanocracks at grain boundary
T. Schmidt et al., Appl. Phys. Lett. 73, 2173 (1998)
instantaneous destruction of Ti film
atomic rearrangement occurs!
108
107
106
J [A/cm2]
J ~ 107A/cm2
oxygen is provided from air: no barrier is formed in vacuum
I. H. Inoue et al., Phys. Rev. B77, 035105 (2008)
19
Current induced oxidation
Electroxidation!
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
"Redox memory" RRAM, ReRAM, Memristor, and so on
20
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
Resistance switching of redox memory I. H. Inoue et al., Phys. Rev. B77, 035105 (2008)
21i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/
Seminar @ TITech, 16 July 2014 22
“Lichtenberg Figure”http://www.CapturedLightning.com/
An electron accelerator of three million volts blasts electrons through the acrylic sheet. It traps the electrons inside. The electrons will stay trapped for hours, but a knock with a sharp point opens a path for them to make a quick escape.
Dielectric breakdown
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014 23
“Lichtenberg Figure”http://www.CapturedLightning.com/
e
Electrons gather from all parts of the block, joining up to form larger and larger streams of electric current on their way toward the exit point. As the charge leaves, it heats up and damages the plastic along the branching trails it follows, leaving a permanent trace of its path
River of electrons
e
e
e
e
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
H. J. Wiesmann and H. R. Zeller, J. Appl. Phys. 60, 1770 (1986)
Breakdown forms a bush
filamentation (rapid flow of space charge)
amplification, propagation and multiplication (branching)
a point of high local field (rough electrode, conducting
inclusions, etc.)
24
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
H. A. Fowler, J. E. Devaney, and J. G. Hagedorn, IEEE Transactions on Dielectrics and Electrical Insulation, 10, 73 (2003)
25
Breakdown forms a bush
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
cathode (-)
25th June 2008 26
anode (+)
cathode (-)
anode (+)
cathode (-)
anode (+)
e O2
O2
O2
O2
electro-reduction
€
CoO→12O2(gas) + Co2+ + 2e−
Forming of RRAM
e ee e
e
ee
e e e
e
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014Nanoelectronics Days 2008 @ Aachen 15 May 2008
Open Faucet Closed Faucet
Reset
Jon ~ 1×107 A/cm2
Current density at a faucet of 7x10-10cm2 (φ150nm)
27
Switching of RRAM
Transition-Metal Oxides ≈ ionic crystals (because of the strong electron correlations)
!
!
!
→ Defects form easily under large electric field.
Can we apply large electric field to TMO
without creating oxygen defects?
Isao H. Inoue Neeraj Kumar Ai Kitou
Yes! Use Parylene to suppress
the defects formation
National Institute of Advanced Industrial Science & Technology (AIST) (Tsukuba, Japan)
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
"Biocompatible glass is coated with protective substances for anti-migration and insulating properties and this is where the Parylene C coating comes. !It also protects the microchip from natural substances in the body, that may penetrate through micro-cracks caused by mechanical damages."
From "moving a pet to Australia" website
by ParyleneProtect surface
Parylene coated rotors and stators are used to control the Canadian arm for NASA Space Shuttle.
Parylene coated circuit boards provides excellent resistance to moisture, chemicals, and mold. Circuit boards for medical equipment can be steam and gamma sterilised. Parylene can also prevent dendrite and tin whisker growth.
From "Paratronix Inc." website
Parylene coating of paper documents, autographs, and photos retards the aging process and protects from moisture, mold, and chemicals.
30
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
Creation of oxygen vacancies is suppressed. !Channel is kept clean.
P.-J. Chen et al., Lab on a Chip 6, 803 (2006)
conformal coating
by ParyleneProtect oxide surface
oxides
31i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/
Seminar @ TITech, 16 July 2014
Parylene/SrTiO3 FET
Using Parylene for the gate insulator, mobility is drastically enhanced.
But carrier density is not large...
SrTiO3
32
High-k/Parylene bilayer to accumulate more carriers
must be very thin
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
"Biocompatible glass is coated with protective substances for anti-migration and insulating properties and this is where the Parylene C coating comes. !It also protects the microchip from natural substances in the body, that may penetrate through micro-cracks caused by mechanical damages."
From "moving a pet to Australia" website
In General, Parylene film is very thick
Parylene coated rotors and stators are used to control the Canadian arm for NASA Space Shuttle.
Parylene coated circuit boards provides excellent resistance to moisture, chemicals, and mold. Circuit boards for medical equipment can be steam and gamma sterilised. Parylene can also prevent dendrite and tin whisker growth.
From "Paratronix Inc." website
Parylene coating of paper documents, autographs, and photos retards the aging process and protects from moisture, mold, and chemicals.
Parylene film in most of the literatures are more than ~1µm thick.
34
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
High-k (HfO2, Ta2O5, etc.)/Parylene bilayer
Hybrid gate insulator ! high-k materials (~15 < ε < ~25) + Parylene-C (ε=3.2)
Isao Inoue and Hisashi Shima, Japan Patent Number: 5522688, Date of Patent: 18th April, 2014
35i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/
Seminar @ TITech, 16 July 2014
SrTiO3
AlHfO2
Au
Ti
parylene
BF-TEM image
36
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
SrTiO3
Al
HfO2
Au
Ti
parylene
BF-TEM image
37 i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
SrTiO3
Al
HfO2
parylene
BF-TEM image
38
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
SrTiO3
Al
HfO2
Au Ti
parylene
STEM-EDS mapping
39
We are preparing FET devices using a conventional
photolithography
“Intel 4004 IC” the original microprocessor or “computer on a chip.”
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
Preliminary data of 20µm devices
41
High-k/Parylene/SrTiO3
cleaner interface
continuous doping control
National Institute of Advanced Industrial Science & Technology (AIST) (Japan)
Christos Panagopoulos
Nanyang Technological University (Singapore)
Azar B. Eyvazov*
Isao H. Inoue
CNRS & Université Paris Sud (France)
Pablo Stoliar** Marcelo J. Rozenberg***
*also AIST (now a PhD student in Cornell University, US)
**also Universidad Nacional de San Martin, Argentina, and Université de Nantes, France
***also Universidad de Buenos Aires, Argentina
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
Unusual I-V curves
Hardly seen in Al2O3/SrTiO3 Al2O3/SrTiO3 has some amount of carriers from the first
K. Ueno et al., App. Phys. Lett. 83, 1755 (2003)
10-6
44
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
When increasing VSD
10-6
ΔV/VSD
I SD
ΔV/VSD
I SD
0.3mm/0.8mm = 0.375
increasing VSD for large fixed VG
0.3mm/0.8mm = 0.375
normal
abnormal !
increasing VSD for small fixed VG
45
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
10-6
When increasing VG
ΔV/VSD
I SD
ΔV/VSD
I SD
0.3mm/0.8mm = 0.375
0.3mm/0.8mm = 0.375
increasing VG for any fixed VSD
normal
abnormal !
not observed
46
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
Proc. Phys. Soc. 82, 954 (1963)
“Nonlinear…” by E. Scholl, Cambridge Univ. Press (2001)
Negative Differential Resistance
47i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/
Seminar @ TITech, 16 July 2014
ΔV/VSD
I SD
0.3mm/0.8mm = 0.375
increasing VG for any fixed VSD
current path!
ΔV/VSD
I SD
0.3mm/0.8mm = 0.375
increasing VSD for small fixed VG
field domain!
Negative Differential Resistance
48
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
Numerical simulation: results
49
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
Comparison of Exp & Calc
10-6
50
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
Experiment Calculation
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
Simulation of path formation
51
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
Schematic picture of channel
52
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
High-k/Parylene/SrTiO3 FET
cleaner interface
filamentation53
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014
same S-shape I-V curves were observed
Hardly seen in Al2O3/SrTiO3 Al2O3/SrTiO3 has some amount of carriers from the first
0 0 . 0 0 5 0 . 0 1 0 . 0 1 50
0 . 2
0 . 4
0 . 6
V 12 ( V )
290 K
280 K
I D (
nA
)
0 0 . 0 1 0 . 0 2 0 . 0 3 0 . 0 40
0 . 0 5
0 . 1
0 . 1 5
V 1 2 ( V )
180 K
220 K
210 K
200 K ID
( n A
)
€
ΔV ≡V1 −V2
€
ΔV ≡V1 −V2
55
Parylene/SrTiO3 FET
26i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014 56
1011 1012
H. Nakamura et al., Appl. Phys. Lett. 89, 133504 (2006)
h/e2=25.8kΩ
Filamentation at 7K
Filamentation Occurs even at 7K!!
Then, what happens at ultra-low T
superconductivity?i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/
Seminar @ TITech, 16 July 2014 5834
SC at LaAlO3/SrTiO3 interface
S. Thiel et al., Science 313, 1942 (2006)
N. Reyren et al., Science 317, 1196 (2007)
TC ~ 200mK HC2 ~ 0.1T JC ~ 100µA/cmnonvolatile
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014 59
34
SC at electrolyte/SrTiO3 interface
K. Ueno et al., Nature Materials 7, 855 (2008)
TC ~ 400mK HC2 ~ 0.1T JC ~ 300µA/cm
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014 60
33
SC of bulk SrTiO3-δ
M. Jourdan et al., Eur. Phys. J. B 33, 25 (2003)
TC ~ 140mK HC2 ~ 0.3T JC ~ 100A/cm2 ~ 100µA/cm (for t10nm)
Good agreement in the orders with ! 1) SC at LaAlO3/SrTiO3 interface, 2) SC at electrolyte/SrTiO3 interface, !and ! 3) our gate-annealed SC (next slide).
31
Sample A
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014 61
VG threshold is lowered. Nonvolatile metallic state.
Bulk-like superconductivity due to oxygen vacancies?
TC ~ 350mK HC2 ~ 0.1T
prolonged (one-day) applicationof large VG
SC was seen only after
Al electrode
Volta
ge (m
V)
0
0.2
Temperature (K)1.8 2.21.4
H. Nakamura et al., J. Phys. Soc. Jpn. 78, 083713 (2009).
SC in "gate-annealed" parylene/SrTiO3
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014 62
32
Oxygen vacancy creation on SrTiO3
M. Janousch et al., Adv. Mat. 19, 2232 (2007)
0.2 mol% Cr-doped SrTiO3
By applying 105V/cm for about 30 min
Pt
Pt
Oxygen vacancies are created, and distributed in the channel, and form a metallic path.
All the superconductivity of SrTiO3 interface shown here might be caused by oxygen defects…
Is this the conclusion? Is this the conclusion?
No. we observed another
All the superconductivity of SrTiO3 interface shown here might be caused by oxygen defects…
39
1011 1012
Domain formation of doped carrier and percolation transition
i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014 65
Another “ ” State
35i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014 66
TC ~ 400mK HC2 ~ 0.1T JC ~ 300µA/cm
·SC at electrolyte/SrTiO3 interface ·gate-annealed SC ·SC at LaAlO3/SrTiO3 interface ·bulk superconductivity
is Fragile
36i.inoue@aist.go.jp http://staff.aist.go.jp/i.inoue/Seminar @ TITech, 16 July 2014 67
Summary
zzz
high-k/Parylene to protect surface
Filamentation
Recommended