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VACUUM AND PLASMA SCIENCE AND TECHNOLOGY

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Ming-Show Wong

Sept. 2015

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• A space contains nothing?• A space devoid absolutely of

mater• Any region of space devoid of

atoms and molecules– vacuum was impossible

Vacuum

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Vacuum

A void; an empty feeling

Isolation

Operated by suction to produce a vacuum

Vacuum cleaner

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• Vacuum: a space relatively empty of matter– vacuum was impossible ( Aristotle)

• an ancient view until end of 16th century– In 1640, Gasparo Berti produced vacuum (Galileo)– In 1644, Torricelli invented barometer– In 1648, Pascal’s brother-in-law Perier measured the atmosphere

pressure using a barometer at different attitude– In 1650, Otto Von Guericke invented air (vacuum) pump

• To the birth of modern physics, chemistry and engineering – In the 18th century: Huge engines, industrial Revolution– In the late 19th century: gaseous discharge, photoelectric effect,

discovery of the electron, x-ray, sputtering, chemistry, cryogenics and cryopumping, metology, incandescent lighting

– In the 20th century: Microelectronics Revolution

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• Kinetic theory of gases– molecular velocity– pressure– gas impingement on surfaces

• Gas transport and pumping– gas flow regimes– conductance– pumping speed

• Vacuum pump and systems– rotary mechanical, roots– diffusion, turbomolecular, cryopump, sputter-ion– systems– system pumping considerations

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Otto van Guerike’s experiment:16 horses were unable to separate the evaculated Magdeburg semisphere. (1657)

American Vacuum Society(AVS) Founded in 1953

https://www.youtube.com/watch?v=luIqVQT4QWs

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JVST, A 2(2) 110, 1984.

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Office: Eng. Building D108 Laboratory: Eng. Building D107 Phone: 03-8634206 E-mail: mswong@mail.ndhu.edu.tw Office Hours: Tuesday 3-5 PM or by individual appointment

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Course Goals

• Learn the basics about the vacuum science and technology and its applications in scientific research and practical industrial production.

• Introduce important developments and new advances in vacuum science and technology.

• It presents fundamental ideas in physics and chemistry that would be useful to both scientists and engineers dealing with problems associated with the use, production and measurement of high vacuums.

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Teaching methodology 教學方法 :

Classroom presentation and discussion

Laboratory tour and experiment

Every student must preview and study class note and textbook before the class.

Everyone should give a short talk (with handout)

for 15-20 minutes. The topic should be related to vacuum and plasma, components and systems, their design, operation and application..

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Presentation materials at department website: http://www.ndhu.edu.tw/~imeng

Textbooks: Handbook of Vacuum Science and TechnologyEdited by:Dorothy M. Hoffman, Bawa Singh, John H. Thomas

III and John H. Thomas III  ISBN: 978-0-12-352065-4http://www.sciencedirect.com/science/book/9780123520654

The User's Guide to Vacuum Technology, 2nd edition), (John F. O'Hanion), Wiley-Interscience, 1989.

蘇青森著 真空技術精華 (Vacuum Technology) (2009) 五南圖書出版股份有限公司

真空技術與應用 國科會 儀器科技研究中心 (2001)

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Journal:.Journal of Vacuum Science & Technology - Vacuum, Surfaces and Films..Vacuum - Surface Engineering, Surface Instrumentation & Vacuum Technology.

Website:.American Vacuum Society (AVS), www.vacuum.org ....Society for Vacuum Coaters (SVC), www.svc.org. 中華民國真空科技學會 , www.tvs.org.tw中華民國鍍膜科技學會, www.tact.org.tw

Vacuum Technology Page: http://nyquist.ee.ualberta.ca/~schmaus/vacf/index.html…...

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Home Work #1

Read Chapter 1.1 - Vacuum Nomenclature and Definitions Pages 3-7 of the web textbook;Visit and study the four websites listed in the syllabus;And write a short assay (about 1000 words) on “What is Vacuum Science and Technology”.

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Novel Photocatalyst preparation

VVeenntt

DDCC PPoowweerr SSuuppppllyy

⊙ ⊙ ⊙ ⊙ ⊙

M F C

M F C

Ar OO22

Rotation

TT..CC.. GGaauuggee 11

IIoonn GGaauuggee

MV

RRVV

TT..PP

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TT..CC.. GGaauuggee 22

MM..PP..

FFVV

Target

AAuuttoo MMaattcchh BBooxx

RRFF GGeenneerraattoorr

PPuullssee DDCC PPoowweerr

Substrate Holder

SputteringEvaporation

lenslaser

target

substrateheater

pump

gas

Window

Burner

Precursor

MFC MFC

Pump

2N

MFC

2O 22HCArGap distance

Cold Trap

MFC

MFC

Window

BurnerBurner

PrecursorPrecursor

MFC MFC

PumpPump

2N2N

MFC

2O2O 22HCArArGap distance

Cold Trap

MFC

MFC

PLD Flat-Flame CVD

Sol-Gel;Hydrothermal

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18Magdeburg Hemispheres (1654)

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|Small Brass Magdeburg Hemispheres, mid 19th century, maker unknown. For classroom demonstration.

20Vacuum Pump, late nineteenth century.

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Electric Egg, circa 1900,by Max Kohl, Chemnitz,Germany.

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Case Western Reserve University Vacuum Pumping Station.

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Early Coolidge X-Ray Tube (1913)

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Geryk-Oil-Air Pump (piston type), (1904)

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Stimson Two-StageDiffusion Vacuum Pump(1917)

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Davisson and Germer Electron Polarization Tube. (1927)1937 Nobel Prize in Physics.

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The History of Television, (1923- ) Cathode-Ray Tube (CRT)

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Omegatron,Basically a miniature cyclotron. (1950)

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The First VacIon Pump. (1957)

30First LEED/Auger Spectometer (1967)