Ol Micro Drill

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October 04 Industrial Business Review

"Laser Microdrilling

in Industrial Applications"

Dr. Dimitris Karnakis

Oxford Lasers Ltd., Didcot OX11 7HP (UK)


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1. Market Overview

2. Which Lasers to use?

3. Physical Mechanisms

4. Laser Drilling Techniques

5. Case Study: Fuel-Injectors

6. Future Trends

OutlineOutline


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MicroDrillingMicroDrilling Industrial ApplicationsIndustrial Applications

Industry Sectors

-Semiconductor

-Automotive

-Aerospace

-Electro-optics

-Photonics

-Medical

-Food

Manufacturing Applications

Inkjet Printer Nozzles

Via Circuit Electrical Interconnects

Optical Switch Fab

Test Probe Cards

Gas Flow Chemical Sensors

Leak Detection

Biomedical Sensors

Fuel Injection Nozzles

Aerosol Atomisers

Engine Silencing

Food Packaging

Particulate Filters

Solar Cell Technology

Turbine Blade Cooling


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Example ApplicationsExample Applications

PCB via drilling

Cardiac stent manufacturing

Inkjet printer manufacturing

Fuel-injection nozzle drilling 150m , 511nm,1mm thick steel

valve

Injection hole

Fuel feed


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Industrial Lasers Market (2004)Industrial Lasers Market (2004)

Global Laser Material Processing Market: ~$1.3 bn (2004)Annual Market Growth: 10% (10 yr average)Projected Worldwide Laser Market (2008) : ~$3 bn

Worldwide Laser System Installations

Europe

33%

N.America

31%

Japan

24%

Asia

9%

RoW

3%

Industrial Laser Sales (2003)

Solid-state

46%

CO2

29%

Other

5%Excimer

20%

Industrial Laser Applications

Market Segmentation (2003)

Medical

19%

Research

7%

Other

7%Material Processing

67%

Laser-Material Processing

Drilling

4%Marking

30%

Welding

13%

Microprocessing

13%

Other

8% Cutting

32%

Source: Laser Focus World,

BCC Inc. Market Analysis,Industrial Laser Solutions


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Which Industrial Materials to Drill?Which Industrial Materials to Drill?

Metals Silicon

Plastics Ceramics

CVD Diamond


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Examples of Laser Drilled ShapesExamples of Laser Drilled Shapes

rectangleshaped

angled

blind


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Why Use Lasers to Drill Holes?Why Use Lasers to Drill Holes?

Non-contact enabling technique

High Processing Speed

High Resolution

Flexibility (hole size, shape)

Compactness (small machine footprint)

Cost effectiveness


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Important Laser-Drilling MarketsImportant Laser-Drilling Markets

Dec 1996

Laser

43%

plasma

3%

photovia

42%

punch

3%

mech.drill

9%

Aug 2000

Laser

93%

other2%

photovia

5%

Source: ESI

Main Drivers: Semiconductor (micro via-holes, ink-jetprinting)Aerospace (turbine cooling)

Emerging Markets: Automotive, Pharmaceutical, Biomedical

Source:Excellon Inc

Technologies to Make Vias

Via Size

Aspe

ctRatio(depth/diameter)

10:1

1:1

0.1:1

Through

Vias

Blind

V

ias

UV Laser

CO2Laser

Mechanical

0 50 100 150 200 250 300 (micron)


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Micro-Via DrillingMicro-Via Drilling

Technology Comparison

Mechanical Drilling(hole > 0.1mm)

Drill speed: ~ 500 holes /min

Cost ~$2400 / 105 holes

Laser Drilling(hole < 0.025 mm)

Drill speed: ~ 34000 holes /min

Cost


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Indicative Cost of Laser ProcessingIndicative Cost of Laser Processing

Capital Cost

Laser/Optics

Motion (CNC, galvo, etc)

Cleanroom/ Environment

Machine Vision Software

Sample Handling

Metrology Equipment

Safety Equipment

Downtime

Main Q: Which laser to use?

Running Cost

Optics

Laser consumables

odiode arrays

oflashlampsoassist gases

Water, Power

Sample postprocessing

Other consumables


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UltrashortUltrashort-Pulsed Laser Drilling-Pulsed Laser Drilling

Picosecond or Femtosecond Lasers

Ti:Sapphire, mode locked Vanadate

Wavelength: 780 or 1064 nm and harmonics

Power range: up to10W, up to 500kHz

Pulse Length: 10ps 30fs

AdvantagesMaterial independentMin HAZNo post-processingnecessary

DisadvantagesHigh Cost ($150k+)ComplexFrequent Maintenance

Not mature yet


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Laser-Hole Drilling: Basic DefinitionsLaser-Hole Drilling: Basic Definitions

)d(Diameter

)t(ThicknessRatio_Aspect =

t

Laser Spot Size

2w0 = (4f!f M2 / " D)

Laser Intensity

I(x)=(2P/"w02) exp(-2r2/w0

2)

Hole Taper Angle

# = tan-1(d1-d2 / 2 t)

Focussing Lens

Fourier Transformer


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Laser-Drilling: Important ParametersLaser-Drilling: Important Parameters

Type

Wavelength

Output Power

Pulse Energy

Rep.RatePulse Length

Beam Diameter

Beam Polarisation

Beam Divergence

Spatial

Temporal

Beam Intensity Profile

Laser

AbsorptivityReflectivity

Refractive Index

Surface Roughness

OPTICAL

Thermal ConductivitySpecific Heat

Melting Point

Boiling Point

Evaporation Enthalpy

Surface Tension

Vapour Pressure

THERMOPHYSICAL

DensityHardness

Poisson Ratio

Young's Modulus

MECHANICAL

Material

Lens NA

Spot Size

Shot Overlap

Gas Assist

Focal PlaneProcessing Speed

Drilling Technique

Processing

! IMPORTANT NOTE:

Most parameters are interrelated and vary with temperature, pressure, time,etc.


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Laser Drilling TechniquesLaser Drilling Techniques

For Fast Drilling! Sample or Beam Motion Necessary

! Need High Fluence = Small Spot Size

! Crater < Hole Dimensions

! Helical motion for High Aspect Ratio Features

(Technique offers Good Repeatability, Versatility)

Laser

Beam Path

Helical

Motion

Trepanning Drilling


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Diesel Fuel Filter DrillingDiesel Fuel Filter Drilling

Fuel filters are used to block fuel impuritiesbefore they reach the injectors

Laser Drilling Speed: 100-500 holes / sec

Hole Diameters: 0.05 0.3 mm

Material Thickness:


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Gasoline-Injection Nozzle DrillingGasoline-Injection Nozzle Drilling

Different

Gasoline InjectorConfigurations


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Documents

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