Bài giảng kỹ thuật cảm biến phần 6 : Cảm biến quang

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Bài giảng kỹ thuật cảm biến phần 6 : Cảm biến quang

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  • Bi ging

    K Thut Cm Bin (sensors)

    1

    Hoang Si Hong

    ----2011----

    Faculty of Electrical Eng., Hanoi Univ. of Science and Technology (HUST),

    Hanoi, VietNam

    Hoang Si Hong-HUST

    5

  • Ngun tham kho

    Note: Bi ging mn hc ny c tham kho, trch dn v lc dch t cc ngun sau:

    Sch

    - K thut o lng cc i lng in tp 1, 2- Phm Thng Hn, Nguyn Trng Qu.

    - Cc b cm bin trong o lng-L Vn Doanh

    - Cc b cm bin-Nguyn Tng Ph

    - o lng in v cc b cm bin: Ng.V.Ho v Hong S Hng

    - Sensor technology handbook (edited by JON WILSON)

    - Elements of Electronic Instrumentation and Measurement (Prentice-Hall Company)

    - Sch gii thch n v o lng hp php ca Vit Nam

    Bi ging v website:

    - Bi ging k thut cm bin-Hong S Hng-BKHN(2005)

    - Bi ging Cm bin v k thut o:P.T.N.Yn, Ng.T.L.Hng BKHN (2010)

    - Bi ging MEMs ITIMS BKHN

    - Mt s bi ging v cm bin v o lng t cc trng i hc KT khc Vit Nam

    - Website: sciendirect/sensors and actuators A and B

    Hoang Si Hong-HUST 2

  • Ni dung mn hc v mc ch

    Ni dung Chapter 1: Khi nim chung v Cm bin (2b)

    Chapter 2: Cm bin in tr (2b)

    Chng 3: Cm bin o nhit (2b)

    Chng 4: Cm bin quang (2b)

    Chng 5: Cm bin tnh in (2b)

    Chng 6: Cm bin Hall v ho in

    Chng 6: Cm bin v PLC(1b)

    Mc ch: nm c cu to, nguyn l hot ng v ng dng ca

    cc loi cm bin thng dng trong cng nghip v i sng. Nm

    c xu th pht trin chung ca cng ngh cm bin trn th gii.

    Hoang Si Hong-HUST 3

  • Hoang Si Hong-HUST 4

    Chng 3: Cm bin quang

    Ni dung Khi nim chung v nh sng v ngun sng

    Quang in tr, t bo quang in v b nhn quang in

    Photodiode

    Phototranzito

    T bo quang in

    Ngun sng

    hay ngun thu

    nh sng?

  • Hoang Si Hong-HUST 5

    Cc khi nim chung v nh sng

    - nh sng l mt sng in t, vng nh sng nhn thy c c bc sng

    t 0.4 n 0.75m.

    - nh sng c tnh cht sng v ht.

    - Vn tc nh sng trong chn khng v = 299792 km/s

    - Vn tc nh sng trong mi trng vt cht c chit sut n l v = c/n

    - Mi lin h gia bc sng nh sng v tn s nh sau: = c/ (chn

    ko) v = v/

    -Ultraviolet (t ngoi). Infrared (hng ngoi)

  • Hoang Si Hong-HUST 6

    Cc khi nim chung v nh sng

    - Tnh cht ht th hin qua s tng tc ca n vi vt cht. nh sng l cc

    ht phton mang nng lng Ept= h. Trong h l hng s planck =

    6,6256.10-34 J.s

    - Khi dng nh sng xuyn qua mt cht no c th b hp th hoc tn x

  • Hoang Si Hong-HUST 7

    Nguyn l chung

    -Bc sng ln nht ca nh sng c th gy nn hin tng gii phng in t vi

    iu kin nng lng photon Ept > Edt nng lng lin kt ca in t

    max = h.c/Edt-Nh vy iu kin gii phng in t ph thuc vo kiu nh sng v bn cht vt

    liu b chiu sng

    - Hin tng gii phng cc ht dn di tc dng ca nh sng do hiu ng

    quang in s gy nn s thay i tnh cht in ca vt liu. l nguyn l c

    bn ca cc cm bin quang in

    - S in t c gii phng trong mt giy G = (1-R) /h.c

    -:Hiu sut, R: h s phn x v thng lng nh sng

  • Hoang Si Hong-HUST 8

    Cc n v o

    -Nng lng bc x Q : l nng lng pht x, lan truyn hoc hp th di dng bc

    x c o bng Jun (J)

    -Quang thng : l cng sut pht x lan truyn hoc hp th, o bng ot (W) v l

    i lng c trng cho ngun sng: = dQ/dt

    - Cng sng I: l quang thng pht ra theo mt hng di mt n v gc khi,

    c n v l W/steradian: I = d/d

    - chi nng lng L: l t s gia cng sng pht ra bi mt phn t b mt

    dI theo mt hng xc nh v din tch hnh chiu vung gc ca phn t b mt

    dAn, c n v l W/steradian.m2 :L = dI/dAn

    - ri E: l t s gia quang thng thu c bi mt phn t b mt v din tch

    ca phn t , c n v l W/m2 :E=d/dA

    - n v th gic /v nng lng

    - Thng lng lumen (lm) oat (W)

    - Cng candela (cd) oat/sr (W/Sr)

    - chi cd/m2 W/Sr.m2

    - ri lumen/m2 (lux) W/m

    - Nng lng lm.s

    - nhy ca mt ngi cc i vi bc sng =0,555 micromet

  • Hoang Si Hong-HUST 9

    Cc n v o

    -Nng lng bc x Q : l nng lng pht x, lan truyn hoc hp th di dng bc

    x c o bng Jun (J)

    -Quang thng : l cng sut pht x lan truyn hoc hp th, o bng ot (W) v l

    i lng c trng cho ngun sng: = dQ/dt

    - Cng sng I: l quang thng pht ra theo mt hng di mt n v gc khi,

    c n v l W/steradian: I = d/d

    - chi nng lng L: l t s gia cng sng pht ra bi mt phn t b mt

    dI theo mt hng xc nh v din tch hnh chiu vung gc ca phn t b mt

    dAn, c n v l W/steradian.m2 :L = dI/dAn

    - ri E: l t s gia quang thng thu c bi mt phn t b mt v din tch

    ca phn t , c n v l W/m2 :E=d/dA

    - n v th gic /v nng lng

    - Thng lng lumen (lm) oat (W)

    - Cng candela (cd) oat/sr (W/Sr)

    - chi cd/m2 W/Sr.m2

    - ri lumen/m2 (lux) W/m

    - Nng lng lm.s

    - nhy ca mt ngi cc i vi bc sng =0,555 micromet

  • Hoang Si Hong-HUST 10

    Cc ngun sng c bn

    n si t

    n ne-on

    Laser

    Led

    LCD ?

  • Hoang Si Hong-HUST 11

    n si t

    - L bng thu tinh cha kh him hoc halogen v si t lm bng vonfram. Pht ra

    nh sng nhn thy c

    - u im: thng lng nh sng ln, di ph rng, c th thay i c thng lng

    nh sng

    - Nhc im: thi gian s dng ngn hn so vi led, d v, qun tnh ln

    Very thin metal wire

    emitting light rays when

    an electric current passes

    though it

    tungsten filament

  • Hoang Si Hong-HUST 12

    n Led (LIGHT EMITTING DIODE)

    - Nguyn l: nng lng (quang nng) c gii phng khi c s ti

    hp cp t-l trng phn tip gip p-n v pht sinh ra cc phton.

    - u im ca led v led 7 thanh:

    + Tn s hot ng cao, bn tt, tin cy cao, tui th cao (10

    nm).

    + Cng sut tiu th b, khng gy st p khi bt u hot ng

    + Khi tng nhit v dng cung cp cho led khng i th cng

    sng s gim trung bnh khong 1.5 n 2 mV/ oC

    + Kch thc b c th ghp ni din tch rng

    + Cng sng ph thuc vo dng in i qua, do c th iu

    khin c cng sng thch hp

    + Mu sc nh sng ph thuc vo vt liu v d: GaAs: , GaAsP

    hoc vng, GaP hoc xanh.

    + Kh nng chuyn mch nhanh ( 1 ns)

    + in p st trn led ph thuc vo mu vi dng thun cung cp c

    20 mA

    + Bc x ca led l n sc

  • Hoang Si Hong-HUST 13

    How does it work?

    P-n junction Electrical Contacts

    Recombination

    produces light!!

    Junction is biased to produce even more

    e-h and to inject electrons from n to p for

    recombination to happen

    g = hc/Eg

    A typical LED needs a p-n junction

    There are a lot of electrons and holes at

    the junction due to excitations Electrons from n need to be injected to p

    to promote recombination

  • Hoang Si Hong-HUST 14

    Visible LED

    Definition:

    LED which could emit visible light, the band gap of the materials that we use must

    be in the region of visible wavelength = 390- 770nm. This coincides with the

    energy value of 3.18eV- 1.61eV which corresponds to colours as stated below:

    Violet ~ 3.17eVBlue ~ 2.73eVGreen ~ 2.52eV Yellow ~ 2.15eVOrange ~ 2.08eVRed ~ 1.62eV

    Colour of an LED should

    emits

    The band gap, Egthat the

    semiconductor must posses to emit each light

    Led in p st p khong 1.6 n 2 VLed da cam in p st p khong 2.2 n 3 VLed l cy in p st p khong 2.7 n 3.2 VLed vng in p st p khong 2.4 n 3 VLed xanh da tri in p st p khong 3 n 5 V

  • Hoang Si Hong-HUST 15

    LED 7 thanh

  • Hoang Si Hong-HUST 16

    Laser

    Laser (c l la-de) l tn vit tt ca cm t Light Amplification

    by StimulatedEmission of Radiation trong ting Anh, v c ngha l "khuch i nhsng bng pht x kch thch".

    http://vi.wikipedia.org/wiki/Laser

    Electron tn ti cc mc nng lng ring bit trong mt nguyn t. Cc mc nng

    lng c th hiu l tng ng vi cc qu o ring bit ca electron xung quanh ht

    nhn. Electron bn ngoi s c mc nng lng cao hn nhng electron pha trong.

    Khi c s tc ng vt l hay ha hc t bn ngoi, cc ht electron ny cng c th

    nhy t mc nng lng thp ln mc nng lng cao hay ngc li. Cc qu trnh ny

    c th sinh ra hay hp th cc tia sng (photon) theo gi thuyt ca Albert Einstein. Bc

    sng (do mu sc) ca tia sng ph thuc vo s chnh lch nng lng gia cc mc.

    C nhiu loi laser khc nhau, c th dng hn hp kh, v d He-Ne, hay dng cht

    lng, song c bc x ln nht vn l tia laser to bi cc thnh phn t trng thi cht

    rn.

  • Hoang Si Hong-HUST 17

    Laser

    http://vi.wikipedia.org/wiki/Laser

    Mt v d v c ch hot ng ca laser c th c miu

    t cho laser thch anh.

    Di s tc ng ca hiu in th cao, cc electron ca

    thch anh di chuyn t mc nng lng thp ln mc

    nng lng cao to nn trng thi o nghch mt ca

    electron.

    mc nng lng cao, mt s electron s ri ngu nhin

    xung mc nng lng thp, gii phng ht nh

    sng c gi l photon.

    Cc ht photon ny s to ra nhiu hng khc nhau t

    mt nguyn t, va phi cc nguyn t khc, kch thch

    eletron cc nguyn t ny ri xung tip, sinh thm cc

    photon cng tn s, cng pha v cng hng bay, to nn

    mt phn ng dy chuyn khuych i dng nh sng.

    Cc ht photon b phn x qua li nhiu ln trong vt liu,

    nh cc gng tng hiu sut khuch i nh sng.

    Mt s photon ra ngoi nh c gng bn m ti mt u

    ca vt liu. Tia sng i ra chnh l tia laser.

  • Hoang Si Hong-HUST 18

    Tnh cht Laser v an ton

    http://vi.wikipedia.org/wiki/Laser

    - nh hng cao: tia laser pht ra hu nh l chm song song do kh nng chiu

    xa hng nghn km m khng b phn tn.

    - Tnh n sc rt cao: chm sng ch c mt mu (hay mt bc sng) duy nht. Do

    vy chm laser khng b tn x khi i qua mt phn cch ca hai mi trng c chit

    sut khc nhau. y l tnh cht c bit nht m khng ngun sng no c.

    - Tnh ng b ca cc photon trong chm tia laser.

    - C kh nng pht xung cc ngn: c mili giy (ms), nano giy, pico giy, cho php tp

    trung nng lng tia laser cc ln trong thi gian cc ngn.

    Laser vi cng thp, ch l vi miliwatt, cng c th nguy him vi mt ngi. Ti bc sng

    m gic mc mt v thy tinh th c th tp trung tt, nh tnh ng nht v s nh hng cao ca

    laser, mt cng sut nng lng ln c th tp trung vo mt im cc nh trn vng mt. Kt qu

    l mt vt chy tp trung ph hy cc t bo mt vnh vin trong vi giy, thm ch c th nhanh

    hn. an ton ca laser c xp t I n IV. Vi I, tia laser tng i an ton. Vi IV,

    thm ch chm tia phn k c th lm hng mt hay bng da. Cc sn phm laser cho dn dng

    nh my chi CD v bt laser dng trong lp hc c xp hng an ton t I, II, hay III. (Xem

    thm an ton laser)

  • Hoang Si Hong-HUST 19

    u im v ng dnghttp://vi.wikipedia.org/wiki/Laser

    - Tnh cht ny cho php laser c th lu tr vi gigabyte thng tin trn cc rnh

    ca DVD. Cng l iu kin cho php laser vicng sut nh vn c th tp

    trung cng sng cao v dng ct, t v c th lm bc hi vt liu trong

    k thut ct bng laser. u c CD v DVD hot ng theo cng c ch, duy ch

    c iu DVD cha c lng d liu nhiu hn bi s dng tia laser bc sng

    ngn hn (650 nano-mt so vi 780 nano-mt ca CD). Bc sng ngn hn cho

    php tng tn sut va chm, sn sinh photon v tng ng vi n l d liu. D

    kin, th h quang mi da trn cng ngh ghi a laser xanh (vi bc sng

    khong 405 nano-mt), c kh nng lu tr nhng b phim cht lng cao (High

    Definition- HD).

    -My o khong cch bng laser trong qun s l loi thit b quan trng

    -Rada laser c chnh xc cao hn rada thng thng, c th hng dn hai tu

    v tr ghp ni chnh xc trn khng gian. Tuy nhin, nhng thit b laser u chu

    nh hng ca thi tit, tri m hoc ma th khong cch o b gim i nhiu.

    - My in laser, xo vt xm, y t

    -u im: Ngun n sc, chi ln, bc sng xc nh, thng lng ln,

    chm tia mnh, i nh hng cao v truyn i xa

  • Lu v cu hi

    Hoang Si Hong-HUST 20

    Cn tip phn 5-2 !!!