Auo Oled Manufacturing

1

AUO Proprietary & Confidential

OLED Manufacturing OLED Manufacturing ProcessProcess


宋志峰宋志峰經理經理

OLED OLED 技術處技術處, , 友達光電友達光電

Apr. 25Apr. 25thth, 2004, 2004


Gro

wth

rate

For example : CRT vs LCD ; Dram vs Flash

Gro

wth

rate

For example : LCD vs OLED

Taiwan’s maker

???

2


Source : Annual Display Search US FPD Conference 2004

050

100150200250300350400450

Rev

enue

(mill

ion

US

D)

Others 2.1 2.6 3.3 3.3 3.3

Industrial 2.6 18.5 30.2 52.6 97.1

Car Audio 83.7 131.5 190.1 189.4 193.6

Mobile phone-Sub 26.4 101.4 127.7 108.1 116.4

Automotive - - 0.8 3.4 3.1

2002 2003 2004 2005 2006

Source : iSuppli OLEDs conference 2004

OLED市場是否能繼續成長端看AMOLED何時遞補??


LTPS-OLED LTPS-LCD

2003 : 2003 : World First Commercial AMOLED DisplayWorld First Commercial AMOLED DisplayKodak DSCKodak DSC

2004 : 2004 : World 2nd Commercial AMOLED DisplayWorld 2nd Commercial AMOLED DisplaySony Sony ClieClie PDAPDA

曇花一現的AMOLED!

3


“贏利無望！”先鋒放棄有源型有機EL面板業務【日經BP社報道】

先鋒將放棄開展有源矩陣型有機EL面板業務。這是2005年12月8日先鋒集團業務結構改革發佈會宣佈的。今後將研究如何有效利用現有專利，準備繼續進行有源型產品的研發。

三洋電機退出有機EL業務 “將考慮出售”相關設備【日經BP社報道】

三洋電機日前宣佈將退出有機EL面板業務。由該公司與美國柯達合資成立的、旨在生產和銷售有機EL面板的SK顯示器公司將撤銷雙方的合資關係。對於退出有機EL面板業務的理由，三洋電機解釋說：“這是根據公司中期經營計劃對業務進行選擇與集中的結果，目的是進一步向核心業務進行集中。”


LPL、三星SDI宣佈加碼投資AMOLED產線

近來平面顯示器面板大廠先後發佈，加碼投資主動式有機電激發光顯示器（AMOLED）的消息，樂金飛利浦（LG. Philips LCD；LPL）計劃在坡州興建1條5.5代AMOLED生產線，在此同時，三星SDI（Samsung SDI）亦向外界宣佈，將投資4.5億美元擴增AMOLED產能，顯示儘管在TFT LCD和PDP面板技術成熟並漸成主流之際，廠商對於AMOLED市場的投資動作仍未停歇。

LPL與柯達合作發展AMOLED面板【電子時報】

據彭博資訊（Bloomberg）報導，TFT LCD面板大廠樂金飛利浦（LG. Philips LCD；LPL）與柯達（Eastman Kodak）日前達成初步協議，將合作研發有機電激發光二極體（OLED）面板。由於三洋電機日前甫宣佈退出OLED市場，而原與三洋電機（Sanyo Electric）擁有OLED合資關係的柯達，旋即與LPL促成合作契機，OLED面板合縱版圖勢必將再現變動。

主角登場了主角登場了!!!!

4


友達AMOLED產品明年可望問市【電子時報 2005/11/25】

友達（2409）2006年主動式有機電激發光顯示器（AMOLED）產品將開始小幅量產，友達副總經理盧博彥表示，2005年底友達將會有小量的AMOLED產品開始送樣給客戶，2006年開始陸續會有一些產品開始問市。盧博彥表示，AMOLED顯示效果佳，且不需要背光模組可以做得十分輕薄，在中小尺寸市場有其利基。不過目前AMOLED量產技術仍需要一段時間的發展，其良率及生產成本才能與TFT LCD在市場上競爭。

在參加了工研院電子所舉辦的「前瞻顯示技術論壇」上，盧博彥表示，他對於三星SDI（Samsung SDI）資深研發副總鄭昊鈞所談，關於三星SDI在AMOLED量產技術的努力，覺得心有戚戚焉，因為雖然每一項有關於技術的改進都只是輕描淡寫地帶過，但是背後事實上都代表了大量的研發經費與人力，而友達在AMOLED技術的發展過程，確實也遭遇到同樣艱辛的挑戰，因此聽來特別有感覺。

對於AMOLED受到TFT LCD技術發展快速的威脅，盧博彥認為，倘若AMOLED技術早在10〜15年前被開發出來，那麼這個技術現在必然會是獨霸市場的顯示技術，因為AMOLED的顯示效果確實是十分地討人喜歡。不過過去幾年由於TFT LCD的技術快速發展，AMOLED確實也面臨很大的壓力。

盧博彥表示，友達看好AMOLED的技術潛力，但對於AMOLED的發展不敢貪心，先以小量出貨為主。盧博彥表示，事實上2006年整個AMOLED市場的產品量應該還不是很明顯的起來，畢竟AMOLED的技術發展完全成熟仍需要一段時間。同時盧博彥也表示，目前AMOLED最重要的課題仍是在於如何在這幾年趕緊把技術快速提升，否則面臨TFT LCD的追趕，未來市場必然更受擠壓。


AgendaAgenda

1. AMOLED v.s. TFT-LCD

2. Manufacturing Process

3. Challenge of OLED

4. AMOLED Development in AUO

5. Summary

5


q Different pixel design

q Enough current supply to drive OLEDq Good stability of TFTs

LC×

VcomScan

Data

OLED

V1

V2

Scan

Data

TFT Request for OLED TFT Request for OLED


TFT-LCD

AMOLED

Cover glass

FPC

Desiccant

FrameTFTPolarizer

Structure of TFTStructure of TFT--LCD & AMOLED LCD & AMOLED

6


Ø OLED replaces liquid crystal, color filter and backlight unit

Ø The module thickness of OLED smaller than 2.1 mm.

Cover glass

FPC

Desiccant

FrameTFTPolarizer

Main Components of AMOLED Main Components of AMOLED


Polarizer1/4 λ Retardation Retardation Film

GlassITO

Glass

Metallic Pole

Org. Layer

Dark Bright

1/4λcircularpolarizer

Circular Circular Polarizer Polarizer for OLED for OLED

7


0.250

1.000

0.250

0.0850.100

0.550

0.065

Top PFColor filter (0.5t)TFT glass (0.5t)Bottom PFGap (built up by shielding tap)Reverse (downward) prism sheet

Light guide plate (flat type)

Reflector

0.280

1.200

Circular polarizerTFT glass (0.5t)Cover glass (0.7t)

Thickness (mm)MaterialsStructureItems

HO

US

ING

FR

AM

E

0.6mm height

2.3mm

Tran

sfle

ctiv

e LC

D

disp

lay

Act

ive

Mat

rix O

LED

D

ispl

ay

HOUSING FRAME

1.48mm

è thinner form factor

Thinner Form FactorThinner Form Factor


OLED LCD

0

50

100

150

200

250

-80 -60 -40 -20 0 20 40 60 80

View angle

Brig

htne

ss (c

d/m

2 )

1.93 AM LCD

AU-OLED

1.E+00

1.E+01

1.E+02

1.E+03

1.E+04

1.E+05

1.E+06

1.E+07

-80 -60 -40 -20 0 20 40 60 80

View angle

Con

trast

ratio

1.93 AM LCDAU-OLED

Virtually no viewing angle problem

Contrast ~2 orders of LCD

Wide Viewing Angle & High ContrastWide Viewing Angle & High Contrast

8


Superior Viewing AngleSuperior Viewing Angle

Co ntra st ratio

0

2 00

4 00

6 00

8 00

10 00

12 00

-100 -50 0 50 100

ang les from n or.

C.R

.

LCD

OLED

Int. Vs viewing angles (White)

0

0.2

0.4

0.6

0.8

1

1.2

-100 -80 -60 -40 -20 0 20 40 60 80 100

angles to normal( deg.)

int.

(a.

u.) LCD

OLED

0.2

0.4

0.6

0.8

1

30

210

60

240

90

270

120

300

150

330

180 0

AMOLED AMOLED

TFTLCD_MVATFTLCD_MVA


AMOLED only shows few advantage than LCD

Performance Comparison Performance Comparison

Contrast ratio

Response time

Viewangle

Power consumptionLifetime

Cost

Thickness& Weight

TFT-LCD AMOLED

9


AgendaAgenda





5. Summary


Color FilterLiquid Crystal Backlight module

OLED process

a-Si TFT array process Cell process Module process

AMOLEDAMOLED

TFTTFT--LCDLCD

Extra equipment for LTPS process

AMOLED Process Flow AMOLED Process Flow

Majority of investment (~80%) is in place for AMOLED manufacturing

10


Substrate pre-treating

OLED Deposition

OLED Encapsulation

TFT arrayprocess

Panel Module

OLED Process Flow OLED Process Flow


Substrate cleaning

Baking

cooling

UV Ozone cleaning& O2 plasma


OLED Deposition

OLED Encapsulation

particleCathode

OLEDITO

Short circuit

Yield Killer Yield Killer –– Point DefectsPoint Defects

Substrate PreSubstrate Pre--treatment treatment

11


Substrate cleaning

Baking

Invert and cooling

UV Ozone cleaning& O2 plasma


OLED Deposition

OLED Encapsulation

ITO Anode§ High work function§ Smooth surface

4.7 eV

5.1 eV

Substrate PreSubstrate Pre--treatment treatment


HIL deposition

HTL deposition

EML deposition

ETL deposition

Cathode deposition


OLED Deposition

OLED Encapsulation

Substrate

Emitting layer

Hole transport layer

Hole injection layerAnode

Electron transport layer

Cathode

⊕ ⊕ ⊕ ⊕ ⊕ ⊕ ⊕ ⊕ ⊕

Light emitting

Optimized OLED structure

OLED Deposition OLED Deposition

12


Red color change material development

High efficient white emitter1. Fine pitch process2. Mass production

Problem

Higher efficiency than color filterNo differential aging

Easier processEasier scale up

Low power consumptionHigher color saturation

Advantage

IdemitsuTDK, Sony, KodakPioneer, SNMD ,Sony, AUOMaker

Full color technology

R G B R G B R G B

Separate RGB pixel White emitter+ color filter

Blue emitter+ color change medium

FullFull--color Patterning color Patterning


EvaporatorTFT driver TFT driver TFT driver

TFT driver TFT driver TFT driver


Shadow mask

The accuracy of shadow mask and alignment system is very critical

Shadow Masking ProcessShadow Masking Process

13


Display pixel

Design rule for mask : (traditional pixel design)Hole width > 50 µm ; Bridge > 40µm è Resolution < 170 ppi

> 50 umφ

Realhole

d > 40um

Limitations of ResolutionLimitations of Resolution


Shadow Mask for OLEDShadow Mask for OLED

HIL deposition

HTL deposition

EML deposition

ETL deposition

Cathode deposition

Substrate Pre-Treating

OLED Deposition

OLED Encapsulation

Shadow mask issue —Materials:Low CTE < 1 ppm/oCEx: G 3.5 shadow maskà 610x720 mmTemperature variation à < 5oCMask expansion è 3.6 µmProcess:Etching type or electron formingAccuracy < +/- 5µmGood taper < 45°

For large size:Mask difficult to manufactureAlignment accuracy hard to achieve




Shadow mask

45º

+/-5µm

14


Cover-glass clean

UV clean

Desiccant attach

Glue dispensing

Encapsulation

Substrate Pre-Treating

OLED Deposition

OLED Encapsulation

Functions• Environmental protection• Moisture-free cavity• Mechanical support

UV glueCover glass

Desiccant

OLED EncapsulationOLED Encapsulation


cover

glass

metal X (bending, adhesion)

○

•Photo mask•Cost

•Less micro-crack•High strength

Wet etching

•High cost•More micro-crack•Weak strength

•Suitable for large size or asymmetric patternMicro blasting

DisadvantagesAdvantagesManufacturing Process

CoverCover--glass for OLEDglass for OLED

15


量測面

32.2mm

10mm

10mm

0.8

6.2

0

2

4

6

8

10

F1 F2 M1 M2

Stre

ngth

(Kg)

代號 F1 F2 M1 M2

Condition 鈉玻璃量

噴砂面

鈉玻璃量

玻璃面

Etch玻璃Etch面

Etch玻璃玻璃面

The measured sample is cover-glass only

CoverCover--glass for OLEDglass for OLED


LiquidunknownChemicalKodak

CaOChemicalSaes getter

SrOChemicalGore-Tex

CaOChemicalDynic

NotesMaterialAbsorption TypeCompany

Desiccant for OLEDDesiccant for OLED

Poor encapsulation

16


Future requirement

•Feature :Slim factor( < 0.6 mm)Low cost

Simple manufacturePotentially flexible

•Feature :Slim factor ( < 1mm )Low cost potentially flexible

•Feature :Stable and reliable processThickness ~1.61mm

PassivationPassivation plus Encapsulation

Glass Encapsulation

OLED

Glass cap

Desiccant

UV glue

OLED

Polymer

Insulator

OLED

Passivation layerGlass or plastic

UV glue

New Approach for EncapsulationNew Approach for Encapsulation


Enc.(305x360)

Cutting CT-1 Beveling Clean

PolarizerAttach

AutoClaveCT-2Package

Module Process

Process Flow for CellProcess Flow for Cell

17


MCOG

OLED Cell

Light-onTest-1

白膠&FPC膠 Burn-in

Light-onTest-2

FrameOutlineInspectionPackage

Customer

Process Flow for ModuleProcess Flow for Module


AgendaAgenda





5. Summary

18


q Performance-wiseDifferential agingImage sticking

q Manufacture-wiseYield : >97% for small size display

Scale-up : G3.5 àG5 à….

Cost : same as LCD

Challenge of OLEDChallenge of OLED


0.5

0.6

0.7

0.8

0.9

1

1.1

0 Time (hrs)

Brig

htne

ss (a

.u.)

RedGreenBlue

0.25

0.27

0.29

0.31

0.33

0.35

0.37

0.39

0

Time (hrs)

CIE

CIE(x)CIE(y)

Differential aging among

RGB

Blue color is the bottleneck

Differential AgingDifferential Aging

Color balance shifts with time due to the shorter lifetime of blue color

19


Differential Aging ImprovementDifferential Aging Improvement

1. Improve blue lifetime2. Balance RGB lifetime

lifetime

brig

htne

ss

lifetimebr

ight

ness

Change

Emitting area


AUO AUO

after stress

Images sticking

400 hrs continuously stress

Solutions

2-line icons

+128x128 pixel

Reduce continuous usage of icons (lower brightness or fixed icons)

Improve display lifetime

Image StickingImage Sticking

20


particleCathode

OLEDITO

Short circuit

Because the organic film is very thin, very small particle still can form the short circuit between anode and cathode

For small size panel, any point defect can not acceptable

Yield Killer_Dead PixelYield Killer_Dead Pixel


particleCathode

OLEDITO

Short circuit

Vdd

Vss

Redundant Pixel DesignRedundant Pixel Design

With redundant pixel design, single dark defect is negligible

21


evaporatedrange

evaporating source

substrate

deposited film (OLED)

new evaporation equipment with higher material utilization ratio

local material vendors

recycle of residues in chamber

Cost Down for Organic MaterialsCost Down for Organic Materialsmodification of OLED recipe


Material usage ratio: ~3%

H

H/2~2H/3

H/3

Material usage ratio: 8~10%(based on TS)

Materials Utilization Ratio IssueMaterials Utilization Ratio Issue

OLED material is very expensive, and the materials utilization ratio is low.

22


AgendaAgenda





5. Summary


OLED TimelineOLED Timeline

97 98 99 00 01 02 03 04 05 06

PMOLED ProductAMOLED Product

Japan started

Korea entered

Japan started SKD-DSC

AUO R&D team established

World first a-Si AMOLED Double Sided AMOLED

Sony PDATaiwan entered

AUO entered

23


OLED ActivitiesOLED Activities

OLED Depositing Equipment

ATC

Location§ R&D line : 200x200 mm, 100x100mm)

§ L3B Fab (Pilot-line )

§Design center –

AUO Technology Center 5F

§RD Employee : 53


11stst AMOLED for MobileAMOLED for Mobile--PhonePhone

24


12/21/2001

World First Double Sided AMOLED

10/20/2004

FPD International ‘04

Ultra Fast Speed in AMOLED R&DUltra Fast Speed in AMOLED R&D

[Product: 2006] 2“ mobile-phone

application

10/30/2002

FPD International 2005

270PPI High Resolution AMOLED

10/30/2002

FPD International 2002World First a-Si

AMOLED Prototype

[Product: 2004] 2“ DSC

application

9/14/2001

4” a-Si prototype

7/19/2001

4” a-Si prototype


AgendaAgenda





5. Summary

25


SummarySummary

q Where is the market ?Small mobile display e.g. cell phoneHigh end product

q Success in the futureContinuous improvement on lower power consumption Maturity on manufactureLower cost TV application


Business

Auo Oled Manufacturing