Antistatic Unit

eFLOW Antistatic Unit 112

KITZ-SCT's wet systems that meet users' needs

e F LOW

KITZ-SCT designs and produces all types of wet

equipment to meet users' needs.

We offer high-reliability equipment because of our

original technology, special-purpose clean room, and

inspection facilities, among other things.

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PanelMountType(PSeries) CabinetType(CSeries)

ThePSeriescanbeinstalledonarackinaccordancewiththeEIA(ElectronicIndustriesAlliance)standard.The1APmodelusesmetal-freeparts forallwettedareas.The2APmodelcanbemetal-freeforallwettedareasasanoption.

TheCSerieshasacabinetwithacapacityfortwoCO2cylinders.Thereisabuilt-inspecificresistancesensorinthecabinet,enablingconnec-tiontowaterpipestothepointofusedirectlyfromeFLOW.

The eFLOW® Series is an apparatus to control the resistivity of the DI water by supplying the CO2 through a "hollow fiber gas permeable membrane" developed by DIC Corp.

Features Alowfailurerateachievedduetomechanismwithoutcomplicatedcontrol. Auniquepipinglayoutprovidesstableresistivityvalueandenableseasycontroloftheresistivity. LonglifeoftheCO2aerationmodule(Guaranteedforfiveyears,madebyKITZSCT)

Effects Preventsredepositionofcontaminantsduetostaticelectricity Preventselectrostaticdestructionofsubstratepattern

Effectivefield/use

eFLOWAntistaticUnit

Field Use

LSILCD

photomask/reticle cleaning

Scrubber cleaning

High-pressure jet cleaning

Cleaning in the dicing process

Cell cleaning

432

480

700

464

350

216

360

1190

220

900

432

480

700

464

350

216

360

1190

220

900

UltraH

ighPurityValvesUltraH

ighPurityFittingsVacuum

Com

ponentsPFAValves

PFAWeldFittings

AntistaticUnit

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DevicePrinciples

ThespecificresistancevalueofDIwatercanbeadjustedbyregulatingthemixingratioofCO2saturatedwaterandultraDIwatergeneratedbytheCO2dissolutionmodule(seethepicturebelow).

CO2DissolutionPrinciples

WhileDIwaterflowsthroughtheinsidethehollowfibersinthemodule,CO2gaspenetratestheDIwaterfromoutsidethehollowfibermembrane.ThedissolvedCO2ionizesinDIwater,providingconductivitytoDIwatertoremovestaticelec-tricity.Usingthefinehollowfiberbundle,thesurfacearearequiredfortheCO2dissolu-tioncanbeobtainedefficiently.

CO2DissolutionModule(InternalCirculation)MadebyDIC

H2O+CO2→H2CO3

H2CO3→H++HCO3-

HCO3-→H++CO3

2-

Resistivity Sensor

DIW IN Resistivity control nob

Resistivity MeterPower Switch

Manual purge Switch

Auto-purgetimer

Gas filter CO2gas

CO2 gas Injetion module

CO2 gas purge valve

CO2 slow-leak（Capillary）

CO2 gasregulator

0.2MPa>CO2 gasshut valve

CO2 gas

Drain

Treated Water

Arrange piping length ofno less than 2m.Arrange piping length ofno less than 2m.

18.2MΩ・cm

18.2

MΩ・

cm

0.2～1.0MΩ・cm

≒0.02MΩ・cm

H2O+CO2

CO2IN

DIW

CO2gas

Hollow fiber

BehaviorofResistivityValueDuringFlowRateFluctuation

*Theresistivityperformanceduringflowratefluctuationisnotguaranteed.*Thegraphsprovidedareforreferenceonly.Theperformanceandcharacteristicsmayvarywithoperatingconditions.

ExampleofScrubberCleaningScrubbercleaningsample

4L/min(0.5min)←→8L/min(0.5min)

ExampleofDicingDicingprocesssample

OL/min(5min)←→8L/min(5min)

TheeFLOW2Aand3Amodelsareequippedwithtwocarbondioxidedissolutionmodules.

(eFLOW 2AP,2AC eFLOW 3AP,3AC) (eFLOW 1AP,1AC)

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Unit:eFLOW® Panelmounttype CabinettypeType 1AP-B02 2AP-B01 3AP-B01 1AC-P101 2AC-P101 3AC-P101

RangeofTreatedWaterFlowRate[L/min] 1~16 5~30 10~50 1~16 5~30 10~50

ConnectionSize φ12mm Rc1"PP Rc3/4" PVC union Rc1" PVC union

Module 1 PF-001L-NA (1 module)

2 PF-001L-ND2s (2 modules)

2 PF-001L-ND3s (3 modules)

1 PF-001L-NA (1 module)

2 PF-001L-ND2s (2 modules)

2 PF-001L-ND3s (3 modules)

RangeofResistivitySettings 0.2~1.0 (MΩ) *(1)

StabilityDuringConstantFlowRate Within ± 15% (stability during flow rate fluctuation not guaranteed)

OperatingFluid Supply water: RO water or better, supply gas: CO2 gas (99.5% or higher purity) Dry air or N2 gas for drying * No other fluids may be used.

SupplyWaterTemperatureandPressureRange 20~30 (ºC) 0.1~0.3 (MPa) Max. 0.5 (MPa)

CO2GasSupply Supplied from the utility on the user sideCan be outfitted with two CO2 gas tanks (optional)

φ140 (5 kg capacity) or φ175 (7 kg capacity)

CO2GasSupplyPressure Less than 0.2 MPa (Outlet pressure of the CO2 tank for cabinet type)

RangeofCO2GasSettings 0.05~0.15 MPa (the pressure set on the eFLOW front panel)

OperatingEnvironmentandStorageTemperature 20~30 (°C) 10~40 (°C) (cannot be frozen)

PowerSupplySpecificationsandPowerConsumption Single-phase AC 100-240V 50/60 Hz Maximum 100VA

Warning Upper and lower limits of resistivity value, power supply monitor:Warning lamp, buzzer (with reset switch)

Upper and lower limits of resistivity value, power supply monitor, water leak detection:

Warning lamp, buzzer (with reset switch)

ExternalOutput Warning: relay contact (c contact) capacity AC 220V DC 24V 3 A (load resistance)Transmitted output: 4~20 mA maximum load resistance 900 Ω insulated output

ExternalDimensionsW432×D350×H199.5[mm] (BOX part)

W480×H216×t3[mm] (panel part)Does not include protuberance

W700×D360×H1120[mm] (BOX part)W700×H900[mm] (opening part)Does not include protuberance

Material Hair-lined SS panel SS Baked-on panint finish

Weight About 9 kg About 100 kg

FasteningMethods Can be attached to EIA-standard rack L-angle caster (with adjuster)

ResistivityMeter HE480-R (AC) (AC100~240V) Manufactured by HORIBA Advanced Techno Co., Ltd.

ResistivitySensor ERD-001C-T (titanium electrode) external installationInstall 2 m downstream on the pipe from eFLOW

ERD-001C-T (titanium electrode)Already installed in the case (built-in)

Equipments

Comes withCO2 slow leak (hollow fiber capillary) valve

CO2 gas auto purge (timer controlled), manual purge (pushbutton switch)

- Carbon dioxide filter

- Water leak sensor (reflective, water-absorbent paper type)

Options - CO2 gas pressure sensor, warning light

* (1) Please contact the sales representatives for settings below 0. 2MΩ⋅cm. Settings of 1.0 MΩ⋅cm or higher are possible, but accuracy is not guaranteed.

Specifications

Performance,Characteristics

RangeofflowRatetobeUsedforEacheFLOWModel

When setting

When setting

PressurelossforeachmodelRangeofflowratetobeusedforeacheFLOWmodel

*Theresistivityperformanceduringflowratefluctuationisnotguaranteed.*Thegraphsprovidedareforreferenceonly.Theperformanceandcharacteristicsmayvarywithoperatingconditions.

PressureLossforEachModel