MICRO-ELECTRO- MECHANICAL SENSORS · Environmental Unit BME280 Relative humidity, dew point, temperature, pressure and true altitude measurements Graph ... Bosch Sensortec’s first

18.05.2017

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Bosch Sensortec | Marketing | 23.06.2016

© Bosch Sensortec GmbH 2016. Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion, Bearbeitung, Weitergabe sowie für den Fall von Schutzrechtsanmeldungen. 1

MICRO-ELECTRO-MECHANICAL SENSORS: TECHNOLOGIES, APPLICATIONS AND TRENDS



CONTENT

01

02

03

04

CONTEXT | WHO WE ARE

PASSION | WHAT WE DO

APPLICATIONS & SOFTWARE | WHAT WE ENABLE

IOT | WHAT WE URGE TO IMPROVE

01

CONTEXT

WHO WE ARE



What are MEMS? Micro-Electro-Mechanical Systems

► MEMS are miniature systems that combine tiny mechanical structures with electronic circuits. Typical individual structures have a size of a few µm.

► The MEMS sensor element is usually packaged together with an ASIC and made into one unit, e.g. into a LGA package.

1

2 5

4

3

MEMS

ASIC

Decoupling unit

Bonding wires

Printed circuit board (PCB)

1

2

3

4

5 2.5 mm

2.5 mm

0.93 mm



Bosch is the #1 MEMS sensor supplier worldwide

► Start of MEMS production in 1995

► Over 7 billion MEMS sensors produced

► More than 1,000 MEMS patents

► 100 % in-house from MEMS design to manufacturing

MEMS Pioneer

► Technology leadership for MEMS solutions:Driving technology roadmaps with in-house technologies

► Global support & systems capabilities:Support beyond component supply (in hardware & software)

► Supply capability & reliability:Capacity, volumes of scale, proven processes,industry’s best reliability

Value Proposition



Consumer MEMS success story

2005

2006

2007

2008

2009

2010

2011

2012

2013

2014

2015

First acceleration sensor

World’s smallest digital pressure sensor

World’s smallest digital acceleration sensor

Full portfolio of acceleration and pressure sensors

First 2x2 mm2 acceleration sensor

3x3 mm² eCompass

World’s smallest gyroscope in 3x3 mm³

Sensor system with µController

Ultra low power IMU

Smart sensor hubs

2016 Intelligent acceleration sensor

Vital sensor hubs

World’s first indoor air quality sensor

World’s smallest 9-axis sensor

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Yearly volume increase of MEMS production

Acc

um

ula

ted

sen

sor

pro

du

ctio

n (

mio

)

7,000

6,000

5,000

4,000

3,000

2,000

1,000

Bosch Sensortec | Marketing | 04/25/2017


Size & Power Continuous shrinking of sensor footprint / size of accelerometers

0

20

40

60

80

100

120

140

1995 2000 2005 2010 2015

Pa

ckag

e fo

otp

rin

t (m

m²)

Automotive CE

PLCC28 (Automotive)

1996

SOIC16w (Automotive)

2002

4x4 QFN (CE)

2006

SOIC14n (Automotive)

2006

3x3 QFN (CE)

2007

2x2 LGA (CE)

2010

1.2x1.5 LGA (CE)

2013

SOIC8 (Automotive)

2010

….

3-axis accel: only 1.2mm x 1.5mm x 0.8mm

~12,5mm x 10.5mm x 4mm



Size & power BMI160 (2nd gen. IMU) – best-in-class IMU!

current: 5 mA

noise: typ. 0.015 °/s/rt(Hz)

950 µA typ.

typ. 0.008 °/s/rt(Hz)

BMI055 BMI160

Key to success: systems engineering, MEMS & ASIC design

new MEMS design

Bosch proprietary structure

(Ohms et al. US20110132087 A1)

X Y

Z

Drive

Drive

new system / ASIC concept

(CR/RTC-NA, BST/EIC)

02

PASSION WHAT WE DO



Today’s state-of-the-art portfolio

Inertial Sensors Environmental Sensors Smart Sensors Optical Microsystems

5.9

6 m

m

Size / power

Continue shrinking of sensor footprint / size and power consumption (e.g. accelerometer)

© Bosch Sensortec GmbH 2016. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. 10

Old challenge Shrinking the size / power consumption of components

Bosch Sensortec | Marketing | 31 Oct 2016

Size alone is not an enabler anymore… but functional density increases

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Bosch Sensortec | BST/EAS1 | 31 Oct 2016

© Bosch Sensortec GmbH 2016. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribut ion, as well as in the event of applications for industrial property rights. 11

Sensor Data Fusion

Each sensor has shortcomings – Sensor Fusion can compensate it.

Sensor Weakness Compensation

Accelerometer Measures total acceleration (incl.

gravity).

Can only detect gravity at rest.

Gyroscope used to separate static and dynamic

acceleration.

Magnetometer Sensitive to everyday magnetic

distortions.

Unaware of orientation in 3D-space.

Gyroscope used to detect magnetic distortions =>

Robust heading.

Accelerometer used to compensate tilt in 3D

space.

Gyroscope Long term drift due to integration

errors.

Measures only relative changes.

Use accelerometer stability to detect rest position

=> compensation.

Use undistorted magnetic sensor as reference

heading.

Static acceleration Acceleration due to gravity when the device is under no motion Dynamic acceleration – Acceleration due to external force (exclusive of gravitational force)

Total acceleration – Static acceleration + Dynamic acceleration

Strengths and shortcomings of individual sensors

03

SOFTWARE & APPLICATIONS WHAT WE ENABLE

Bosch Sensortec | BST/EAS1 | 31 Oct 2016


Sensor Data Fusion From signals to sense

Analog signal

Digital signal

Filtering, preprocessing

Feature extraction (interrupts, steps, …)

Classification



Application of sensor fusion

MEMS and SW are enabler for intuitive and realistic HMI realization

User interface

► Tap control

► Gaming input

► Menu navigation

► Voice/ speech recognition

► Gesture recognition

Motion detection

► Step counting

► Activity monitoring

► Power management

Position detection

► Upside down

► Portrait / landscape

► Free speech profile

Pedestrian navigation

► Speed & distance estimation

► Altitude detection

► Location based services



BSX FusionLib software

Bosch Sensortec | Department | 31 Oct 2016


Pedestrian navigation

Good GPS reception

GPS navigation and

sensors calibration

Poor GPS reception

Blending Sensors and GPS

data

No GPS reception

Sensor data only

Sensor Data Fusion

http://images.google.de/imgres?imgurl=http://www.fotosearch.de/bthumb/ICL/ICL131/OBI_351.jpg&imgrefurl=http://www.fotosearch.de/clip-art/spion.html&h=170&w=170&sz=9&hl=de&start=1&usg=__FbMrIBeGxFm623CBdQCweNMZsso=&tbnid=P6HwUyBJ3KQyHM:&tbnh=99&tbnw=99&prev=/images?q=satellit+clipart&gbv=2&hl=de



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Sensors & Functions

Indoor navigation – inertial and pressure sensors

Acceleration

Geomagnetic

Gyroscope

Barometric air pressure

Low power consumption

Applications

► Step counter and dynamic

orientation

► Path integration

► Pedestrian dead reckoning

Benefits

Navigation in shopping malls,

public areas, parking structures, etc.

Height

Path



BSH-Software

Algorithm Software to calculate the ambiente temperature with the Integrated

Environmental Unit BME280

Relative humidity, dew point, temperature, pressure and

true altitude measurements

Graph

Humidity and temperature measurement over time

Personal weather station

Precise altitude detection as influences of weather changes are considered

Cloud-based environment monitoring enabled by active app users

Comfort zone (well-being assistant)

Display of current indoor climate vs. recommended comfort zone

Determinants: temperature, air circulation and relative humidity

Relative humidity, dew point, temperature, pressure and true altitude measurements



0.65 mm 2 mm

2 mm

0.95 mm

Bosch Sensortec’s first standalone accelerometers

with embedded intelligence

The intelligent features enable innovative

applications

while minimizing power consumption

New generation of

intelligent accelerometers

Smart Sensors BMA422 & BMA455

Accelerometer



For wearables

►Motion detection for power saving

►Power down/off when device not used/moving

►Orientation detection

►Display orientation

►3D device orientation*

►Motion measurement

►Step-counting

►Activity recognition, e.g. walking, running

►Advanced activity, e.g. yoga, meditation, push ups, weight lifting…

* in combination with gyroscope and geo-magnetic sensor


New challenge Data fusion at lowest power

Smart Sensor Hub BHI160

► 3 x 3 x 0.95 mm3

► 32-bit floating-point microcontroller (optimized for sensor fusion)

► 96 kByte ROM, 48 kByte RAM

► 30 µA step detector / 1.59 mA full 9DoF Fusion @100Hz

Performance output ready to use

► Quaternion

► Linear acceleration

► Rotation

► Gravity

► Robust heading

► eCompass fast calibration

► Step counter

► Activity monitoring & interrupt

► Significant motion detection Bosch Sensortec | | 31 Oct 2016 Bosch Sensortec | Marketing | 23.06.2016


Advanced use cases are enabled by sensor systems

► Indoor navigation

► Augmented reality

► Location-based services

► Well-being recommendations

► Activity monitoring

► Step counting

► Significant motion

► User interface

► Gaming

► Image stabilization

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More use cases than just portrait / landscape

Outdoor Context Fitness Wellness

Outdoor

► GPS

Indoor

► Step count & heading

► Localization

► Improve with pressure

User’s context

► In a meeting

► Outside

► Sitting and eating

► Watching TV

► Activity recognition

Sports trainer

► Step counter

► Fitness level

► Calorie monitoring

► Swimming

► Running

► Snowboarding

► Climbing

Well-being

► Sleep monitoring

► Activity

► Socializing

Stress monitoring

► Speaker assistant

► Stress level

04

IOT WHAT WE URGE TO IMPROVE



Multitude of devices



Internet of Things – Making objects smart

Wireless connected smart sensors and actuators are enabling the IoT

MEMS Sensors

Micro-Controller

Connectivity

Embedded Software

Power Management

Small Form Factor

IoT means products enabled by connectivity and sensors to communicate with/via the Internet


Tomorrow’s challenge Cross domain solutions

Ap

plicati

on

do

main

S

en

so

r N

od

e

Smart home: heating systems

Smart home: surveillance systems

Connected vehicles Body area

network

Low power (Integrated power

management)

Wireless interface (Network Capability)

Integrated function (Algos & Software)

FOTA capable (Firmware Over The

Air update)

Efficient module (integrates all, but only

needed functions)

Bosch Sensortec | | 31 Oct 2016

The internet of things and service

Bosch Sensortec | | 31 Oct 2016

© Bosch Sensortec GmbH 2016. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribut ion, as well as in the event of applications for industrial property rights. 34

Position of Bosch in IoT – innovation cluster

Connected Mobility

Connected Energy Connected Building Connected Industry

Bosch Software Innovations

Bosch Connected Devices and Solutions

Retrofit eCall

Cross-domain development kit

Transport data logger

Parking sensor

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SENSING OUR WORLD

Bosch Sensortec



Global presence – 14 locations in 8 different countries Kusterdingen

Germany Munich Germany

Dresden Germany

Beijing China

Seoul Korea

Tokyo Japan

Suzhou/Shanghai China

Taipei Taiwan

Shenzhen China

Coimbatore India

Palo Alto USA

Mount Prospect USA

Milan Italy

Hong Kong China

TODAY, THREE OUT OF FOUR SMART PHONES WORLDWIDE USE BOSCH SENSORTEC SENSORS.

Documents

MICRO-ELECTRO- MECHANICAL SENSORS · Environmental Unit BME280 Relative humidity, dew point, temperature, pressure and true altitude measurements Graph ... Bosch Sensortec’s first