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HORIZON 2020 EUROPEAN UNION FUNDING FOR RESEARCH & INNOVATION
Embedded smart sensing devices incorporating piezoelectric energy harvesters. VERMON SA, France An NGUYEN-DINH, Vice-President, Director of Technology
Contents
• VERMON SA, France • wireless SHM (Structure Health Monitoring) • Piezoelectricity & Energy Harvesting • Applications • Perspectives / conclusions
An NGUYEN-DINH, VERMON SA Vice-President
Dir. of Tech
VERMON is anchored in both medical and industrial ultrasound markets
- SME created in 1984 - 160 pers (30 in R&D) - Turnover: 26,5M€ (2014) - >10% CAGR - >20% of turnover dedicated to R&D - 87% to export
Facilities - Located in Tours, France - > 4000sqm - ISO9001, ISO13485 and ISO14001 QMS.
OEM provider of ultrasound turnkey solutions
Main core technologies - Bulk piezoelectric technologies - Electrostatic MEMS-based technologies
Applications - Imaging / Monitoring - Therapy - NDT/SHM - Energy harvesting
180 rue du Général Renault 37038 TOURS CEDEX 1, France
www.vermon.com
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Energy harvesting system block diagram
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Applications addressable by energy harvesters
VERMON, France
Piezoelectric energy harvesting
PIEZOELECTRICITY is unique in that allows the generation of electricity from what are considered as waste mechanical forces. Piezoelectric effect is defined as the electrical polarization of materials due to application of mechanical stress or strain.
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VERMON, France
Off-Resonance Resonance
Mechanical sources Compression load Vibrations
Frequency N/A Tunable
Structure Stack / cymbal / drum.. Cantilever / bridge..
Intrinsic features High energy output Withstand high mechanical load Mechanical amplifier compatible (cymbal) Dynamic excitation stress Robust manufacturing process
Tunable resonant frequency Simple structures Compact sizes / miniaturisable Cost efficient (development & fab) Reliable performance
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Modes of operations
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Cantilever energy harvester
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bimorph cantilever in d31 piezoelectric mode
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Piezo cantilever energy harvester (component)
Piezo harvester + rectifier + rechargeable battery or super caps (scalable energy harvesting sub-system)
Piezo harvester + rectifier + sensors + signal proc. + communication (embeddable autonomous sensor node)
Embeddable autonomous sensor node (ASN)
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Some previous generations of sensor nodes
Next Gen: consumption<few µW / integrated energy harvesting / wireless transponder / adaptable lifespan / conformable / smart power management / etc..
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ASN network
(a) Typical wireless sensor network scenario. (b) Sensor node block diagram.
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Surface roughness (PZT) Op5cal Thickness control Poling and electrode pla5ng X50
⇒ Thinned bulk PZT layers ⇒ Metallic/Organic shim materials ⇒ Assembly method (reliability & robustness)
Manufacturing process (cantilever)
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Performance assessment
100 105 110 115 120 125 1300
5
10
15
20
25
30
35
RMS
pow
er d
istr
ibut
ion(µW
) @
200K
Ω
Time Frequency (Hz)
0.14G0.19G0.23G0.28G0.32G0.38G
• Performances : - 25µW/cm2 @ 0,24G 24,5Hz - 3Vrms - Q=24 - non-linear electromechanical
behavior
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Structure health monitoring (SHM)
Requirements for SHM energy harvester § High reliability
§ Embeddable within the structure § Long lifespan
§ Harsh environment compatible (T°, pressure, radiation, chemical) § Efficiency § High power density
§ Cost efficient
Aircraft applications Maintenance costs for airlines companies: 10b$
35% of them can be saved with embedded autonomous sensors.
Various types of sensors: acoustic, LRU, inertial.. Vibration frequencies: 50-150Hz.
Typical acceleration: 0,2 to 1G Constraints: flat design, robust, reliable, long
lifespan.
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General specifications: Vibration conditions
– Harvesting frequency range from 10 to 50Hz – 1G max acceleration
Geometry – Flat shape to be incorporated into a composite
sandwich layer thickness – Compatible with internal stress/strain
Detection capabilities and localization – Passive acoustic or LRU sensors for guided wave
processing – Other sensors
Autonomous acous+c sensor nodes
ASN for SHM
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• Heart as vibrational source – Direct conversion (external patches) – Hear motion (external or internal
capsules • Power output
– >10µW/cm2 continuous power output – Up to 2.5V voltage
• Quality standards & requirements – 20-25 years lifespan – Comply with ISO60601 standards on
active implantable medical devices • Biocompatibility • Electrical safety
“Conformal piezoelectric energy harvesting from motions of the heart, lung, and diaphragm” C. Dagdeviren
“Implantable vibrational low frequency energy harvester”, VERMON
Piezoelectric energy harvesters for medical
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modelling
Micromachining
Electronics
Integration
WSN
Sensing
Test & validation
Piezoelectric energy harvesting, a multi-disciplinary domain.
academic-industry synergy
Piezoelectric design
micro-machining
smart-integration
low power Electronics
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MEMS-based
Macro-Fab
Thin films Thin films Thick films Thinned bulk Chemical vapor
deposition Sputtering Sol-gel
Performances LF Energy harvesting cap. kHz range kHz range <100Hz 5-50Hz
Power density mid mid mid high Aging na na na qualif. in prog
Manufacturing capabilities bimorph difficult difficult average easy
WLP / PLP yes yes yes yes piezo thickness <1µm <3µm <10µm 10µm-50µm
Technology development Design adjustment level low low high high
Feasibility development cost >200k€ >200k€ <100k€ <50k€
Product industrialization >1M€ >1,5M€ >250k€ <250k€
Product cost / equipment cost Cost/Unit <5€ <5€ ? >20€
Quantity/wafer 160/ 6“wafer 160/ 6“wafer na na
Development cycle >2years >2years >1 year 6 months
Piezoelectric energy harvesters technology comparison
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Conclusions
Validated Competitive Performances (10-25µW/cm2) Low technology access investment High degree of flexibility
• Large choice of materials and dimensions • Application compatibility
An efficient way to fast prototyping and demonstrator validation
• Extended resonance frequency range (10Hz to 4KHz) • Low to medium volume compatible
Aging : > 10years lifespan Versatile (medical or industrial)
Perspectives High expectation market potential Stable & well-known principles Proven durability Room for new designs and optimizations High degree of customization
Still in development Non-linear behavior (medium term) Robustness in harsh environment (short term) Reliability (medium term)
On-going Research Programs (2015-2018) Smart-Memphis, H2020-GA644378 (2015-2016) Laureat-ANR-French National Agency for Research; ANR-14-CE17-0010
Contact: An Nguyen-Dinh [email protected] Phone: +33 247374278
VERMON, France
