6
3486 1-4244-1340-0/07/$25.00 c 2007 IEEE

Automated Design of a MEMS Resonator - 2007

Embed Size (px)

DESCRIPTION

Paper describing how to make a MEMS resonator

Citation preview

Page 1: Automated Design of a MEMS Resonator - 2007

3486

1-4244-1340-0/07/$25.00 c©2007 IEEE

Page 2: Automated Design of a MEMS Resonator - 2007

2007 IEEE Congress on Evolutionary Computation (CEC 2007) 3487

Page 3: Automated Design of a MEMS Resonator - 2007

3488 2007 IEEE Congress on Evolutionary Computation (CEC 2007)

Page 4: Automated Design of a MEMS Resonator - 2007

2007 IEEE Congress on Evolutionary Computation (CEC 2007) 3489

Page 5: Automated Design of a MEMS Resonator - 2007

3490 2007 IEEE Congress on Evolutionary Computation (CEC 2007)

Page 6: Automated Design of a MEMS Resonator - 2007

2007 IEEE Congress on Evolutionary Computation (CEC 2007) 3491