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A 10 Gb/s 0.25 lm SiGe modulator driverfor photonic-integration
Bernhard Goll • Horst Zimmermann
Received: 22 February 2013 / Revised: 27 September 2013 / Accepted: 14 November 2013 / Published online: 23 November 2013
� Springer Science+Business Media New York 2013
Abstract A 10 Gb/s modulator driver in SiGe 0.25 lm
BiCMOS technology with a chip area of only 0.54 mm2 is
presented. The intentions of designing this modulator driver
are to amplify small incoming data signals at 10 Gb/s and to
integrate the driver together with a silicon optical phase
modulator (Mach–Zehnder modulator in push–pull config-
uration) on the same chip. The driver is designed to have a
low power-consumption of 0.68 W but a high gain
(S21 = 37 dB). It consists of a differential pre-amplifier
with common-mode feedback and automatic gain control,
which is supplied by 2.5 V. The differential output stage is
supplied with 3.5 V. The driver is designed to drive a Mach–
Zehnder modulator, which uses in his arms carrier depletion
in a reverse biased pn junction to adjust the refractive index.
The differential output (5Vpp) delivers two times a voltage
between 0 and 2.5 V. Therefore no bias-T is needed at the
output to assure that the diodes of the interferometer arms
are in the reverse biased mode. In addition to the low-power
design, a passive network instead of an additional amplifier
circuit for driving the cascode transistors, which reduce the
collector–emitter voltage of each transistor in the output
stage below breakdown, is presented. According to bit-
error-ratio (BER) measurements with a pseudo-random-bit-
sequence with the length of 231 - 1 the BER is better than
10-12 for input voltage differences down to 50 mVpp. The
rise/fall time (20–80 %) is 45/30 ps respectively.
Keywords Modulator driver � 0.25 lm SiGe
BiCMOS � Low power � High gain � Analog circuit
design � 10 Gb/s
1 Introduction
Optical data transmission at 10 Gb/s (e.g. ethernet standard)
and beyond is a well established technology and multi-
channel transmission systems have been demonstrated [1].
For the design of functional blocks as well as whole trans-
ceiver, a competitive option is their implementation in a
common silicon process based on experience in BiCMOS or
CMOS technologies due to widespread integrated circuit
foundries [2–4]. A fully integrated 4 9 10 Gb/s dense
wavelength division multiplex (DWDM) optoelectronic
transceiver with Mach–Zehnder modulator and a fully inte-
grated 25 Gb/s transceiver with photonic microring resona-
tor modulator in 0.13 lm SOI CMOS is presented in [5] and
[6], respectively. Even at lower data rates at e.g. 10 Gb/s
optimizations on different optical as well as electrical
building blocks are still going on. So different electrical
circuit blocks like e.g. laser drivers for direct modulation [7,
8] or drivers for signal amplification, e.g. a driver for a low-
voltage differential signaling (LVDS) digital standard [9]
which usually are designed in a fast SiGe BiCMOS process
can be combined with silicon photonics elements. Silicon
optical phase modulators based on carrier depletion were
demonstrated in [10–12]. For data transmission at 10 Gb/s
reverse bias voltages of only 5 V are sufficient to achieve an
extinction ratio of [5 dB at a distinct operation point of a
phase modulator. As a consequence an appropriate electric
modulator driver has to deliver a data signal with&5Vpp. If a
modulator is designed as a Mach–Zehnder interferometer in
push–pull configuration, the driver has to deliver a
B. Goll (&) � H. Zimmermann
Institute of Electrodynamics, Microwave and Circuit
Engineering, Vienna University of Technology, Gusshausstrasse
25/354, 1040 Vienna, Austria
e-mail: [email protected]
H. Zimmermann
e-mail: [email protected]
123
Analog Integr Circ Sig Process (2014) 79:15–25
DOI 10.1007/s10470-013-0235-3
differential data stream, where each single-ended part
switches between 0 and 2.5 V. There exist several 10 Gb/s
modulator drivers in SiGe BiCMOS technology in the lit-
erature. In [14] a modulator driver with a feedback network
for a breakdown voltage doubler was introduced to over-
come the limit of collector–emitter breakdown voltage. A
driven cascode circuit with compensation capacitance to
overcome the breakdown limit is presented in [15]. Another
driven cascode is used in a modulator driver in [16] to
achieve a high differential output voltage of 10Vpp but at a
low data rate of 3.4 Gb/s. A high data rate of 23 Gb/s was
achieved in [17], where an optimization regarding parasitic
inductances has been done. A 10 Gb/s differential, distrib-
uted modulator driver in 0.18 lm SiGe-BiCMOS, where
instead of the input transmission line a digital phase-shifting
is implemented was proposed in [18]. The output swing
amounted to 6Vpp, the total power consumption was 2.13 W
and 2.8 mm2 chip area was needed.
In this paper the more detailed description of a modulator
driver in a 0.25 lm SiGe BiCMOS (IHP SG25H3 with ftmax
&120 GHz, BVCE0 = 2.2 V) technology is presented
including its automatic gain control (AGC) and its common-
mode feedback (CMFB) with additional simulation and mea-
surement results, whereas a short and non-detailed description
of only the pre-amplifier and the output stage without the device
sizes and resistor as well as capacitance values, tail-currents,
emitter-areas and passive components can be found in the short
letter [13]. Furthermore the measurement results are treated in
more detail (additional diagrams with BER measurements and
S11/S21 measurements) in this paper. The driver is capable of
driving the modulators proposed in [10] and [11]. For the driver
design the focus has been set to achieve a high gain
(S21 = 37 dB) as well as a low power consumption (0.68 W)
and a low chip area of 0.54 mm2 for driving the long electrode
lines of the modulator (up to 3 mm), which are each terminated
with their characteristic impedance of 50 X. Modulator drivers
for smaller modulators like e.g. some types of microring
modulators (e.g. in [12]) only have to drive an electrode with its
small capacitive loads thus consuming much less power (but it
should be noted that microring resonators have other severe
disadvantages). Additionally in the design no inductances for
enhancing the bandwidth with inductive shunt peaking are
implemented because for 10 Gb/s they usually consume a
considerable chip area. Because each voltage of the inverted
and non-inverted part of the differential output switches
between 0 and 2.5 V, the driver does not need an additional
bias-T to drive the diodes in the modulator in reverse operation.
2 Circuit description
A block diagram of the whole modulator driver is depicted
in Fig. 1. The presented modulator driver implements a pre-
amplifier stage, where the amplification is controlled with an
AGC and where the common-mode level is regulated with a
CMFB circuit. The reference block RB (simulated power
consumption of 19 mW) delivers bias voltages like RE-
FAGC and REFCM and bias currents to the different circuit
blocks. It consists of a standard bandgap reference and an
additional voltage regulator to generate all bias- and refer-
ence voltages. An output stage is implemented to generate a
fully differential output data stream with 5Vpp for an
external 50 X system.
2.1 Pre-amplifier
The pre-amplifier stage is supplied with VCC1 = 2.5 V and
the schematic is depicted in Fig. 2. The data signal to be
amplified is applied to the input pads IN? and IN-, which
are connected to the first differential amplifier consisting of
transistors T1, T2 and resistors R1 and R2. The amplified
differential data signal OT1? and OT1- is buffered and
level-shifted by emitter followers (transistors T3, T4 with
resistors R5, R6 respectively) and applied to transistors T5,
T6 of the second differential amplifier (see Fig. 2). Capac-
itors C1 and C2 avoid peaks in the collector–emitter voltage
of T5 and T6 but have the disadvantage of a slight decrease
in bandwidth. The amplified data signal at nodes OT2? and
OT2- is level shifted again with emitter followers (tran-
sistors T7, T8 and resistors R11 and R12) and builds with
nodes INT2? and INT2- the input nodes for the following
output stage. Additionally nodes INT1? and INT1- are
connected to the output stage to deliver a second differential
data signal to drive the cascode transistors T11, T12 for
voltage doubling to overcome the breakdown voltage limit
of the fastest bipolar transistor (BVCE0 & 2.2 V) available
in the process used. All bipolar transistors used as emitter
followers have a smaller transit frequency (45 GHz), which
is still enough for 10 Gb/s but a higher collector–emitter
breakdown voltage of BVCE0 &4.5 V. The simulated power
consumption of the pre-amplifier excluding the two 50 X
VEE
IN+
CMFB
IN-
AGC
VCC1
INT1+
INT1-INT2-
INT2+
RB
Cur
Mirr
REFCM
REFAGC
BIAS1
VCM
VEE
50Ω 50Ω
VEE VEEchar
acte
ristic
impe
danc
esof
ele
ctro
des
(50
)Ω
OUT+
OUT-
VCC2
VEE
CM
OT
1+O
T1-
Pre-amplifier Output stage
VEE
VEE
VCC1
VCC1
VEE
VCC1
BIASOPA1,2
IDC
Fig. 1 Block diagram of the modulator driver
16 Analog Integr Circ Sig Process (2014) 79:15–25
123
matching resistors at nodes IN?/IN?, the CMFB amplifier,
RB and AGC amounts to 72.5 mW.
2.2 AGC
The AGC is added to the circuit to reduce continuously the
amplification of the first differential amplifier if an input volt-
age difference (nodes IN?/IN-) is larger than 100 mVpp (see
Fig. 3). This is done to reduce voltage peaks in the first stage of
the pre-amplifier if large input voltage differences are applied.
The operational amplifier OPA1 is a buffer to avoid a too large
load at nodes OT1? and OT1-. OPA1 is a fast voltage buffer
with a 3 dB cut-off frequency of f-3dB = 24 GHz but with a
simulated DC voltage gain of only 3 dB (it so happened that for
OPA1 f-3dB is equal to its transit frequency). This low gain is
enough when considering that the AGC starts to work for dif-
ferential input voltages at IN?/IN- of 100 mVpp (corresponds
to&1Vpp at nodes OT1?/OT1-) and that the main focus of the
design was a low influence to nodes OT1?/OT1-. OPA1
consists of the fastest SiGe bipolar transistors available in this
process, where its input differential stage (MN2, T21, T22,
R27–R30, C12, C13) is designed with transistors of minimum
emitter area (AE1 = 0.353 lm2) to have a small load at nodes
OT1? and OT1- for fast operation of the modulator driver.
The differential amplifier stage uses emitter degeneration (R27,
R28) with decoupling at high frequencies by C12, C13 to enhance
the bandwidth. After buffering with two stages (T23, R21, R33
and T24, R32, R34 having in front of them diode connected NPN
transistors for level shifting) the differential output data signal
OP1? and OP1- is applied to transistors T25, T26 and
capacitor C14 as well as resistor R35, which act as a peak
detector. The voltage at node AMP, which is stored in C14,
corresponds to the maximum voltage at OT1? or OT1-. R35
introduces an additional time constant of &120 ns when dis-
charging C14 (R35 = 100 kX, C14 & 1.2 pF). The amplifier
OPA2 compares the potential at AMP with a reference voltage
REFAGC and adds current via transistor MP2 to transistor T27,
which is in diode connection and forms the input side of a
current mirror with TCS1 at its output side. OPA2 is a simple
two-stage standard operational amplifier with CMOS transis-
tors and Miller compensation. The simulated DC gain is 55 and
the 3 dB cut-off frequency is f-3dB = 0.28 MHz. A constant
current IDC (see Fig. 3) of 0.45 mA defines a minimum
amplification for large input voltage differences. With a current
mirror multiplication factor of nine, the collector current in
TCS1 can be found. For small input voltage differences of the
input data signal OPA2 turns MP2 on and the maximum
amount of current is mirrored from T27 (Fig. 3) to transistor
TCS1 in Fig. 2 (See node CurMirr in Figs. 2, 3.), because node
AMP is 0.2 V lower in its potential than the reference voltage
REFAGC. This ensures a stable low potential (low-ohmic) near
to VEE at the output of OPA2 thus VAGC is low and MP2
delivers maximum current. The maximum gain is available for
the first stage in Fig. 2. For small amplitudes this gain is not
high enough to drive the output of OPA2 away from this low
potential and the AGC is turned off.
The simulated step response for the AGC at 10 Gb/s is
depicted in Fig. 4, where at IN? a DC voltage of 1.25 V
was applied while at IN- the data signal overlaid at 1.25 V
DC offset performed a step response from 25 to 500 mVpp.
The settling time for an error lower than 1 % of the final
value is 1.55 ls. The simulated power consumption of the
AGC amounts to 14.5 mW.
2.3 CMFB
A CMFB is implemented to the first differential amplifier
stage of the pre-amplifier stage (see Figs. 1, 2) to ensure a
constant common-mode voltage of &1.8 V at nodes OT1?
and OT1- if different common-mode voltages are applied at
VEE
IN+
CMFB
IN-
AGC
VEE VEEVEE VEE VEE
VCC1 VCC1 VCC1 VCC1 VCC1VCC1
T1 T2
T3
T4
T5 T6 T7
T8
INT1+
INT1-
INT2-
INT2+
CMOT1-
OT1+ OT2+ OT2-R1
TCS1
R2R3 R4
R5 R6
MN1
R7 R8
R9 R10
R11 R12
C1 C2
RB
CurMirr
MP1
RE
FC
M
RE
FAG
C
BIAS1
VCM
VEE
50 50
~10mA 12mA
1mA1mA
2.5mA 2.5mA
AE1 AE1
AE2
AE2
AE2
10 E1 10 E1
AE2
AE2
Fig. 2 Pre-amplifier stage of
the modulator driver. The unit
emitter area of the fast
transistors (T1, T2, T5, T6 with
BVCE0 = 2.2 V) is
AE1 = 0.353 lm2 and
AE2 = 0.493 lm2 for the slow
transistors (T3, T4, T7, T8,
TCS1 with BVCE0 = 4.5 V).
R1,2 = 120 X, R3,4 = 4 kX,
R5,6 = 1 kX, R7,8 = 11 X,
R9,10 = 25.3 X,
R11,12 = 600 X, C1,2 = 250 fF
Analog Integr Circ Sig Process (2014) 79:15–25 17
123
IN? and IN-. The common-mode voltage is measured at
node CM and then adjusted via a feedback loop with transistor
MP1. A detailed circuit of CMFB can be seen in Fig. 5. The
CMFB circuit consists of a simple operational CMOS
amplifier (OPA3) with Miller compensation, where transistor
MP6 limits the maximum output voltage at node VCM. OPA3
VEE VEE
VCC1 VCC1
T26
T25
R35C14
OT1+OT1-
AMP
VEE
C15
R36
VEE
VCC1
VAGC
OPA1
OPA2
T27
MP2
I DC
VCC1 VCC1
VEE
MN2
BIASOPA1VEE VEE
VCC1 VCC1
T21
T22T23
T24
VEE
VCC1
R27
R28C12
C13
R29 R30 R33 R34
OP1+
OP1-
R31 R32
REFAGC
CurMirr
BIASOPA2
AE1
AE1
AE1 AE1
AE1
AE1
AE1
AE1
AE2
1mA 1.1mA 1.1mA
1.2mA
max.1.4mA
Fig. 3 Automatic gain control
(AGC) in the pre-amplifier (fast
bipolar transistors with
AE1 = 0.353 lm2 and
BVCE0 = 2.2 V, and slow
bipolar transistors with
AE2 = 0.493 lm2 and
BVCE0 = 4.5 V) and its
simulated influence to the
voltage gain of the first stage in
the pre-amplifier in Fig. 2.
R27,28 = 250 X,
R29,30 = 400 X,
R31,32 = 650 X,
R33,34 = 900 X,
C12,13 = 120 fF,
R35 = 100 kX, C14 & 1.2 pF
Fig. 4 Simulated step response
of the AGC at 10 Gb/s for
IN? = 1.25 V DC and IN-
= 1.25 V with the overlaid data
signal. The amplitude of the
input data signal performs a step
from 25 to 500 mVpp
18 Analog Integr Circ Sig Process (2014) 79:15–25
123
is designed to have a DC voltage gain of 39 and a 3 dB cut-off
frequency of 18 MHz (considering a capacitive load of 2 pF).
With capacitors C16–C18 OPA3 is used as an integrator circuit.
The response of a step of the input common-mode voltage
from 1.75 to 1.25 V can be seen in Fig. 6. The time constant of
the feedback loop amounts to&130 ns. The simulated power
consumption of the CMFB circuit amounts to 7 mW.
2.4 Output stage
The schematic of the output stage of the modulator driver is
depicted in Fig. 7
The supply voltage of the output stage amounts to
VCC2 = 3.5 V. The differential data signal INT2? and
INT2-, which is incoming from the pre-amplifier stage, is
applied to transistors T9 and T10 for amplification.
Resistors R13 and R14 set the operating point and somewhat
degenerate the small-signal amplification at low frequen-
cies. At high frequencies capacitor C4 enhances the band-
width by decoupling these resistors. Capacitor C3 is added
to reduce peaks in the collector–emitter voltages of tran-
sistors T9–T12 with the drawback of a small decrease of
the bandwidth. T11 and T12 are the driven cascode tran-
sistors, where at the bases the data signals INT1- and
INT1? respectively, which are delivered by the pre-
amplifier stage, are applied. By doing this the voltage at
node AP? is divided to the collector–emitter voltages of
series-connected transistors T9 and T11 and to a small part
to the voltage drop across resistor R13. In a similar way the
voltage at AP- is divided to T10, T12 and R14. The
amplified differential data signals AP? and AP- are level
shifted with emitter followers T13, R17, R19 and T14, R18,
R20 respectively. Capacitors C5 and C6 bypass the emitter
followers and enhance the bandwidth. The generated sig-
nals APD?, APD- are applied to transistors T15 and T16
for amplification, which are the dominating transistors in
the output stage. Cross-coupled capacitors C7, C8 between
the collectors of T16 and T15 resp. and nodes APD? and
APD- resp. are added to somewhat decrease the rise- and
fall time by a few ps of the data signals at nodes AP2?
and AP2- thus lowering the voltage peaks of the
Fig. 5 Schematic of the CMFB amplifier
Fig. 6 Step response of the
common-mode voltage at nodes
OT1?/OT1- (simulated at
node CM) and signal VCM
when a common-mode jump
from 1.75 to 1.25 V is applied
to the input (nodes IN?/IN-) at
10 Gb/s data rate
Analog Integr Circ Sig Process (2014) 79:15–25 19
123
collector–emitter voltage of transistors T17 and T18. These
peaks occur due to different switching times between nodes
AP2? and AP2I? or AP2- and AP2I- respectively. C7
and C8 (200 fF) are chosen to be too small to considerably
increase the bandwidth or to cause instabilities. Instability
considerations of so-called negative miller-capacitances
(NMCs) and their positive influence to the large signal
behavior in reducing the effective input impedance under
certain conditions are treated in [19]. Another problem is
the saturation voltage of bipolar transistors, which can
amount between 0.3 and 0.4 V. So in the design care has to
be taken to use the full collector–emitter voltage range
headroom between the saturation voltage and BVCE0
&2.2 V. Usually it is avoided to drive a transistor into
saturation but as a trade-off between voltage-headroom and
speed a small saturation effect may be tolerable.
To include all these considerations and to furthermore
save power, a passive network without amplification tran-
sistors is used to drive transistors T17 and T18 at their
bases with the help of nodes AP? and AP-. The simulated
waveforms can be seen in Fig. 8. The DC base current for
e.g. transistor T17 is defined here mainly with resistor R21.
If T15 turns on (The operation point is set at node APD-)
node AP2I? is pulled very close to the saturation voltage
of T15 and a large collector current flows, which is also
defined by resistor R25 (note that T15 = T17). Due to the
fact that AP- is currently in the high state and node API-
is pulled to low (via the base–emitter diode of T17) the
voltage difference AP- minus API- and R25 defines the
higher base current and also the collector–emitter voltage
of T17 is close to saturation. In the other case, when
transistor T15 turns off the potential at AP2I? is limited by
the potential at node API- via the base–emitter voltage of
T17. Because only a negligible collector current flows
through T15 and T17 the base current of T17 is low and the
potential at API- is mainly defined by AP-, which is
currently at low state. Transistors T16 and T18 are the
differential counterpart to transistors T15 and T17 and are
working in a similar way. Capacitors C9 and C10 form
capacitive dividers together with the base–emitter capaci-
tances of T17 and T18, respectively, including capacitor
C11 to increase the bandwidth at nodes API- and API?
and to improve the dynamic behavior. Capacitor C11 is also
added to avoid further voltage peaks exceeding the col-
lector–emitter breakdown voltages of T17 and T18. In
Fig. 8 it can be seen that the collector–emitter voltages of
T15 and T17 are \1.7 and 2.1 V, respectively, which is
well below BVCE0 &2.2 V.
Fig. 7 Schematic of the output
stage of the modulator driver
(AE1 = 0.353 lm2 for fast
transistors and
AE2 = 0.493 lm2 for slow
transistors): R13,14 = 30 X,
R15,16 = 68 X, R17,18 = 520 X,
R19,20 = 880 X, R21,22 = 1 kX,
R23,24 = 100 kX, C3 = 20 fF,
C4 = 2pF, C5,6 = 800 fF,
C7,8 = 200 fF, C9,10 = 200 fF
Fig. 8 Simulated transients at the nodes of the modulator driver’s
output stage
20 Analog Integr Circ Sig Process (2014) 79:15–25
123
The final differential data signal at nodes AP2?, AP2-
is level shifted by the emitter followers T19 and T20,
which drive the modulator electrodes’ characteristic
impedance of 50 X. The bipolar transistors (T13, T14, T19,
T20) used as the emitter followers have similar to those in
the pre-amplifier stage a smaller transit frequency, which is
still enough for 10 Gb/s but a higher collector–emitter
breakdown voltage of BVCE0 &4.5 V. A simulation of the
final data signals at the outputs OUT? and OUT- at
10 Gb/s can be seen in Fig. 9. The inverted data signal
(OUT-) as well as the non-inverted data signal (OUT?)
switch between 0 and 2.5 V (differential 5Vpp) so that the
diodes in the modulator arms are always in reverse oper-
ation (no bias-T is needed for the signal part of modulator).
Typically in the modulator arms additional diodes in
reverse operation are implemented with which the optical
operation point of the phase modulator can be adjusted by
tuning the phase shift with an additional external DC
voltage. The simulated power consumption of the output
stage including the load of two 50 X resistors amounts to
602 mW.
3 Measurement results
A test chip of the modulator driver has been fabricated in a
0.25 lm SiGe BiCMOS technology in ‘‘low-speed’’ ver-
sion IHP SG25H3 (ftmax & 120 GHz, BVCE0 = 2.2 V)
(see Fig. 10). The modulator driver chip has a size of
0.54 lm2. For test purposes the test chip has been bonded
to a PCB and supplied with VCC1 = 2.5 V, VCC2 = 3.5 V.
The chip contains four pads for each supply voltage and
several pads for the ground connections. To reduce the
influence of the parasitic inductances of the bond wires,
eight wires are bonded to the PCB for VCC1 as well as for
VCC2 each. For the ground connection as many wires as
possible have been connected to the chip. To connect one
signal pad to the PCB, two wires were bonded in parallel.
At IN- a DC voltage of 1.25 V and at IN? a 10 Gb/s
pseudo-random bit-sequence PRBS 231 - 1 with a DC bias
of 1.25 V has been applied. The measured eye diagram and
for comparison simulated ones are shown in Fig. 11 for
100 mVpp (measured eye diagrams) and 50 mVpp (simu-
lated eye diagrams) differential input voltage respectively.
The jitter in the measured eye diagram in Fig. 11 is mainly
caused by data dependent jitter in the rising and falling
edge, because the circuit, where several capacitors to
compensate the frequency behavior are added, shows a
slightly slower behavior than in the simulation. Another
reason is the fact that the saturation voltage of a bipolar
transistor is &0.35 V. Transistors T15–T18 show small
saturation effects when they are turned on. This has an
additional influence to the rising edge of the data signals.
Nevertheless the eye of the signal at node OUT? shows a
wide opening with a voltage swing of 2.5 V (corresponds
to 5Vpp differential). The influence of the load of the bases
of the large output transistors T19 and T20 on nodes AP2?
and AP2-, respectively, results to a slight ramp in the
roofs of the eyes in Fig. 11.
A rising voltage of e.g. AP2? has as a consequence a
higher emitter current of T19 and hence the base current,
which consists of a static part and a dynamic part caused by
voltage switching, is rising. Another influence of T19 (or
T20) to node AP2? (or AP2-) is the voltage dependent
base–collector capacitance, which tends to increase when
the voltage at AP2? rises.
Bit-error-ratio (BER) measurements with a PRBS
231 - 1 data signal have resulted in a BER \10-12 for
input voltage differences down to 40 mVpp (see Fig. 12).
Fig. 9 Simulated data signal (10 Gb/s) at the output nodes OUT?
and OUT- of the modulator driver, when an input data signal of
100 mVpp with 1.25 V common-mode bias is applied at IN? and a
reference voltage of 1.25 V at IN-
Fig. 10 Layout plot (top) and chip photo (bottom) of the modulator
driver
Analog Integr Circ Sig Process (2014) 79:15–25 21
123
The measured power consumption amounts to 680 mW
in contrast to the simulated 715 mW for the modulator
driver (including 2 9 50 X load at the output nodes
OUT?/OUT- but excluding 2 9 50 X termination at the
input nodes IN?/IN-).
For S-parameter measurements the chip has been wire-
bonded to a PCB but where the signal pads (IN?/IN-,
OUT?/OUT-) have been kept unconnected to place
Z-probes on these pads in a wafer prober. Measurements were
performed with a R&S ZVM vector network analyzer
(10 MHz to 20 GHz) where for calibration (TOSM) a CSR-3
calibration substrate has been used. Due to AC measurements
(magnitude of measured S21 and S11 see Fig. 13) for small
input voltage differences, where the AGC has not turned on,
the modulator driver has a maximum S21 of 37 dB with a 3 dB
cut-off frequency of f-3dB = 7.1 GHz The resonance effect at
*12 GHz is caused by capacitors C7 and C8 in Fig. 7, which
are connected in positive feedback. The single peaks at 1 and
2 GHz are most likely measurement obstacles (parasitic line
effects) caused by an old, not perfect calibration substrate.
Fig. 11 Measured (100 mVpp
data signal at the input) and
simulated (50 mVpp data signal
at the input) eye diagrams at the
output nodes OUT? and OUT-
Fig. 12 Measured BER versus the differential input voltage for two
input common-mode voltages
22 Analog Integr Circ Sig Process (2014) 79:15–25
123
Influences of bond wires are less likely, because when bonding
the chip to the test PCB, care has been taken for short bond
wires and block capacitors as near as possible to the chip. A
rough estimation (inductance, on-chip block capacitors)
would give influences around 10 GHz. The measured rise/fall
times (20–80 %) are 45/30 ps. The longer rise time is another
indication of a small saturation effect in T15–T18.
4 Comparison and conclusion
A test chip of a modulator driver with a chip area of
0.54 mm2 in a 0.25 lm SiGe 120 GHz-BiCMOS process
has been presented. The driver consists of a pre-amplifier
stage with AGC and CMFB, which is supplied with 2.5 V
and an output stage, which is supplied with 3.5 V. At the
Fig. 13 AC characteristic (magnitude of S21 and S22) for small input
voltage differences at 1.25 V input common-mode voltage
Table 1 Comparison related to design parameters power consumption and gain of the modulator driver used
Publ. Technology Data rate
Input swing (eye)
Output swing (eye)
Suppl. volt.
Power
consumption
AC gain
f-3dB
Load Driver chip
area (mm2)
[5] 0.13 lm CMOS SOI 10 Gb/s (meas.)
50 mVpp for 4 dB ER (sim.)
5Vpp nominal (sim.)
(inductive peaking
in every stage)
1.5 V, 5 V
575 mW
N/A 2 9 50 X N/A
[6] 0.13 lm CMOS SOI 25 Gb/s (meas.)
200 mVpp
&2.8Vpp (sim.) 6.9 dB
ER (meas.) (inductive
peaking in the last stage)
1.2 V, -1.5 V
to 1.5 V
207.6 mW
N/A Capacitive load of
photonic ring resonator
(Ø15 lm, &50 fF)
N/A
[14] 0.35 lm SiGe BiCMOS 10 Gb/s
500 mVpp
9Vpp
5 V
1 W
N/A 2 9 50 X 0.56
[15] 0.18 lm SiGe BiCMOS 10 Gb/s
500 mVpp
8 Vpp
-6.5 V
3.7 W
N/A 2 9 50 X 1.2
[16] 0.25 lm SiGe BiCMOS 3.4 Gb/s
300 mVpp
max. 12Vpp
5.2V, 8 V
1.6 W
N/A 2 9 50 X 0.6
[17] SiGe bipol. 0.3 lm eff. emitter width 23 Gb/s
0.6Vpp to 0.8Vpp
7Vpp
0 V to -5 V,
2.8 V to -5 V
2.5 W
N/A 2 9 50 X 0.7828
[19] 0.25 lm 180 GHz-SiGe BiCMOS 40 Gb/s
0.6Vpp
6Vpp
4 V, 5.5 V
1.35 W
13 dB
33.7 GHz
2 9 50 X 0.72
[21] 0.25 lm SiGe BiCMOS 20 Gb/s
–
2.5Vpp
5 V
0.75 W
– 50 X 0.7
This work 0.25 lm 120 GHz-SiGe BiCMOS 10 Gb/s (meas.)
50 mVpp (sim.)
100 mVpp (meas.)
5Vpp (meas.)
2.5, 3.5 V
0.68 W
37 dB
7.1 GHz
2 9 50 X 0.54
The most significant results of our work are written in bold
ER extinction ratio of optical output of a transceiver, sim. simulated, meas. or no comment measured
Analog Integr Circ Sig Process (2014) 79:15–25 23
123
outputs a differential data stream with 5Vpp is delivered.
Because the differential output delivers two times a voltage
swing of between 0 and 2.5 V, no bias-T is needed and the
modulator driver can be connected directly to the elec-
trodes of a silicon Mach–Zehnder modulator in push–pull
configuration, because the diodes in the interferometer
arms are always in reverse operation. The focus in the
design has been also set to a low supply voltage and hence
a low power consumption, which amounts to 680 mW in
contrast to simulated 715 mW. To save additional active
transistor stages in the output stage a passive network
without additional bipolar transistors to control the cascode
transistors has been used. Another design goal was a high
AC gain, which results to S21 = 37 dB (f-3dB = 7.1 GHz).
In Table 1 a comparison with the literature related to
the considered design parameters (gain and power con-
sumption) is given. In some publications the AC gain has
not been measured, but a hint may be given by comparison
of the input and output voltage swing for the different eye
diagrams. Considering the measured small-signal stray-
parameter of S21 = 37 dB and the large-signal behavior
that a full-swing eye-diagram (Vpp = 5 V) was achieved
by a low input voltage difference of 100 mVpp, this is a
considerably better result. The power consumption of
0.68 W is lower than in most of the other works, but
depends also on the load, which will be driven. It is
apparent that the driver for the active microring resonator
in [6] with a load capacitance of 50 fF only, consumes less
power and therefore less chip area than the driver for a
Mach–Zehnder modulator in push–pull configuration
(typical length of 2–3 mm of electrodes), where two times
the termination of an electrode line (50 X) and additionally
the capacitances of the diodes in reverse operation have to
be driven. A Mach–Zehnder modulator in push–pull con-
figuration, however has the advantage compared to mic-
roring resonators of a theoretical chirp-free operation, more
than a factor of 100 higher bandwidth and a lower sensi-
tivity to process tolerances and temperature [20]. A slightly
lower power consumption of a Mach–Zehnder modulator
driver has been reported in [5]. Nevertheless they use
inductive peaking with integrated inductors in every
amplifier stage to meet bandwidth requirement and this
tends to increase the chip area. Another factor in CMOS
processes is the lower gain of MOS transistors compared to
bipolar transistors. So a large gate width has to be imple-
mented for an appropriate drain current and higher gain
(in small-structure CMOS processes the velocity saturation
of charge carriers further reduces the gain) which increases
the chip area needed. A trade-off in the low-power design
of the presented modulator driver may be the rise-/fall-time
(20–80 %), which amounts to 45 and 30 ps respectively.
This is slightly worse than in some publications, but
enough for well open eye diagrams (see Fig. 11) to
integrate the driver together with a 10 Gb/s silicon Mach–
Zehnder modulator on a photonic-electronic chip.
Acknowledgments The authors would like to thank L. Zimmer-
mann and B. Tillack at IHP GmbH, Germany for chip production and
H. Porte at Photline Technologies for support. This work was partially
funded in the European project HELIOS (FP7-224312).
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Bernhard Goll (M’08) received
the M.Sc. degree (with distinc-
tion) in Electrical Engineering
and Telecommunication Engi-
neering in 2003 and the Ph.D.
degree (with distinction) in 2007
from Vienna University of
Technology (VUT), Austria. He
is with the Institute of Electro-
dynamics, Microwave and Cir-
cuit Engineering, VUT, as a
Scientific Research Assistant on
the design of analog integrated
circuits, especially clocked,
regenerative comparators, mod-
ulator drivers and optical receivers.
Horst Zimmermann (M’98–
SM’02) was born in Sulzbach-
Rosenberg, Bavaria, in 1957. He
received the Dr.-Ing. degree
from the Fraunhofer Institute for
Integrated Circuits (IIS-B), Er-
langen, Germany, in 1991. He
was an Alexander-von-Hum-
boldt Research Fellow at Duke
University, Durham, NC, where
he worked on diffusion in Si,
GaAs, and InP until 1992. In
1993, he joined the Chair for
Semiconductor Electronics, Kiel
University, Kiel, Germany,
where he lectured optoelectronics and worked on optoelectronic
integration in silicon. Since 2000, he is professor for Electronic
Circuit Engineering at the Vienna University of Technology, Vienna,
Austria. He is the author of the Springer books ‘Integrated Silicon
Optoelectronics’ (2nd ed., 2000) and ‘Silicon Optoelectronic Inte-
grated Circuits’ (2004), coauthor of ‘Highly Sensitive Optical
Receivers’, of’Optical Communication over Plastic Optical Fibers’
and of ‘Analog Filters in Nanometer CMOS’ as well as author or co-
author of more than 400 publications. His main interests are in the
design and characterization of analog, deep-submicron and nanometer
CMOS circuits as well as optoelectronic integrated CMOS and
BiCMOS circuits and sensors.
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