Biological Micro-Electro-Mechanical Systems

Biological Micro-Electro-Mechanical Systems 02109639 02109097

-- (MEMS) ( : 20 m 1 mm.) ) (microprocessor) ) - (, , ) (BioMEMS) MEMS .

BioMEMS-LOC-TAS

BioMEMS: .LOC: chip.TAS: .

(bioreceptor) . , . , .

( , )

- (LOC, TAS, DNA, BioFlips, Point of care, , , )

(minimally invasive devices, The da Vinci Surgical System)

( , , )( , )

( ) ( , )Microfluidics ( chip , )

( ) ( ) ( )

( , ) ( )

( , , ). ( , , )

ElectrokineticsMicrofluidics

()Micromachining

Bulk micromachining

Surface micromachining

- - -

- : / -

- , -

-(l/s)(Hz)(mmmmmm)25.5170661.50.234661.53.82.51496

(Google) 1/10 2035 LED (Google)

Surgery on a grape

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