MKS 사 MFC

TMS Co., Ltd장원재2015.04.08.

G-SERIES MFC 저 비용 , 높은 성능의 MFC 대부분 산업분야에 적합 Oring seal / Metal –sealed MFC 5 sccm ~ 250 slm Digital and Analog I/O

I-SERIES MFC 물과 먼지에 MFC 가 노출되는 환경에 사용 가능 (IP66) Oring seal / Metal-sealed MFC 5 sccm ~ 1,000 slm Digital and Analog I/O

P-SERIES MFC 높은 정확도 , 반복성 및 Inlet 압력변화에 영향 없는 중요 공정분야에 적합 Metal-sealed MFC/MFM 5 sccm ~ 250 slm Digital and Analog I/O

MF1 작은 사이즈의 MFC분석 기기 및 sputter 분야 Oring seal MFC 10 sccm ~ 20 slm

Analog MFCOring seal / Metal-sealed 10 sccm ~ 20 slm 일반산업분야에 가장 많이 사용

1179A / 1479A

ALTA MFC

대용량 MFC 50~1,000 slm GE250A IE250A, IE500A, IE1000A,IM250A P250A 1579A

Analog type

item Spec

Range 10sccm~20slm

Accuracy ±1.0% of F.S

Repeatability ±0.2% of F.S

Digital typeElastomer Sealed

MFC- 저비용 고성능

1179A(Elastomer seal)

1479A(Metal seal)

GE-50A

MFM 179A (All metal MFM) M10B (Elastomer sealed)

item Spec

Range 5sccm~50slm

Accuracy ± 1% of setpoint for 20 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S.

Repeatabil-ity

±0.3% of reading

Analog Output

0~5VDC, 4~20mA

통신 DeviceNet,RS485,Profibus,EtherCAT

Digital typeElastomer SealedShut-Off Valve

GV-50A

item Spec

Range 5sccm~50slm

Accuracy ± 1% of setpoint for 20 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S.

Repeatabil-ity

±0.3% of reading

Analog Output

0~5VDC, 4~20mA

통신 DeviceNet,RS485,Profibus,EtherCAT

Digital typeMetal Sealed-MFM 모델로선택가능 .

GM-50A

item Spec

Range 5sccm~50slm

Accuracy ± 1% of setpoint for 20 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S.

Repeatabil-ity

±0.3% of reading

Analog Output

0~5VDC, 4~20mA

통신 DeviceNet,RS485,Profibus,EtherCAT

MFC- 저비용 고성능

IP66 RATED( 방진 , 방수형 ),

DIGITAL MASS FLOW CONTROLLER:Controller setting time < 500msec

MFC- 산업용 ( 방진 , 방수 )

IE-50A(elastomer seal)

IM-50A(Metal Seal)

item Spec

Range 5sccm~50slm

Accuracy ± 1% of setpoint for 20 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S.

Repeatabil-ity

±0.3% of reading

Analog Output

0~5VDC, 4~20mA

통신 Profibus, RS-485, De-vicenet

MFC- 가스용π-MFC

P5A,P6A

DIGITAL MASS FLOW CONTROLLER:Controller setting time < 1.5sec

Multi Gas, Multi Range• NC-Sapphire/Teflon seal•PFC-50 (P5A)•PFC-60 (P6A) : 입력 압력에 영향받지 않음 .

item Spec

Range 5sccm~50slm

Accuracy ± 1% of setpoint for 20 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S.

Repeatabil-ity

±0.3% of reading

Analog Output

0~5VDC

통신 Devicenet, RS-485

π-MFCP2A

DIGITAL MASS FLOW CONTROLLER:Controller setting time < 1.5sec

Multi Gas, Multi Range• NC-Teflon SealSafe Delivery Source gases -- Ion Implant Applications

item Spec

Range 2 sccm ~ 20 sccm

Inlet pres-sure

4~1200 Torr(with Vacuum Outlet)

Accuracy ± 1% of setpoint for 10 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S.

Repeatabil-ity

±0.2% of reading

Analog Output

0~5VDC

2016 년 단종 예정: 대체모델 P5A=> GM50A, P4B P6A=> P9B

MFC- 가스용

DIGITAL MASS FLOW CONTROLLER:Controller setting time < 0.75sec

Multi Gas, Multi Range

• 빠른 제어를 위한 MFC.• NC/NO valve-Teflon seal, MFM 옵션

item Spec

Range 5sccm~50slm

Accuracy ± 1% of setpoint for 20 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S.

Repeatabil-ity

±0.3% of reading

Analog Output

0~5VDC

통신 Devicenet, RS-485

MFCP9B

DIGITAL MASS FLOW CONTROLLER:Controller setting time < 0.75sec

Multi Gas, Multi Range

• 빠른 제어를 위한 MFC.• NC/NO valve-Teflon seal, MFM 옵션• Inlet 압력에 영향없음 .

MFCP4B

item Spec

Range 5sccm~50slm

Accuracy ± 1% of setpoint for 20 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S.

Repeatabil-ity

±0.3% of reading

Analog Output

0~5VDC

통신 Devicenet, RS-485

MFC- 가스용

DIGITAL MASS FLOW CONTROLLER:Controller setting time < 0.8sec

Compact, General MFC

•All Metal Sensor•MFM 기능 옵션임 .

item Spec

Range 10sccm~20slm

Accuracy ± (0.5% of reading +0.2% of F.S.)

Repeatabil-ity

±0.2% of reading

Analog Output

0~5VDC

통신 Profibus, Modbus, USB,EtherCAT, Profinet

MF1

MFC- 가스용

1480A-MFC

ALTA MFC

Digital Metal sealed Type

Devicenet, Analog Version

10sccm~30slm

MC20A High Flow Thermal MFC

50,100,200slm

Devicenet, Analog Version

MC20A-MFC

MFC- 대용량가스용

Analog type

item Spec

Range 20slm~200slm

Accuracy ±1.0% of F.S

Repeatability ±0.2% of F.S

item Spec

Range 50slm~300slm

Accuracy ±1.0% of set-poont

Repeatability ±0.3% of read-ing

Analog 15PinDigital Profibus

MFC-대용량가스용

1559A(Elastomer seal)

1579A(Elastomer seal)

2016 년 단종 예정

1559A=>GE250A

2016 년 단종 예정

558A=>579A

MFC-대용량가스용

GE-250A(Elastomer seal)

item Spec

Range 100slm~250slm

Accuracy ± 1% of setpoint for 20 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S.

Repeatabil-ity

±0.5% of reading

Analog Out-put

0~5VDC, 4~20mA

DIGITAL MASS FLOW CONTROLLER:Controller setting time < 1~2sec DIGITAL MASS FLOW CONTROLLER

:Controller setting time < 3sec

Multi Gas, Multi RangeMetal Sealed MOCVD, silicon epitaxy, RTP

item Spec

Range 100 slm~200slm

Accuracy ± 1% of setpoint for 20 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S.

Repeatabil-ity

±0.3% of reading

Analog Output

0~5VDC

통신 Devicenet

P250A

대용량 IP66 RATED( 방진 , 방수형 ),DIGITAL MASS FLOW CONTROLLER IE250A :Controller setting time < 1~2sec IM250A :Controller setting time < 2~3secitem Spec

Range 100~250slm

Accuracy ± 1% of setpoint for 20 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S.

Repeatabil-ity

±0.5% of reading

Analog Output

0~5VDC, 4~20mA

IE-250A(elastomer seal)

IM-250A(Metal Seal)

MFC-대용량 : 방진방수

IP66 RATED( 방진 , 방수형 ),DIGITAL MASS FLOW CONTROLLER Controller setting time < 2~3sec

item Spec

Range 250~500 slm, 501~1000 slm

Accuracy ± 1% of setpoint for 20 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S.

Repeatabil-ity

±0.5% of reading

Analog Output

0~5VDC, 4~20mA

IE-500A(elastomer seal)

IE-1000A(elastomer seal)

PRESSURE-BASED MASS-FLO® CON-

TROLLER

Type 1640

item Spec

Range 2sccm ~ 20sccm

최대 Inlet 압력 5 psig

최소 동작 Inlet 압력

10 torr 이하 (typical)

Control Range 5% to 100% of F.S.

Repeatability ±0.2% of F.S.

Analog Output 0~5VDC

Resolution 0.1% of F.S.

Safe Delivery System (SDS®) Applications