8/10/2019 19-25-06967

1/6

UT544A Specification Rev.B PN 19-25-06967, Rev. A, ECN 15674 1 of 6

UT544A

Reticle Specification

Rev. B

Copyright August 2008

Ultratech Inc.

8/10/2019 19-25-06967

2/6

UT544A Specification Rev.B PN 19-25-06967, Rev. A, ECN 15674 2 of 6

Specifications

Note: The UT544A is a 2-field 6x6x0.250 reticle used for the AP300 Stepper.

1.

Substrate: 6x6x0.250 quartz; 2m flatness;

2. Chrome: 3.0 OD - Anti-reflective.

3.

Defects: None larger than 5m

4.

CD specifications:

Chrome Line - Field 1 & 2

Fld1: Vertical space: 8.0 0.20m (7.80 8.20m) Fld2: Horizontal space: 8.0 0.20m (7.80 8.20m)

5 measurements per field.

CD results to ship with plate

5.

Resolution: 8.0m line/spaces within fields

6.

Apply 2000-Type pellicle with specifications:

Pellicle part # 01-15-04269Hard defects < 5.0 micronsSoft defects: chrome side < 5.0 microns

glass side < 10.0 micronspellicle surface < 10.0 microns

Pellicle transmission: 92% min. @ G, H, and I lines

Pellicle placement/plate format - ref. UTS Document 19-25-02934

7.

Placement Specification:

Reference Manual part # 19-25-02934

Array placement to glass edge is specified to a tolerance of 0.500 mmat three locations. Use form included to report actual measurementsfor each reticle ordered.

8/10/2019 19-25-06967

3/6

UT544A Specification Rev.B PN 19-25-06967, Rev. A, ECN 15674 3 of 6

8.

Plate Serialization:

All plates should have serial numbers as follows:

Manufacturers code plus plate number, where Manufacturers code is

a single letter and is immediately followed by a consecutive threedigit serial number which represents the plate number: (XXXX)

No mask vendor logo, etc... to be on mask.

Write date is allowed.

9. Data: All data on layer 1 unless otherwise noted.

All data digitized = glass unless otherwise noted.

10.Barcode:

Add barcode to read:

UT544AX001 where X001 is the vendor assigned code followed by the serial number of the

reticle.

Barcode to be placed per spec from the UTS 6x6x250 Unity Reticle Manual (19-25-02934, rev. A).

8/10/2019 19-25-06967

4/6

UT544A Specification Rev.B PN 19-25-06967, Rev. A, ECN 15674 4 of 6

Mebes Placements- UT544A

CHIP 544A_FLD1 0.25m address layer 1 Dig=clear

87410/44600 Fracture Extents: Min X: -17200 Max X: 17200Min Y: -26000 Max Y: 2000

CHIP 544A_FLD2 0.25m address layer 1 Dig=clear

87410/107800 Fracture Extents: Min X: -17200 Max X: 17200Min Y: -26000 Max Y: 2000

CHIP MVS_544A 0.10m address layer 1 Dig.= clear

Fracture Extents: Min X: -17230 Max X: 17230Min Y: -200 Max Y: 200

102610/44600;107800

CHIP PELFIDD 0.25m address layer 1

66418/134400 Fracture Extents: Min X: -750 Max X: 75074420/146700 Min Y: -750 Max Y: 750100150/5700108150/18000

CHIP RETALIGN 0.25m address layer 1

98710/12000;140400 Fracture Extents: Min X: -500 Max X: 500Min Y: -1300 Max Y: 1300

CHIP RETALGN_MVS 0.10m address layer 1

102530/12000;140400 Fracture Extents: Min X: -731 Max X: 731Min Y: -731 Max Y: 731

CHIP KLACROSS 0.25m address layer 1

Fracture Extents: Min X: -500 Max X: 500Min Y: -100 Max Y: 100

67730;106840/13000;76200;139400

END

8/10/2019 19-25-06967

5/6

CD Locations

Measure 8um chrome line at 5 locations as shown

Vertical lines for Field 1

Horizontal Lines for Field 2

UT544A Specification Rev.B PN 19-25-06967, Rev. A, ECN 15674 5 of 6

8/10/2019 19-25-06967

6/6

Array Centrality Form

Array Placement Specification Plate serial Number:________________________

Actual Measurements

1 = 12.000 +/- 0.500mm 1._______________________________

2 = 102.530 +/- 0.500mm 2._______________________________

3 = 102.530 +/- 0.500mm 3._______________________________

UT544A Specification Rev.B PN 19-25-06967, Rev. A, ECN 15674 6 of 6