-
(VOCs)
-
()
94.03.1494.08.0394.08.26()94.10.1294.11.11()
-
()
-
()
-
---((()()(/((()(((95.1.5)
-
()() TFT-LCDTN/STN ():() 1. 2. ():((VOCsHFHCl)) ---
-
():( ) ()()() ():() 1.9515 2.9515 ()---()
-
() ()() ()() ()() ---()
-
1. (1) (2)2.3 (1)() (2)(HF)(HCl) ---()
-
VOCs---()
/()/()
-
---()
ppm/ppm/ppm/ppm/
-
---()
-
//---()
-
---()
-
(module)---()
-
() ---()
-
() 96.03.31 () ---()
-
---()
-
VOCs(module)(CEMS) CEMS CEMS---()
-
CEMSVOCs(NMHC)VOCsNMHCVOCsCEMS---()
-
VOCsHFHClNMHCNIEA A723.72B NIEA A433.71C NIEA A718.10CNIEA
A452.70B NIEA A450.71C ---()
VOCs HFHCl
-
---()
-
---()
pH
-
(CEMS)()CEMS---
-
---()CEMS
-
() ()15 CEMS---()
-
()() ()---()
-
()---()
-
VOCs---()
-
CEMS(1316)(11)---
(or or
-
---()
30 VOCs30 1CEMSCEMS
-
961196.1.1VOCsHFHCl 971961()9611()
-
96331VOCsHFHCl96.1.1-3.31(96)CEMSCEMS96.1.5CEMS95.7.597.1.5
()
-
(95.01.05)()
-
(VOCs)()VOCs SOxNOx10 VOCs94111096VOCs(VOCs)
-
VOCs()(VOCs)
-
VOCs VOCsVOCs(VOCs)
-
VOCsVOCs12~ 53/VOCs10~96/() VOCs3~8()(VOCs)
-
(VOCs)
-
()(961)13VOCs ()(981)17VOCs ()()(VOCs)
-
()()(VOCs)
-
(13) 12A2B3 LC5050% AALG(g/m3)= 10-6 /70/60() 12/20()
70/76()()(VOCs)
-
()()VOCsNMHC ()VOCsVOCs 20~30/(12~32/) (53/)(12/)2,000/,VOCs
60/()(VOCs)
-
()(VOCs)
5030/(-50) 1,000/30/1.2./3.44.18.75~5025/(-18.75)
1,000/25/7.5~18.7522/(-7.5) 1,000/22/1~7.520/(-1)
1,000/20/12000/2000/1,2-1,1-1,1,1-60/1./
-
SOxNOxVOCs200/ 98()(VOCs)
-
()(VOCs)
-
()(VOCs)
-
VOCsVOCs()(VOCs)
-
()(VOCs)
VOCsVOCsNIEA A716.10CNIEA A717.10CVOCsVOCs()VOCsVOCs880%
-
17~25/Kg50/30/3630/50/29.9/VOCs1.Cobb-Douglas &
()2.()(30/)20~25/
%25%50%75%90%95%(/kg)9,8912,0142923617
1000 Nm3()(mg/Nm3)-RTORTO100 / 2006.63 / 10.47.13 / 8.414.1 /
13.026.8 / 25.826.2 / 48.950021.212.010.522.7117
Chart1
20.4
28.1
32.2
39.1
41.5
86
86
5.9
4.4
13.3
2.2
0.8
21
21
27
38
3.5
5.1
0.14
4
0.8
21
21
27
38
8.8
3.84
3.65
54.4
114
8.8
67.8
52.4
0.2
30
12
88
41.5
13.8
47.6
( / )
Sheet1
20.4
- 40C28.1
- 70C32.2
- 40C+39.1
- 40C+41.5
86
86
PURTO5.9
PU4.4
PU13.3
PU2.2
0.8
21
21
27
38
-3.5
-5.1
-0.14
- / 4
-0.8
-21
-21
-27
-38
-8.8
-3.84
-3.65
-54.4
114
8.8
67.8
52.4
0.2
30
12
88
41.5
13.8
47.6
28.4
13.3
28.2
Sheet1
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
&A
Page &P
( / )
Sheet2
Sheet3
-
VOCsVOCs
VOCs(/) [VOCs(/)]-[VOCs(/)]-VOCs(/)-VOCs(/)-VOCs(/)(VOCs)
[()VOCs] (VOCs) (VOCs) [()VOCs] (VOCs) VOCsVOCsVOCs
-
(/)(1-) (VOCs) (/)(M3/)(/)(/) (1-)()(/)(/) (1-)()(/)(%) ()(1-)
()/(/)(M3/)(1-)(VOCs)
