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High-reliability and high-performance ultra-precision diamond turning machine < ROBONANO @-NT+A

Hydrostatic oil bearing(XZB), ROBONANO @-NT A...Work-holding spindle realizing stable ultra-precision turning Maximum 4,000min-1 Maximum φ100mm, 5kg or less Vacuum FANUC aerostatic

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Page 1: Hydrostatic oil bearing(XZB), ROBONANO @-NT A...Work-holding spindle realizing stable ultra-precision turning Maximum 4,000min-1 Maximum φ100mm, 5kg or less Vacuum FANUC aerostatic

Main specifications

RNANO α-NTiA(E)-01, 2020.6, Printed in Japan2020

High-reliability and high-performanceultra-precision diamond turning machine

<ROBONANO @-NT+A

Work-holding spindle

Z

B(option)

XStroke

Bearing type

Command resolution

Work-table area

Maximum feed rate

Motion accuracy

Work-holding spindle

Mass of Workpiece

Size of Workpiece

Mass of the machine

Standard accessories

Option

X axis(horizontal linear) 200mm

Z axis(horizontal linear) 200mm

B axis(horizontal rotation) 360°

(continuous rotation)

Hydrostatic oil bearing(XZB),Aerostatic bearing(work-holding spindle)

X, Z axis 0.1nm

B axis(option) 0.000001°

B axis(option) Φ215mm

X, Z axis 1000mm/min

B axis(option) 3600°/min

X axis 0.2μm/200mm

Z axis 0.2μm/200mm

B axis(option) ±3 arcsec / 360°

Maximum rotation speed 4000min-1

Driving system FANUC built-in spindle motor

5kg or less

Maximum Φ100mm

Approx. 2800 kg(main body)

CNC cabinet, Hydraulic pump unit, Cutting fluid supply unit, Air temperature control unit, Active damper, Tool holder

B axis(rotary table), Smart M-Setup, Smart M-Form

•The content of this catalog describes the specifications as of Jun., 2020.•All specifications are subject to change without notice.•No part of this catalog may be reproduced in any form.•The photo includes options.•The products in this catalog are controlled based on Japan's "Foreign Exchange and Foreign Trade Law". The export of ROBONANO α-NTiA from Japan is subject to an export License by the government of Japan. Other models in this catalog may also be subject to export controls.Further, re-export to another country may be subject to the license of the government of the country from where the product is re-exported. Furthermore, the product may also be controlled by re-export regulations of the United States government.Should you wish to export or re-export these products, please contact FANUC for advice.

Oshino-mura, Yamanashi 401-0597, Japan Phone: 81-555-84-5555 Fax: 81-555-84-5512 http://www.fanuc.co.jp

Page 2: Hydrostatic oil bearing(XZB), ROBONANO @-NT A...Work-holding spindle realizing stable ultra-precision turning Maximum 4,000min-1 Maximum φ100mm, 5kg or less Vacuum FANUC aerostatic

< ROBONANO @-NT+A

High-reliability and high-performanceultra-precision diamond turning machine

Applying the latestFANUC CNC & servo

technology

High Performance of Machining

Ultra-precisionwork-holding spindle

0.1nm command

Non-contact bearing

Minimizing Downtime

Protectingwork-holding spindle

FANUC standardCNC & servo motor

Ease of Use

Smart M-Form

Conformity to safety standardsSimple parts change

Smart M-Setup

High Performance of MachiningHydrostatic oil bearing for stable ultra-precision machining

Ultra-precision turning with the work-holding spindle using aerostatic bearing

0.1nm command and control with FANUC CNC & servo technology

Minimizing DowntimeHigh reliability with FANUC standard CNC & servo motor

Various functions to protect high-speed rotating work-holding spindle

Simple and quick parts change in maintenance

Ease of UseSimple setup for machining using Smart M-Setup

Easy enhancement of machining form accuracy with on-machine measurement using Smart M-Form

Conformity to safety standards (CE and KCs marking)

2 3

Page 3: Hydrostatic oil bearing(XZB), ROBONANO @-NT A...Work-holding spindle realizing stable ultra-precision turning Maximum 4,000min-1 Maximum φ100mm, 5kg or less Vacuum FANUC aerostatic

< ROBONANO @-NT+A

High-reliability and high-performanceultra-precision diamond turning machine

Applying the latestFANUC CNC & servo

technology

High Performance of Machining

Ultra-precisionwork-holding spindle

0.1nm command

Non-contact bearing

Minimizing Downtime

Protectingwork-holding spindle

FANUC standardCNC & servo motor

Ease of Use

Smart M-Form

Conformity to safety standardsSimple parts change

Smart M-Setup

High Performance of MachiningHydrostatic oil bearing for stable ultra-precision machining

Ultra-precision turning with the work-holding spindle using aerostatic bearing

0.1nm command and control with FANUC CNC & servo technology

Minimizing DowntimeHigh reliability with FANUC standard CNC & servo motor

Various functions to protect high-speed rotating work-holding spindle

Simple and quick parts change in maintenance

Ease of UseSimple setup for machining using Smart M-Setup

Easy enhancement of machining form accuracy with on-machine measurement using Smart M-Form

Conformity to safety standards (CE and KCs marking)

2 3

Page 4: Hydrostatic oil bearing(XZB), ROBONANO @-NT A...Work-holding spindle realizing stable ultra-precision turning Maximum 4,000min-1 Maximum φ100mm, 5kg or less Vacuum FANUC aerostatic

Hydrostatic oil bearing

Moving part

Hydraulic oil

Fixed part

Workpiece

Cutting tool

Core for aspheric lens

Core for Fresnel lens

•Hydrostatic oil bearing with high rigidity and damping effect applied to linear and indexing axis

•Enhancing stability in machining with high rigidity that realize high feed rate and deep cutting depth with high damping effect that reduces vibration transferred from floor and motion

•FANUC original servo-controlled hydraulic pump unit with low heat generation and high stability

•Driven by the FANUC built-in spindle motor•High accuracy and reliability with FANUC aerostatic bearing•Clamping workpiece without distortion by vacuum chucking

•Applying 0.1nm command in machining program and ultra precision interpolation to ROBONANO with the latest technology of FANUC CNC & servo technology

•Enhancing surface roughness and quality of workpiece with 0.1nm command and control

High Performance of Machining

Suitable specifications for ultra-precision turning

•Suitable specifications for turning lens cores in several optical fields

•Realizing high accuracy and productivity for IT, automotive, and security fields

0.1nm command and control with FANUC CNC & servo technology

Hydrostatic oil bearing for stable ultra-precision machining

Work-holding spindle realizing stable ultra-precision turning

Maximum 4,000min-1

Maximum φ100mm, 5kg or less

Vacuum

FANUC aerostatic bearing

FANUC built-in spindle motor

Rotation speed

Size mass of workpiece

Clamping method

Bearing type

Driving system

Position feed back Machining profile

Hydraulic pump unit

Work-holding spindle

Work-holding spindle

Z

B(option)

X

・Optical lens core

・Turning

X200mm×Z200mm

Machining target

Machining method

Stroke

4 5

Page 5: Hydrostatic oil bearing(XZB), ROBONANO @-NT A...Work-holding spindle realizing stable ultra-precision turning Maximum 4,000min-1 Maximum φ100mm, 5kg or less Vacuum FANUC aerostatic

Hydrostatic oil bearing

Moving part

Hydraulic oil

Fixed part

Workpiece

Cutting tool

Core for aspheric lens

Core for Fresnel lens

•Hydrostatic oil bearing with high rigidity and damping effect applied to linear and indexing axis

•Enhancing stability in machining with high rigidity that realize high feed rate and deep cutting depth with high damping effect that reduces vibration transferred from floor and motion

•FANUC original servo-controlled hydraulic pump unit with low heat generation and high stability

•Driven by the FANUC built-in spindle motor•High accuracy and reliability with FANUC aerostatic bearing•Clamping workpiece without distortion by vacuum chucking

•Applying 0.1nm command in machining program and ultra precision interpolation to ROBONANO with the latest technology of FANUC CNC & servo technology

•Enhancing surface roughness and quality of workpiece with 0.1nm command and control

High Performance of Machining

Suitable specifications for ultra-precision turning

•Suitable specifications for turning lens cores in several optical fields

•Realizing high accuracy and productivity for IT, automotive, and security fields

0.1nm command and control with FANUC CNC & servo technology

Hydrostatic oil bearing for stable ultra-precision machining

Work-holding spindle realizing stable ultra-precision turning

Maximum 4,000min-1

Maximum φ100mm, 5kg or less

Vacuum

FANUC aerostatic bearing

FANUC built-in spindle motor

Rotation speed

Size mass of workpiece

Clamping method

Bearing type

Driving system

Position feed back Machining profile

Hydraulic pump unit

Work-holding spindle

Work-holding spindle

Z

B(option)

X

・Optical lens core

・Turning

X200mm×Z200mm

Machining target

Machining method

Stroke

4 5

Page 6: Hydrostatic oil bearing(XZB), ROBONANO @-NT A...Work-holding spindle realizing stable ultra-precision turning Maximum 4,000min-1 Maximum φ100mm, 5kg or less Vacuum FANUC aerostatic

Minimizing Downtime Ease of Use

•Adapting FANUC Series 30i-B with 15” Color LCD PANEL iH-Pro•Intuitive and operable interface by iHMI realizing easy operation on programming, setup

and machining•Linear motion units, rotary unit (option) and work-holding spindle directly driven by linear

motors, DD motor and built-in spindle motor

•Doors open left and right providing ample working space•Enhanced ease of use with 90 degrees pivoting operator panel

•Controlling heat generation of bearing with fine air temperature control system•Air tanks connected to bearing and vacuum chuck preventing sudden air leakage•Controlling heat displacement of spindle shaft with chilling motor, bearing, and mount of

spindle•Stopping spindle safely in the event of a power failure with power failure backup module•Stopping spindle safely when abnormal rotational vibration is detected by CNC monitors

High reliability with FANUC standard CNC and servo motor

High reliability while protecting work-holding spindle

•Operate and observe peripheral devices on ROBONANO operation screen•Enhance the ease of use by collecting peripheral devices on ROBONANO screen

Smart M-Setup(Option)

Structure enhancing workability and operability

FANUC Series 30+-B withPANEL +H-Pro and +HMI

Peltier constant current control

±0.01℃ (command)

AC200V±10% 50/60Hz

0.5kW

W320mm×D550mm×H510mm/38kg

Temperature control

Accuracy

Input power

Power consumption

Size/mass

Door closed(Automatic operation mode) Door open(Manual operation mode)

Machining originobservation screen

Microscope screen Micrometer screen Spindle balancing screen

Air temperature control system

Linear axis (X,Z) FANUC linear motor

Indexing axis (B) FANUC DD motor

Work-holding axis (C) FANUC built-in spindle  motor

6 7

Page 7: Hydrostatic oil bearing(XZB), ROBONANO @-NT A...Work-holding spindle realizing stable ultra-precision turning Maximum 4,000min-1 Maximum φ100mm, 5kg or less Vacuum FANUC aerostatic

Minimizing Downtime Ease of Use

•Adapting FANUC Series 30i-B with 15” Color LCD PANEL iH-Pro•Intuitive and operable interface by iHMI realizing easy operation on programming, setup

and machining•Linear motion units, rotary unit (option) and work-holding spindle directly driven by linear

motors, DD motor and built-in spindle motor

•Doors open left and right providing ample working space•Enhanced ease of use with 90 degrees pivoting operator panel

•Controlling heat generation of bearing with fine air temperature control system•Air tanks connected to bearing and vacuum chuck preventing sudden air leakage•Controlling heat displacement of spindle shaft with chilling motor, bearing, and mount of

spindle•Stopping spindle safely in the event of a power failure with power failure backup module•Stopping spindle safely when abnormal rotational vibration is detected by CNC monitors

High reliability with FANUC standard CNC and servo motor

High reliability while protecting work-holding spindle

•Operate and observe peripheral devices on ROBONANO operation screen•Enhance the ease of use by collecting peripheral devices on ROBONANO screen

Smart M-Setup(Option)

Structure enhancing workability and operability

FANUC Series 30+-B withPANEL +H-Pro and +HMI

Peltier constant current control

±0.01℃ (command)

AC200V±10% 50/60Hz

0.5kW

W320mm×D550mm×H510mm/38kg

Temperature control

Accuracy

Input power

Power consumption

Size/mass

Door closed(Automatic operation mode) Door open(Manual operation mode)

Machining originobservation screen

Microscope screen Micrometer screen Spindle balancing screen

Air temperature control system

Linear axis (X,Z) FANUC linear motor

Indexing axis (B) FANUC DD motor

Work-holding axis (C) FANUC built-in spindle  motor

6 7

Page 8: Hydrostatic oil bearing(XZB), ROBONANO @-NT A...Work-holding spindle realizing stable ultra-precision turning Maximum 4,000min-1 Maximum φ100mm, 5kg or less Vacuum FANUC aerostatic

Wide range of applications

•Realizing high accuracy and productivity in lens core for IT, automotive and security fields•Suitable for mirror finishing of watch bezel without polishing

•Compliant with approval standards for Europe and Korea

CE MarkingCE MarkingEU

KCs MarkKCs MarkKorea

Ease of Use

•Measuring form accuracy and compensation machining of the workpiece with Smart M-Form on the machine without other measuring devices.

•Measuring form accuracy of the workpiece by profile measurement after turning.•Measuring various optical lens shapes such as aspheric lens.

On-machine measurement function Smart M-Form (option) Supporting a wide range of machining fields requiring turning

Conformity to safety standards

IT, Security field

Automotive field

Flat core

Lens core

Material : Ni-P plateSize : Φ10mmRoughness : Ra0.5nmMachining time : 3min

Material : Ni-P plateSize : Φ10mmRoughness : Ra0.5 to 0.8nmMachining time : 7min

Fresnel lens core

Sensor lens coreF-θ lens core

Bezel

LED lens core

Lens core

Smart M-Form

Watch and decoration field

VR lens core

Flash core

1000mm/min or less

0.1nm

Approx. 0.5mN(50mgf)

±60°(downward 75°)

Horizontal

Measurement speed

Measurement resolution

Contact force

Measurable tilt angle

Mounting direction

Measurement software(with CAD/CAM function)

8 9

Page 9: Hydrostatic oil bearing(XZB), ROBONANO @-NT A...Work-holding spindle realizing stable ultra-precision turning Maximum 4,000min-1 Maximum φ100mm, 5kg or less Vacuum FANUC aerostatic

Wide range of applications

•Realizing high accuracy and productivity in lens core for IT, automotive and security fields•Suitable for mirror finishing of watch bezel without polishing

•Compliant with approval standards for Europe and Korea

CE MarkingCE MarkingEU

KCs MarkKCs MarkKorea

Ease of Use

•Measuring form accuracy and compensation machining of the workpiece with Smart M-Form on the machine without other measuring devices.

•Measuring form accuracy of the workpiece by profile measurement after turning.•Measuring various optical lens shapes such as aspheric lens.

On-machine measurement function Smart M-Form (option) Supporting a wide range of machining fields requiring turning

Conformity to safety standards

IT, Security field

Automotive field

Flat core

Lens core

Material : Ni-P plateSize : Φ10mmRoughness : Ra0.5nmMachining time : 3min

Material : Ni-P plateSize : Φ10mmRoughness : Ra0.5 to 0.8nmMachining time : 7min

Fresnel lens core

Sensor lens coreF-θ lens core

Bezel

LED lens core

Lens core

Smart M-Form

Watch and decoration field

VR lens core

Flash core

1000mm/min or less

0.1nm

Approx. 0.5mN(50mgf)

±60°(downward 75°)

Horizontal

Measurement speed

Measurement resolution

Contact force

Measurable tilt angle

Mounting direction

Measurement software(with CAD/CAM function)

8 9

Page 10: Hydrostatic oil bearing(XZB), ROBONANO @-NT A...Work-holding spindle realizing stable ultra-precision turning Maximum 4,000min-1 Maximum φ100mm, 5kg or less Vacuum FANUC aerostatic

Mist collectorHydraulic

pump

Chiller

Active damper controller

Cutting fluidsupply unit

CNC cabinet

Air temperature control unit

2.5m

4m

5m

※Mist collector, chiller is not included in ROBONANO

1.2m1.2m

1.0m

ROBONANO@-NT+A

ROBONANO@-NT+A

環境条件

Maintenance and Customer Support

FANUC operates customer service and support system anywhere in the world through subsidiaries, affiliates and distributor partners.FANUC provides the highest quality service with the quickest response at the location nearest you.

Installing Conditions Outer Dimensions and Floor Plan

•Install the machine in the environment described below for machine’s performance and reliability•For more details, please contact FANUC

Environmental conditions Outer dimensions

Floor plan(minimal temperature-controlled room size)

Worldwide Customer Support and Service

Main body mass:Approx. 2800kg CNC cabinet mass:Approx. 100kg

1700 1130

510

1600

1600

710

Unit:(mm)

Compressor

Air tank

FilterRegulator Valve

Air temperature control unit

(Standard accessory)

ROBONANO

Precision regulatorDrain

Oil separator

Prepared by ROBONANO user Temperature-controlled room

Compressed air conditions

•Air conditioning and air supply required during machine operation

•Recommend continuous air conditioning and air supply during non-work hours

•Air flow rates are measured near the air supply port of the machine

•For details, please contact FANUC

200 to 220 VAC±10%, 50/60Hz±1Hz

10kVA(30A)

0.1μm or less(Acceleration:0.1Gal or less) *Measurement and analysis of vibration required before install.

23℃

±1℃ or less of the above ambient temperature(30 minutes or less of cycle of change) *According to required machining accuracy.

50% or less

Input power supply(three phase)

Power source

Floor vibration amplitude

Ambient temperature

Temperature change

Relative humidity

0.7 MPa or more

0.01 MPa or less

1.0m3/min or more

15 to 28℃

Input air pressure

Air pressure change

Air flow level

Air temperature

Required conditions of spindle chiller

•Chiller necessary for driving spindle•Selecting chiller type with heat removal method

suitable for factory environment. from water, air, etc.•Using ISO VG2 spindle oil for refrigerant•For details, please contact FANUC

23℃±0.05(recommended)

1kW or more

Industrial multipurpose lubricating oil ISO VG2

5L/min or more

Accuracy in temperature control

Cooling capacity

Cooling oil

Pump capacity

・Built-in heater type recommended・Refrigerant reservoir tank recommended. (12L or more)

Headquarters

Coventry

ParisBarcelonaMilanBudapestSofiaBrusselsLinz

Bangalore

ChicagoDetroit

ChangwonTaichung

Johannesburg

Aguascalientas

Sao Paulo

LuxembourgStuttgartPragueIstanbulMoscowWroclawStockholmBielCelje

ManilaBangkokHo Chi MinhKuala LumpurSingaporeJakarta

Sydney

World Wide Support Over 260 Offices

BeijingShanghai

FANUC Global Service Network

10 11

Page 11: Hydrostatic oil bearing(XZB), ROBONANO @-NT A...Work-holding spindle realizing stable ultra-precision turning Maximum 4,000min-1 Maximum φ100mm, 5kg or less Vacuum FANUC aerostatic

Mist collectorHydraulic

pump

Chiller

Active damper controller

Cutting fluidsupply unit

CNC cabinet

Air temperature control unit

2.5m

4m

5m

※Mist collector, chiller is not included in ROBONANO

1.2m1.2m

1.0m

ROBONANO@-NT+A

ROBONANO@-NT+A

環境条件

Maintenance and Customer Support

FANUC operates customer service and support system anywhere in the world through subsidiaries, affiliates and distributor partners.FANUC provides the highest quality service with the quickest response at the location nearest you.

Installing Conditions Outer Dimensions and Floor Plan

•Install the machine in the environment described below for machine’s performance and reliability•For more details, please contact FANUC

Environmental conditions Outer dimensions

Floor plan(minimal temperature-controlled room size)

Worldwide Customer Support and Service

Main body mass:Approx. 2800kg CNC cabinet mass:Approx. 100kg

1700 1130

510

1600

1600

710

Unit:(mm)

Compressor

Air tank

FilterRegulator Valve

Air temperature control unit

(Standard accessory)

ROBONANO

Precision regulatorDrain

Oil separator

Prepared by ROBONANO user Temperature-controlled room

Compressed air conditions

•Air conditioning and air supply required during machine operation

•Recommend continuous air conditioning and air supply during non-work hours

•Air flow rates are measured near the air supply port of the machine

•For details, please contact FANUC

200 to 220 VAC±10%, 50/60Hz±1Hz

10kVA(30A)

0.1μm or less(Acceleration:0.1Gal or less) *Measurement and analysis of vibration required before install.

23℃

±1℃ or less of the above ambient temperature(30 minutes or less of cycle of change) *According to required machining accuracy.

50% or less

Input power supply(three phase)

Power source

Floor vibration amplitude

Ambient temperature

Temperature change

Relative humidity

0.7 MPa or more

0.01 MPa or less

1.0m3/min or more

15 to 28℃

Input air pressure

Air pressure change

Air flow level

Air temperature

Required conditions of spindle chiller

•Chiller necessary for driving spindle•Selecting chiller type with heat removal method

suitable for factory environment. from water, air, etc.•Using ISO VG2 spindle oil for refrigerant•For details, please contact FANUC

23℃±0.05(recommended)

1kW or more

Industrial multipurpose lubricating oil ISO VG2

5L/min or more

Accuracy in temperature control

Cooling capacity

Cooling oil

Pump capacity

・Built-in heater type recommended・Refrigerant reservoir tank recommended. (12L or more)

Headquarters

Coventry

ParisBarcelonaMilanBudapestSofiaBrusselsLinz

Bangalore

ChicagoDetroit

ChangwonTaichung

Johannesburg

Aguascalientas

Sao Paulo

LuxembourgStuttgartPragueIstanbulMoscowWroclawStockholmBielCelje

ManilaBangkokHo Chi MinhKuala LumpurSingaporeJakarta

Sydney

World Wide Support Over 260 Offices

BeijingShanghai

FANUC Global Service Network

10 11

Page 12: Hydrostatic oil bearing(XZB), ROBONANO @-NT A...Work-holding spindle realizing stable ultra-precision turning Maximum 4,000min-1 Maximum φ100mm, 5kg or less Vacuum FANUC aerostatic

Main specifications

RNANO α-NTiA(E)-01, 2020.6, Printed in Japan2020

High-reliability and high-performanceultra-precision diamond turning machine

<ROBONANO @-NT+A

Work-holding spindle

Z

B(option)

XStroke

Bearing type

Command resolution

Work-table area

Maximum feed rate

Motion accuracy

Work-holding spindle

Mass of Workpiece

Size of Workpiece

Mass of the machine

Standard accessories

Option

X axis(horizontal linear) 200mm

Z axis(horizontal linear) 200mm

B axis(horizontal rotation) 360°

(continuous rotation)

Hydrostatic oil bearing(XZB),Aerostatic bearing(work-holding spindle)

X, Z axis 0.1nm

B axis(option) 0.000001°

B axis(option) Φ215mm

X, Z axis 1000mm/min

B axis(option) 3600°/min

X axis 0.2μm/200mm

Z axis 0.2μm/200mm

B axis(option) ±3 arcsec / 360°

Maximum rotation speed 4000min-1

Driving system FANUC built-in spindle motor

5kg or less

Maximum Φ100mm

Approx. 2800 kg(main body)

CNC cabinet, Hydraulic pump unit, Cutting fluid supply unit, Air temperature control unit, Active damper, Tool holder

B axis(rotary table), Smart M-Setup, Smart M-Form

•The content of this catalog describes the specifications as of Jun., 2020.•All specifications are subject to change without notice.•No part of this catalog may be reproduced in any form.•The photo includes options.•The products in this catalog are controlled based on Japan's "Foreign Exchange and Foreign Trade Law". The export of ROBONANO α-NTiA from Japan is subject to an export License by the government of Japan. Other models in this catalog may also be subject to export controls.Further, re-export to another country may be subject to the license of the government of the country from where the product is re-exported. Furthermore, the product may also be controlled by re-export regulations of the United States government.Should you wish to export or re-export these products, please contact FANUC for advice.

Oshino-mura, Yamanashi 401-0597, Japan Phone: 81-555-84-5555 Fax: 81-555-84-5512 http://www.fanuc.co.jp