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Main specifications
Work-table area
Run out
Mass of the machine
Stroke
Command resolution
Bearing type
Maximum feedrate
Straightness
Standard accessories
X axis (horizontal linear)
Z axis (horizontal linear)
Y axis (vertical linear)
B axis (horizontal rotation)
C axis (vertical rotation)
Hydrostatic air bearing (all axes)
X, Z, and Y axes
B and C axes
B and C axes
X and Z axes
Y axis
B axis
C axis
X axis
Z axis
Y axis
B and C axes
Approx. 1700 kg
Supplying cutting fluid unitTool holderCounter weightAngle platePrecision compressed air temperature control systemSpeed display
280mm
150mm
40mm
360°(continuous rotation)
1nm
0.000001°
Φ210mm
500mm/min
50mm/min
3600°/min
3600°/min
250min-1 (S axis mode)
0.2μm/280mm
0.2μm/150mm
0.2μm/40mm
0.05μm
X
Y
Z
C
B
280mm
150mm
40mm
• All specifications are subject to change without notice.• No part of this catalog maybe reproduced in any form.• The photo includes options.• The products in this catalog are controlled based on Japan's "Foreign Exchange and Foreign Trade Law". The export of ROBONANO α-0+B from Japan is subject to an export License by the government of Japan. Other models in this catalog may also be subject to export controls.Further, re-export to another country may be subject to the license of the government of the country from where the product is re-exported. Furthermore, the product may also be controlled by re-export regulations of the United States government.Should you wish to export or re-export these products, please contact FANUC for advice.
Headquarters Oshino-mura,Yamanashi 401-0597, Japan Phone:81-555-84-5555 Fax:81-555-84-5512 http://www.fanuc.co.jp
For particulars apply to the ROBONANO sales Dept. at Oshino-mura, Yamanashi 401-0597, Phone:81-555-84-5371 Fax:81-555-84-5545
© < CORPORATION, 2001
< CORPORATION
RNANO α-0+B(E)-10, 2014. 10, Printed in Japan
High-reliability and High-performanceUltra Precision nano machine
<ROBONANO @ +
2 3
High-reliability and High-performance Ultra Precision nano machine
High sustainability
Maintenance-free bearing
Disturbance prevention
High reliability
Usability
Auto machining origin setting
Measurement guidance
Superior operability
High performance of machining
Ultra precision on-machine measurement
Various machining options
Ultra precision nano machining
FANUC ROBONANO @ +
High performance of machiningLaminar air bearing for ultra precision nano machiningUltra precision on-machine measurement by NANOCHECKERVarious machining options supporting all types of nano machining
High sustainabilityFANUC standard CNC and servo motor realizing high reliabilityMechanical unit using non-contact air bearings for all axesSuperior functions for preventing disturbance
UsabilityRevolving door structure for superior operabilityAutomatic machining origin setting by tool contact detectionGuidance function for improving operability of on-machine measurement
2 3
High-reliability and High-performance Ultra Precision nano machine
High sustainability
Maintenance-free bearing
Disturbance prevention
High reliability
Usability
Auto machining origin setting
Measurement guidance
Superior operability
High performance of machining
Ultra precision on-machine measurement
Various machining options
Ultra precision nano machining
FANUC ROBONANO @ +
High performance of machiningLaminar air bearing for ultra precision nano machiningUltra precision on-machine measurement by NANOCHECKERVarious machining options supporting all types of nano machining
High sustainabilityFANUC standard CNC and servo motor realizing high reliabilityMechanical unit using non-contact air bearings for all axesSuperior functions for preventing disturbance
UsabilityRevolving door structure for superior operabilityAutomatic machining origin setting by tool contact detectionGuidance function for improving operability of on-machine measurement
●Hydrostatic air bearings are adopted for all axes, thereby solid friction is completely eliminated.
●The design of the piping has been optimized so that turbulent flow causing minute vibration does not occur.
Laminar air bearing for ultra precision nano machining
●NANOCHECKER enables the form of a workpiece to be measured and compensated on the machine without attaching or removing the workpiece.
●NANOCHECKER can measure not only symmetrical figure, but also complicated free figure.
●NANOCHECKER enables inclination measurement using rotary axes to measure a lens with an inclination of over 80 degrees with high precision.
Ultra precision on-machine measurement by NANOCHECKER
Various machining options supporting all types of nano machining
High performance of machining
Smooth flow
Small whirl = source of vibration
Laminar flow
Turbulent flow
-110° +110°
Fresnel lens mold Diffraction grating mold
Head-up display mold Machining to lithium niobate (optical waveguide)
Scribing (5-axis) Milling (5-axis) Turning
High-speed scribing
* The machining accuracy of each sample is not guaranteed because it depends on the machining condition, the material, the tool, and so on.
Material : NiP plateSize : φ40 mmPitch : 0.1 mmNumber of grooves : 200
Material : NiP plateSize : 50×50 mmPitch : 1μmV-angle : 90°Number of grooves : 50,000Machine time : 5.5hours
Material : NiP plateSize : 160×70mmSurface roughness : Ra 8nmCurvature radius : approx. R2m & R0.4m
Material : Lithium niobateWidth : 15μmDepth : 5μm
Variable groove angle
4 5
Specifications of NANOCHECKERMaximum measuring speed
Measuring stroke
Measuring resolution
Measuring force
500mm/min
5mm
1nm
0~500mgf
W56×D90×H56mm/0.4kg
3-axis: ±60°(Downward: 75°)
5-axis: ±90°
Setting direction
Size/mass
Bearing type
Maximum measuring angle
Horizontal, vertical
Hydrostatic air bearing
Measurement software(with CAD/CAM function)
15μm
The option unit can be attached to either of the B and C tables.
Example of setting 1 Example of setting 2
Workpiece
160mm
1μm50mm
80μm
±85-degree inclined spherical lens mold
±85°inclined
φ6mm Material: NiP plate
Diameter: 6 mm
Figure accuracy after compensationPV approx. 0.1μm
Measured angle [degrees]
Form error [μm]
●Hydrostatic air bearings are adopted for all axes, thereby solid friction is completely eliminated.
●The design of the piping has been optimized so that turbulent flow causing minute vibration does not occur.
Laminar air bearing for ultra precision nano machining
●NANOCHECKER enables the form of a workpiece to be measured and compensated on the machine without attaching or removing the workpiece.
●NANOCHECKER can measure not only symmetrical figure, but also complicated free figure.
●NANOCHECKER enables inclination measurement using rotary axes to measure a lens with an inclination of over 80 degrees with high precision.
Ultra precision on-machine measurement by NANOCHECKER
Various machining options supporting all types of nano machining
High performance of machining
Smooth flow
Small whirl = source of vibration
Laminar flow
Turbulent flow
-110° +110°
Fresnel lens mold Diffraction grating mold
Head-up display mold Machining to lithium niobate (optical waveguide)
Scribing (5-axis) Milling (5-axis) Turning
High-speed scribing
* The machining accuracy of each sample is not guaranteed because it depends on the machining condition, the material, the tool, and so on.
Material : NiP plateSize : φ40 mmPitch : 0.1 mmNumber of grooves : 200
Material : NiP plateSize : 50×50 mmPitch : 1μmV-angle : 90°Number of grooves : 50,000Machine time : 5.5hours
Material : NiP plateSize : 160×70mmSurface roughness : Ra 8nmCurvature radius : approx. R2m & R0.4m
Material : Lithium niobateWidth : 15μmDepth : 5μm
Variable groove angle
4 5
Specifications of NANOCHECKERMaximum measuring speed
Measuring stroke
Measuring resolution
Measuring force
500mm/min
5mm
1nm
0~500mgf
W56×D90×H56mm/0.4kg
3-axis: ±60°(Downward: 75°)
5-axis: ±90°
Setting direction
Size/mass
Bearing type
Maximum measuring angle
Horizontal, vertical
Hydrostatic air bearing
Measurement software(with CAD/CAM function)
15μm
The option unit can be attached to either of the B and C tables.
Example of setting 1 Example of setting 2
Workpiece
160mm
1μm50mm
80μm
±85-degree inclined spherical lens mold
±85°inclined
φ6mm Material: NiP plate
Diameter: 6 mm
Figure accuracy after compensationPV approx. 0.1μm
Measured angle [degrees]
Form error [μm]
6 7
●Linear motion units and rotary units are directly driven by linear motors and built-in servo motors.
●All axes with air bearings are controlled in the order of nanometers.
●Linear motion units follow 1-nm step motion commands exactly.●The effect of floor vibration is eliminated as much as possible by the active damper.
FANUC standard CNC and servo motor realizing high reliability
●Non-contact air bearings are used for all axes, so the mechanical unit has a long service life.
●The accuracy is kept without periodic maintenance.
●No cooling system for bearing is required, so the device size is compact.
●Air bearings are also used for machining options.
Mechanical unit using non-contact air bearings for all axes
Superior functions for preventing disturbance
High sustainability
1-nm step motion along a linear axis (X, Y, Z)
Ordinary rolling bearing Air bearing
Heat and vibration generated by friction of bearing
No heat or vibration generated by friction-free bearing
System specifications
Temperature control system
Air temperature control precision
Input power supply
Power consumption
Dimensions/mass
Peltier constant current control
Setting±0.01℃
100VAC±10% 50/60Hz
0.5kW
W320×D550×H510mm/38kg
Effect of precision compressed air temperature control (relative positions of the tool and workpiece)
Active damper
●The temperature of compressed air for air bearings is controlled precisely to realize long-time stable machining.
Precision compressed air temperature control system
Compressed airMoving part
Air gap
Fixed part
Linear axis (X, Y, Z)
Rotary axis (B, C)
<linear motor
<synchronous built-in servo motor
< Series 30+Frequency of floor vibration (Hz)
Damping rate (dB)
Damping all frequency
0 5 10 15 0 5 10 15[Hour] [Hour]
Temperature control OFF Temperature control ON
1μm 0.1μm or less
Time [sec]1nm/div
Fixed part
Moving part
6 7
●Linear motion units and rotary units are directly driven by linear motors and built-in servo motors.
●All axes with air bearings are controlled in the order of nanometers.
●Linear motion units follow 1-nm step motion commands exactly.●The effect of floor vibration is eliminated as much as possible by the active damper.
FANUC standard CNC and servo motor realizing high reliability
●Non-contact air bearings are used for all axes, so the mechanical unit has a long service life.
●The accuracy is kept without periodic maintenance.
●No cooling system for bearing is required, so the device size is compact.
●Air bearings are also used for machining options.
Mechanical unit using non-contact air bearings for all axes
Superior functions for preventing disturbance
High sustainability
1-nm step motion along a linear axis (X, Y, Z)
Ordinary rolling bearing Air bearing
Heat and vibration generated by friction of bearing
No heat or vibration generated by friction-free bearing
System specifications
Temperature control system
Air temperature control precision
Input power supply
Power consumption
Dimensions/mass
Peltier constant current control
Setting±0.01℃
100VAC±10% 50/60Hz
0.5kW
W320×D550×H510mm/38kg
Effect of precision compressed air temperature control (relative positions of the tool and workpiece)
Active damper
●The temperature of compressed air for air bearings is controlled precisely to realize long-time stable machining.
Precision compressed air temperature control system
Compressed airMoving part
Air gap
Fixed part
Linear axis (X, Y, Z)
Rotary axis (B, C)
<linear motor
<synchronous built-in servo motor
< Series 30+Frequency of floor vibration (Hz)
Damping rate (dB)
Damping all frequency
0 5 10 15 0 5 10 15[Hour] [Hour]
Temperature control OFF Temperature control ON
1μm 0.1μm or less
Time [sec]
1nm/div
Fixed part
Moving part
8 9
●During setup, you can turn the revolving door to access the work area from the right, left, and top. ●A tutorial guidance function is added to enable operator errors to decrease.
●Various types of software are integrated to improve usability.
●The relevant software is automatically started according to the target work.
Revolving door structure for superior operability
●This function detects the contact between the edge of a tool tip and the machining surface of the workpiece and automatically sets the origin of machining.
●Contact is detected by sensing a change in positional deviation occurring when a tool tip contacts with a workpiece.
●The detection accuracy is 0.5μm or less
Automatic machining origin setting by tool contact detection
Guidance function for improving operability of on-machine measurement
Usability
* The machining accuracy of each sample is not guaranteed because it depends on the machining condition, material, tool, and so on.
Material : NiP plateSize : 60×15mmFigure accuracy : PV 0.15μmSurface roughness : PV 11nm
Material : NiP plateSize : φ3 mmFigure accuracy : PV 52nmSurface roughness : Ra 1.3 nm
Material : NiP plateSize : φ3mmFigure accuracy : PV 70nmSurface roughness : Ra 1.8nm
Material : NiP plateSize : φ40mmNumber of lenses : 300Lens size : φ0.8mmFigure accuracy : PV 0.1μm
Lens array mold
Spherical lens mold Non-spherical lens mold
Asymmetrical free figure
Revolving door operation
Tool contact detectionChange in positional deviation at the moment of contact
Screen of NANOCHECKER software with the guidance function
Turned 180°
Revolving door
Contact
Positional deviation
Time
The tool goes up at the moment of contact.
Tool
Edge of a tool tip
Workpiece
Contact between the edge of a tool tip and the highest point on the workpiece
φ0.8mm
φ40mm
φ3mm φ3mm
R25mm
R25mm60mm
8 9
●During setup, you can turn the revolving door to access the work area from the right, left, and top. ●A tutorial guidance function is added to enable operator errors to decrease.
●Various types of software are integrated to improve usability.
●The relevant software is automatically started according to the target work.
Revolving door structure for superior operability
●This function detects the contact between the edge of a tool tip and the machining surface of the workpiece and automatically sets the origin of machining.
●Contact is detected by sensing a change in positional deviation occurring when a tool tip contacts with a workpiece.
●The detection accuracy is 0.5μm or less
Automatic machining origin setting by tool contact detection
Guidance function for improving operability of on-machine measurement
Usability
* The machining accuracy of each sample is not guaranteed because it depends on the machining condition, material, tool, and so on.
Material : NiP plateSize : 60×15mmFigure accuracy : PV 0.15μmSurface roughness : PV 11nm
Material : NiP plateSize : φ3 mmFigure accuracy : PV 52nmSurface roughness : Ra 1.3 nm
Material : NiP plateSize : φ3mmFigure accuracy : PV 70nmSurface roughness : Ra 1.8nm
Material : NiP plateSize : φ40mmNumber of lenses : 300Lens size : φ0.8mmFigure accuracy : PV 0.1μm
Lens array mold
Spherical lens mold Non-spherical lens mold
Asymmetrical free figure
Revolving door operation
Tool contact detectionChange in positional deviation at the moment of contact
Screen of NANOCHECKER software with the guidance function
Turned 180°
Revolving door
Contact
Positional deviation
Time
The tool goes up at the moment of contact.
Tool
Edge of a tool tip
Workpiece
Contact between the edge of a tool tip and the highest point on the workpiece
φ0.8mm
φ40mm
φ3mm φ3mm
R25mm
R25mm60mm
10 11
Installation condition
Environmental conditions
Specifications of machining options Outline drawing and floor plan
Turning air turbine spindle
Shuttle unit
Diameter of shaft table
Maximum speed
Dimensions/mass
Bearing type
Run out
Speed display function provided
●The balance can be corrected by two sides.●Fly cutting is also possible.
φ72mm
7,000min‒1
φ184×77mm/4.8kg
Hydrostatic air bearing
0.05μm (NRRO)
●To take full advantage of the performance of the machine, install the machine in the environment described below. For details, contact FANUC.
Maintenance and customer support
* Air supply is required not only during machine operation, but also in other times such as in the nighttime and on holidays.* The temperature of the input air must be managed so that it is equivalent to room temperature.* The above air flow rates were measured near the air supply port of the machine.* Equipment that exhausts mist in the machining area might separately be required.
Stroke
Horizontal drive speed
Vertical drive speed
Tool stroke
Dimensions/mass
Bearing type
●Unique reaction-free structure used.●Dots can be fabricated with peripheral devices. (Waveform signal generator, PLC, and oscilloscope separately required.)
Up to 190 mm
Up to 5 cycles/second
Up to 4.5 cycles/second
12μm
W382×D120×H142mm/6.7kg
Hydrostatic air bearing
Input power supply
Power source
Floor vibration amplitude
Ambient temperature
Temperature change
Relative humidity
200 to 220 VAC±10%, three phase, 50/60 Hz ±1 Hz
3kVA (10A)
0.1 μm or less (Acceleration: 0.1 Gal or less)
23℃
±1℃ or less of the above ambient temperature (30 minutes or less of cycle of change)
50% or less
Compressed air conditions
Input air pressure
Air pressure change
Air flow level
0.7 MPa or more
0.01 MPa or less
1.0m3/min or more
Tool
Workpiece
Tool
Workpiece
Milling air turbine spindle
Diameter of shank
Maximum speed
Dimensions/mass
Bearing type
Run out
Speed display function provided
●The balance can be corrected by two sides.
φ6mm
50,000min‒1
φ74×84mm/1.5kg
Hydrostatic air bearing
0.05μm (NRRO)Workpiece
Milling tool
FANUC takes responsibility for maintaining our products as long as customers use the products. Our experienced professional staff directly explains basic operations and gives practical training using your machine after delivery.
1380
(650)740
(1500)
550
300
1170
1500
1240
(500)
Machine part Mass:approx. 1700 kg Operator panel Mass:45 kg CNC cabinet Mass:125 kg
3000
3600
Ceiling height 2 m or more
10 11
Installation condition
Environmental conditions
Specifications of machining options Outline drawing and floor plan
Turning air turbine spindle
Shuttle unit
Diameter of shaft table
Maximum speed
Dimensions/mass
Bearing type
Run out
Speed display function provided
●The balance can be corrected by two sides.●Fly cutting is also possible.
φ72mm
7,000min‒1
φ184×77mm/4.8kg
Hydrostatic air bearing
0.05μm (NRRO)
●To take full advantage of the performance of the machine, install the machine in the environment described below. For details, contact FANUC.
Maintenance and customer support
* Air supply is required not only during machine operation, but also in other times such as in the nighttime and on holidays.* The temperature of the input air must be managed so that it is equivalent to room temperature.* The above air flow rates were measured near the air supply port of the machine.* Equipment that exhausts mist in the machining area might separately be required.
Stroke
Horizontal drive speed
Vertical drive speed
Tool stroke
Dimensions/mass
Bearing type
●Unique reaction-free structure used.●Dots can be fabricated with peripheral devices. (Waveform signal generator, PLC, and oscilloscope separately required.)
Up to 190 mm
Up to 5 cycles/second
Up to 4.5 cycles/second
12μm
W382×D120×H142mm/6.7kg
Hydrostatic air bearing
Input power supply
Power source
Floor vibration amplitude
Ambient temperature
Temperature change
Relative humidity
200 to 220 VAC±10%, three phase, 50/60 Hz ±1 Hz
3kVA (10A)
0.1 μm or less (Acceleration: 0.1 Gal or less)
23℃
±1℃ or less of the above ambient temperature (30 minutes or less of cycle of change)
50% or less
Compressed air conditions
Input air pressure
Air pressure change
Air flow level
0.7 MPa or more
0.01 MPa or less
1.0m3/min or more
Tool
Workpiece
Tool
Workpiece
Milling air turbine spindle
Diameter of shank
Maximum speed
Dimensions/mass
Bearing type
Run out
Speed display function provided
●The balance can be corrected by two sides.
φ6mm
50,000min‒1
φ74×84mm/1.5kg
Hydrostatic air bearing
0.05μm (NRRO)Workpiece
Milling tool
FANUC takes responsibility for maintaining our products as long as customers use the products. Our experienced professional staff directly explains basic operations and gives practical training using your machine after delivery.
1380
(650)740
(1500)
550
300
1170
1500
1240
(500)
Machine part Mass:approx. 1700 kg Operator panel Mass:45 kg CNC cabinet Mass:125 kg
3000
3600
Ceiling height 2 m or more
Main specifications
Work-table area
Run out
Mass of the machine
Stroke
Command resolution
Bearing type
Maximum feedrate
Straightness
Standard accessories
X axis (horizontal linear)
Z axis (horizontal linear)
Y axis (vertical linear)
B axis (horizontal rotation)
C axis (vertical rotation)
Hydrostatic air bearing (all axes)
X, Z, and Y axes
B and C axes
B and C axes
X and Z axes
Y axis
B axis
C axis
X axis
Z axis
Y axis
B and C axes
Approx. 1700 kg
Supplying cutting fluid unitTool holderCounter weightAngle platePrecision compressed air temperature control systemSpeed display
280mm
150mm
40mm
360°(continuous rotation)
1nm
0.000001°
Φ210mm
500mm/min
50mm/min
3600°/min
3600°/min
250min-1 (S axis mode)
0.2μm/280mm
0.2μm/150mm
0.2μm/40mm
0.05μm
X
Y
Z
C
B
280mm
150mm
40mm
• All specifications are subject to change without notice.• No part of this catalog maybe reproduced in any form.• The photo includes options.• The products in this catalog are controlled based on Japan's "Foreign Exchange and Foreign Trade Law". The export of ROBONANO α-0+B from Japan is subject to an export License by the government of Japan. Other models in this catalog may also be subject to export controls.Further, re-export to another country may be subject to the license of the government of the country from where the product is re-exported. Furthermore, the product may also be controlled by re-export regulations of the United States government.Should you wish to export or re-export these products, please contact FANUC for advice.
Headquarters Oshino-mura,Yamanashi 401-0597, Japan Phone:81-555-84-5555 Fax:81-555-84-5512 http://www.fanuc.co.jp
For particulars apply to the ROBONANO sales Dept. at Oshino-mura, Yamanashi 401-0597, Phone:81-555-84-5371 Fax:81-555-84-5545
© < CORPORATION, 2001
< CORPORATION
RNANO α-0+B(E)-10, 2014. 10, Printed in Japan
High-reliability and High-performanceUltra Precision nano machine
<ROBONANO @ +