ICMAP 2014International Conference on Microelectronics and

Plasma Technology 2014

July 8-11, 2014, Gunsan, Korea

www.icmap2014.org

Organized by

The Korean Vacuum Society / ICMAP Organizing Committee

Table of Contents

ICMAP 2014 Sponsors 1

Welcome to ICMAP 2014 2

Welcome Message from the Program Chair 3

Organization 5

General Information 9- Registration

- Hotel Information

- Transportation

Social Events 11- Banquet

- Excursion

Conference Topics 12

Tutorial Sessions 14

Instruction for Presentation 16- Oral Presentation

- Poster Presentation

- Poster Presentation Student Awards

Submission of Manuscripts for Proceedings 17

Conference Site Map 19

Program-at-a-Glance 20

Tutorial Sessions 23

Plenary Sessions 27

Oral Sessions- July 08, 2014 (Tuesday) 31

- July 09, 2014 (Wednesday) 43

- July 10, 2014 (Thursday) 55

- July 11, 2014 (Friday) 65

Poster Sessions- July 08, 2014 (Tuesday) 71

- July 09, 2014 (Wednesday) 97

- July 10, 2014 (Thursday) 123

Author Index 145

1

ICMAP 2014International Conference on Microelectronics and

Plasma Technology 2014

July 8-11, 2014, Gunsan, Korea

Organizer- The Korean Vacuum Society/ ICMAP Organizing Committee

Supporters- Jeonbuk Province

- Gunsan City

- Kunsan National University

- Korean Federation of Science and Technology Societies

- Plasma Technology Research Center at National Fusion Research Institute

- Korea Multi-purpose Accelerator Complex at Korea Atomic Energy Research Institute

- Cheorwon Plasma Research Institute

- High Enthalpy Plasma Research Center of Chonbuk National University

- Chemical & Biological Detection Research Center

Sponsors

- ICD

- AVACO

- Edwards Korea

- Korea Vacuum Tech

- NEW WELL

2

Welcome to ICMAP 2014

On behalf of the organizing committee of the 5th International Conference on

Microelectronics and Plasma technology (ICMAP 2014), I am pleased to invite

you to this conference which is now taking place at Gunsan Saemangeum

Convention Center (GSCO), Gunsan, Republic of Korea.

The ICMAP 2014 continues a series of conferences began in 2008 to promote

a global exchange of information among scientists, technologists and manu-

factures. This years meeting is initiated for proving an open forum to discuss the current state of

the art perspective of scientific and technological achievements of the materials and plasma R&D

fields with an industrial importance currently and in the future including a special topic of plasma bio

applications such as medical and agricultural fields.

The extensive technical program of ICMAP 2014 comprises more than 518 presentations on

various topics from 11 countries, including 8 plenary lectures, 11 keynotes, and 59 invited talks to

be presented. Additionally, a tutorial session of 6 subjects is prepared for young scientists and

students. The submitted regular manuscripts will be published in journals, Journal of Nanoscience

and Nanotechnology (JNN, SCI), "Journal of Nanoelectronics and Optoelectronics" (JNO, SCIE),

"Science of Advanced Materials" (SAM, SCIE)" (American Scientific Publishers), and "Thin Sold

Films (TSF, SCI)" (Elsevier), after rigorous peer review.

A dedicated team of volunteers has devoted a significant amount of time over the past year to

make this meeting a success. I wish to acknowledge the great efforts of the members of the

international advisory committee, the organizing committee, and the program committee, and the

local committee for their invaluable assistances. I also acknowledge that this conference was

supported by the finance of many companies, institutes and centers, and local governments of

Jeonbuk province and Gunsan city to have made the conference successful.

It is my great pleasure to serve as the conference chair and work with the dedicated committee

members. I hope you have a great and happy time of learning and discovering advanced ideas,

initiating new friendship and collaborations, and having exciting cultural experiences in Gunsan

during the ICMAP 2014.

Myeun Kwon, Conference Chair

President, National Fusion Research Institute

3

Welcome Message from the Program Chair

The 5th International Conference on Microelectronics and Plasma Technology

(ICMAP 2014) is initiated for providing an open forum to discuss the current

state of the art perspective of scientific and technological achievements of the

plasma R&D fields with an industrial importance currently and in the future.

Since its beginning in 2008, ICMAP has become the premier conference in its

field. This conference seeks to bring the plasma community together, and to

create a forum for discussing the latest developments and identifying challenges ahead in the field

of plasma research and applications among the scientists worldwide. Following this tradition, the

ICMAP 2014 program continues to promote a truly global exchange of information among

scientists, technologists, and manufacturers. This conference addresses the current status ofa

variety of plasma and processing technologies related to semiconductor, display, and energy

conversion devices. Many of the subjects covered by submitted papers include newly developed

materials, processes, and integration technologies. For application of the materials and processing

technologies to those important devices in rapid development today, development of basic and new

plasma technologies is also essential for low-temperature and low-cost processing. In this respect,

technological convergences between different materials, processing, and device technologies and

between basic science and applied engineering are indispensably needed and would benefit the

communities related to the fields. Sharing of the research achievements in these interdisciplinary

fields would also benefit the scientific community in large.

The ICMAP 2014 consists of six sessions in total. The four sessions are (1) Materials and

Processing on Nano Devices; (2) Materials and Processing on Energy Conversion & Storage; (3)

Materials and Processing on Next Generation Displays; (4) High Enthalpy Plasma Science and

Technology. Additionally, two special sessions are prepared for the ICMAP 2014. The first special

session covers three different topics that are 1) Plasma Bioscience, Agriculture and Food; 2)

Industry special session: Wearable & Quantum Devices; and 3) Advanced Carbon Materials. The

second special session discusses Renewable Energy Photovoltaic.

The extensive technical program of ICMAP 2014 comprises more than 518 presentations from 11

countries, including plenary lectures, keynote lectures, and invited talks. For graduate students,

engineers,and technical staffs, a high quality tutorial session is also offered, which is aimed at

4

providing an opportunity to learn basic principles and processing technology including potential

industrial application in recently emerging technologies.

Finally, I would like to acknowledge the great efforts of all the committee members, presenters,

session chairs, paper reviewers, and all institutions and companies that offered support and

sponsorship to make this conference successful.

Wonho Choe, Scientific Program Committee Chair

Professor, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea

5

Organization

Honorary ChairChi Kyu Choi (Jeju National Univ., Korea)

Phone: + 82-63-440-4007Email: ckyu@jejunu.ac.kr

International Advisory Committee ChairJ. E. Greene (Univ. of Illinois at Urbana Champaign, USA)

Phone: + 1-307-734-8009Email: jegreene@uiuc.edu

Conference ChairMyeun Kwon(NFRI, Korea)

Phone: + 82-42-879-5000Email: kwonm@nfri.re.kr

Scientific Program Committee Chair Wonho Choe (KAIST, Korea)

Phone: + 82-42-350-2539Email: wchoe@kaist.ac.kr

International Organizing Committee ChairHong Young Chang (KAIST, Korea)

Phone: + 82-42-350-2526Email: hychang@kaist.ac.kr

Local Organizing Committee Chair Suk Jae Yoo (NFRI, Korea)

Phone: + 82-64-440-4001Email: sjyoo@nfri.re.kr

Executive Committee ChairGeun Young Yeom (Sungkyunkwan Univ., Korea)

Phone: + 82-31-290-7395Email: gyyeom@skku.edu

Publication Committee Chair Nae-Eung Lee (Sungkyunkwan Univ., Korea)

Phone: +82-31-290-7398Email: nelee@skku.edu

General Secretary Jung Hoon Joo(Kunsan National Univ., Korea)

Phone: + 82-63-469-4736Email: jhjoo@kunsan.ac.kr

Exhibits Chair and TreasurerHee Hwan Choe (Korea Aerospace Univ., Korea)

Phone: + 82-2-300-0141Email: choehh@kau.ac.kr

6

Organization

International Advisory CommitteeName Affiliation Country

J. E. Greene, Chair University of Illinois at Urbana-Champaign USA

Yong-Seok Hwang Seoul National University Korea

Joung Cho Kim Edwards Korea Ltd. Korea

Rod Boswell Australia National University Australia

Duk In Choi Kwangwoon University Korea

Han Sub Uhm Kwangwoon University Korea

Masaru Hori Nagoya University Japan

Osamu Takai Kanto Gakuin University Japan

ChengKang Wu Chinese Academy of Science China

Roger McWilliams University of California at Irvine USA

Chang-Jin Kang Samsung Electronics, Ltd Korea

Sang Hee Hong Seoul National University Korea

Sam Kyu Nor Korea Research Institute of Standards and Science Korea

You-Nian Wang Dalian University of Technology China

International Organizing CommitteeName Affiliation Country

Hong Young Chang, Chair Korea Advanced Institute of Science and Technology Korea

Heeyeop Chae Sungkyunkwan University Korea

Ki-Woong Whang Seoul National University Korea

Chul Joo Hwang Jusung Engineering Korea

Myeun Kwon National Fusion Research Institute Korea

Eun Ha Choi Kwangwoon University Korea

Jeon K. Han Sungkyunkwan University Korea

Yasuhiro Horike National Institute for Materials Science Japan

David B. Graves University of California Berkley USA

Bert Ellingboe Dublin City University Ireland

Hiroshi Fujiyama Nagasaki University Japan

Yuan-Hong Song Dalian University of Technology China

G. P. Li University of California Irvine USA

G. H. Rim KERI Korea

Seung Jeong Noh Dankook Univ. Korea

Z. Huang SIMTech Singapore

Harm Tolner Phillips Netherlands

Mau Chien Dang Vietnam National University - HoChiMinh City Vietnam

Ming-Show Wong National Dong Hwa University Taiwan

Denis Shamiryan IMEC Belgium

Jung-Joong Lee Seoul National University Korea

Larry F. Weber SID USA

Jin Hyo Boo Sungkyunkwan University Korea

7

Organization

Scientific Program CommitteeName Affiliation Country

Wonho Choe, Chair Korea Advanced Institute of Science and Technology Korea

Jae Sang Lee Korea Multi-Purpose Accelerator Complex Korea

C.G. Lee Sungkyunkwan University Korea

David Ruzic Univ. of Illinois at Urbana-Champaign USA

Lawrence J. Overzet Univ. of Texas at Dallas USA

Jonghyun Ahn Yonsei University Korea

Takayuki Watanabe Tokyo Institute of Technology Japan

T. H. Ahn Samsung Electronics Korea

Jongwon Shon Sungkyunkwan University Korea

Taeho Shin SEMES Korea

Gyungsoon Park Kwangwoon University Korea

K.S. Kim Kangwon University Korea

Seiji Samukawa Tohoku University Japan

Horng-Show(Frank) Koo Minghsin University of Science and Technology Taiwan

Y.H Phang Tech Semiconductor Singapore

W. Boullart IMEC Belgium

Bong Guen Hong Chonbuk National University Korea

Munpyo Hong Korea University Korea

Yong-Hoon Cho Korea Advanced Institute of Science and Technology Korea

Bo-yun Jang Korea Institute of Energy Research Korea

Publication CommitteeName Affiliation Country

Nae-Eung Lee, Chair Sungkyunkwan University Korea

Chin-Wook Chung Hanyang University Korea

Hyun Woo Kim Hanyang University Korea

Yi Kang Pu Tsinghua University China

Han-Ki Kim Kyunghee University Korea

Chee Won Chung Inha University Korea

Jiyoung Kim UT Dallas USA

Hyoung Sub Kim Sungkyunkwan University Korea

Tatsuo Ishijima Kanazawa University Japan

Heeyeop Chae Sungkyunkwan University Korea

In-Sung Park Hanyang University Korea

Jihyun Kim Korea University Korea

Yuichi Setsuhara Osaka University Japan

8

Organization

Local CommitteeName Affiliation Country

Suk Jae Yoo, Chair Plasma Technology Research Center, NFRI Korea

Junsin Yi Sungkyunkwan University Korea

Heon Ju Lee Jeju National University Korea

Kang-Man Lee Jeju National University Korea

Tae Hun Chung Donga University Korea

Byungyou Hong Sungkyunkwan University Korea

Gon Ho Kim Seoul National University Korea

C.H. Moon Hoseo University Korea

Hyungjun Kim Yonsei University Korea

SangHun Seo Korea Advanced Institute of Science and Technology Korea

Jung-Hee Lee Kyungpook National University Korea

Se Youn Moon Chonbuk National University Korea

Kiwon Kim Sun Moon University Korea

Executive CommitteeName Affiliation Country

Geun Young Yeom, Chair Sungkyunkwan University Korea

Hee Hwan Choe Korea Aerospace University Korea

Gichung Kwon Kwangwoon University Korea

Jae Sang Lee Korea Multi-Purpose Accelerator Complex Korea

Yong-Seok Hwang Seoul National University Korea

Yongmin Kim Dankook University Korea

Jong Su Kim Yeungnam University Korea

Il Ki Han Korea Institute of Science and Technology Korea

9

General Information

Registration

Registration Guide

All participants must pay the registration fee. The regular registration fee includes admittance to all technical sessions, one copy of the program book. The student registration fee includes admittance to technical sessions and a copy of the program book. Registrants can access e-Proceedings on the conference website. Online registration with credit cards will be available through the homepage (http://www.icmap2014.org). For those who wish to register on-site, credit cards and cash in local currency (KRW; Korean Won) will be accepted.

If you register, you can attend the tutorial session I or II. (The tutorial book fee is KRW10,000.)

Registration Fees

Events Classification Pre-registration(On and before June 13)On-site registration

(After June 13)

Regular SessionsRegular KRW 600,000 KRW 660,000

Student / Retiree KRW 300,000 KRW 360,000

Regular Sessionsplus Industry Special Session

Regular KRW 700,000 KRW 760,000

Student / Retiree KRW 400,000 KRW 460,000

Industry Special Session OnlyRegular

KRW 300,000 KRW 360,000 Student / Retiree

TutorialTutorial I KRW 10,000 (Tutorial Book Fee)

Tutorial II KRW 10,000 (Tutorial Book Fee)

Banquet Optional KRW 50,000

Excursion Optional KRW 10,000

* Inclusion of VAT* Industry Special Session: Wearable & Quantum Devices* The banquet fee is not included in the registration fee.* Including JNN, JNO, TSF and SAM, one manuscript submission per registration (regular or student) will be allowed.For student manuscript submission, at least one of the authors needs to be a regular registrant of the conference.* The registration fee does not include the publication charge. The accepted manuscript will be published in the journals with a

fee of about KRW 250,000 per manuscript or about $90/journal page.(The exact fee will be notified later.)

Registration at the conferenceCash and credit card will be accepted. The registration fee includes refreshment breaks, conference abstract book and materials. Registration and general information are available at the registration desk. The following dates and times are the schedule for registration.

July 7 Monday 12:00-18:00

July 8 - 10 Tuesday - Thursday 08:30-18:00

July 11 Friday 08:30-11:00

Exchange rates for Korean Won(KRW) are subjected to change and approximately :1,050 KRW=1USD, 1,500 KRW=1EURO, 10 KRW=1Yen

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General Information

Hotel Information

Gunsan Saemangeum Convention Center (GSCO)http://gsco.kr

Phone: +82-63-468-1880

Address: 437, Saemangeumbuk-ro, Gunsan-si, Jeollabuk-do, Korea

Best Western Kunsan Hotel (Main Hotel - First Class)www.gunsanhotel.co.kr/eng

Phone: +82-63-469-1234

Address: 435, Saemangeumbuk-ro, Gunsan-si, Jeollabuk-do, Korea

Ritz Plaza Hotel (Sub Hotel - First Class)www.ritzplaza.co.kr

Phone: +82-63-468-4681

Address: 1195-49, Nawoon-dong, Gunsan-si, Jeollabuk-do, Korea

Apple Tree Hotel (Sub Hotel - Business Hotel)www.appletreehotels.com/gunsan

Phone: +82-63-734-1234

Address: 899, Osikdo-dong, Gunsan-si, Jeollabuk-do, Korea

Transportation

Limousine bus Schedule at Gunsan Intercity Bus Terminal to Incheon Intl Airport

Route Name Bus Type Station Bus Stop No.

Time line ofdeparting

Buses

Travelling Time Fare

Incheon Interanational Airport (ICN)

Limousine Gunsan > ICN -04:10, 05:10, 07:10, 09:10, 12:10, 14:30

200 min. KRW 23,700

Incheon Interanational Airport (ICN)

Limousine Gunsan > Songdo > ICN -03:00, 06:10, 08:10, 10:10, 13:30, 15:30

200 min. KRW 23,700

(You may prepare the bus fare in Korean Won or purchase the bus ticket in advance.)

* Bus reservation: www.busterminal.or.kr/

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Social Events

Banquet

Banquet will be held on July 9 (Wednesday) at 7:00 PM in the Convention Center. The banquet fee is not included in the registration fee, so those who want to attend the banquet are advised to purchase the ticket in advance.

Excursion

Date & Time: Friday, July 11, 12:30 18:00 Place: Jeonju Hanok Village [Slow City] Price: KRW 10,000 Itinerary:

- 12:30 : Gathering at Gunsan Saemangeum Convention Center- 12:30-13:30 : Move to Jeonju Hanok Village- 13:30-18:00 : Sightseeing freely

- 18:00 : Move to Jeonju KTX Station / Jeonju Bus Terminal/ Gunsan Saemangeum Convention Center

Jeonju Hanok Village [Slow City]Jeonju Hanok Village is located in the city of Jeonju and overlaps Pungnam-dong and Gyo-dong. There are over 800 traditional Korean hanok houses. While the rest of city has been industrialized, Hanok Maeul retains its historical charms and traditions.

Jeonju Hanok village is especially beautiful for its roof curves. The roof edges being slightly raised to the sky is

unique. Hanok houses are generally divided into two sections, Anchae and Sarangchae. Anchae is also known as Gyusu room, and is furnished accordingly. Sarangchae is where the men dwell, and is referred to as the Seonbi room. Because men and women have to remain separate, Anchae is situated deep inside the house so that it is secretive and quiet.

Another trait of Hanok is that all the houses are heated with the ondol system, a unique sub-flooring heating system. Since Koreans enjoy sitting, eating, and sleeping on the floor, it needs to remain heated. A part of Hanok has been set aside so that tourists can experience traditional Korean life, called Hanok Life Experience Hall. You can enter the Seonbi room and the Gyusu room to experience the warm floor first-hand. An advantage of this system is that it is warm in the winter and cool in the summer.

The food provided is very traditional, which adds to the traditional ambience. At Jeonju Hanok Village, visitors can enjoy traditional Korean life and traditional foods like bibimbap, the most well known dish from the Jeonju region. And also can enjoy variety of foods and snacks selling on the street at a low price.

English Interpretation Services Offered: Every day at 2 and 4 p.m. in front of Gyunggi Palace Korean Interpretation Services Offered: Friday at 2 p.m. in front of Omokdae Tourist Information Center

12

Conference Topics

ACM Advanced Carbon MaterialsSession Organizer: Hun-Su Lee, KIST

Advanced Materials of Wearable Device/Solar Cell by using Electrospinning

Interface Treatment and Functionalize for Filler of Composite Graphene/CNT Materials

Mechanical Properties on Carbon Fiber Fabric by Plasma treatment

Plasma Ion Implantation

APT Advanced Plasma Technology Session Organizer: Prof. Jung Hoon Joo, Kunsan National University

HEP High Enthalpy Plasma Science and TechnologySession Organizer: Prof. Bong Guen Hong, Chonbuk National University

Thermal plasma diagnostics and control

Thermal plasma technology

Materials by thermal plasma

Characterization of thermal plasma: numerical analysis and diagnostics

IS-QD Industry special session: Quantum Dots

IS-WD Industry special session: Wearable DeviceSession Organizer: Dr. HyunSik Myung, BizOcean Co., Ltd

Industry & Market Trend

Flexible, Energy Harvesting and Sensor Technology for Wearable Device Applications

Materials and Processes for Quantum Dot Display

Cd-free and Blue Emitting Quantum Dot

Graphene Quantum Dot

MP-ECS Materials and Processing on Energy Conversion & StorageSession Organizer: Dr. Bo-Yun Jang, KIER

Solar cell technologies

Secondary battery technologies

Fuel cell technologies

Energy harvesting technologies

New materials and processing for energy conversion and storage

13

Conference Topics

MP-ND Materials and Processing on Nano Devices Session Organizer: Prof. Yong-Hoon Cho, KAIST

Nano-Graphene

2-D materials for nano-devices

Nanolithography/Fabrication

Plasma processing technology for nano-scale devices

Plasma nano engineering

MP-NGD Materials and Processing on Next Generation DisplaysSession Organizer: Prof. Munpyo Hong, Korea University

Materials and processes for next generation display (flexible display, OLED TV, Over UHD LCD, etc)

Plasma processing and equipment for display devices (OLED, LCD, PDP technology)

Materials and processes for oxide and new semiconductor thin film

Plasma applications for display technology

PBAF Plasma Bioscience, Agriculture and FoodSession Organizer: Prof. Eun Ha Choi, Kwangwoon University

Plasma Biosciences and Medicine

Plasma Biomaterials and Films

Plasma Agriculture and Food

Nonthermal Bioplasma Sources and Diagnostics

Plasma Bio-Nano Materials and Scaffolds

Lab-on-a-Chip, MEMS & NEMS, Micro- & Nano-Fluidics

SS-REP Renewable Energy PhotovoltaicSession Organizer: Prof. Junsin Yi, Sungkyunkwan University

Photovoltaic Materials

Photovoltaic Devices and Processes

Photovoltaic Optics and Designs

Advanced Concepts in Photovoltaics

14

Tutorial Sessions

Session Chair: Prof. Jung Hoon Joo (Kunsan National Univ., Korea)

Tutorial I

July 7 (Mon), 13:00-17:00J. E. Greene (Univ. of Illinois at Urbana-Champaign, USA)

Sputter Deposition

Films are deposited by sputtering for their useful properties in microelectronics, surface protection, optics, etc., by a variety of sputtering techniques. The film properties depend on the parameters of the sputtering system, such as pressure and substrate bias. This course provides an understanding of the cause and effect of changes in sputtering parameters on the energetics of the sputtering and deposition processes. The energy and spatial distribution of species ejected from the target are discussed. The effect of the sputtering system on material transport to the substrate and subsequent film deposition is also discussed for films of metals, alloys, and compounds. The parameters of different sputtering systems (diode, triode, magnetron, and HiPIMS) operated with DC, AC, and RF power supplies are discussed. Target configurations (planar, sputter-guns, rotating cylindrical) will be discussed leading to strategies for optimizing large-area deposition and high-rate sputtering of magnetic targets. The advantages and disadvantages of these different modes of operation and how they affect film properties will be examined. Emphasis will be placed on developing a sufficient understanding of sputter deposition to provide direction in designing new processes. Present and future trends in sputter deposition will also be addressed.

Tutorial II

July 7 (Mon), 13:00-14:00Hojun Kim (Samsung Electronics, Korea / Lecture will be delivered in Korean.)

Numerical Simulation of Semiconductor Fabrication System

Numerical methodology to design and modify the semiconductor fabrication system will be presented. This course will explain the mathematical reasons why convection and diffusion of scalar fields should be carefully resolved in the reactive flows and plasma simulation. And also a state-of-art numerical scheme named as "Spectral Element Method (SEM)" will be briefly introduced. SEM is one of most suitable schemes to simulate discharge physics and minimize artificial diffusion in the reactive flow problems due to its spectral accuracy. Some application examples of numerical results will be provided. This course will explain why we need to consider not only the detailed flow feature but also complex discharge physics in order to obtain accurate numerical results of plasma discharge.

15

Tutorial Sessions

July 7 (Mon), 14:00-16:00Sang Hun Seo (KAIST, Korea / Lecture will be delivered in Korean.)

RF Technology for Plasma Generation & Control

July 7 (Mon), 16:00-17:00Rod Boswell (Australia National Univ., Australia)

Plasma Sources

The basic physics of RF matching networks connected to symmetric and asymmetric capacitively coupled plasmas connected to RF matching networks will be presented. How different frequency driving RF change the plasma density and self bias will be investigated. Finally, inductive coupling will be discussed.

July 7 (Mon), 17:00-18:00David Ruzic (Univ. of Illinois at Urbana Champaign, USA)

Plasma Diagnostics

This course will explain how to use Langmuir and other Electric Probes to measure the electron temperature, plasma density, and electric potentials of processing plasmas. The course will briefly describe the theory, and then delve into practical examples and practical designs. Specialized cases, such as electronegative plasmas, deposition environments, and reactive gasses will also be considered. By the end of the course the student should be able to build, operate, and analyze the results from a simple Langmuir Probe.

July 7 (Mon), 18:00-19:00Masaru Hori (Nagoya Univ. Japan)

Optical method for radical density measurement

This tutorial lecture will briefly explain the background of plasma diagnostics and then focus on the optical method for radical density measurement in the plasma processing.This lecture will describe the principle of optical methods for the measurement of radical density, such as actinometric optical emission spectroscopy, absorption spectroscopy, laser induced fluorescence and so on.Especially, in order to deepen the fundamental knowledge towards applications in the plasma processing, this lecture will show participants several examples how to use the measurement equipment and analyze the results from optical methods in practical plasma processes of etching, deposition and surface modification in low pressure and atmospheric pressure plasmas.

16

Instruction for Presentation

First of all, we would like to welcome all of you to ICMAP 2014, Gunsan, Korea. Thank you for presenting your studies in the conference. To make sure that all sessions run smoothly, we provide the following brief guidelines for all authors to follow:

Oral Presentation Sessions Please try to arrive at the meeting room of your presentation session at least 20 minutes before

the start of the session. - Please upload your PowerPoint file onto the computer for presentation and make sure that your

file runs appropriately. - Please introduce yourself to your session chair so that the session chair will know who is

presenting the paper. Each oral presentation is allocated 15 minutes including Q & A. Time management is VERY critical because people may switch between sessions for presentations

that they are interested in.

Poster Sessions There are three poster sessions and 2 hour is allocated for each poster session. Please try to arrive at the meeting area of your poster session at least 20 minutes before the start

of the session. Please post your posters on the poster board designated to you. During your poster session, please be around the poster board designated to you in order to

interact with participants who are interested in your study. After your poster session, please help remove your posters from the board so that the author(s)

of the next poster session can put their posters on the board. Drawing pins will be supplied to mount posters. It is advisable to present the poster in a clear

and legible format. The poster board size at the meeting is "95cm x 150cm"

Poster Session Student AwardsStudent awards application is available for the graduate students who present the papers by poster. Several students will be selected and awarded after the presentation. Poster presenters who want to be a candidate for the poster presentation award should put a tag of Candidate for Poster Presentation Award on the right upper corner of their poster board. If you want to apply for Student Poster Presentation Award, tell the registration desk.

The AWARDS will be given at the Closing Ceremony at 12:00 on July 11.

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Submission of Manuscripts for Proceedings

The submitted regular manuscripts will be published in the journals, Journal of Nanoscience and

Nanotechnology (JNN, SCI), Journal of Nanoelectronics and Optoelectronics (JNO, SCIE),

Science of Advanced Materials (SAM, SCIE) (American Scientific Publishers) and Thin Sold

Films (TSF, SCI) (Elsevier) after peer reviews.

In order to be included in the journals, at least one of the authors should register in the conference

and make a presentation in the assigned session.

The manuscripts should be prepared in MS-Word format. There is no journal page limit (But, more

than 3 pages of Results and Discussion in the full journal paper submission format are required).

For all journals, one manuscript submission per registration (regular or student) will be allowed. For

student manuscript submission, at least one of the authors needs to be a regular registrant of the

conference.

The registration fee does not include the publication charge. The accepted manuscript will be

published in the journals with a fee of about KRW 250,000 per manuscript for TSF and about

90$/page for JNN, JNO, and SAM. (The exact fee will be notified later.)

All the information about the ICMAP 2014 proceedings is available on the official website at

http://icmap2014.org.

Manuscript Presentation Guide

- TSF http://www.elsevier.com/journals/thin-solid-films/0040-6090/guide-for-authors

- JNN http://www.aspbs.com/jnn/inst-auth_jnn.htm

- JNO http://www.aspbs.com/jno/jno_instructions.htm

- SAM http://www.aspbs.com/sam/inst-auth_sam.htm

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Submission of Manuscripts for Proceedings

For further information about the submission and publication of the proceedings, please contact

the following addresses:

Thin Solid Films (TSF)

Prof. Nae-Eung Lee

Sungkyunkwan Univ., Korea

Phone: +82-31-290-7398

Email: nelee@skku.edu

Journal of Nanoscience and Nanotechnology (JNN)

Prof. Geun Young Yeom (Sungkyunkwan Univ., Korea)

Sungkyunkwan Univ., Korea

Phone: + 82-31-290-7395

Email: gyyeom@skku.edu

Journal of Nanoelectronics and Optoelectronics (JNO)

Dr. Suk Jae Yoo

NFRI, Korea

Phone: + 82-64-440-4001

Email: sjyoo@nfri.re.kr

Science of Advanced Materials (SAM)

Prof. Hee Hwan Choe

Korea Aerospace Univ., Korea

Phone: + 82-2-300-0141

Email: choehh@kau.ac.kr

The Korean Vacuum Society

Daejong Building 710, Teheran-ro,

Samsung-dong, Gangnam-gu 143-48, Seoul, Korea

Tel: +82-2-567-9486

Fax: +82-2-556-5675

Email: kvs@kvs.or.kr

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Conference Site Map

Registration

Convention Hall 1 Convention Hall 2

Lobby

1st Floor

2nd Floor

Exhibition

20

Program-at-a-Glance

21

Program-at-a-Glance

Tutorial Sessions

25

Program Schedule

Tutorial Session

- Session Chair: Prof. Jung Hoon Joo (Kunsan National Univ., Korea)

- Date: July 7 (Mon)

Tutorial I #203

13:00-17:00 Sputter DepositionJ. E. Greene (Univ. of Illinois at Urbana-Champaign, USA)

Tutorial II #208

13:00-14:00 Numerical simulation of semiconductor fabrication systemHo Jun Kim (Samsung Electronics, Korea / Lecture will be delivered in Korean.)

14:00-15:00 Optical method for radical density measurementMasaru Hori (Nagoya Univ. Japan)

15:00-17:00 RF technology for plasma generation & controlSang Hun Seo (KAIST, Korea / Lecture will be delivered in Korean.)

17:00-18:00 Plasma sourcesRod Boswell (Australia National Univ., Australia)

18:00-19:00 Plasma diagnosticsDavid Ruzic (Univ. of Illinois at Urbana Champaign, USA)

Plenary Sessions

29

Plenary Sessions

July 08, 2014 (Tuesday) Convention 1

PL-1 [11:10-12:00]

Plasma Life Sciences: Present and Future Masaharu Shiratani (Kyushu University, Japan)

PL-2 [14:00-14:50]

Key Challenges of Dry Etching Technology for Beyond 20nm Simiconductor Device Era Dongchan Kim (Samsung Electronics, Korea)

July 09, 2014 (Wednesday) Convention 1

PL-3 [11:10-12:00]

Amorphous Oxide Thin Film Transistors for Displays and Imaging Arokia Nathan (Cambridge University, United Kingdom)

PL-4 [14:00-14:50]

Tracing the 5000-year recorded history of thin film science Joe Greene (University of Illinois, United States)

PL-5 [18:00-18:50]

Fabrication of Three Dimensional Micro-Battery by Using Printing Technology Kiyoshi Kanamura (Tokyo Metropolitan Univ., Japan)

30

July 10, 2014 (Thursday) Convention 1

PL-6 [11:10-12:00]

Nanogenerators for Self-Powered Systems and Piezotronics for Functional Devices Zhong Lin Wang (Georgia Institute of Technology,United States)

PL-7 [14:00-14:50]

Thermal Plasma Processing for Environmental Application Takayuki Watanabe (Kyushu University Japan)

PL-8 [18:00-18:50]

In Situ Diagnostics of Properties of Plasma CVD Si Films for Improving Si Thin Film Photovoltaics Shota Nunomura (National Institute of Advanced Industrial Science and Technology, Japan)

31

Oral Sessions

July 08, 2014 (Tuesday)

32

33

Oral Sessions

July 08, 2014 (Tuesday) MP-ND-TuM Materials and Processing on Nano Devices Moderator: Prof. Jong Soo Kim, Yeungnam Univ., Korea

Time: 09:00-11:00 Room: Convention 1

MP-ND-TuM-1 [09:00-09:40]

[Keynote] Improvement in the Grain Growth of Plasma-Treated Nano-Sized ZnO Films and Their Characterization Mi Chen, Ching-Chuan Chou, Ching-Cheng Lin, and Horng-Show Koo (Minghsin University of Science and Technology, Taiwan)

MP-ND-TuM-2 [09:40-10:10]

[Invited] Plasma Cryoetching Processes for Silicon and Advanced Materials Liping Zhang, Jean-Francois de Marneffe, Mikhail Baklanov (IMEC, Belgium), Remi Dussart, Thomas Tillocher, Nicolas Gosset, Alexane Vital, Philippe Lefaucheux, Rami L'jazouli (University of Orleans / CNRS, France), Mohamed Boufnichel (STMicroelectronics, France), Marylene Vayer, Christophe Sinturel (University of Orleans/CNRS, France), Eiichi Nishimura, Koichi Yatsuda (Tokyo Electron, Japan), and Kaoru Maekawa (Tokyo Electron, United States)

MP-ND-TuM-3 [10:10-10:25]

Dilute Gas Effect on the Spatial Thickness Profiles Change of PECVD SiO2 FilmSeung Moo Lee (Samsung Electronics Co, Korea), and Seung Moo Lee (Ltd., Korea)

MP-ND-TuM-4 [10:25-10:40]

Atomic Layer Etching of Silicon and Silicon Dioxide Under Pulsed RF Substrate Bias Saiqian Zhang, Zhongling Dai, Jun Yan, and Younian Wang (Dalian University of Technology, China)

34

MP-ND-TuM-5 [10:40-10:55]

A study on the characteristics of Hydrogenated amorphous carbon (a-C:H) film prepared by Asymmetry Bipolar Multi-step Pulsed Power Sputtering (ABMPPS)TAEHWAN KIM, Ho Jun Lee (Pusan National University, Korea), Dae Chul Kim, Yonghyun Kim, Young-Woo Kim (National Fusion Research Institute, Korea), and Seunghee Han (Korea Institute of Science and Technology, Korea)

MP-NGD-TuM Materials and Processing on Next Generation Displays Moderators: Prof. David Ruzic, University of Illinois at Urbana Champaign, USA Moderators: Prof. Geun Young Yeom, Sungkyunkwan Univ., Korea

Time: 09:00-11:00 Room: #201

MP-NGD-TuM-1 [09:00-09:40]

[Keynote] Electromagnetic Effects in Very High Frequency CCP for Low Pressure Discharges Yongxin Liu, Fei Gao, Jia Liu, and Younian Wang (Dalian University of Technology, China)

MP-NGD-TuM-2 [09:40-10:10]

[Invited] PVD-Quality Coatings With Atmospheric-Pressure Plasma Processing YuiLin Wu (University of Illinois at Urbana-Champaign, United States), Zihao Ouyang (LAM Research, United States), Ivan Shchelkanov (University of Illinois at Urbana-Champaign, United States), Tae Cho (Applied Materials, United States), and David Ruzic (University of Illinois at Urbana-Champaign, United States)

MP-NGD-TuM-3 [10:10-10:25]

Determination of Effective Electron Temperature and Electron Energy Distribution Shape by Floating Harmonics Method in Non-Maxwellian PlasmasSung-Ryul Huh, Nam-Kyun Kim, Myung-Sun Choi, and Gon-Ho Kim (Seoul National University, Korea)

35

MP-NGD-TuM-4 [10:25-10:40]

Micro/nano structure fabrication using near-atmospheric pressure plasma for inkjet patterning Mukyeom Mun (Sungkyunkwan University, Korea), and Geun Young Yeom (Department of Materials Science and Engineering_ Sungkyunkwan University_ Suwon_ Gyeonggi-do 440-746_ South Korea, Korea)

MP-NGD-TuM-5 [10:40-10:55]

Tailoring Ion Energy Distributions in Dual Frequency ICP Discharges Anurag Mishra, Tae Hyung Kim, and Geun Young Yeom (Sungkyunkwan University, Korea)

MP-NGD-TuM-6 [10:55-11:10]

Sensitivity Test for Chamber to Chamber Match of Cl2-Cr Etcher Using OES-Plasma Monitoring Method Seolhye Park, Hyun-Joon Roh (Seoul National University, Korea), Sangmin Jeong (Seoul National University/Samsung Electronics, Korea), and Gon-Ho Kim (Seoul National University, Korea)

APT-TuM Advanced Plasma Technology Moderator: Prof. J. H. Joo, Kunsan National Univ., Korea

Time: 09:00-11:00 Room: #203

APT-TuM-1 [09:00-09:15]

Effect of pulse time modulation in dual-frequency capacitive coupled plasma on SiO2 etching characteristics Jinwoo Park and Geun Young Yeom (SungKyunKwan University, Korea)

APT-TuM-2 [09:15-09:30]

Effect of Plasma Series Resonance on Standing Wave in Pulsed VHF Driven Capacitively Coupled Plasma Seok-Hwan Lee, Myung-sun Choi, Yunchang Jang, Sangmin Jeong, Sangwon Ryu, Nam-Kyun Kim, Hyun-Joon Roh, and Gon-Ho Kim (Seoul National University, Korea)

36

APT-TuM-3 [09:30-10:00]

[Invited] Experimental and Numerical Studies of Pulse-Modulated ICP Discharges Wei Liu, Deqi Wen, Fei Gao, Yuru Zhang, Shuxia Zhao, Yuan-Hong Song, and Younian Wang (Dalian University of Technology, China)

APT-TuM-4 [10:00-10:15]

Modified K-means Cluster Analysis for Plasma Etching Endpoint Detection of Dielectric Layers Haegyu Jang (Sungkyunkwan University (SKKU), Korea), Hakseung Lee (Sungkyunkwan University(SKKU), Korea), Jeonggeon Park (Sungkyunkwan university, Korea), and Heeyeop Chae (Sungkyunkwan University (SKKU), Korea)

APT-TuM-5 [10:15-10:30]

Utilization of Phase Shift for the Uniformity Control in Capacitively Coupled Plasmas Jin Seok Kim, Younghyun Jo, Ho-Jun Lee, and Hae June Lee (Pusan National University, Korea)

APT-TuM-6 [10:30-10:45]

Analysis of Low Energy Electron Property in Maxwell Demon Plasma Sangwon Ryu, Nam-Kyun Kim, Hyun-Joon Roh, and Gon-Ho Kim (Seoul National University, Korea)

PBAF-TuM Plasma Bioscience, Agriculture and Food Moderators: Prof. Eun Ha Choi, Kwangwoon University, Korea Moderators: Prof. Masafumi Ito, Meijo University, Japan

Time: 09:00-11:00 Room: #208

PBAF-TuM-1 [09:00-09:30]

[Invited] Nuclear Forensics using plasma source ion beams Rod Boswell (Australian National University, Australia)

37

PBAF-TuM-2 [09:30-10:00]

[Invited] Interactions of Atmospheric Pressure Plasma Jet with Cancer Cells in Vitro: DNA Damage, Cell Viability, and Apoptosis Tae Hun Chung (Dong-A University, Korea)

PBAF-TuM-3 [10:15-10:30]

Infrared Absorption Spectroscopic Study on Reaction Process of Plasma with Self-Assembled Monolayer for Bio-Application MASANORI SHINOHARA, Yuta Yoshida, Naoki Maruno, Yoshinobu Matsuda, and Hiroshi Fujiyama (Nagasaki University, Japan)

PBAF-TuM-4 [10:30-10:45]

Mechanisms of Low Energy Electron-Induced Damage to DNA and A Novel Challenge for Treating Living Matter by Non-thermal Plasma Yeunsoo Park (National Fusion Research Institute, Korea)

PBAF-TuM-5 [10:45-11:00]

Nanosecond-Pulsed Plasma: Anticancer Activity and Modification of Biomolecules Naresh Kumar, Han Sup Uhm, Pankaj Attri, Ji Hoon Park, and Eun Ha Choi (Kwangwoon University, Korea)

MP-ND-TuA Materials and Processing on Nano Devices Moderators: Prof. Remi Dussart, Univ of Orleans/CNRS, France Moderators: Prof. Yongmin Kim, Dankook Univ. Korea

Time: 15:00-18:00 Room: Convention 1

MP-ND-TuA-1 [15:00-15:30]

[Invited] Optical Properties of InAs/GaAs Quantum Dot Solar Cells Jong Su Kim, Im Sik Han (Yeungnam University, Korea), and Sam Kyu Noh (Korea Research Institute of Standards and Science, Korea)

38

MP-ND-TuA-2 [15:30-15:45]

Nanoindentation and nanoscratch behaviors of TiN film synthesized by plasma immersion ion implantation and deposition Hongxi Liu (Kunming University of Science and Technology, China)

MP-ND-TuA-3 [15:45-16:00]

The Effects of Precursor Ligands on Growth Characteristics and Dielectric Properties of Atomic Layer Deposition HfO2 Bo-Eun Park, Il-Kwon Oh, Changwan Lee, Gyeongho Lee, Clement Lansalot-Matras, Wontae Noh, Hyungjun Kim (Yonsei University, Korea), and Han-Bo-Ram Lee (Incheon National University, Korea)

MP-ND-TuA-4 [16:40-16:55]

Gallium nitride nanoparticle synthesis using non-thermal plasma with nontoxic source Kwang Ho You (Korea Advanced Institute of Science and Technology, Korea), Jung Hyung Kim, Shin-Jae You, Hyun Ruh, Dae-Jin Seong, Yong-Hyeon Shin (Korea Research Institute of Standards and Science, Korea), and Hong-Young Chang (Korea Advanced Institute of Science and Technology, Korea)

MP-ND-TuA-6 [17:10-17:25]

Resistive Switching in Flexible (Na0.5K0.5)NbO3 Thin Films for the Self-Powered Memristors Bo Yun Kim, Beom SeoK Lee, Woong-Hee Lee, and Sahn Nahm (Korea University, Korea)

MP-ND-TuA-7 [17:25-17:40]

Dependence of resistive switching mechanism on bottom electrode for TiO2 thin films Beom SeoK Lee, Sahn Nahm, Ji-Hyeon Lee, Bo Yun Kim (Korea University, Korea), and Kwon Hong (SK Hynix Semiconductor Inc., Korea) MP-ND-TuA-8 [17:40-17:55]

BaTiO3 Nanopowders with High Tetragonality Synthesized by Hydrothermal Method using TiO2 Nano-sol Jae-Min Han, and Sahn Nahm (Korea University, Korea)

39

MP-ECS-TuA Materials and Processing on Energy Conversion & Storage Moderator: Dr. Boyun Jang, Korea Institute of Energy Research, Korea

Time: 15:00-18:00 Room: #201

MP-ECS-TuA-1 [15:00-15:30]

[Invited] Piezoelectric Energy Harvester Synthesized Using KNbO3 Nanowires with Various Crystal Structures Sahn Nahm (Korea University, Korea)

MP-ECS-TuA-2 [15:30-16:00]

[Invited] Origin of Enhanced ORR Activity and Durability of Pt Nanodendrites for Fuel Cell Electrocatalysts Yong-Tae Kim (Pusan National University, Korea)

MP-ECS-TuA-3 [16:00-16:40]

[Keynote] An Efficient DFT-Based Material Screening Method Assisted by Multivariate Modeling Techniques Randy Jalem (Kyoto University, Japan), and Masanobu Nakayama (Nagoya Institute of Technology, Japan)

MP-ECS-TuA-4 [17:00-17:15]

Production of Hydrogen-rich Syngas from Methane Reforming by Making Use of a Steam Microwave Plasma Dae-hyun Choi, Se Min Chun, Sukhwal Ma, and Yong Cheol Hong (National Fusion Research Institute, Korea) MP-ECS-TuA-5 [17:15-17:30]

Synthesis and electrocatalytic properties of Pt nanoparticles-supported nanographene synthesized employing in-liquid plasma HIROKI KONDO, Tomoki Amano, Kenji Ishikawa, Makoto Sekine, Masaru Hori (Nagoya University, Japan), Masafumi Ito, and Mineo Hiramatsu (Meijo University, Japan)

40

MP-ECS-TuA-6 [17:30-17:45]

Plasma-Reduced Ni based Catalysts for Dry Reforming of Propane Karuppiah Karuppiah, and Young Sun Mok (Jeju National University, Korea)

APT-TuA Advanced Plasma Technology Moderators: Prof. Ho-Jun Lee, Pusan National University, Korea Moderators: Prof. Yuan-Hong Song, Dailian University of Technology, China

Time: 15:00-18:00 Room: #203

APT-TuA-1 [15:00-15:30]

[Invited] Transport Enhancement of Reactive Gases inside the Plasma Enhanced Atomic Layer Deposition Chamber Ho Jun Kim (Samsung Electronics, Korea)

APT-TuA-2 [15:30-15:45]

A spatial measurement of an absolute electron density and temperature and its uncertainty Helicon plasmas using a laser Thomson scattering Byong Hoon Seo (Korea research institute of standard and science, Korea), Shin Jae You, and Jung Hyung Kim (KRISS, Korea)

APT-TuA-3 [15:45-16:00]

Monitoring of N2 and NH3 plasmas using digital in-line holography Byungwhan Kim, Dongwhan Jung (Sejong University, Korea), and Junhyun Seo (Electronics Engineering, Korea)

APT-TuA-4 [16:00-16:30]

[Invited] After the Fact Correction of Aspect Ratio Etch Rate Dependencies. Lawrence Overzet, Robert Bates, and Matthew Goeckner (The University of Texas at Dallas, United States)

41

APT-TuA-5 [16:30-16:45]

Effect of Electrode RC-time on the Ion Energy Distribution (IED) Driven by Low Frequency RF Bias Myung-Sun Choi, Seok-Hwan Lee, Yunchang Jang, Sangmin Jeong, Hyun-Joon Roh, Sangwon Ryu, Nam-Kyun Kim, and Gon-Ho Kim (Seoul National University, Korea)

APT-TuA-6 [16:45-17:00]

The Effect of Negative Ions from the Target on Thin Film Deposition in Magnetron Sputter Min Young Hur, Hyunyoung Lee, Ho-Jun Lee, and Hae June Lee (Pusan National University, Korea)

APT-TuA-7 [17:00-17:30]

[Invited] Fundamental Properties and Applications of Microwave Plasma Jianping Zhao (Tokyo Electron America, United States)

APT-TuA-8 [17:30-17:45]

Environmentally Friendly High-Speed Photoresist Removal Process by Microwave Bubble Plasma in Water Tatsuo Ishijima (Kanazawa University, Japan)

PBAF-TuA Plasma Bioscience, Agriculture and Food Moderators: Prof. Gon-Ho Kim, Seoul National University, Korea Moderators: Prof. Rod Boswell, Australia Natioanal University, Australia

Time: 15:00-18:00 Room: #208

PBAF-TuA-1 [15:00-15:40]

[Keynote] Plasma Applications to Agriculture: Plasma Farming Suk Jae Yoo (Natioanl Fusion Research Institute, Korea)

42

PBAF-TuA-2 [15:40-16:10]

[Invited] Control of Plant Fungal Diseases by Atmospheric Pressure Non-Thermal Plasma Gyungsoon Park, Kamonporn Panngom, Min Ho Kang, Anchalee Pengkit, Sang-Hark Lee (Kwangwoon University, Korea), DaeHoon Park (Kwangwoon University , Korea), Geon Bo Sim (Kwangwoon University, Korea), YONG HEE KIM (Kwangwoon Univ., Korea), Hyo Won Choi (National Academy of Agricultural Science, Korea), Dong-Bum Shin (National Institute of Crop Science, Korea), Han Sup Uhm (Kwangwoon University, Korea), and EunHa Choi (Kwangwoon University , Korea)

PBAF-TuA-3 [16:10-16:40]

[Invited] Pathogen Inactivation and Meat Quality by Thin-layer Dielectric Barrier Discharge Plasma Cheorun Jo (Seoul National Univeristy, Korea), and Wonho Choe (Korea Advanced Institute of Science and Technology, Korea)

PBAF-TuA-4 [17:00-17:30]

[Invited] Removal of Ethylene from Air by Adsorption on Zeolite-Supported Silver and Non-Thermal Plasma Oxidation Young Sun Mok, and Quang Hung Trinh (Jeju national university, Korea)

PBAF-TuA-5 [17:30-17:45]

Effects of Charged Particles on Bubble Surface Tension in the Electrolyte Plasma Discharge Sung-young Yoon, S-jeong Kim, and Gon-Ho Kim (Seoul National University, Korea)

PBAF-TuA-6 [17:45-18:00]

Characteristics and applications of water surface discharge and underwater discharge Seungmin Ryu (National Fusion Research Institute, Korea)

43

Oral Sessions

July 09, 2014 (Wednesday)

44

45

July 09, 2014 (Wednesday)

MP-ND-WeM Materials and Processing on Nano Devices Moderators: Prof. Suk-Ho Choi, Kyung Hee Univ., Korea Moderators: Prof. Tae Seok Seo, KAIST, Korea

Time: 09:00-11:00 Room: Convention 1

MP-ND-WeM-1 [09:00-09:30]

[Invited] Synthesis of High-Quality Two-Dimensional Atomic Layers and Their Applications on Microelectronics Zheng Liu (Nanyang Technological University, Singapore)

MP-ND-WeM-2 [09:30-10:00]

[Invited] Multilayer MoS2 Thin-Film Transistors Woong Choi (Kookmin University, Korea)

MP-ND-WeM-3 [10:00-10:30]

[Invited] Negative Diamagnetic Shift in InP-GaP Lateral Superlattice Under Pulsed Magnetic Fields Yongmin Kim (Dankook University, Korea)

MP-ND-WeM-4 [10:30-10:45]

Towards the Control of Grain Size and the Continuous Layer Growth of 2-dimensional MoS2 Film Jaeho Jeon (Sungkyunkwan University, Korea), and Sungjoo Lee (Sungkyunkwan Univ, Korea)

46

MP-ECS-WeM Materials and Processing on Energy Conversion & Storage Moderator: Dr. Heeun Song, Korea Institute of Energy Research, Korea

Time: 09:00-11:00 Room: #201

MP-ECS-WeM-1 [09:00-09:15]

Structural Study of Tourmaline in the Electric Power Saving System by Infrared Spectroscopy Ki-Seog Chang (Hongik University, Korea), and Sung-Gwun Choi (ENPOSS Co., Korea)

MP-ECS-WeM-2 [09:15-09:30]

Cu(In,Ga)Se2 Thin Film Prepared by a Direct Solution Coating Route and Its Application to Solar Cells Shanza Rehan (University of Science and Technology(UST)-Korea Institute of Energy Research, Korea), and SeJin Ahn (University of Science and Technology (UST)-Korea Institute of Energy Research, Korea)

MP-ECS-WeM-3 [09:30-09:45]

Electrochemical Recovery of Silver from End-of-life Photovoltaic Cell in Organic Solvent Jin-Seok Lee, Jun-Kyu Lee, Bo-Yun Jang, Joon-Soo Kim, Young-Soo Ahn, and Gi-Hwan Kang (Korea Institute of Energy Research, Korea)

MP-ECS-WeM-4 [10:00-10:30]

[Invited] Overview of Crystalline Si Solar Cells Based on Thin- and Aano-Technology Hae-Seok Lee, Seongeun Park, Young Do Kim, and Donghwan Kim (Korea University, Korea)

MP-ECS-WeM-5 [10:30-11:00]

[Invited] Current Status and Process of Technology Research of High Efficiency Solar Cell Sangwook Park (LGE, Korea), and Gyea Young Kwak (LG Electronics, Korea)

47

MP-NGD-WeM Materials and Processing on Next Generation Displays Moderator: Prof. Sanghun Jeon, Korea University, Korea

Time: 09:00-11:00 Room: #203

MP-NGD-WeM-1 [09:00-09:40]

[Keynote] Overcoming Current Limitations of Plasma Process Based Thin Film Transistor Technology MunPyo Hong, Jin Nyoung Jang, Doohyun Kim (Korea University, Korea) MP-NGD-WeM-2 [09:40-10:10]

[Invited] 2D Nanosheet MoS2 Transistor and its Application Sunkook Kim (KyungHee University, Korea)

MP-NGD-WeM-3 [10:10-10:25]

Verification of Persistent Photoconductivity in Oxide Thin-Film Transistors Sanghun Jeon (Korea University, Korea)

MP-NGD-WeM-4 [10:25-10:40]

Correlation between Electrical Characteristics and Amorphous Structure for High Performance Teresa Oh (Cheongju University, Korea)

MP-NGD-WeM-5 [10:40-10:55]

Investigation of Growth Characteristics and Electronic Properties of In2O3 and In doped ZnO by Atomic Layer Deposition Hyungjun Kim, Taewook Nam, and Donghyun Kim (Yonsei University, Korea)

48

MP-NGD-WeM-6 [10:55-11:10]

Advanced transparent conductive Al doped ZnO film deposition using ICP assisted facing target sputtering Masaru Hori (NU-SKKU Joint Institute for Plasma-Nano Materials, Japan), JAYBUM KIM (NU-SKKU Joint Institute for Plasma-Nano Materials, Korea), Subong Jin (Sungkyunkwan unviersity, Korea), Bibhuti Bhusan Sahu (NU-SKKU Joint Institute for Plasma-Nano Materials, Korea), and Jeongeon Han (Sungkyunkwan University, Korea)

IS-WD-WeM Industry Special Session 1: Wearable Device Moderator: Dr. HyunSik Myung, BizOcean Co., Ltd, Korea

Time: 09:00-11:00 Room: #208

IS-WD-WeM-1 [09:00-09:50]

[Invited] Wearable Electronics and Internet of Things: What are the Real Opportunities for Sensors Hailey Yang (Developent Manager, Korea)

IS-WD-WeM-2 [10:00-10:50]

[Invited] Low-temperature fabricated organic and metal-oxide thin-film-devices for future wearable electronics Sung Kyu Park (Chung-Ang University, Korea)

MP-ND-WeA Materials and Processing on Nano Devices Moderators: Prof. Zheng Liu, Nanyang Technological University, Singapore Moderators: Prof. Woong Choi, Kookmin Univ. Korea

Time: 15:00-18:00 Room: Convention 1

MP-ND-WeA-1 [15:00-15:40]

[Keynote] All-graphene vertical tunneling diodes and photodetector applications Suk-Ho Choi (Kyung Hee University, Korea)

49

MP-ND-WeA-2 [15:40-16:10]

[Invited] Graphene Based Optical and Electrochemical Biosensors Tae Seok Seo (Korea Advanced Institute of Science and Technology, Korea)

MP-ND-WeA-3 [16:10-16:25]

Protein controlled doping of single layer graphene film Sung Kyu Jang (Sungkyunkwan University, Korea), and Sungjoo Lee (Sungkyunkwan Univ, Korea)

MP-ND-WeA-4 [16:25-16:40]

Effects of substrate materials on the graphene-based device performances Sung Kyu Jang (Sungkyunkwan University, Korea), and Sungjoo Lee (Sungkyunkwan Univ, Korea)

MP-ND-WeA-5 [16:40-16:55]

Low Temperature Synthesis of Graphene using Plasma-Assisted Chemical Vapor Deposition System Byeong-Joo Lee, and Goo-Hwan Jeong (Kangwon National University, Korea)

MP-ND-WeA-6 [16:55-17:10]

Study of graphene etching using new type atmospheric pressure plasma Duk Jae Kim (Geniatech Inc. / Sungkyunkwan unviersity, Korea), Yeon Geun Shim (Geniatech Inc., Korea), and Jeongeon Han (Sungkyunkwan unviersity, Korea)

MP-ND-WeA-7 [17:10-17:25]

Silver nanowire-graphene hybrid transparent-conductive electrodes Geonyeop Lee, and Jihyun Kim (Korea University, Korea)

50

MP-ECS-WeA Materials and Processing on Energy Conversion & Storage Moderator: Prof. Randy Jalem, Kyoto University, Nagoya Institute of Technology, Japan

Time: 15:00-18:00 Room: #201

MP-ECS-WeA-1 [15:00-15:30]

[Invited] Ferroelectricity in Yttrium-doped Hafnium Oxide Thin Films Prepared by Middle Frequency Twin Magnetron Sputtering Jun Xu, Yu Zhang, Wen-qi Lu, and Da-yu Zhou (Dalian University of Technology, China)

MP-ECS-WeA-2 [15:30-16:10]

[Keynote] First Principles Genome Approach Screening High-Functional Renewable Energy Materials Byungchan Han (DGIST, Korea)

MP-ECS-WeA-3 [16:10-16:40]

[Invited] Multilayer Anodes for Thin Film Lithium Ion Batteries Arun Patil (Vishwakarma College of Arts Commerce and Science, India), Vaishali Patil (KIST, Korea), Seok-jin Yoon, and Ji-Won Choi (Korea Institute of Science and Technology, Korea)

MP-ECS-WeA-4 [16:45-17:00]

Silicon Nanoparticles synthesized using Double Tube Reactor and Inductive Coupled Plasma Boyun Jang (Korea insititute of energy research, Korea), Chunyoung Jung (Korea institude energy research, Korea), Jeongboon Koo, and Jin-Seok Lee (Korea Institute of Energy Research, Korea)

MP-ECS-WeA-5 [17:00-17:15]

Electrochemical behaviors of physical mixtures of Si nanoparticles and Carbon nanofibers as active materials of Lithium-ion batterys anodes Jeongboon Koo (Korea Institute of Energy Research, Korea), Chunyoung Jung (Korea institude energy research, Korea), Boyun Jang, Jin-seok Lee, Joon-soo Kim, Yongsoo Ahn (Korea Institute of Energy Research, Korea), and Sung-soo Kim (Chungnam National University, Korea)

51

MP-ECS-WeA-6 [17:15-17:30]

Investigation of the Lithium Ion Dynamics in Garnet-type Cubic Li7La3Zr2O12 Solid Electrolytes Randy Jalem (Kyoto University, Japan), and Masanobu Nakayama (Nagoya Institute of Technology, Japan)

MP-ECS-WeA-7 [17:30-17:45]

Microstructures of SiOx nanowires and nanoparticles synthesized by an evaporation and condensation process with steam injection Sunho Choi (Korea Institute of Energy Research, Korea), Junghoon Cheon (Korea Institute of Energy Resaerch, Korea), Boyun Jang (Korea Insititute of Energy Research, Korea), Jinseok Lee (Korea Institute of Envergy Research, Korea), Joonsoo Kim (Korea Institue of Energy Resaerch, Korea), and Moonhee Han (Chungnam National University, Korea)

MP-ECS-WeA-8 [17:45-18:00]

Thermoelectric Properties of Co-Sb Thin Films Prepared by RF co-sputtering Aziz Ahmed (University of Science and Technology (UST), Korea), and Seungwoo Han (Korea Institute of Machinery and Materials, Korea)

MP-NGD-WeA Materials and Processing on Next Generation Displays Moderators: Prof. Arokia Nathan, Cambridge University, UK Moderators: Prof. Munpyo Hong, Korea University, Korea

Time: 15:00-18:00 Room: #203

MP-NGD-WeA-1 [15:00-15:30]

[Invited] Deposition of Organic and Organic-Inorganic Hybrid Polymer Thin Films Using PECVD Method for OTFTs and OLEDs Applications Hyun-Jin Seo, Sang-Jin Cho, Nea-Eung Lee, Y.J. Kim, D. Jung, Byungyou Hong (Sungkyunkwan University, Korea), Eunha Choi (Kwangwon University, Korea), and Jin-Hyo Boo (Sungkyunkwan University, Korea)

MP-NGD-WeA-2 [15:30-16:00]

[Invited] Three-dimensional Nitride LEDs

52

Nathan Gardner (Glo AB, United States) MP-NGD-WeA-3 [16:00-16:15]

Plasma Assisted Spatial ALD Process for Thin Film Encapsulation of Organic Light Emitting Diodes Heeyeop Chae (Sungkyunkwan University (SKKU), Korea), and Sang Heon Yong (Sungkyunkwan University, Korea)

MP-NGD-WeA-4 [16:15-16:30]

Light outcoupling enhancement from top-emitting organic light-emitting diodes using a nano-sized stochastic texture layer Woo-Young Park, and Ki-Woong Whang (Seoul National University, Korea)

MP-NGD-WeA-5 [16:30-16:45]

Study of low temperature plasma process for the flexible display Kyo W. Lee, Sung I. Kim, Joon S. Lee, and Jeon G. Han (Sungkyunkwan University, Korea)

MP-NGD-WeA-6 [16:45-17:00]

Electrochromic Study on Tungsten Oxides Film by Sputtering Process Chuan Li (National Yang Ming University, Taiwan), J. H. Hsieh (Ming Chi University of Technology, Taiwan), and B. Q. Huang (National Central University, Taiwan)

MP-NGD-WeA-7 [17:00-17:15]

High performance ultra thin ITO film deposited by modulated pulsed plasma magnetron sputtering Junghoon Joo (Kunsan National University, Korea)

53

IS-WD-WeA Industry Special Session 1: Wearable Device Moderator: Dr. HyunSik Myung (BizOcean Co., Ltd, Korea)

Time: 15:00-18:00 Room: #208

IS-WD-WeA-1 [15:00-15:50]

[Invited] Flexible Batteries Enabling Wearable Electronics Era Sang-Young Lee (UNIST, Korea)

IS-WD-WeA-2 [16:00-16:50]

[Invited] Energy Harvesting Technology for Wearable Device Applications Miso Kim (Korea Research Institute of Standards and Science, Korea)

IS-WD-WeA-3 [17:00-17:50]

[Invited] Patenting Trends in Wearable Computing Devices Sung-Han Cho (Korea Advanced Institute of Science and Technology, Korea)

54

55

Oral Sessions

July 10, 2014 (Thursday)

56

57

July 10, 2014 (Thursday) HEP-ThM High Enthalpy Plasma Science and Technology Moderators: Prof. Manabu Tanaka, Kyushu University, Japan Moderators: Prof. Sooseok Choi, Inha University, Korea

Time: 09:00-11:00 Room: #201

HEP-ThM-1 [09:00-09:40]

[Keynote] Plasma Engineering for Nano Materials Seong In Kim (Cheorwon Plasma Research Institute, Korea)

HEP-ThM-2 [09:40-10:10]

[Invited] High-Speed Visualization of Electrode Phenomena in Thermal Plasma Processing Manabu Tanaka, and Takayuki Watanabe (Kyushu University, Japan)

HEP-ThM-3 [10:10-10:40]

[Invited] Synthesis of Amorphous Metal Nanoparticles by Arc Thermal PlasmaSooseok Choi, Si Taek Park, Tae-Hee Kim, and Dong-Wha Park (Inha University, Korea)

HEP-ThM-4 [10:40-10:55]

Analysis for degradation cause of SiO2 passivation layer deposited on InSb using PECVD via Raman spectroscopy Chulkyun Seok, Sujin Kim, Jaeyul Lee, Sehun Park, Hwanyeol Park (Seoul National University, Korea), Yongjo Park (Advanced Institutes of Convergence Technology, Korea), and Euijoon Yoon (Seoul National University, Korea)

58

SS-REP-ThM Special Symposium on Renewable Energy Photovoltaic Moderators: Prof. Jin Hyo Boo, Sungkyunkwan University, Korea Moderators: Dr. Jang-Hsing Hsieh, Ming Chi University of Technology, Taiwan

Time: 09:00-11:00 Room: #203

SS-REP-ThM-1 [09:00-09:25]

[Invited] Quantum Dots: an Approach for the Conversion Efficiency of Solar Cells Weiling Luan, Zhimin Liu, Xinhua Zhong, Huagui Yang, and Jianli Hua (East China Uni. of Sci.& Tech., China)

SS-REP-ThM-2 [09:25-09:50]

[Invited] Optimization of the Buffer and the Window Layer for High Efficiency CIGS Solar Cells Jaehyeong Lee, Donguk Kim, SooHo Lee, Minha Kim, Dohyun Baek, Junsin Yi (Sungkyunkwan University, Korea), Yongseob Park (Chosun College of Science and Technology, Korea), and Byungyou Hong (Sungkyunkwan University, Korea)

SS-REP-ThM-3 [09:50-10:15]

[Invited] Photovoltaic Application of Polymer: Dye-sensitized Solar Cell and Organic/inorganic Hybrid Solar Cell Hyunwoong Seo, Shinji Hashimoto, Daiki Ichida (Kyushu University, Japan), Giichiro Uchida (Osaka University, Japan), Naho Itagaki, Kazunori Koga, and Masaharu Shiratani (Kyushu University, Japan)

SS-REP-ThM-4 [10:15-10:30]

Development of n-type microcrystalline silicon film for highly conducting layer of thin film solar cell Chonghoon Shin, and Duy Phong Pham (Sungkyunkwan University, Korea)

59

SS-REP-ThM-5 [10:30-10:45]

Suppression of Cluster Incorporation into a-Si:H Films Using a Cluster Eliminating Filter Yoshihiro Torigoe, Chen Weiting, Sususmu Toko, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani (Kyushu University, Japan)

IS-QD-ThM Industry Special Session 2: Quantum Dots Moderator: Dr. HyunSik Myung, BizOcean Co., Ltd, Korea

Time: 09:00-11:00 Room: #208

IS-QD-ThM-1 [09:00-09:50]

[Invited] Industry & Market Trends of QDs Dae-Gyu Moon (Soonchunhyang University, Korea)

IS-QD-ThM-2 [10:00-10:50]

[Invited] Graphene- and GaN-based Quantum Dots for Novel Photonic Applications Yong-Hoon Cho (KAIST (Korea Advanced Institute of Science and Technology), Korea)

ACM-ThM Advanced Carbon Materials Moderator: Dr. Myung Jong Kim, KIST, Jeonbuk, Korea

Time: 09:00-11:00 Room: #204

ACM-ThM-1 [09:00-09:30]

[Invited] 1D-Nanostructured Materials by Electrospinning and Their Applications Seong Mu Jo (Korea Institute of Science and Technology, Korea)

60

ACM-ThM-2 [09:30-10:00]

[Invited] The carbon fiber fabricated by atmospheric pressure RF plasma and low pressure microwave plasma Hunsu Lee, So Young Kim, Han-ik Joh, Sungho Lee, and Seongmu Jo (KIST, Korea)

ACM-ThM-3 [10:00-10:30]

[Invited] Optoelectronic devices based on Hybrid Semiconductor Nanoparticles and Graphene Dong Ick Son (Korea Institute of Science and Technology, Korea)

ACM-ThM-4 [10:30-11:00]

[Invited] Synthesis of Graphene and its Application into Electronic Devices Myung Jong Kim (Korea Institute of Science and Technology, Korea)

HEP-ThA High Enthalpy Plasma Science and Technology Moderators: Prof. Takayuki Watanabe, Kyushu University, Japan Moderators: Dr. Hyeon Gon Lee, NFRI, Korea

Time: 15:00-18:00 Room: #201

HEP-ThA-1 [15:00-15:40]

[Keynote] Influence of the Gas Temperature on the Gasification of Low-Grade Coal Han Sup Uhm, Youngho Na (Kwangwoon University, Korea), Yongcheol Hong, Donghun Shin, Changhyun Cho (National Fusion Research Institute, Korea), and Youngki Park (Wintech, Korea)

HEP-ThA-2 [15:40-16:10]

[Invited] Diagnosing fusion plasmas -- challenges posed by ITER Martin O'Mullane (University of Strathclyde, United Kingdom)

61

HEP-ThA-3 [16:10-16:40]

[Invited] Status of ITER Diagnostics and Technical Challenges Hyeon Gon Lee (National Fusion Research Institute, Korea)

HEP-ThA-4 [17:00-17:30]

[Invited] Design and Development of the edge Thomson scattering system in ITER Takaki Hatae (Japan Atomic Energy Agency, Japan)

HEP-ThA-5 [17:30-17:45]

Abatement of Fluorinated Compounds Using a 2.45 GHz Microwave Plasma Torch with an Enhanced Reverse Vortex Plasma Reactor Ji Hun Kim, Chang Hyun Cho, Dong Hun Shin, Yong Cheol Hong (National Fusion Research Institute, Korea), and Yong-Wook Shin (Handong global university, Korea)

SS-REP-ThA Special Symposium on Renewable Energy Photovoltaic Moderators: Prof. Donggeun Jung, Sungkyunkwan University, Korea Moderators: Prof. Hyunwoong Seo, Kyushu University, Japan

Time: 15:00-18:00 Room: #203

SS-REP-ThA-1 [15:00-15:25]

[Invited] P-type sp3-bonded BN/n-type Si heterodiode solar cell fabricated by laser-plasma synchronous CVD method and related topics Shojiro Komatsu (NIMS, Japan) SS-REP-ThA-2 [15:25-15:50]

[Invited] Development of Low Cost Non-Vacuum Processing Techniques for Fabrication of CIGS Nanostructure Based PV Devices Barreau N (Universite de Nantes, France), Duy Phong Pham (Sungkyunkwan University, Korea), Velumani Subramaniam, Reyes P, Babu B.J, and Vidhya B. (CINVESTAV, Mexico)

62

SS-REP-ThA-4 [16:05-16:20]

Light trapping in an n-i-p type solar cell with a back reflector S M Iftiquar, Juyeon Jung, Chonghoon Shin, Junhee Jung, Jinjoo Park, Hyeongsik Park, and Junsin Yi (Sungkyunkwan University, Korea)

SS-REP-ThA-5 [16:55-17:20]

[Invited] Plasma characteristics of H2-SiH4-G(G=Ar, He, Ne) and the resultant properties of nc-Si:H Jang-Hsing Hsieh (Ming Chi University of Technology, Taiwan), C. Li (National Yang Ming University, Taiwan), and H. C. Lin (Ming Chi University of Technology, Taiwan)

SS-REP-ThA-6 [17:20-17:45]

[Invited] Plasma Deposited Silicon Thin Films for Next Generation Photovoltaics Ka-Hyun Kim (Korea Institute of Energy Research, Korea)

IS-QD-ThA Industry Special Session 2: Quantum Dots Moderator: Dr. HyunSik Myung, BizOcean Co., Ltd, Korea

Time: 15:00-18:00 Room: #208

IS-QD-ThA-1 [15:00-15:50]

[Invited] Colloidal quantum dots for display and lighting devices Namhun Kim (Sungkyunkwan University, Korea), and Heeyeop Chae (Sungkyunkwan University (SKKU), Korea)

IS-QD-ThA-2 [16:00-16:50]

[Invited] Highly Efficient Quantum-Dot LED Technology Chang Hee Lee (Seoul Nat'l Univ., Korea)

63

IS-QD-ThA-3 [17:00-17:50]

[Invited] Nanoscale Interface Control for Quantum-Dot-Sensitized Solar Cell Byungwoo Park (Seoul National University, Korea)

APT-ThA Advanced Plasma Technology Moderator: Prof. Remi Dussart, University of Orleans / CNRS, France

Time: 15:00-18:00 Room: #204

APT-ThA-1 [15:00-15:30]

[Invited] Flexible and Twistable All Organic Non-Volatile Memory Cell Array with One Diode-One Resistor Architecture Tae-Wook Kim (Korea Institute of Science and Technology, Korea)

APT-ThA-2 [15:30-15:45]

Robust and Clean Transfer of Large-area Graphene by in-situ Grown h-BN as Protective Cover Qinke Wu (Sungkyunkwan University (SKKU), Korea), and Young Jae Song (SKKU Advanced Institute of Nanotechnology (SAINT), Korea)

APT-ThA-3 [15:45-16:15]

[Invited] Microplasma in Close Proximity to Liquid and Its Application in Nanofabrication Xiaoxia Zhong (Shanghai Jiao Tong University, China)

64

APT-ThA-4 [16:15-16:30]

Determination of Ion Concentration in Two-Ion-Species Ar/Xe and He/Ar Filament Discharged Multi-dipole Plasmas Nam-Kyun Kim, Hyun-Joon Roh, Sung-Ryul Huh, Seok-Hwan Lee, and Gon-Ho Kim (Seoul National University, Korea)

APT-ThA-5 [16:30-17:00]

[Invited] HiPIMS Applications Michael Mark (MELEC GmbH, Germany)

65

Oral Sessions

July 11, 2014 (Friday)

66

67

July 11, 2014 (Friday)

HEP-FrM High Enthalpy Plasma Science and Technology Moderators: Prof. Bong Guen Hong, Chonbuk National University, Korea Moderators: Prof. Masaya Shigeta, Osaka University, Japan

Time: 09:00-12:00 Room: #201

HEP-FrM-1 [09:00-09:40]

[Keynote] Development of modulated induction thermal plasmas and their application to large scale synthesis of nanopowder Yasunori Tanaka (Kanazawa University, Japan)

HEP-FrM-2 [09:40-10:10]

[Invited] High-Yield Growth Mechanism of Small-Diameter Boron Nitride Nanotubes (

68

SS-REP-FrM Special Symposium on Renewable Energy Photovoltaic Moderators: Prof. Jaehyeong Lee, Sungkyunkwan University, Korea Moderators: Prof. Velumani Subramaniam, CINVESTAV, Mexico

Time: 09:00-12:00 Room: #203

SS-REP-FrM-1 [09:00-09:50]

[Keynote] Advanced Passivation Technology and Loss Factor Minimization for High Efficiency Solar Cells Cheolmin Park, Youn-Jung Lee, Balaji Nagarajan, and Junsin Yi (Sungkyunkwan University, Korea)

SS-REP-FrM-2 [09:50-10:15]

[Invited] Sputter-Deposition of Pseudobinary ZnO-InN Alloys with Tunable Bandgap for Photovoltaic Application Naho Itagaki, Koichi Matsushima, Ryota Shimizu, and Tomoaki Ide (Kyushu University, Japan)

SS-REP-FrM-3 [10:40-11:05]

[Invited] Fabrication of Periodically Arrayed Microwire Silicon Solar Cells Using Simple Patterning Process Chaehwan Jeong, Jonghwan Lee (Korea Institute of Industrial Technology, Korea), Changheon Kim (Korea Institute of Industrial Technology / Yonsei University, Korea), and Sangwoo Lim (Yonsei University, Korea)

SS-REP-FrM-4 [11:05-11:30]

[Invited] Transparent Electrode for Si Heterojunction Photoelectric Devices Jun Gi Kim, and Joondong Kim (Incheon National University, Korea) SS-REP-FrM-5 [11:30-11:45]

Fabrication of GaAs step cone-like subwavelength structure (SWS) for solar cell applications Janghyuk Kim, and Jihyun Kim (Korea University, Korea)

69

SS-REP-FrM-6 [11:45-12:00]

Fabrication of ZnO tetrapods for Organic Solar Cells Applications. Amir Abidov, Jiwon Kye, Myung Chan An, Wang Hoon Lee (Gumi Electronics & Information Technology Research Institute, Korea), Bunyod Allabergenov, Sungjin Kim (Kumoh National Institute of Technology, Korea), Yong Bae Kim (Gumi Electronics & Information Technology Research Institute, Korea), and Supab Choopun (Chiang Mai University, Thailand)

70

71

Poster Sessions

July 08, 2014 (Tuesday)

72

73

Poster Sessions

July 08, 2014 (Tuesday)

MP-ECS-Tu-PS Materials and Processing on Energy Conversion & Storage

Time: 12:00-14:00 Convention 2

MP-ECS-Tu-PS-1

Comparative Analysis of Various Photoelectrodes for Dye-sensitized Solar Cells Kwan-Woo Ko, Sungjun Hong, and Chi-Hwan Han (Korea Institute of Energy Research, Korea)

MP-ECS-Tu-PS-2

Progress in Electrocatalytic Activity of Plasma Functionalized MWCNT-entrapped PEDOT:PSS Photocathode Namki Min, Yong Hoon Rhee, Jinwoong Kim, Jong Hyun Kim, and Hyun Pyo Hong (Korea University, Korea)

MP-ECS-Tu-PS-3

Effect of Ga and In co-doping concentrations on optoelectronic properties and thermal stability of ZnO thin films Duy Phong Pham, Vinh Ai Dao, Junsin Yi (Sungkyunkwan University, Korea), Huu Truong Nguyen, Bach Thang Phan, Thi My Dung Cao, Van Dung Hoang, and Cao Vinh Tran (University of Science, Viet Nam)

MP-ECS-Tu-PS-4

Effect of Thermal Treatment on the Rectifying Characteristics of Mo-SiC Schottky Contact Jinseon Lee (Gachon University, Korea), Tai-young Kang, Sinsu Kyoung (Powercubesemi, Korea), Eun Sik Jung (Maplesemiconductor, Korea), Hyung Wook Choi, and Kyung Hwan Kim (Gachon University, Korea)

74

MP-ECS-Tu-PS-5

Analysis of Selenization of Cu-In-Ga Precursors using the Rapid Thermal Process with Cracked Selenium Min Young Kim, Donggun Lim, Kyeongtae Son, JunChul Shin, and SungHee Jo (Korea National University of Transportation, Korea)

MP-ECS-Tu-PS-6

Relationship between the Surface Texturing Shape and the Efficiency of Crystalline Silicon Solar Cell Min Young Kim, Donggun Lim, HaeSung Cho,Dae Sung Kim, and Sung Kyun Byeon (Korea National University of Transportation, Korea)

MP-ECS-Tu-PS-7

Investigation of Thickness Dependence of Metal Layer in Al/Mo/4H-SiC Schottky Barrier Diodes Seula Lee, Jinseon Lee (Gachon University, Korea), Tai-young Kang, Sinsu Kyoung (Powercubesemi, Korea), Eun Sik Jung (Maplesemiconductor, Korea), and Kyung Hwan Kim (Gachon University, Korea)

MP-ECS-Tu-PS-8

Electrohydrodynamic-jet Printed Ni Electrodes for Si Solar Cells Sujay Kumar Vishwanath (Kongju national university, Korea), Ji-Myon Lee (Suncheon National University, Korea), Sung-Nam Lee (Korea Polytechnic University, Korea), and Jihoon Kim (Kongju National University, Korea)

MP-ECS-Tu-PS-9

Properties of Silver Nanowire/Zinc Oxide Transparent Bilayer Thin Films for Optoelectronic Applications Sslimsearom You, Yu Sup Jung, Hyung Wook Choi, and Kyung Hwan Kim (Gachon University, Korea)

MP-ECS-Tu-PS-10

Thermal Treatment for enhanced conductivity of the cuprous oxide thin films by reactive sputtering Gye Cheol Lee, Hyung Wook Choi, Yong Seo Park, and Kyung Hwan Kim (Gachon University, Korea)

75

MP-ECS-Tu-PS-11

Electrochemical Properties of a mixture of SiOx Nanoparticles and Nanowires as an Anode material for Li-ion Battery Junghoon Cheon, Sunho Choi (Korea Institute of Energy Research, Korea), Boyun Jang (Korea Insititute of Energy Research, Korea), Jin-Seok Lee, and Joonsoo Kim (Korea Institute of Energy Research, Korea)

MP-ECS-Tu-PS-12

Amorphous Silicon Nanoparticles with Phosphorous for an Active Material of Li ion Battery Boyun Jang (Korea insititute of energy research, Korea), Chunyoung Jung (Korea institude energy research, Korea), Jeongboon Koo (Korea Institute of Energy Research, Korea), Joonsoo Kim, Yonsoo Ahn (Korea institude energy research, Korea), and Moonhee Han (Chungnam National University, Korea)

MP-ECS-Tu-PS-13

Diameter dependence thermoelectric properties of chalcognide nanowire arrays in anodic aluminium oxide template Seil Kim (Hanyang University, Korea), Young-In Lee (Seoul National University of Science and Technology, Korea), Hyo Ryoung Lim, and Yong-Ho Choa (Hanyang University, Korea)

MP-ECS-Tu-PS-14

Impedance analysis of effects of the Al2O3 encapsulation on organic solar cell characteristics Jaewon Lee, Wonjin Ban, Sungyool Kwon, Eunji Bae, Jinsub Jang, Youngwoong Jeong, and Donggeun Jung (Sungkyunkwan Univ., Korea)

MP-ECS-Tu-PS-15

A Modified Oxidative Refinement Process for Removing Boron from Molten Silicon under Enhanced Electromagnetic Force Jun-Kyu Lee (Korea Institute of Energy Research / Chungnam National University, Korea), Jin-Seok Lee, Bo-Yun Jang, Joon-Soo Kim, Young-Soo Ahn (Korea Institute of Energy Research, Korea), and Churl-Hee Cho (Chungnam National University, Korea)

76

MP-ECS-Tu-PS-16

The Chelating Effect in Hybrid Ink for CuInSe2 (CIS) Thin Film Solar Cell Ara CHO, SeJin Ahn, Jae Ho Yun, Jihye Gwak, Seung Kyu Ahn, Young-Joo Eo, Jun Sik Cho, Ju Hyung Park, Jin Su Yu, Kihwan Kim, Keeshik Shin, and Kyunghoon Yoon (KIER, Korea)

MP-ECS-Tu-PS-17

Influence of a Gasifier Temperature on Low-grade Coal Gasification in a 915 MHz Microwave Pure Steam Plasma Dong Hun Shin, Chang Hyun Cho, JinYoung Huh, and Yong Cheol Hong (National Fusion Research Institute, Korea)

MP-ECS-Tu-PS-18

Monocrystalline-like Silicon Solar Cells Fabricated by Wet and Dry Texturing Processes for Improving Light-trapping Effect Kyumin Han (Chungnam National University, Korea), Jun-Sik Cho (Korea Institute of Energy Research, Korea), Wonseok Choi (Hanbat National University, Korea), and Jinsu Yoo (Korea Institute of Energy Research, Korea)

MP-ECS-Tu-PS-19

Syngas Production from a Hybrid System Combined with a Carbon Dioxide Microwave Plasma Torch and a Catalyst Se Min Chun, Dae-hyun Choi, and Yong Cheol Hong (National Fusion Research Institute, Korea)

MP-ECS-Tu-PS-20

Synthesis of highly dispersed Pt nano particles by ALD technique for fuel cell electrode Heeyeon Kim (Korea Institute of Energy Research, Korea)

MP-ECS-Tu-PS-21

Temperature dependent Characteristics of SiC Schottky Barrier Diode after Neturon Irradiation Sung-Su Kim, Min-Seok Kang (Kwangwoon University, Korea), Kee-Nam Choo, Man-Soon Cho (Korea Atomic Energy Research Institute, Korea), and Sang-Mo Koo (Kwangwoon University, Korea)

77

MP-ECS-Tu-PS-22

A Theoretical Study on CO2 Adsorption and Conversion Reactions on Boron-Rich BNNT Sidewalls Heechol Choi (National Fusion Research Institute (NFRI), Korea), Young Choon Park (KAIST, Korea), Mi-Young Song (National Fusion Research Institute (NFRI), Korea), and Yoon Sup Lee (KAIST, Korea)

MP-ECS-Tu-PS-23

Application of Absorption Layer for Thin film a-Si Solar Cells by Hyperthermal Neutral Beam with Microwave Electro Cyclotron Resonance Plasma Kyoung suk Oh, Jong-Bae Park (National Fusion Research Institute, Korea), Sun-hwa Lee, Chaehwan Jeong (Korea Institute of Industrial Technology, Korea), Ji-hwan Yang, and Koeng Su Lim (Korea Advanced Institute of Science and Technology, Korea)

MP-ECS-Tu-PS-24

Characterization of CaMnO3 perovskite for oxygen reduction and evolution in alkaline solution Junho Bae, Yongwon Kim, Kareen Lopez (Kunsan National University, Korea), Seungwook Eom (Korea Electrotechnology Research Institute, Korea), Ho-Jung Sun, Gyungse Park, and Joongpyo Shim (Kunsan National University, Korea)

MP-ECS-Tu-PS-25

Capacity improvement of carbon-coated Li2MnSiO4 cathode in lithium rechargeable batteries Jihae Han, Kyung-Koo Lee, Gyungse Park, Ho-Jung Sun, and Joongpyo Shim (Kunsan National University, Korea)

MP-ECS-Tu-PS-26

Dependence of a VHF Plasma on Discharge Gap Cheng-Yang Lien, Chia-Fu Chen, Ching-Lung Yang, Yoshinobu Kawai, Kuo-Feng Chiu, Jen-Bin Shi, Sy-Ruen Huang, Jui-Hao Wang, and Mi Chen (Feng Chia University, Taiwan)

78

MP-ND-Tu-PS Materials and Processing on Nano Devices

Time: 12:00-14:00 Convention 2

MP-ND-Tu-PS-1

Comparison of thermoelectric power and electrical conductivity of expanded graphite/polymer composites with graphite powder/polymer composites Reza Javadi, and Byoung Deog Choi (Sungkyunkwan University, Korea)

MP-ND-Tu-PS-2

Investigation on hydrophobic recovery of plasma-modified superhydrophilic single-walled carbon nanotube networks Seungwoo Ham, Hyun Pyo Hong, Jong Hyun Kim, Jinwoong Kim, and NAMKI MIN (Korea University, Korea)

MP-ND-Tu-PS-3

Vertically Standing Graphene Nanosheets Grown by PECVD Process for Flexible Supercapacitor Yifei Ma (Sungkyunkwan University, Korea), and Heeyeop Chae (Sungkyunkwan University (SKKU), Korea)

MP-ND-Tu-PS-4

Velocity Distributions of Charge Carriers in Carbon Nanotube Thin-Film Transistors by Using Non-Quasistatic measurement Hyeonwoo Shin (Seoul National University, Korea), Tae-Jun Ha (Kwangwoon University, Korea), and Changhee Lee (Seoul National University, Korea)

MP-ND-Tu-PS-5

Transparent conductive electrodes based on graphene/nanoparticles composites for flexible devices Jun-Mo Kim, Young-Hee Joo (Chung-Ang University, Korea), and Chang-Il Kim (Chung-Ang Univeristy, Korea)

79

MP-ND-Tu-PS-6

Structural and Optical Properties of Large Scale MoS2 Layers Grown by Thermal Decomposition Technique Dongri Qiu, Dong Uk Lee, Sang Woo Pak, and Eun Kyu Kim (Hanyang University, Korea)

MP-ND-Tu-PS-7

Low Temperature Growth of Single-Walled Carbon Nanotubes using a Hybrid CVD Synthesis System Eun-Hye Kwak, and Goo-Hwan Jeong (Kangwon National University, Korea)

MP-ND-Tu-PS-8

MoSe2 photo-transistor Sokjoo Lim, Junghak Park (Korea University, Korea), Minhyun Jung (Korea Univ., Korea), Taeho Kim, and Sanghun Jeon (Korea University, Korea)

MP-ND-Tu-PS-9

The influence of post annealing process on electrical and photo responsive characteristics of multilayer MoS2 device with Sol-gel passivation Junghak Park (Korea Univ., Korea), Sokjoo Lim, Taeho Kim (Korea University, Korea), Minhyun Jung (Korea Univ., Korea), and Sanghun Jeon (Korea University, Korea)

MP-ND-Tu-PS-10

Photo-responsive characteristics of WS2 photo-sensor with passivation Minhyun Jung (Korea Univ., Korea), Sokjoo Lim (Korea University, Korea), Junghak Park (Korea Univ., Korea), Taeho Kim, and Sanghun Jeon (Korea University, Korea)

MP-ND-Tu-PS-11

Production of Low-Dimensional Carbon Nanomaterials using a Solution Plasma System Byeong-Joo Lee (Kangwon National University, Korea), Soon-Cheon Cho (SEMES, Korea), and Goo-Hwan Jeong (Kangwon National University, Korea)

80

MP-ND-Tu-PS-12

Thickness-dependent adhesion of thin adhesive layer on rigid substrates Chan Kim (Korea University of Science and Technology(UST), Korea), Min-Ah Yoon, Sangbong Lee, Bongkyun Jang, Jae-Hyun Kim (Korea Institute of Machinery & Materials (KIMM), Korea), Hak Joo Lee (Korea Institute of Machinery & Materials, Korea), and Kwang-Seop Kim (Korea Institute of Machinery & Materials (KIMM), Korea)

MP-ND-Tu-PS-13

The Study on the Etching Characteristics of Carbon Nanotubes using O2/Ar gas plasma Kwang-Ho Kwon, Junmyung Lee (Korea University, Korea), Kwangsoo Kim (Sogang University, Korea), and Alexander Efromov (State University of Chemistry and Technology, Russian Federation)

MP-ND-Tu-PS-14

High Performance Three-Dimensional Chemical Sensor Platform Using Reduced Graphene Oxide Formed on High Aspect-Ratio Micro-Pillars Le Thai Duy, Tran Quang Trung, Vinh Quang Dang, Bo-Yeong Kim, Hock Key Moon, Nae-Eung Lee (Sungkyunkwan University, Korea), and Duck-Jin Kim (Massachusetts Institute of Technology, United States)

MP-ND-Tu-PS-15

Electrical detection of DNA hybridization by solution-gated MoS2 Field-effect Transistor Doowon Lee, Jinhwan Lee, il-yung Sohn, Bo-yeong Kim, Youngmin Sohn, Changgu Lee, and Nae-Eung Lee (Sungkyunkwan University, Korea)

MP-ND-Tu-PS-16

Piezoelectric coupling between vertically grown ZnO nanorods and graphene in nanohybrid channel field effect transistor Vinh Quang Dang, Do-Il Kim, Le Thai Duy, Byeong-Ung Hwang, Bo-Yeong Kim, Mi Jang, and Nae-Eung Lee (Sungkyunkwan University, Korea)

MP-ND-Tu-PS-17

Fabrication and characterization of gold nanocrown arrays on a gold film for a high-sensitivity surface plasmon resonance biosensor Mun-sik Choi, Nak-hyeon Kim, Kyungmin Byun (Kyung Hee University, Korea), and Hyeong-Ho Park (Korea Advanced Nano Fab Center, Korea)

81

MP-ND-Tu-PS-18

Photoluminescence of colloidal CdS/CdSe nanoheterostructures with tetrapod morphologies Minh Tan Man (Jeju National University, Korea), NoSoung Myoung, Sang-Youp Yim (Gwangju Institute of Science and Technology, Korea), Ji-Hee Kim, Mun Seok Jeong (Sungkyunkwan University, Korea), and Hong Seok Lee (Jeju National University, Korea)

MP-ND-Tu-PS-19

2D TiO2 nanoparticle photonic crystal patterned Y3Al5O12:Ce3+ phosphor plate for white light-emitting diodes Chulkyun Park, Hyojun Kim (Hanyang Univ., Korea), Ki-Young Ko (Korea Invention Promotion Association, Korea), Ki-Kang Kim (Samsung Display Co Ltd, Korea), and jinho ahn (Hanyang Univ., Korea)

MP-ND-Tu-PS-20

Ferromagnetic Nanowires Embedded in Insulating Porous Alumina Template for High Frequency Antenna Hyo Ryoung Lim, Tae-Yeon Hwang, Seil Kim, and Yong-Ho Choa (Hanyang University, Korea)

MP-ND-Tu-PS-21

Room Temperature Ethanol Sensing Performances of Pt-Au Cofunctionalized SnO2 Nanorod Sensors Sunghoon Park, Soohyun Kim, Sangbo Park, Taeseop Hong, Jihwan Jung, and Chongmu Lee (Inha University, Korea)

MP-ND-Tu-PS-22

A Mass-Production Process Study for Si Nano Powder Manufactured by 80kW RF Plasma Seok Kyun Song, Byungkoo Son, Moonwon Lee, Sunyong Choi, Jung Chul Shin, Man Ki Jung (Cheorwon Plasma Research Institute, Korea), Byunghoon Kim, Myungsun Sin, Kyu-Hang Lee (Cheorwon Plasma Research Institute / Kwangwoon University, Korea), Gwangsup Cho (Kwangwoon University, Korea), and Seong In Kim (Cheorwon Plasma Research Institute, Korea)

MP-ND-Tu-PS-23

Fabrication of Resistive Switching Memory with In2O3 Quantum Dots on Sandwiched Graphene Monolayer between SiO2 Layers Dong Uk Lee, Dongri Qiu, Kyoung Su Lee, Gyujin Oh, and Eun Kyu Kim (Hanyang University, Korea)

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MP-ND-Tu-PS-24

Industrialization of Boron Nitride Nanotubes: From Synthesis to Applications Keun Su Kim, Michael Jakubinek, Amy Hrdina, Yadienka Martinez-Rubi, Behnam Ashrafi, Mark Plunkett, Shuqiong Lin, Stephane Denommee, Christopher Kingston, and Benoit Simard (National Research Council Canada, Canada)

MP-ND-Tu-PS-25

Fabrication and Characterization of Aligned Cu Nanowires for Enhanced Heat Transfer Ulugbek Shaislamov (Jeju National University, Korea), and Heon-Ju Lee (Jeju national Univerisity, Korea)

MP-ND-Tu-PS-26

Chemically Designed Template for Selective Alignment of DNA-templated Gold Nanowires for the Application to Nano-device Hyung Jin Kim (Gumi Electronics and Information Technology Research Institute, Korea), Kwang Soup Song, Won Chang Lee, and Sang Hee Kim (Kumoh National Institute of Technology, Korea)

MP-ND-Tu-PS-27

Etching Characteristics of nano-patterned SiO2 by using Pulse-Time-Modulation in 60 MHz/2 MHz Dual-Frequency Capacitive Coupled Plasma Geun Young Yeom (Depa