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EE141 1 © Digital Integrated Circuits 2nd Wires Digital Integrated Digital Integrated Circuits Circuits A Design Perspective A Design Perspective The Wire The Wire Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic July 30, 2002

Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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Page 1: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

EE1411

© Digital Integrated Circuits2nd Wires

Digital Integrated Digital Integrated CircuitsCircuitsA Design PerspectiveA Design Perspective

The WireThe Wire

Jan M. RabaeyAnantha ChandrakasanBorivoje Nikolic

July 30, 2002

Page 2: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

EE1412

© Digital Integrated Circuits2nd Wires

The WireThe Wire

transmitters receivers

schematics physical

Page 3: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Interconnect Impact on ChipInterconnect Impact on Chip

Page 4: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Wire ModelsWire Models

All-inclusive model Capacitance-only

Page 5: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Impact of Interconnect Impact of Interconnect ParasiticsParasitics

Interconnect parasiticsreduce reliabilityaffect performance and power consumption

Classes of parasiticsCapacitiveResistiveInductive

Page 6: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

10 100 1,000 10,000 100,000Length (u)

No

of n

ets

(Log

Sca

le)

Pentium Pro (R)Pentium(R) IIPentium (MMX)Pentium (R)Pentium (R) II

Nature of InterconnectNature of Interconnect

Local Interconnect

Global Interconnect

SLocal = STechnologySGlobal = SDie

Sour

ce: I

ntel

Page 7: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

INTERCONNECTINTERCONNECT

Page 8: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Capacitance of Wire InterconnectCapacitance of Wire Interconnect

VDD VDD

VinVout

M1

M2

M3

M4Cdb2

Cdb1

Cgd12

Cw

Cg4

Cg3

Vout2

Fanout

Interconnect

VoutVin

CLSimplified

Model

Page 9: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Capacitance: The Parallel Plate ModelCapacitance: The Parallel Plate Model

Dielectric

Substrate

L

W

H

tdi

Electrical-field lines

Current flow

WLt

cdi

diint

ε=

LLCwire SSS

SS 1=

⋅=

Page 10: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

PermittivityPermittivity

Page 11: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Fringing CapacitanceFringing Capacitance

W - H/2H

+

(a)

(b)

Page 12: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Fringing versus Parallel PlateFringing versus Parallel Plate

(from [Bakoglu89])

Page 13: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

InterwireInterwire CapacitanceCapacitance

fringing parallel

Page 14: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Impact of Impact of InterwireInterwire CapacitanceCapacitance

(from [Bakoglu89])

Page 15: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Wiring Capacitances (0.25 Wiring Capacitances (0.25 µµm CMOS)m CMOS)

Page 16: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

INTERCONNECTINTERCONNECT

Page 17: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Wire Resistance Wire Resistance

W

LH

R = ρH W

L

Sheet ResistanceRo

R1 R2

Page 18: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Interconnect Resistance Interconnect Resistance

Page 19: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Dealing with ResistanceDealing with Resistance

Selective Technology ScalingUse Better Interconnect Materials

reduce average wire-lengthe.g. copper, silicides

More Interconnect Layersreduce average wire-length

Page 20: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

PolycidePolycide Gate MOSFETGate MOSFET

n+n+

SiO2

PolySilicon

Silicide

p

Silicides: WSi 2, TiSi 2, PtSi2 and TaSi

Conductivity: 8-10 times better than Poly

Page 21: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Sheet ResistanceSheet Resistance

Page 22: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Modern InterconnectModern Interconnect

Page 23: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Example: Intel 0.25 micron ProcessExample: Intel 0.25 micron Process

5 metal layersTi/Al - Cu/Ti/TiNPolysilicon dielectric

Page 24: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

INTERCONNECTINTERCONNECT

Page 25: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

InterconnectInterconnectModelingModeling

Page 26: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

The Lumped ModelThe Lumped Model

Vout

Driver

cwire

VinClumped

RdriverVout

Page 27: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

The Lumped RCThe Lumped RC--ModelModelThe Elmore DelayThe Elmore Delay

Page 28: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

The The EllmoreEllmore DelayDelayRC ChainRC Chain

Page 29: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Wire ModelWire Model

Assume: Wire modeled by N equal-length segments

For large values of N:

Page 30: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

The Distributed RCThe Distributed RC--lineline

Page 31: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

StepStep--response of RC wire as a response of RC wire as a function of time and spacefunction of time and space

0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 50

0.5

1

1.5

2

2.5

time (nsec)

vo

lta

ge

(V

)

x= L/10

x = L/4

x = L/2

x= L

Page 32: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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RCRC--ModelsModels

Page 33: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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Driving an RCDriving an RC--lineline

Vin

Rs Vout

(rw,cw,L)

Page 34: Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic

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© Digital Integrated Circuits2nd Wires

Design Rules of ThumbDesign Rules of Thumb

rc delays should only be considered when tpRC >> tpgate of the driving gate

Lcrit >> √ tpgate/0.38rcrc delays should only be considered when the rise (fall) time at the line input is smaller than RC, the rise (fall) time of the line

trise < RCwhen not met, the change in the signal is slower than the propagation delay of the wire

© MJIrwin, PSU, 2000