MFC: Theory and

Applications

TSMC Fab14 Etch 范揚楷

Outlines 2011- 3/14

TSMC Fab14 Briefing

Semiconductor industry & Equipment

MFC Theory

MFC performance indices

MFC Applications in Semi. Industry

Q&A

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MFC (Mass Flow Controller)

Industrial Application

Definitions

Thermal MFC technology

Material considerations

Unit of measure

Performance Indices

Industrial

Applications

Typical Process Flow循環不止, 生生不息

Dry Etchers Precise control to RF/Gas/Pressure

Run at high vacuum ( 10-4 atm)

Chambers

Chamber Basic

RF

Plasma

Basic Layout

Industrial Applications

Gas Box

Industrial Applications

Gas Box

World Market of MFC US$ 7 (NT$210 ) in 2010 by 5.3%

annual growth

MFC Business

in Taiwan (estimate)

MFC’s 4,000

* 8” 270

MFC 108

0.1 %

108 *0.1%*10 ~

* IC insight 2010-11

Definitions

Definitions of MFC

MFC (Mass Flow Controller)

–

–

VAQQ vm

Turbulent

Re >3,000

Laminar

Re < 2,100

General Flow Terminology Reynolds Number (RE)

– A single dimensionless parameter formed as the ratio of

inertial to viscous forces .

ViscosityFluid

)(cDimen.Chartersti DV

ForceViscous

ForceInertia

E

fR

Volume Flow MetersORIFICE PLATE

(or FLOW TUBE) VENA

CONTRACTA

MANOMETER

(or DP

TRANSMITTER)

h

Direction of Flow

1 1 2 2v A v A

2 2

1 1 2 2

1 1

2 2p v p v

Bernoulli’s eq.

Continuity eq.

2

211 2 1

2

11

2

Av p p p

A

1 2

1

2

2

1

pv

A

A

Thermal MFC

Technology

Principle of Thermal Mass

Flow Meter

)( udppheat

TTmCTCmQ

Tu Td

Principle of Thermal Mass

Flow Meter Keep Laminar Flow

Add 2 coils (resistance)

Principle of Thermal Mass

Flow Meter

T1 T2

Principle of Thermal Mass

Flow Meter

T1 T2

Principle of Thermal Mass

Flow Meter

Linear if bypass is small

Mass Flow Control

Control Valve Quick response and precise

Piezo-eletric ~msec Solenoid ~ 1sec

Industrial MFC’s

Material

Considerations

Material Considerations

High resistance to Toxic and Corrosive Gas

No particle generations or reaction to gases

SUS316 for MFC block and piping

Units of Measure

Gas Correction Factor

GCFC

C

Q

Q

Q

Q

m

m

C

C

TkCmTkCm

kTkCm

pasa

prsr

sr

sa

srsr

sasa

r

a

pa

pr

paaprr

p

Then

;

gas and Actual (N2) gas For ref.

constant :

Gas Correction Factors

Gas Correction Factor

GCF – Actual vs. Indicated

GCF - Example

GCF - Example

Performance

Indices

Define Application Spec.

Flowing Media (Steam, Water, Air, Gas etc…)

Density - pressure and temperature

Flow Range, minimum to maximum

(turndown needed)

Accuracy – how stated? % of range or span

Repeatability

Economic Considerations – Initial cost,

maintenance cost & operating costs

Flow Control Performance

Accuracy

Repeatability

Linearity

Rangeability

Poor Repeatability Means

Poor Accuracy

Good Accuracy Means Good Repeatability

Good Repeatability Does Not Necessarily Mean Good Accuracy

Performance Indices

Factors – Mechanical

Factors - Temperature

Factors – Upstream Pressure

Examples

MFC Verification

Reference

MFC ,New Jein Corp., 2009

Mass flow controller introductions, MKS, 2010

MFC introductions, tsmc / ,2006

A Tale of Two Thermals: Capillary & Immersible,

Mark McMahon, Sierra Instruments, 2008

Homework

MFC

MFC

Thermal MFC

MFC

MFC