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  • 7/26/2019 61_125 Inox Ouro Japonez

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    45

    Vol. 61, 2, 2010 2 125

    5 10

    5 10

    11

    111

    10

    1990

    10

    TSVThrough Silicon Via

    1

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  • 7/26/2019 61_125 Inox Ouro Japonez

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    60 126

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    4TSV

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    Si TSV

    TSV

    TSV

    ,

    TSV

    TSV

    TSV

    4

    TSV

    P. C. Andricacos, C. Uzoh, J. O. Dukovic, J. Horkans and H.

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    1

    2

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    47

    Vol. 61, 2, 2010 2 127

    pH

    2001710mg/L

    40g/L

    280g/L 45g/L 21g/L

    pH 454050

    pH

    2

    pH

    2

    40wt%

    3

    0.6g/L 8.0g/L

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    0.1474mol/L

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    0.4mol/LPOEN --

    3g/L

    40mass%

    40g/L

    20g/L4 20g/L 200g/L

    40wt%Cu-Sn

    3

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    4/70

    48

    60 128

    MEMSMicro Electro Mechanical Systems

    Kim

    Vitek 5-

    5-

    50 58mass

    PRPR

    4

    pH 7

    2 pH 10 11

    UV

    51, 718

    2000.

    T.Doi, K.mizumoto, S.Tanaka and T.YamashitaMetal Finishing,

    102,4, 262004.

    F.Saito, K.Kishimoto, Y.Nobira, K.Kobayakawa and Y.SatoMetal

    Finishing, 150,12, 342007.

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    Electrochemical Society, 154, 4432007.

    J.VitekP.Nejedly and F.KristoforyPlating & Surface Finishing,

    88,12, 612001.

    10 55, 2372004.

    11

    112p.492005.

    12Peter T.TangElectrochimica Acta, 47, 612001.

    13 17,

    No.5, 12004.

    1416, No.6, 12003.

    113

    /

    1920

    Sargent

    CrO:HSO 100:1

  • 7/26/2019 61_125 Inox Ouro Japonez

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    Vol. 61, 2, 2010 2 129

    13 16 %

    20 m/h

    6

    1940

    25 %

    SRHS 1945

    2 2

    1984

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    10

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    Ni-P

    10

    1

    Chromispel 500

    750 g/L 80

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    15 30 20 200 A/dm 70 %

    300 700 m/h

    700 1200 HV

    pH 2 400 g/L,

    58 g/L, 0.75 g/L

    20 20 90 A/dm

    30 33 %

    100 A/dm

    64.8 % 17.1 m/min

    65 70 100 200 A/dm

    200 m/h

    2

    60

    PR

    on-o time

    1300 Mpa

    100

    1

  • 7/26/2019 61_125 Inox Ouro Japonez

    6/70

    50

    60 130

    5 m

    ZrOSiCWC

    0.1 0.9 wt%

    3

    2000 2005 3 6

    3 6

    26

    3

    6

    3

    6

    3

    6

    CuNiFe

    3

    6

    6

    3

    3

    pH

    100 m

    3

    Cr-P-C Cr-Ni

    3

    Fe

    20 g/L

    CrPb/TiPt/TiDSA

    R.Mantscheva, I.Nenov and I.Gadjov ; Galvanotechnik, 90, 1273

    1999, 92, 3722001, 93, 22542002, 99, 8432008.

    M. Monev and D. Popov ; Galvanotechnik, 92, 3402001.

    ; 55, 1392004.

    ; 56, 3342005.

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    S.Surviliene, A. Lisowska-Oleksiak and A. Ceuniene ; Corros. Sci.,

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    11R.P.Renz, J.J.Fortman, E.J.Taylor and M.E.Inman ;Plat. Surf. Finish.,

    90,6, 522003

    114

    6

    3

    3

    1

    20 8m

  • 7/26/2019 61_125 Inox Ouro Japonez

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    51

    Vol. 61, 2, 2010 2 131

    40kg 1 70

    0.7A/dm A

    CO

    6 3

    6

    3 6

    6

    3

    6

    6

    6

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    6

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    3 6

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    10.85 0.74 0.49 0.64 0.45 0.58

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  • 7/26/2019 61_125 Inox Ouro Japonez

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    52

    60 132

    Si

    3

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    6 10

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    12 15

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    LiSn

    1000mAh/g

    LiC 2.5

    1990

    2000

  • 7/26/2019 61_125 Inox Ouro Japonez

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    53

    Vol. 61, 2, 2010 2 133

    1940

    CuSn 150-

    200 CuSn CuSn

    CuSn

    CuSn

    CuSn

    CuSn

    ,CuSn

    2

    ,,

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    54

    60 134

    FIB

    EBSD

    SEM-FIB

    FIB

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    2004.

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    ;

    p. 3R&D

    2006.

    ;

    68, 5522004.

    ; 8, 12003.

    ; 49, 432009.

    ; ,

    72, 1682008.

    ; 58, 4062007.

    ;

    72, 6482008.

    10

    ; 59, 9132008.

    11; 58, 4452007.

    12; 13, 6762008.

    116

    1

    1

    2

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    2

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    ,

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    130

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    3

  • 7/26/2019 61_125 Inox Ouro Japonez

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    55

    Vol. 61, 2, 2010 2 135

    4

    EDTA

    ,

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    1

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    60 136

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    2

    p.15, 1992.

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    1838

    G.R. Elkington

    30 40

    1990

    40 600.3

    5A/dm pH 4 1 0

    pH

  • 7/26/2019 61_125 Inox Ouro Japonez

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    57

    Vol. 61, 2, 2010 2 137

    pH 8 10 20 40 0.5

    2A/dm

    10

    20 30

    2 5A/dm

    20 30

    0.5 2A/dm

    SUS 304

    450 10

    a

    b

    SUS 316410

    LED

    LED

    LED

    a) b)

    a) b)

    1

    a : AgCN 4g/L

    KCN 80g/L252.5A/dm2 : AgCN 40g/L,

    KCN 110g/L, K2CO330g/L251A/dm2b

    SUS 304450 10

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    60 138

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    ; ,

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    ;

    51, 10212000.

    ; 117

    p. 262008.

    12

    121

    ABS

    Plating on Plastic : POP

    Plating Through Hole : PTH

    4

    pH

    1980

    Direct Plating

    1990 10

    1990

    2000

    2000

    Resin Coated Copper : RCC

    0.2mm Blind

    Via Hole : BVH

    Multi

    Purpose Unit : MPU

    Bare Dielectric

    Resin

    SEM

  • 7/26/2019 61_125 Inox Ouro Japonez

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    Vol. 61, 2, 2010 2 139

    1m

    0.2

    0.3m

    0.4 0.7m

    Particle

    m

    Non Discloser Agreement : NDA

    10

    10

    58, 812007.

    59, 2822008.

    59, 5702008.

    3

    p.741, 2006.

    122

    Ni-P

    DMAB Ni-B

    Ni-P

    WCuCoFe MoSn

    PTFE

    Ni-P

    pH

    Ni-P

    1 3%

    4 9%10 13%

    P 1 3%

    ITO

    1 SEM

  • 7/26/2019 61_125 Inox Ouro Japonez

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    60

    60 140

    P 4 9%Au

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    Ni B B 0.3 3%

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    B 0.1 3% Ni-P

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    Ni-PNi-B

    Mg

    Mg

    Mg

    Ni-P

    20

    3.5

    Ni/ ENIG

    ENIG

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    Vol. 61, 2, 2010 2 141

    Ni/Au Ni

    Al FC

    ,

    FPC

    ITO

    pH

    LTCC

    pH 6 8

    3

    HaackUS Pat. 3915716

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    2002.

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    1999.

    123

    1

    AuAgPt

    Pd

    Au Pd Ni

    Ni/Pd/Au ,

    Pd Au Ni/Pd/Au

    2 Pd

    1 Pd

    Pd Cu

    Ni Ni

    Cu

    Cu Pd

    Pd

    Pd

    PdCl

    Cu

    Cu Pd

    Pd Ni PdNHCl NHCl

    Cu Pd

    Pd

  • 7/26/2019 61_125 Inox Ouro Japonez

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    62

    60 142

    2 Pd

    Pd Au Au

    Pd Au

    Pd Pd Pd- P

    Pd

    Pd Pd-P

    Pd-P Pd Pd-P

    Pd Pd-P Au

    Pd Pd-P

    Pd-P Pd Pd-P>Pd

    3 Au

    1 Au

    Ni/ Au

    Au

    30nm 100nm Au

    Au

    Au

    2 Au

    1980 Au

    Au

    Au

    Au

    Au

    Au

    Au

    Au

    Au

    4Ni/Pd/Au

    Pd/ Au

    Au 30nm

    Pd Pd-P Pd/ Au

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    BGABall Grid Array

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    Au

    Ni/Pd/ Au/ Au

    Ni/Pd/Au

    1Ni/Pd/Au

    HASLOSP

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    CSP BGA

    Ni/Au

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    Ni/ Au/ Au

    Au

    Ni/ Au/ Au

    Pd

    Ni/Pd/Au

    Al Cu

    Ni/ Au Al

    Au

    Au Ni/ Au/

    Au

    Ni/Au

    Au Ni/Pd/Au

    2Ni/Pd/Au

    Ni/Au

    10 Ni/

    Au

    Ni/ Au

    Ni/

    Pd/Au ,

    Ni/ Au

    Ni/ Au 1997

    Ni

    P

    Au Ni

    Ni/Pd/Au

    Ni Au

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    Pd

    Ni/Pd/Au

    Ni/Au Ni/Pd/

    Au

    Ni/Pd/

    Au 2006

    JEDEC 10mm/

    Ni/Pd/Au

    Ni/Au

    Au

    Au

    Au

    Au Ni/Au

    Au

    Ni/Au

    Au

    Ni/Au

    Ni/Au Au

    Au

    Au

    Tl

    Ni/Au

    Ni/Au

    Ni/Au

    Ni/Au

    Ni Au Au

    Ni Au

    Au Ni

    Au Ni Au Ni

    Au Au

    Ni/Pd/Au

    Ni/Au

    Ni Au

    Pd Ni/Pd/Au

    Ni/Pd/Au

    Ni/Au

    ,

    Ni/Pd/ Au

    Ni Pd

    Au

    Au

    Pd

    Au Au Au

    Au

    Ni/Pd/ Au/ Au

    5

    Pd

    Au

    Ni/Pd/Au

    Ni/Pd/

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    Fe-Zn

    FIB

    GA CGL

    Fe

    2

    GA 90 2000

    CO

    GA

    GA TS 270MPa

    440MPa

    SiMn CGL

    SiMn

    SiMn m

    2000

    590-980MPa GA

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    2000 Al

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    Zn-Al-Mg

    2 Zn-Al-Mg

    1

    Zn-Al-Mg

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    1 Zn-6%Al-3%Mg

    abZn/Al"/Zn2Mg

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    Al Zn/Al/ZnMg Zn/Al /

    ZnMg Zn ZnMg

    Al Zn/Al/

    ZnMg Zn-Al-Mg

    Mg Al

    Zn-Al-Mg

    ZnMg

    150 Zn

    60

    Zn

    2

    Zn-Al-Mg

    Zn

    Zn-6%Al-3%Mg

    CCTJIS H8502 1/10

    1/4 ,

    CCT20 Zn-6%Al-3%Mg

    SEM-EDX

    Mg Al Zn-6%Al-3%Mg

    Mg Al

    ,

    Mg Al

    Mg Al

    3

    2 Zn-6%Al-3%Mg

    SEM-EDX CCT20

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    Zn-Al-Mg Zn

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    Al Al

    Al-Si Al

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    Al Fe-Al-

    Si IF Al

    280mm

    Al

    3Zn GINi 2 Zn GI

    Zn

    Ni

    Zn

    45g/m Ni

    5g/m Ni

    4 Sn-Zn

    Sn-Zn Sn Zn

    Zn

    Zn

    7 9 %Zn Sn

    Sn-Zn

    Sn-Zn

    Sn Zn

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    EBEP

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    TiNTiAlNTiC

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    DLC 55 28%

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