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Grating Coupler Fabrication. acetone. CF 4. e -. PMMA. Si. SiO 2. Photonic Crystal Fabrication. CF 4. dilute aqua regia. SF 6. e -. PMMA. Mo. Si. SiO 2. Integrated Device. Grating Coupler Geometry. For λ = 1.55 µm, n e = 2.83, and θ = 45°, Λ = 730 nm . - PowerPoint PPT Presentation
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Grating Coupler Fabrication
PMMA
Si
SiO2
e-
CF4acetone
Photonic Crystal Fabrication
Si
SiO2
Mo PMMA
e-
CF4SF6dilute aqua regia
Integrated Device
Grating Coupler Geometry
Si
SiO2
θ
Λ
θenλΛsin
For λ = 1.55 µm, ne = 2.83, and θ = 45°, Λ = 730 nm.
Grating Coupler Characterization
PC Waveguide SEM
Integrated Device SEM
730 nm730 nm
360 nm360 nm426 nm426 nm
AFM of ~10 nm Grating
Coupling Efficiency of ~10 nm Grating
Coupling Efficiency of ~20 nm Grating