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3.0 EHS ACTIVITIES(DETAIL)
3.1 Change Management
3.2 Chemical Management
a. Operation Control
b. SDS Registration System
c. Chemical Exposure System
d. Physical Exposure System
e. Hazardous Sign
f. PPE Management
3.3 Contractor Management
3.4 EHS Training(Including License)
3.5 Reporting System
3.1. CHANGE MANAGEMENT
Requirements of Safety & Health Law requirements
Article 88 (Notification of plans, etc.) New tools, installation, changes
Article 28-2 (Investigation, etc. to Be Carried Out by Employer) “best effort clause” since 2005
Guideline for safety/health measures on non-routine activities at chemical equipment (enacted in 2008)
OHSAS18001 Requirements
4.3.1（2.1） Identify Planning for Hazard Identification, Risk Assessment & Risk Control
4.4.6（3.5） Operational Control
Establish comprehensive management system for installation, change, relocation or disposal. Submit a Form from SharePoint site.
Report to Labor Standard office
Design Review
EHS section conducts risk evaluation.
Evaluate hazard and risk and determine control measures
before the change
3.1.A TOOL INSTALLATION FLOW（１）
Stage Planner Purchase EHS Finance Remarks
Desig
n S
tag
e
Requirement of New Tool
Production Capacity Study Introduction
Layout Draft Layout Design
Review 1st Design Review
RegistrationRegistration SPEC.
Apply MSDS
To BRM
Estimation
Create Spec.Budgeted
Acquistion of PO-No ReferencePurchase
Order
購買業務処置規則Genaral Equipment
Requirements (DOC1)引合及び購入仕様書作成
規則
Order Order 装置の安全衛生規則
Reference 新規原材料使用申請
Submit Lobar STD Office
Create Documents
LSD 2nd Design Review
労基申請
SDS RegistrationSystem
Change Management System
3.1.B INSTALLATION FLOW（2）
Stage Planner Purchase EHS Finance Remarks
Ex
ecu
tio
n S
tag
e
HOOK up Create Material
Preparation of Installation
Confirmation 装置搬入・搬出作業手順
HOOK up Comfirmation Meeting Comfirmation 3rd Design Review
Preparation of Installation
Request Preparation of Installation
Confirmation of Open Area
Preparation of Installation
SAP RegistrationRegistration Work
Maintenance Online Help
Maintenance Procedure.doc
SAP MACH Internal Order登録申請Form
Installation System Construction Completed
Contractor Vendor Training
IDカード登録サイト（教育申請）
Start-Up CompletedFacilitation Form Facilitation Form
Commissioning
& Verification Work Environment C/Rパーティクル管理基準
Inspection 4th Design Review
Online Test Release ＳＰＣ運用規則
IdentificationＥＣＮ運用規則
Next Page
Facility Project Management
3.1.C TOOL INSTALLATION FLOW（3）
Stage Planner Purchase EHS Finance Remarks
Acce
pta
nce
Sta
ge
acceptance inspection & Capital Asset Registration MSC
Registration
ET PM Event Code set upConfirmation of Acceptance
GeRM set upMeeting
Acceptance Munite
MTSPC set upFinal
Acceptance Duration ofGuarantee
SAP
固定資産管理規則
Depreciation Start
3.1.D TOOL INSTALLATION CHECK FLOW
NO
Latest model/platform?
Install new equipment or convert equipment
Discuss basic safety requirements w/ supplierComplete Check Sheet
Supplier
Corporate safety
Corporate Purchase
Micron Risk Analysis
Legal requirementsHazard – mid or highYES
Design Review
NO
YES
・Equipment installation, relocation and change notice・Equipment safety inspection form・Equipment Layout（include safety features)
Submit to Safety personnel
Risk Assessment conducted?
Conduct Risk Assessment
YES
NO
Install equipment
Installation or modification complete
Equipment Safety Inspection
InspectionMake Checklist
Issue inspection certificate
Significant failure
No minor findings
40 days before the install
Project leader must notify BRM of the completion and arrange the inspection date.
Provide project leader with results in the Checklist.Project leader needs to report to BRM after correcting the findings.
Apply to the Labour Standard Office
• EHS SV’s attend pre-kick-off meeting for the
new tool installation or tool modification and
review the legal requirements.
• EHS & Dpt SC’s inspect the tool before release
MFG on safety & health standpoint.
Design & Construction • Operation Group conducts periodical inspection
for PV & Boiler system and Electricity system..
• 1st class PV & boiler system are inspected & confirmed
by the external institution.
• 2nd class PV’s are inspected by internal inspectors.
• Extra-high voltage system are inspected & confirmed
by the external institution.
• Sub-stations are inspected by internal inspectors.
Operation & Maintenance
Process , 1st & 2nd PV, Electrical System
3.2 CHEMICAL MANAGEMENT
3.2.1 OPERATION CONTROL
Create documents by business activity
Company-wide General Rule Engineering control, safety/health measures, Gas/Chemical, health
Specific Rule Sub-general rule (28 documents)
Department Detailed Rule Operation procedures used at each department
Restructure systems
□ Safety/health management system – clarify roles and responsibilities of the positionsSafety/health officer, safety officer, health officer and PPE supervisor of the department
□ Review work environment
Review workplace that needs environmental measurement for (non) routine activities.
□ Review displays and signs (GHS)
All tools except SEMI addresses the rules of Dec 2008
□ Increase safety patrol efforts
Safety personnel in the department Every day
Department manager Every other week
General Safety/Health Supervisor Once a month
Health Officer/Industrial doctor Once a week
A-1. 化学薬品管理
関連文書（EHSS規定及び規則）
Business Category； Operation Safety, Gas & Chemical Handling
原材料／危険・有害物質関連ページ
1.安全衛生対策 【Operation Safety】2.薬液・ガス 【Gas/ Chemical】3.危険・有害物質安全確認4.作業（外注工事含む）安全管理5.ヒ素・アルシン取扱い6.安全衛生標識・表示規則
関連部署：
チェック項目 自己判定 ガイドライン
1. 化学薬品管理のための訓練を受けたシステムオーナーが存在するか？
はい X いいえ サイトには化学物質管理責任者、衛生管理者など化学物質の管理責任者が存在する。
2. 化学薬品管理は文書化されているか？ はい X いいえ 文書化されるとは例として以下を意味する。トレーニング要件、職場危機評価に関連した防止策、プログラム職掌規定、業者に対する危険性の説明、従業員に対する潜在的危険に関する情報提供、曝露防止のための予防措置を含むシステム。
3. 化学薬品のラベリングは運転要件を満たしているか？GHSラベル（FAC） SEMI危険表示（PE）
はい X いいえ 運転要件を満たすとは例として以下を意味する。ラベルには薬品名、危険性の記述、又は危険性のコード／レーティング、ラベルに記載される担当会社／部門／組織名。容器を抜き出し検査し、ラベルが正しく記載されていることを確認する。
4. 化学薬品在庫目録には各薬品のサプライヤー名が記載されており、法規に従って保管されているか？
はい X いいえ 薬品在庫目録には例えば、すべてのプロセス、保守、クリーニング、ラボケミカルが含まれている。
5. 化学薬品管理のトレーニングには従業員が取り扱う可能性のある化学薬品の危険性についての説明が含まれているか？
はい X いいえ 基本的なトレーニングでは例として、薬品の種類、物理的な性質（酸性、塩基性、可燃性など）、危険性についてカバーされていること。
6. 化学薬品管理のトレーニングは曝露を避けるために必要な予防策についての説明が含まれているか？
はい X いいえ 予防策には例として特別な手順や身体保護器具装着が含まれる。
7. MSDSを管理するためのシステムが存在するか？
はい X いいえ 管理するとは、例えばすべての化学薬品についてその現物がサイトに到着する以前にMSDSを準備していることを意味する。
8. MSDSはすべての従業員が簡単に参照することができるようなかたちで準備されているか？
はい X いいえ 簡単に参照することができるとは以下を意味する。MSDSは当該サイト従業員が日常使用している言語で作成されている。関わりのある従業員は誰でも1日24時間いつでもMSDSを見ることができる。
9. MSDSを更新し、更新した箇所を従業員に知らせるシステムが存在するか？
はい X いいえ システムには例として、MSDSが正確で最新であることを確実にするためのプロセスが含まれていること。
10. 業者や訪問者がサイトに持ち込む化学薬品を管理するシステムが存在するか？
はい X いいえ 薬品管理のシステムとは例として以下を含む。業者や訪問者が持ち込む化学薬品の認可システムが存在する。業者／訪問者は持ち込んだ化学薬品を退去時に持ち去ること。
「はい」の割合（％） 10 ／10＝ 100 ％
Reference3.2.1aCSA Checklist
3.2.2 SDS REGISTRATION SYSTEM
Purpose of the system
Part of the efforts to establish the Chemical Management System
Control status of new materials from introducing to withdrawing and eliminating from the site.
Eliminates troubles caused by paper-based application system
Paper-based application takes long to complete routing for approval. Some application have been lost and some materials have not been applied.
At times information was not communicated to the appropriate individuals or departments.
Accessible from any computer in the company
Allows smooth approval or notification of new entry, revision or withdrawal to departments
Ensure that GHS labels and hazard materials information are available near the equipment.
The application system using Microsoft SharePoint will replace the old system.
Under the new system, CBT training test will be developed for SDS of new raw material. This will be notified to relevant departments that use the material, and only certified members are allowed to handle it.
SharePoint
3.2.2a Chemical Management Flow
Refer to SDS Registration System
Reference
3.2.2B SDS REGISTRATION SITE
3.2.2C SDS REGISTRATION SCREEN
Applier enters necessary information
EHS enters comments
GHS compliant
Engineering Data
Supplier Data
Engineering Data
Withdrawal
Reference
• EHS checks the new chemical using the Tool Change
Management System and SDS Registration System.
• EHS SV attend pre-kick-off meeting for the new tool
installation or tool modification
• EHS & Dpt SC’s Inspect the tool before release to MFG
• EHS checks the new chemical using the Tool Change
Management System and SDS Registration System.
• EHS SV attend pre-kick-off meeting for the new tool
installation or tool modification
• EHS & Dpt SC’s Inspect the tool before release to MFG
Design & Construction Operation & Maintenance
• EHS checks the new tools or machines using the Tool
• Change Management.
• EHS SV attend pre-kick-off meeting for the new tool
installation or tool modification
• EHS & Dpt SC’s Inspect the tool before release to MFG
• EHS checks the new tools or machines using the Tool
• Change Management System.
• EHS SV attend pre-kick-off meeting for the new tool
installation or tool modification
• EHS & Dpt SC’s inspect the tool before release to MFG
Design & Construction Operation & Maintenance
Introduce New
Tool/Tool Modification
1. SharePoint Site InputHazordous /Design Review
BRMApproval
CompleteTool
Installation
Conduct Tool Inspection &
Confirm how to use Red Flag
Tool Release
9.Energy Isolation Level-2 Map
Trigger Event Concluding Event
Confirm Red Flag Training
Request Red Flag Training
BRM Confirm Record
Yes
NoCheckListで赤旗取
り付け用フック確認
及び赤旗教育確認
同じ機器で過去実
施している場合は
その機器名を聞く
Micronで初めて入
れた機器に関してそ
の機器特有のエネ
ルギー遮断を確認
労基に設置申請を忘れない事
労基は特にEMOなどのエネル
ギー遮断について聞く
申請時にエネルギー遮
断の配置及びインター
ロックの配置確認する事
②.Tool Change Mgtと同じであるが特にエネル
ギー遮断のプロセスを作った。(特に重要な為
EHS & Dpt SC’s check & confirm the Energy Isplation location
& Training at tool Inspection.
Design & Construction
Training ( CBT & OJT) is provided for
Technician every year.
Operation & Maintenance
Introduce New Tool/Tool Modification
BRMApproval
Tool Release
10.Fall Protection & Prevention Level-2 Map
Trigger Event Concluding Event
Yes
No
1. SharePoint Site InputHazordous /Design Review
CompleteTool
Installation
Conduct Tool Inspection
Confirm the fall
protection equipment &
Procedure
Taken C/A
②.Tool Change Mgtと同じであるが特に転落防
止を作った。(特に重要な為
機器や架台などに手摺
(H>850mm）及びラダー等の
設置確認また工事用足場な
どのコメントを入れる。
設計時通りに手摺、
架台、転落防止装
置が付いているか
確認。また、手順
書の確認も要
• EHS SV’s attend pre-kick-off meeting for the new
tool installation or tool modification.
• EHS & Dpt SC’s Inspect the tool before release.
• Constructors or maintenance persons conduct
the TBM or KYT before work.
• contact person has the meeting with contractor
before work.
• ALL contractors & vendors are trained before work.
Design & Construction Operation & Maintenance
• Dpt SC checks un-safe behavior at the safety patrol during the construction work.
Monitoring
3.2.3 HAZARD SIGN (GHS) PROCESS
Review displays and signs (GHS) Legal Requirement
⇒ All tools except SEMI addresses the rules of Dec 2008
Conform it at tool inspection
On-going
3.2.4 PPE MANAGEMENT
Legal requires to inspect respirator periodically.
BRM provides the site PPE Program Document including PPE Matrix.
Each department creates the own PPE matrix based on BRM
Document.
EHS Health SV Dpt Health Officer
Dpt PPE Manager
Shift Worker Check
Using Check Sheet
Internal Audit
3.3 CONTRACTOR MANAGEMENT
3.3 CONTRACTOR MANAGEMENT
Manage 3 types of Card （V card, Yellow card, Pink card)
Conduct the vendor Survey for Construction Vendor & Operation
Contractor. (including Waste Vendor)
Provides the Vendor Training on Web Site and Guard House
(before the work or earlier)
Check the Un-safety behavior by Dpt SCs.
Report Vendor Survey & Un-safe Behavior Result to MRM
Purchasing person requests the Un-safe behavior company to submit
the countermeasures .
Each Department holds the Safety Meeting periodically.
Construction vendors conduct safety patrol for their work area.
3.3.1 CONTRACTOR
MANAGEMENT
Card Type Definition Training Works Vendor Survey Escort
VisitorExpiration ;1 day
•1 Page S&H Guidance • sales•Spectator
Meeting at Entrance
NO YES
•Construction & Tool VendorExpiration ;1 Year
•Vendor Training•Contractor in-house Training
•Maintenance Vendor•Inspection Vendor•Construction Vendor•Tool Vendor
YES Yes No PictureNO Picture
•In-House Contractor
Expiration ;Permanence
•S&H Basic Trainingor Vendor Training•Contractor In-house Training
•Operation supports•Engineering Supports•Cafeteria work•House keeping work
YES •NO
V
3.3.1 CONTRACTOR MANAGEMENT
3.3.2 Contractor Management
評価対象の物品・サービス : 材料関係(ウエハー・ターゲット・ガス・ケミカル・レジスト・スラリー・梱包材料)・半導体製造設備・ユーティリティー設備・部品洗浄・産業廃棄物
旧E-KA02 資材購入先管理手順 プロセスマップ
資材
安全衛生
環境
購入先
購買先
調査
購買先
調査
購買先
調査
購買先
評価
判定
判定
購入先
承認
YES
供給購入先
選定
フォロー
アップ
フォロー
アップ
継続アセス
メント計画
策定
継続
アセスメント
継続
アセスメント
判定
判定
継続
契約
継続
供給
NO
NO
継続
承認
継続
承認
YES
YES
NO
NO
1
2
2
2
3
4
4
4'
4'
5
6
7
8
8
9
9
10
10
11
12
6.2.1
6.2.1
6.2.1
6.2.2 6.2.3
6.2.3
6.2.3
6.4
6.4.1
6.4.1 6.5
6.5
Investigation Evaluation Follow-up Assessment
Pur
Supplier
S&H
Env.
Process Map for Vendor or Supplier Selection
Evaluation Sheet
Reference
3.4 EHS TRAINING
3.4 EHS TRAINING
Make an overall review of current S&H Training
Establish the system ensuring training is offered to the correct target audience in a timely manner
Legal requirements
When hired or starting a new position
Leader training (External)
Special training (low-voltage electricity, industrial robot training, etc.)
In-house EHS technical training
Clarify the purpose and appropriate contents
Instructor-led (14 courses), OJT (3 courses)
Training for Construction Vendors & Tool Vendor (before the work or earlier)
Each department has to include training in the EHS plan to monitor the progress and improve.
Reference
Training Standard
Learning Objectives
3.4.1 IN-HOUSE TRAINING SYSTEM
3.4.3 MJP EHSS TRAINING
Training Legal
Requiremen
t
Staff Eng. Tech. Mgr.
& SV
New
TL
Temp.
Employe
e
Remarks
EHS Basic 1 time ○ ○ ○ ○ ○ ○ Legal
Requirement
EHS SV 1 time ○
New Leader 1 time ○ Legal
Requirement
14 Area 1-3y △ △ △ △ △ Incl. Env.
Training
3 OJT 1 time ○ TBM, Red Flag,
RA
Fab Common 1 time ○ ○ ○
Low Voltage
Elect.
1 time ○ △ ○ Legal
Requirement
Industrial Robot 1 time ○ △ ○ Legal
Requirement
ERT Commander 1 time ○
ERT Event Tech. 1 time ○
ERT Event Support 1 time ○ ○
ERT Follow-up annual
ly
○
Evacuation Drill annual
ly
○ ○ ○ ○ ○ ○ ○ Legal
Requirement
3.4.2 IN-HOUSE TRAINING SYSTEM
3.4.3 LICENCE MANAGEMENT SYSTEM
3.5 REPORTING MANAGEMENT
3.5 EHS REPORTING SYSTEM
Incident Reporting System
Definition
Reporting System (Next Page)
Nonconformity Reporting System(Including Env. Nonconformity)
Reporting System(Next Page)
Traffic Accident Reporting System
It’s same as the Incident Reporting System.
3.5.1 INCIDENT REPORT
Near Miss
Not Incident
Class1 (Un-recordable)
First Aid
Class2 (recordable, report to Corporate)
Hospital treatment but no absent level/Lost
days
Class 3 (recordable, report to Corporate)
Class 2 +1-3days (Lost work day)
Report to Labor Std Office quarterly.
Class4 (recordable, report to Corporate)
Class2+ more than 4days (Lost work day)
Report to Labor Std Office within 24 hr
Class5 (recordable, report to Corporate)
Fatal
Report to Labor Std Office within 24 hr
Class Definition
Event Definition
3.5.2 EHS NONCONFORMITY REPORTING SYSTEM
