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Predictive Maintenance. 張智星 (Roger Jang) [email protected] http://mirlab.org/jang 台灣大學 資訊系 MIR 實驗室. Problem Definition. Given a set of training data Input: A set of wafers with their sensor readings Output: Maintenance stage (1-3) Goal Construct a model to predict maintenance stage. - PowerPoint PPT Presentation
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112/04/20 1
Predictive Maintenance
張智星 (Roger Jang)
http://mirlab.org/jang
台灣大學 資訊系 MIR 實驗室
-2-
Problem Definition
Given a set of training data Input: A set of wafers with their sensor readings Output: Maintenance stage (1-3)
Goal Construct a model to predict maintenance stage
-3-
Important Statistics
Specs. of the problem No. of recipe steps = 10 No. of sensors = 57 Statistics for a step:
mean, min, max, std, slope (mean is used here)
No. of wafers = 47By machines at different
maintenance stages
No. of maintenance stages = 3
Specs. of classification No. of instances = 47 No. of features =
10*57*5 = 2850 No. of classes = 3
-4-
Average of 57 Sensor Readings
47 curves for each subplot, 10 points for each curveBIASELECTRODEHOUSINGTEMPERATUREMONITORBIASMATCHCURRENTSENSEBIASMATCHIMPEDANCEMAGNITUDEBIASMATCHIMPEDANCEPHASEBIASMATCHPHASEBIASMATCHPHASEDIFFERENCEBIASMATCHSERIESCAPPOSITIONBIASMATCHSHUNTCAPPOSITION
BIASMATCHVOLTAGESENSEBIASRFCURRENTPROBEBIASRFGENFORWARDPOWERBIASRFGENREFLECTEDPOWERBIASRFVOLTAGEPROBECHAMBERFRONTLEFTTEMPERATUREMONITORCHAMBERFRONTRIGHTTEMPERATUREMONITORCHAMBERMANOMETERADJUSTEDPRESSURE
CHAMBERMONITORTEMPERATURECHAMBERREARLEFTTEMPERATUREMONITORCHAMBERREARRIGHTTEMPERATUREMONITORESCBIASVOLTAGE ESCCLAMPVOLTAGE ESCCOOLANTFLOWESCCURRENTMONITOR1ESCCURRENTMONITOR2
ESCTEMPERATUREMONITORFORELINEMANOMETERADJUSTEDPRESSUREFORELINEPRESSUREMANOMETERHEBACKSIDEFLOWHEBACKSIDEPRESSURE IB1VALUE IB2VALUE IB3VALUE
IB4VALUE IB4_SLOP INNERESCTEMPERATUREOUTERESCTEMPERATUREPRESSUREHIGHMANOMETERPROCESSMANOMETERADJUSTEDPRESSURETCPMATCHC1CAPPOSITIONTCPMATCHC3CAPPOSITION
TCPMATCHCURRENTSENSETCPMATCHIMPEDANCEMAGNITUDETCPMATCHIMPEDANCEPHASETCPMATCHPHASETCPMATCHPHASEDIFFERENCETCPMATCHVOLTAGEPROBEV3PEAKTCPMATCHVOLTAGEPROBEV4PEAKTCPMATCHVOLTAGESENSE
TCPMATCHVSWRTCPRFGENFORWARDPOWERTCPRFGENREFLECTEDPOWERTCPWINDOWTEMPERATUREMONITORTCUMONITOR THROTTLEVALVEPOSITIONTHROTTLEVALVETEMPERATUREMONITORTURBOPUMPSPEED
UPPERCHAMBERTEMPERATUREMONITOR
-5-
LDA Projection to 2D Plane for Each Sensor
LDA for dimensionality reduction (10 2)
-6-
Best Performance For Each Sensor
Best LDA projection for a single sensor
0
20
40
60
80
100
Rec
og.
rate
(%
)
Ranking of recog. rates
BIA
SM
AT
CH
CU
RR
EN
TS
EN
SE
(0)
BIA
SM
AT
CH
SE
RIE
SC
AP
PO
SIT
ION
(0)
BIA
SM
AT
CH
SH
UN
TC
AP
PO
SIT
ION
(0)
BIA
SR
FG
EN
FO
RW
AR
DP
OW
ER
(0)
BIA
SR
FG
EN
RE
FLE
CT
ED
PO
WE
R (
0)
IB2V
ALU
E (
0)
IB3V
ALU
E (
0)
IB4V
ALU
E (
0)
TC
PM
AT
CH
VO
LTA
GE
PR
OB
EV
4PE
AK
(0)
TC
PM
AT
CH
VS
WR
(0)
TC
UM
ON
ITO
R (
0)
TU
RB
OP
UM
PS
PE
ED
(0)
BIA
SE
LEC
TR
OD
EH
OU
SIN
GT
EM
PE
RA
TU
RE
MO
NIT
OR
(3)
CH
AM
BE
RR
EA
RLE
FT
TE
MP
ER
AT
UR
EM
ON
ITO
R (
2)
ES
CB
IAS
VO
LTA
GE
(7)
CH
AM
BE
RF
RO
NT
RIG
HT
TE
MP
ER
AT
UR
EM
ON
ITO
R (
8)
PR
OC
ES
SM
AN
OM
ET
ER
AD
JUS
TE
DP
RE
SS
UR
E (
9)
TC
PR
FG
EN
RE
FLE
CT
ED
PO
WE
R (
6)
BIA
SM
AT
CH
IMP
ED
AN
CE
PH
AS
E (
5)B
IAS
RF
CU
RR
EN
TP
RO
BE
(1)
PR
ES
SU
RE
HIG
HM
AN
OM
ET
ER
(1)
TC
PW
IND
OW
TE
MP
ER
AT
UR
EM
ON
ITO
R (
4)
BIA
SM
AT
CH
IMP
ED
AN
CE
MA
GN
ITU
DE
(3)
CH
AM
BE
RM
ON
ITO
RT
EM
PE
RA
TU
RE
(10
)
CH
AM
BE
RR
EA
RR
IGH
TT
EM
PE
RA
TU
RE
MO
NIT
OR
(7)
CH
AM
BE
RF
RO
NT
LEF
TT
EM
PE
RA
TU
RE
MO
NIT
OR
(2)
IB4_
SLO
P (
1)
TC
PR
FG
EN
FO
RW
AR
DP
OW
ER
(8)
TH
RO
TT
LEV
ALV
ET
EM
PE
RA
TU
RE
MO
NIT
OR
(2)
BIA
SR
FV
OLT
AG
EP
RO
BE
(7)
ES
CC
LAM
PV
OLT
AG
E (
1)
OU
TE
RE
SC
TE
MP
ER
AT
UR
E (
3)
TC
PM
AT
CH
VO
LTA
GE
PR
OB
EV
3PE
AK
(5)
BIA
SM
AT
CH
PH
AS
E (
1)
BIA
SM
AT
CH
PH
AS
ED
IFF
ER
EN
CE
(2)
ES
CC
OO
LAN
TF
LOW
(8)
TC
PM
AT
CH
PH
AS
ED
IFF
ER
EN
CE
(7)
BIA
SM
AT
CH
VO
LTA
GE
SE
NS
E (
1)C
HA
MB
ER
MA
NO
ME
TE
RA
DJU
ST
ED
PR
ES
SU
RE
(6)
INN
ER
ES
CT
EM
PE
RA
TU
RE
(7)
UP
PE
RC
HA
MB
ER
TE
MP
ER
AT
UR
EM
ON
ITO
R (
1)
HE
BA
CK
SID
EP
RE
SS
UR
E (
7)
TC
PM
AT
CH
PH
AS
E (
5)
ES
CT
EM
PE
RA
TU
RE
MO
NIT
OR
(6)
ES
CC
UR
RE
NT
MO
NIT
OR
2 (7
)
FO
RE
LIN
EM
AN
OM
ET
ER
AD
JUS
TE
DP
RE
SS
UR
E (
2)
FO
RE
LIN
EP
RE
SS
UR
EM
AN
OM
ET
ER
(2)
HE
BA
CK
SID
EF
LOW
(1)
IB1V
ALU
E (
3)
TC
PM
AT
CH
IMP
ED
AN
CE
MA
GN
ITU
DE
(8)
TC
PM
AT
CH
IMP
ED
AN
CE
PH
AS
E (
6)
TC
PM
AT
CH
VO
LTA
GE
SE
NS
E (
2)
ES
CC
UR
RE
NT
MO
NIT
OR
1 (3
)
TH
RO
TT
LEV
ALV
EP
OS
ITIO
N (
1)
TC
PM
AT
CH
CU
RR
EN
TS
EN
SE
(7)
TC
PM
AT
CH
C1C
AP
PO
SIT
ION
(10
)
TC
PM
AT
CH
C3C
AP
PO
SIT
ION
(7)
-7-
Confusion Matrix for the Selected Sensor
4 2 0
0 18 0
1 2 20
PM1 6
PM2 18
PM3 23
PM1
5
PM2
22
PM3
20
Data counts, RR = 42/47 = 89.3617%
66.6667% 33.3333% 0
0 100% 0
4.3478% 8.6957% 86.9565%
PM1 100%
PM2 100%
PM3 100%
PM1
PM2
PM3
Percentages, RR = 89.3617%
-8-
Comparisons
Result of prediction
0 5 10 15 20 25 30 35 40 45 500
1
2
3
Wafer index
PM
Desired profile
0 5 10 15 20 25 30 35 40 45 500
1
2
3
Wafer index
PM
Predicted profile
Groundtruth:
Predicted:
-9-
Application Case 2
Characteristics Different set of recipes More wafers
-10-
Important Statistics
5 Recipe steps Stabilize, strike, nitridation, dechuck, purge
No. of sensors = 50Used statistics = meanNo. of wafers = 1522No. of maintenance stages = 3
-11-
Best Performance For Each SensorAfter best LDA projection from 5 inputs
0
20
40
60
80
100
Rec
og.
rate
(%
)
Ranking of recog. rates
DIV
CA
P (
0)
DP
N_C
HA
MB
ER
_PR
ES
SU
RE
(0)
DP
N_H
ELI
UM
_LE
AK
(0)
DP
N_O
FF
SE
T_T
AB
LE_D
IVC
AP
___
(0)
DP
N_O
FF
SE
T_T
AB
LE_I
OE
S_L
EV
EL_
__ (
0)
DP
N_O
FF
SE
T_T
AB
LE_P
RE
SS
_MT
OR
R_
(0)
DP
N_O
FF
SE
T_T
AB
LE_S
ER
IES
___
(0)
DP
N_O
FF
SE
T_T
AB
LE_S
HU
NT
___
(0)
DP
N_O
FF
SE
T_T
AB
LE_T
IME
_S_
(0)
DP
N_R
F_G
EN
ER
AT
OR
_DE
LIV
ER
ED
_PO
WE
R (
0)
DP
N_R
F_G
EN
ER
AT
OR
_RE
FLE
CT
ED
_PO
WE
R (
0)
DP
N_R
F_G
EN
ER
AT
OR
_RE
FLE
CT
ION
_CO
EF
FIC
IEN
T (
0)
DP
N_R
F_M
AT
CH
_CA
P_C
UR
RE
NT
_1 (
0)
DP
N_R
F_M
AT
CH
_CA
P_C
UR
RE
NT
_2 (
0)
DP
N_R
F_M
AT
CH
_CA
P_C
UR
RE
NT
_RA
TIO
(0)
ES
C_V
OLT
AG
E (
0)
H_E
__T
EM
P_
(0)
H_E
_WA
TE
R_R
ES
IST
IVIT
Y (
0)
LEA
K_R
AT
E (
0)
PLA
SM
A_P
OW
ER
_FO
RW
AR
D (
0)
ST
EP
_TIM
E (
1)
ES
C_H
E_P
RE
SS
UR
E (
5)
AI_
HE
_PR
ES
SU
RE
_SIG
NA
L (5
)
DP
NN
2_F
LOW
(5)
OT
F_E
XT
_CH
C_O
UT
(5)
ES
C_H
E_F
LOW
(5)
OT
F_R
OT
_CH
C_O
UT
(3)
DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W (
3)
DP
NH
E_F
LOW
(2)
AI_
HE
_FLO
W_S
IGN
AL
(5)
SE
RIE
S (
1)
SH
UN
T (
3)
DP
NN
2_V
_ (2
)
DP
NA
R_F
LOW
(4)
DP
NA
R_V
_ (3
)
MA
INF
RA
ME
_PR
ES
S (
5)
DP
NH
E_V
_ (5
)
OT
F_R
OT
_CH
C_I
N (
4)
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
(1)
AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
(1)
DP
NO
2_F
LOW
(2)
DP
NO
2_V
_ (2
)
OT
F_E
XT
_CH
C_I
N (
5)
DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_
(5)
M_F
_AP
C_
(5)
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R (
3)
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G (
4)
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
(3)
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
(2)
AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
(3)
-12-
Best Perf. For All 435 Sensor Pairs
After best LDA projection from 5*2 inputs
30
40
50
60
70
80
90
100
Rec
og.
rate
(%
)
Ranking of recog. rates
[ES
C_H
E_P
RE
SS
UR
E][
ST
EP
_TIM
E]
(5)
[ST
EP
_TIM
E][
ES
C_H
E_P
RE
SS
UR
E]
(5)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][S
TE
P_T
IME
] (6
)[S
TE
P_T
IME
][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(6)
[DP
NN
2_F
LOW
][S
TE
P_T
IME
] (1
0)[S
TE
P_T
IME
][D
PN
N2_
FLO
W]
(10)
[AI_
HE
_FLO
W_S
IGN
AL]
[ST
EP
_TIM
E]
(2)
[ST
EP
_TIM
E][
AI_
HE
_FLO
W_S
IGN
AL]
(2)
[DP
NN
2_F
LOW
][E
SC
_HE
_PR
ES
SU
RE
] (5
)[E
SC
_HE
_PR
ES
SU
RE
][D
PN
N2_
FLO
W]
(5)
[AI_
HE
_FLO
W_S
IGN
AL]
[DP
NN
2_F
LOW
] (4
)[A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
[DP
NN
2_F
LOW
] (7
)[D
PN
N2_
FLO
W][
AI_
HE
_FLO
W_S
IGN
AL]
(4)
[DP
NN
2_F
LOW
][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(7)
[DP
NN
2_F
LOW
][E
SC
_HE
_FLO
W]
(4)
[ES
C_H
E_F
LOW
][D
PN
N2_
FLO
W]
(4)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][E
SC
_HE
_PR
ES
SU
RE
] (1
0)[E
SC
_HE
_PR
ES
SU
RE
][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(10
)[S
ER
IES
][S
TE
P_T
IME
] (2
)[S
TE
P_T
IME
][S
ER
IES
] (2
)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][S
TE
P_T
IME
] (3
)[S
TE
P_T
IME
][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (3
)[O
TF
_EX
T_C
HC
_OU
T][
ST
EP
_TIM
E]
(3)
[ST
EP
_TIM
E][
OT
F_E
XT
_CH
C_O
UT
] (3
)[A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
[OT
F_E
XT
_CH
C_O
UT
] (5
)[O
TF
_EX
T_C
HC
_OU
T][
AI_
HE
_PR
ES
SU
RE
_SIG
NA
L] (
5)[A
I_H
E_F
LOW
_SIG
NA
L][E
SC
_HE
_FLO
W]
(8)
[ES
C_H
E_F
LOW
][A
I_H
E_F
LOW
_SIG
NA
L] (
8)[A
I_H
E_F
LOW
_SIG
NA
L][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (9
)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][A
I_H
E_F
LOW
_SIG
NA
L] (
9)[E
SC
_HE
_FLO
W][
ST
EP
_TIM
E]
(3)
[ST
EP
_TIM
E][
ES
C_H
E_F
LOW
] (3
)[A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
[SH
UN
T]
(7)
[SH
UN
T][
AI_
HE
_PR
ES
SU
RE
_SIG
NA
L] (
7)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][E
SC
_HE
_FLO
W]
(10)
[ES
C_H
E_F
LOW
][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (1
0)[S
TE
P_T
IME
][D
PN
HE
_FLO
W]
(3)
[DP
NH
E_F
LOW
][S
TE
P_T
IME
] (3
)[A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
[ES
C_H
E_F
LOW
] (1
0)[E
SC
_HE
_FLO
W][
AI_
HE
_PR
ES
SU
RE
_SIG
NA
L] (
10)
[ES
C_H
E_P
RE
SS
UR
E][
OT
F_E
XT
_CH
C_O
UT
] (2
)[O
TF
_EX
T_C
HC
_OU
T][
ES
C_H
E_P
RE
SS
UR
E]
(2)
[DP
NN
2_V
_][O
TF
_EX
T_C
HC
_OU
T]
(2)
[OT
F_E
XT
_CH
C_O
UT
][D
PN
N2_
V_]
(2)
[AI_
HE
_FLO
W_S
IGN
AL]
[ES
C_H
E_P
RE
SS
UR
E]
(10)
[ES
C_H
E_P
RE
SS
UR
E][
AI_
HE
_FLO
W_S
IGN
AL]
(10
)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][O
TF
_EX
T_C
HC
_OU
T]
(6)
[OT
F_E
XT
_CH
C_O
UT
][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (6
)[D
PN
HE
_FLO
W][
ES
C_H
E_P
RE
SS
UR
E]
(9)
[ES
C_H
E_P
RE
SS
UR
E][
DP
NH
E_F
LOW
] (9
)[E
SC
_HE
_PR
ES
SU
RE
][S
ER
IES
] (1
0)[E
SC
_HE
_PR
ES
SU
RE
][S
HU
NT
] (1
0)[S
ER
IES
][E
SC
_HE
_PR
ES
SU
RE
] (1
0)[S
HU
NT
][E
SC
_HE
_PR
ES
SU
RE
] (1
0)[A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
[DP
NH
E_F
LOW
] (3
)[A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
[OT
F_R
OT
_CH
C_O
UT
] (1
)[D
PN
HE
_FLO
W][
AI_
HE
_PR
ES
SU
RE
_SIG
NA
L] (
3)[O
TF
_RO
T_C
HC
_OU
T][
AI_
HE
_PR
ES
SU
RE
_SIG
NA
L] (
1)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][D
PN
N2_
FLO
W]
(4)
[DP
NN
2_F
LOW
][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (4
)[D
PN
N2_
FLO
W][
SH
UN
T]
(6)
[SH
UN
T][
DP
NN
2_F
LOW
] (6
)[D
PN
N2_
FLO
W][
OT
F_R
OT
_CH
C_O
UT
] (1
0)[O
TF
_RO
T_C
HC
_OU
T][
DP
NN
2_F
LOW
] (1
0)[E
SC
_HE
_FLO
W][
SH
UN
T]
(4)
[SH
UN
T][
ES
C_H
E_F
LOW
] (4
)[A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W]
(10)
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W][
AI_
HE
_PR
ES
SU
RE
_SIG
NA
L] (
10)
[DP
NN
2_F
LOW
][O
TF
_EX
T_C
HC
_OU
T]
(4)
[ES
C_H
E_P
RE
SS
UR
E][
OT
F_R
OT
_CH
C_O
UT
] (2
)[O
TF
_EX
T_C
HC
_OU
T][
DP
NN
2_F
LOW
] (4
)[O
TF
_RO
T_C
HC
_OU
T][
ES
C_H
E_P
RE
SS
UR
E]
(2)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][S
ER
IES
] (9
)[S
ER
IES
][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(9)
[OT
F_R
OT
_CH
C_O
UT
][S
TE
P_T
IME
] (1
0)[S
TE
P_T
IME
][O
TF
_RO
T_C
HC
_OU
T]
(10)
[SH
UN
T][
ST
EP
_TIM
E]
(10)
[ST
EP
_TIM
E][
SH
UN
T]
(10)
[DP
NH
E_F
LOW
][D
PN
N2_
FLO
W]
(3)
[DP
NN
2_F
LOW
][D
PN
HE
_FLO
W]
(3)
[ES
C_H
E_F
LOW
][E
SC
_HE
_PR
ES
SU
RE
] (1
0)[E
SC
_HE
_PR
ES
SU
RE
][E
SC
_HE
_FLO
W]
(10)
[DP
NN
2_V
_][O
TF
_RO
T_C
HC
_OU
T]
(2)
[OT
F_R
OT
_CH
C_O
UT
][D
PN
N2_
V_]
(2)
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W][
OT
F_R
OT
_CH
C_O
UT
] (5
)[O
TF
_RO
T_C
HC
_OU
T][
DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W]
(5)
[ES
C_H
E_F
LOW
][O
TF
_EX
T_C
HC
_OU
T]
(3)
[ES
C_H
E_F
LOW
][O
TF
_RO
T_C
HC
_OU
T]
(3)
[OT
F_E
XT
_CH
C_O
UT
][E
SC
_HE
_FLO
W]
(3)
[OT
F_R
OT
_CH
C_O
UT
][E
SC
_HE
_FLO
W]
(3)
[AI_
HE
_FLO
W_S
IGN
AL]
[SH
UN
T]
(3)
[SH
UN
T][
AI_
HE
_FLO
W_S
IGN
AL]
(3)
[OT
F_E
XT
_CH
C_O
UT
][O
TF
_RO
T_C
HC
_OU
T]
(10)
[OT
F_R
OT
_CH
C_O
UT
][O
TF
_EX
T_C
HC
_OU
T]
(10)
[DP
NN
2_V
_][S
HU
NT
] (3
)[S
HU
NT
][D
PN
N2_
V_]
(3)
[DP
NN
2_F
LOW
][S
ER
IES
] (3
)[S
ER
IES
][D
PN
N2_
FLO
W]
(3)
[AI_
HE
_FLO
W_S
IGN
AL]
[DP
NH
E_F
LOW
] (7
)[A
I_H
E_F
LOW
_SIG
NA
L][O
TF
_EX
T_C
HC
_OU
T]
(3)
[DP
NH
E_F
LOW
][A
I_H
E_F
LOW
_SIG
NA
L] (
7)[O
TF
_EX
T_C
HC
_OU
T][
AI_
HE
_FLO
W_S
IGN
AL]
(3)
[DP
NN
2_V
_][E
SC
_HE
_PR
ES
SU
RE
] (3
)[E
SC
_HE
_PR
ES
SU
RE
][D
PN
N2_
V_]
(3)
[AI_
HE
_FLO
W_S
IGN
AL]
[OT
F_R
OT
_CH
C_O
UT
] (3
)[O
TF
_RO
T_C
HC
_OU
T][
AI_
HE
_FLO
W_S
IGN
AL]
(3)
[AI_
HE
_FLO
W_S
IGN
AL]
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L] (
10)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][A
I_H
E_F
LOW
_SIG
NA
L] (
10)
[ES
C_H
E_F
LOW
][S
ER
IES
] (4
)[S
ER
IES
][E
SC
_HE
_FLO
W]
(4)
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W][
SH
UN
T]
(5)
[SH
UN
T][
DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W]
(5)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][D
PN
N2_
V_]
(4)
[DP
NN
2_V
_][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(4)
[DP
NA
R_F
LOW
][E
SC
_HE
_PR
ES
SU
RE
] (5
)[E
SC
_HE
_PR
ES
SU
RE
][D
PN
AR
_FLO
W]
(5)
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W][
ES
C_H
E_P
RE
SS
UR
E]
(10)
[ES
C_H
E_P
RE
SS
UR
E][
DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W]
(10)
[AI_
HE
_FLO
W_S
IGN
AL]
[SE
RIE
S]
(4)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][D
PN
AR
_FLO
W]
(3)
[DP
NA
R_F
LOW
][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(3)
[SE
RIE
S][
AI_
HE
_FLO
W_S
IGN
AL]
(4)
[DP
NA
R_F
LOW
][S
TE
P_T
IME
] (7
)[D
PN
N2_
V_]
[ES
C_H
E_F
LOW
] (3
)[E
SC
_HE
_FLO
W][
DP
NN
2_V
_] (
3)[S
TE
P_T
IME
][D
PN
AR
_FLO
W]
(7)
[DP
NN
2_F
LOW
][D
PN
N2_
V_]
(2)
[DP
NN
2_V
_][D
PN
N2_
FLO
W]
(2)
[DP
NA
R_F
LOW
][D
PN
N2_
FLO
W]
(2)
[DP
NH
E_F
LOW
][E
SC
_HE
_FLO
W]
(5)
[DP
NN
2_F
LOW
][D
PN
AR
_FLO
W]
(2)
[ES
C_H
E_F
LOW
][D
PN
HE
_FLO
W]
(5)
[DP
NN
2_V
_][S
TE
P_T
IME
] (1
)[S
TE
P_T
IME
][D
PN
N2_
V_]
(1)
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W][
SE
RIE
S]
(4)
[SE
RIE
S][
DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W]
(4)
[SE
RIE
S][
SH
UN
T]
(10)
[DP
NH
E_F
LOW
][O
TF
_EX
T_C
HC
_OU
T]
(2)
[OT
F_E
XT
_CH
C_O
UT
][D
PN
HE
_FLO
W]
(2)
[SH
UN
T][
SE
RIE
S]
(10)
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W][
DP
NN
2_V
_] (
3)[D
PN
N2_
V_]
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W]
(3)
[OT
F_E
XT
_CH
C_O
UT
][S
HU
NT
] (6
)[S
HU
NT
][O
TF
_EX
T_C
HC
_OU
T]
(6)
[OT
F_R
OT
_CH
C_O
UT
][S
HU
NT
] (7
)[S
HU
NT
][O
TF
_RO
T_C
HC
_OU
T]
(7)
[OT
F_E
XT
_CH
C_O
UT
][S
ER
IES
] (5
)[S
ER
IES
][O
TF
_EX
T_C
HC
_OU
T]
(5)
[DP
NA
R_F
LOW
][D
PN
N2_
V_]
(2)
[DP
NN
2_V
_][D
PN
AR
_FLO
W]
(2)
[MA
INF
RA
ME
_PR
ES
S][
ST
EP
_TIM
E]
(5)
[OT
F_R
OT
_CH
C_O
UT
][D
PN
HE
_FLO
W]
(2)
[ST
EP
_TIM
E][
MA
INF
RA
ME
_PR
ES
S]
(5)
[DP
NA
R_F
LOW
][O
TF
_RO
T_C
HC
_OU
T]
(2)
[DP
NH
E_F
LOW
][O
TF
_RO
T_C
HC
_OU
T]
(2)
[OT
F_R
OT
_CH
C_O
UT
][D
PN
AR
_FLO
W]
(2)
[DP
NH
E_F
LOW
][D
PN
N2_
V_]
(3)
[DP
NN
2_V
_][D
PN
HE
_FLO
W]
(3)
[AI_
HE
_FLO
W_S
IGN
AL]
[DP
NN
2_V
_] (
3)[D
PN
AR
_FLO
W][
ES
C_H
E_F
LOW
] (4
)[D
PN
N2_
V_]
[AI_
HE
_FLO
W_S
IGN
AL]
(3)
[ES
C_H
E_F
LOW
][D
PN
AR
_FLO
W]
(4)
[DP
NN
2_F
LOW
][M
AIN
FR
AM
E_P
RE
SS
] (6
)[M
AIN
FR
AM
E_P
RE
SS
][D
PN
N2_
FLO
W]
(6)
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W][
DP
NH
E_F
LOW
] (6
)[D
PN
HE
_FLO
W][
DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W]
(6)
[DP
NN
2_V
_][M
AIN
FR
AM
E_P
RE
SS
] (3
)[M
AIN
FR
AM
E_P
RE
SS
][D
PN
N2_
V_]
(3)
[MA
INF
RA
ME
_PR
ES
S][
SH
UN
T]
(5)
[SH
UN
T][
MA
INF
RA
ME
_PR
ES
S]
(5)
[DP
NA
R_V
_][D
PN
N2_
FLO
W]
(3)
[DP
NN
2_F
LOW
][D
PN
AR
_V_]
(3)
[DP
NA
R_F
LOW
][O
TF
_EX
T_C
HC
_OU
T]
(4)
[ES
C_H
E_F
LOW
][M
AIN
FR
AM
E_P
RE
SS
] (5
)[M
AIN
FR
AM
E_P
RE
SS
][E
SC
_HE
_FLO
W]
(5)
[OT
F_E
XT
_CH
C_O
UT
][D
PN
AR
_FLO
W]
(4)
[DP
NN
2_V
_][S
ER
IES
] (3
)[S
ER
IES
][D
PN
N2_
V_]
(3)
[AI_
HE
_FLO
W_S
IGN
AL]
[DP
NA
R_F
LOW
] (3
)[D
PN
AR
_FLO
W][
AI_
HE
_FLO
W_S
IGN
AL]
(3)
[DP
NA
R_F
LOW
][D
PN
AR
_V_]
(2)
[DP
NA
R_V
_][D
PN
AR
_FLO
W]
(2)
[DP
NA
R_V
_][E
SC
_HE
_PR
ES
SU
RE
] (3
)[E
SC
_HE
_PR
ES
SU
RE
][D
PN
AR
_V_]
(3)
[DP
NA
R_V
_][S
TE
P_T
IME
] (2
)[S
TE
P_T
IME
][D
PN
AR
_V_]
(2)
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W][
DP
NA
R_F
LOW
] (4
)[D
PN
AR
_FLO
W][
DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W]
(4)
[ES
C_H
E_P
RE
SS
UR
E][
MA
INF
RA
ME
_PR
ES
S]
(9)
[MA
INF
RA
ME
_PR
ES
S][
ES
C_H
E_P
RE
SS
UR
E]
(9)
[SH
UN
T][
DP
NH
E_F
LOW
] (3
)[A
I_H
E_F
LOW
_SIG
NA
L][M
AIN
FR
AM
E_P
RE
SS
] (7
)[D
PN
HE
_FLO
W][
SH
UN
T]
(3)
[M_F
_AP
C_]
[OT
F_E
XT
_CH
C_O
UT
] (8
)[M
_F_A
PC
_][O
TF
_RO
T_C
HC
_OU
T]
(5)
[MA
INF
RA
ME
_PR
ES
S][
AI_
HE
_FLO
W_S
IGN
AL]
(7)
[OT
F_E
XT
_CH
C_O
UT
][M
_F_A
PC
_] (
8)[O
TF
_RO
T_C
HC
_OU
T][
M_F
_AP
C_]
(5)
[MA
INF
RA
ME
_PR
ES
S][
OT
F_R
OT
_CH
C_O
UT
] (3
)[O
TF
_RO
T_C
HC
_OU
T][
MA
INF
RA
ME
_PR
ES
S]
(3)
[DP
NA
R_F
LOW
][D
PN
HE
_FLO
W]
(3)
[DP
NA
R_F
LOW
][S
HU
NT
] (7
)[D
PN
HE
_FLO
W][
DP
NA
R_F
LOW
] (3
)[S
HU
NT
][D
PN
AR
_FLO
W]
(7)
[MA
INF
RA
ME
_PR
ES
S][
OT
F_E
XT
_CH
C_O
UT
] (4
)[O
TF
_EX
T_C
HC
_OU
T][
MA
INF
RA
ME
_PR
ES
S]
(4)
[DP
NA
R_V
_][O
TF
_RO
T_C
HC
_OU
T]
(3)
[OT
F_R
OT
_CH
C_O
UT
][D
PN
AR
_V_]
(3)
[DP
NA
R_F
LOW
][M
AIN
FR
AM
E_P
RE
SS
] (5
)[M
AIN
FR
AM
E_P
RE
SS
][D
PN
AR
_FLO
W]
(5)
[DP
NA
R_V
_][D
PN
HE
_FLO
W]
(2)
[DP
NH
E_F
LOW
][D
PN
AR
_V_]
(2)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][M
AIN
FR
AM
E_P
RE
SS
] (1
0)[D
PN
AR
_V_]
[OT
F_E
XT
_CH
C_O
UT
] (4
)[M
AIN
FR
AM
E_P
RE
SS
][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(10
)[O
TF
_EX
T_C
HC
_OU
T][
DP
NA
R_V
_] (
4)[A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
[DP
NA
R_V
_] (
1)[D
PN
AR
_V_]
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L] (
1)[D
PN
AR
_V_]
[DP
NN
2_V
_] (
7)[D
PN
N2_
V_]
[DP
NA
R_V
_] (
7)[A
I_H
E_F
LOW
_SIG
NA
L][D
PN
AR
_V_]
(5)
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W][
MA
INF
RA
ME
_PR
ES
S]
(9)
[DP
NA
R_V
_][A
I_H
E_F
LOW
_SIG
NA
L] (
5)[M
AIN
FR
AM
E_P
RE
SS
][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (9
)[O
TF
_RO
T_C
HC
_OU
T][
SE
RIE
S]
(5)
[SE
RIE
S][
OT
F_R
OT
_CH
C_O
UT
] (5
)[D
PN
HE
_FLO
W][
SE
RIE
S]
(9)
[SE
RIE
S][
DP
NH
E_F
LOW
] (8
)[D
PN
AR
_V_]
[MA
INF
RA
ME
_PR
ES
S]
(5)
[MA
INF
RA
ME
_PR
ES
S][
DP
NA
R_V
_] (
5)[D
PN
AR
_V_]
[ES
C_H
E_F
LOW
] (4
)[E
SC
_HE
_FLO
W][
DP
NA
R_V
_] (
4)[M
AIN
FR
AM
E_P
RE
SS
][S
ER
IES
] (7
)[S
ER
IES
][M
AIN
FR
AM
E_P
RE
SS
] (7
)[D
PN
HE
_V_]
[ST
EP
_TIM
E]
(3)
[ST
EP
_TIM
E][
DP
NH
E_V
_] (
3)[D
PN
HE
_V_]
[DP
NN
2_F
LOW
] (1
)[D
PN
N2_
FLO
W][
DP
NH
E_V
_] (
1)[D
PN
AR
_FLO
W][
SE
RIE
S]
(5)
[DP
NH
E_F
LOW
][M
AIN
FR
AM
E_P
RE
SS
] (6
)[M
AIN
FR
AM
E_P
RE
SS
][D
PN
HE
_FLO
W]
(6)
[SE
RIE
S][
DP
NA
R_F
LOW
] (5
)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][D
PN
AR
_V_]
(4)
[DP
NA
R_V
_][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (4
)[D
PN
HE
_V_]
[ES
C_H
E_P
RE
SS
UR
E]
(2)
[ES
C_H
E_P
RE
SS
UR
E][
DP
NH
E_V
_] (
2)[D
PN
HE
_FLO
W][
DP
NH
E_V
_] (
4)[D
PN
HE
_V_]
[DP
NH
E_F
LOW
] (4
)[A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
[DP
NH
E_V
_] (
1)[D
PN
HE
_V_]
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L] (
1)[D
PN
AR
_V_]
[SH
UN
T]
(3)
[SH
UN
T][
DP
NA
R_V
_] (
3)[D
PN
HE
_V_]
[MA
INF
RA
ME
_PR
ES
S]
(4)
[DP
NH
E_V
_][O
TF
_RO
T_C
HC
_OU
T]
(4)
[MA
INF
RA
ME
_PR
ES
S][
DP
NH
E_V
_] (
4)[O
TF
_RO
T_C
HC
_OU
T][
DP
NH
E_V
_] (
4)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
ST
EP
_TIM
E]
(2)
[ST
EP
_TIM
E][
AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (2
)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
ES
C_H
E_P
RE
SS
UR
E]
(2)
[ES
C_H
E_P
RE
SS
UR
E][
AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (2
)[D
PN
AR
_FLO
W][
DP
NH
E_V
_] (
2)[D
PN
HE
_V_]
[DP
NA
R_F
LOW
] (2
)[D
PN
HE
_V_]
[OT
F_E
XT
_CH
C_O
UT
] (3
)[O
TF
_EX
T_C
HC
_OU
T][
DP
NH
E_V
_] (
3)[D
PN
HE
_V_]
[DP
NN
2_V
_] (
3)[D
PN
N2_
V_]
[DP
NH
E_V
_] (
3)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (4
)[A
I_H
E_F
LOW
_SIG
NA
L][D
PN
HE
_V_]
(6)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(4)
[DP
NH
E_V
_][A
I_H
E_F
LOW
_SIG
NA
L] (
6)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
AI_
HE
_PR
ES
SU
RE
_SIG
NA
L] (
1)[A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (1
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][O
TF
_EX
T_C
HC
_OU
T]
(10)
[OT
F_R
OT
_CH
C_I
N][
ST
EP
_TIM
E]
(4)
[ST
EP
_TIM
E][
OT
F_R
OT
_CH
C_I
N]
(4)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][O
TF
_RO
T_C
HC
_IN
] (8
)[O
TF
_EX
T_C
HC
_OU
T][
DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[O
TF
_RO
T_C
HC
_IN
][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(8)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][E
SC
_HE
_FLO
W]
(1)
[ES
C_H
E_F
LOW
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(1)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][O
TF
_EX
T_C
HC
_OU
T]
(2)
[OT
F_E
XT
_CH
C_O
UT
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(2)
[OT
F_E
XT
_CH
C_O
UT
][O
TF
_RO
T_C
HC
_IN
] (1
0)[O
TF
_RO
T_C
HC
_IN
][O
TF
_EX
T_C
HC
_OU
T]
(10)
[DP
NA
R_V
_][D
PN
HE
_V_]
(4)
[DP
NH
E_V
_][D
PN
AR
_V_]
(4)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][A
I_H
E_F
LOW
_SIG
NA
L] (
2)[A
I_H
E_F
LOW
_SIG
NA
L][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(2)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][E
SC
_HE
_PR
ES
SU
RE
] (7
)[E
SC
_HE
_PR
ES
SU
RE
][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(7)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][D
PN
HE
_FLO
W]
(2)
[DP
NH
E_F
LOW
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(2)
[DP
NH
E_V
_][E
SC
_HE
_FLO
W]
(5)
[ES
C_H
E_F
LOW
][D
PN
HE
_V_]
(5)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(1)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(1)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][M
_F_A
PC
_] (
2)[M
_F_A
PC
_][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(2)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][M
AIN
FR
AM
E_P
RE
SS
] (1
)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
ST
EP
_TIM
E]
(4)
[MA
INF
RA
ME
_PR
ES
S][
AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (1
)[S
TE
P_T
IME
][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(4)
[ES
C_H
E_P
RE
SS
UR
E][
OT
F_R
OT
_CH
C_I
N]
(9)
[OT
F_R
OT
_CH
C_I
N][
ES
C_H
E_P
RE
SS
UR
E]
(9)
[DP
NA
R_V
_][S
ER
IES
] (3
)[S
ER
IES
][D
PN
AR
_V_]
(3)
[DP
NN
2_F
LOW
][D
PN
O2_
FLO
W]
(4)
[DP
NO
2_F
LOW
][D
PN
N2_
FLO
W]
(4)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][D
PN
N2_
FLO
W]
(3)
[DP
NN
2_F
LOW
][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(3)
[DP
NO
2_F
LOW
][S
TE
P_T
IME
] (3
)[S
TE
P_T
IME
][D
PN
O2_
FLO
W]
(3)
[AI_
HE
_FLO
W_S
IGN
AL]
[OT
F_R
OT
_CH
C_I
N]
(3)
[DP
NN
2_F
LOW
][O
TF
_RO
T_C
HC
_IN
] (7
)[O
TF
_RO
T_C
HC
_IN
][A
I_H
E_F
LOW
_SIG
NA
L] (
3)[O
TF
_RO
T_C
HC
_IN
][D
PN
N2_
FLO
W]
(7)
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W][
DP
NH
E_V
_] (
6)[D
PN
HE
_V_]
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W]
(6)
[ES
C_H
E_F
LOW
][O
TF
_RO
T_C
HC
_IN
] (3
)[O
TF
_RO
T_C
HC
_IN
][E
SC
_HE
_FLO
W]
(3)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][D
PN
AR
_FLO
W]
(2)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][D
PN
O2_
FLO
W]
(1)
[DP
NA
R_F
LOW
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(2)
[DP
NO
2_F
LOW
][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(1)
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W][
OT
F_R
OT
_CH
C_I
N]
(4)
[OT
F_R
OT
_CH
C_I
N][
DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W]
(4)
[DP
NN
2_F
LOW
][M
_F_A
PC
_] (
7)[M
_F_A
PC
_][D
PN
N2_
FLO
W]
(7)
[DP
NO
2_V
_][E
SC
_HE
_PR
ES
SU
RE
] (3
)[E
SC
_HE
_PR
ES
SU
RE
][D
PN
O2_
V_]
(3)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][D
PN
N2_
FLO
W]
(2)
[DP
NN
2_F
LOW
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(2)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (3
)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(3)
[DP
NO
2_F
LOW
][E
SC
_HE
_PR
ES
SU
RE
] (4
)[E
SC
_HE
_PR
ES
SU
RE
][D
PN
O2_
FLO
W]
(4)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][O
TF
_EX
T_C
HC
_OU
T]
(4)
[OT
F_E
XT
_CH
C_O
UT
][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(4)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][D
PN
O2_
V_]
(2)
[DP
NO
2_V
_][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(2)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][D
PN
N2_
V_]
(2)
[DP
NN
2_V
_][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(2)
[DP
NN
2_V
_][O
TF
_RO
T_C
HC
_IN
] (2
)[O
TF
_RO
T_C
HC
_IN
][D
PN
N2_
V_]
(2)
[OT
F_R
OT
_CH
C_I
N][
OT
F_R
OT
_CH
C_O
UT
] (3
)[O
TF
_RO
T_C
HC
_OU
T][
OT
F_R
OT
_CH
C_I
N]
(3)
[DP
NO
2_F
LOW
][E
SC
_HE
_FLO
W]
(4)
[ES
C_H
E_F
LOW
][D
PN
O2_
FLO
W]
(4)
[DP
NH
E_V
_][S
HU
NT
] (4
)[D
PN
N2_
V_]
[DP
NO
2_F
LOW
] (3
)[D
PN
O2_
FLO
W][
DP
NN
2_V
_] (
3)[M
AIN
FR
AM
E_P
RE
SS
][O
TF
_RO
T_C
HC
_IN
] (3
)[O
TF
_RO
T_C
HC
_IN
][M
AIN
FR
AM
E_P
RE
SS
] (3
)[S
HU
NT
][D
PN
HE
_V_]
(4)
[DP
NA
R_F
LOW
][O
TF
_RO
T_C
HC
_IN
] (3
)[O
TF
_RO
T_C
HC
_IN
][D
PN
AR
_FLO
W]
(3)
[DP
NO
2_F
LOW
][M
AIN
FR
AM
E_P
RE
SS
] (4
)[M
AIN
FR
AM
E_P
RE
SS
][D
PN
O2_
FLO
W]
(4)
[DP
NA
R_V
_][O
TF
_RO
T_C
HC
_IN
] (3
)[D
PN
N2_
V_]
[DP
NO
2_V
_] (
2)[D
PN
O2_
V_]
[DP
NN
2_V
_] (
2)[M
_F_A
PC
_][O
TF
_RO
T_C
HC
_IN
] (6
)[O
TF
_RO
T_C
HC
_IN
][D
PN
AR
_V_]
(3)
[OT
F_R
OT
_CH
C_I
N][
M_F
_AP
C_]
(6)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][S
ER
IES
] (2
)[S
ER
IES
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(2)
[DP
NN
2_F
LOW
][D
PN
O2_
V_]
(1)
[DP
NO
2_V
_][D
PN
N2_
FLO
W]
(1)
[AI_
HE
_FLO
W_S
IGN
AL]
[DP
NO
2_F
LOW
] (3
)[D
PN
O2_
FLO
W][
AI_
HE
_FLO
W_S
IGN
AL]
(3)
[DP
NA
R_F
LOW
][D
PN
O2_
V_]
(1)
[DP
NO
2_V
_][D
PN
AR
_FLO
W]
(1)
[DP
NO
2_F
LOW
][O
TF
_EX
T_C
HC
_OU
T]
(3)
[DP
NO
2_F
LOW
][O
TF
_RO
T_C
HC
_OU
T]
(2)
[OT
F_E
XT
_CH
C_O
UT
][D
PN
O2_
FLO
W]
(3)
[OT
F_R
OT
_CH
C_I
N][
DP
NH
E_F
LOW
] (2
)[O
TF
_RO
T_C
HC
_OU
T][
DP
NO
2_F
LOW
] (2
)[D
PN
HE
_FLO
W][
OT
F_R
OT
_CH
C_I
N]
(2)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][O
TF
_RO
T_C
HC
_OU
T]
(4)
[OT
F_R
OT
_CH
C_O
UT
][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(4)
[AI_
HE
_FLO
W_S
IGN
AL]
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (3
)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
AI_
HE
_FLO
W_S
IGN
AL]
(3)
[DP
NH
E_F
LOW
][D
PN
O2_
V_]
(2)
[DP
NO
2_V
_][D
PN
HE
_FLO
W]
(2)
[DP
NO
2_V
_][S
TE
P_T
IME
] (1
)[S
TE
P_T
IME
][D
PN
O2_
V_]
(1)
[AI_
HE
_FLO
W_S
IGN
AL]
[DP
NO
2_V
_] (
4)[D
PN
O2_
V_]
[AI_
HE
_FLO
W_S
IGN
AL]
(4)
[OT
F_R
OT
_CH
C_I
N][
SH
UN
T]
(9)
[SH
UN
T][
OT
F_R
OT
_CH
C_I
N]
(9)
[DP
NA
R_F
LOW
][D
PN
O2_
FLO
W]
(1)
[DP
NO
2_F
LOW
][D
PN
AR
_FLO
W]
(1)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[OT
F_R
OT
_CH
C_O
UT
] (1
0)[O
TF
_RO
T_C
HC
_OU
T][
DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[D
PN
HE
_FLO
W][
DP
NO
2_F
LOW
] (2
)[D
PN
HE
_V_]
[OT
F_R
OT
_CH
C_I
N]
(2)
[DP
NO
2_F
LOW
][D
PN
HE
_FLO
W]
(2)
[OT
F_R
OT
_CH
C_I
N][
DP
NH
E_V
_] (
2)[D
PN
O2_
V_]
[MA
INF
RA
ME
_PR
ES
S]
(2)
[MA
INF
RA
ME
_PR
ES
S][
DP
NO
2_V
_] (
2)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
SH
UN
T]
(2)
[SH
UN
T][
AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (2
)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][D
PN
O2_
V_]
(4)
[DP
NO
2_V
_][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (4
)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
ES
C_H
E_F
LOW
] (3
)[D
PN
O2_
FLO
W][
SH
UN
T]
(5)
[DP
NO
2_V
_][E
SC
_HE
_FLO
W]
(4)
[ES
C_H
E_F
LOW
][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(3)
[ES
C_H
E_F
LOW
][D
PN
O2_
V_]
(4)
[SH
UN
T][
DP
NO
2_F
LOW
] (5
)[D
PN
AR
_V_]
[DP
NO
2_V
_] (
3)[D
PN
O2_
V_]
[DP
NA
R_V
_] (
3)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
DP
NH
E_F
LOW
] (4
)[D
PN
HE
_FLO
W][
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (4
)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
MA
INF
RA
ME
_PR
ES
S]
(3)
[MA
INF
RA
ME
_PR
ES
S][
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (3
)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
SH
UN
T]
(7)
[SH
UN
T][
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (7
)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
OT
F_R
OT
_CH
C_O
UT
] (2
)[O
TF
_RO
T_C
HC
_OU
T][
AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (2
)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W]
(4)
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W][
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (4
)[D
PN
O2_
V_]
[OT
F_E
XT
_CH
C_O
UT
] (2
)[O
TF
_EX
T_C
HC
_OU
T][
DP
NO
2_V
_] (
2)[D
PN
HE
_V_]
[SE
RIE
S]
(4)
[SE
RIE
S][
DP
NH
E_V
_] (
4)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][D
PN
O2_
FLO
W]
(4)
[DP
NO
2_F
LOW
][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (4
)[D
PN
O2_
V_]
[OT
F_R
OT
_CH
C_O
UT
] (2
)[O
TF
_RO
T_C
HC
_OU
T][
DP
NO
2_V
_] (
2)[D
PN
O2_
FLO
W][
SE
RIE
S]
(4)
[SE
RIE
S][
DP
NO
2_F
LOW
] (4
)[D
PN
O2_
V_]
[SH
UN
T]
(4)
[OT
F_R
OT
_CH
C_I
N][
SE
RIE
S]
(5)
[SE
RIE
S][
OT
F_R
OT
_CH
C_I
N]
(5)
[SH
UN
T][
DP
NO
2_V
_] (
4)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
DP
NA
R_F
LOW
] (5
)[D
PN
AR
_FLO
W][
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (5
)[D
PN
AR
_V_]
[DP
NO
2_F
LOW
] (2
)[D
PN
O2_
FLO
W][
DP
NA
R_V
_] (
2)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
SE
RIE
S]
(6)
[SE
RIE
S][
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (6
)[D
PN
O2_
V_]
[SE
RIE
S]
(4)
[SE
RIE
S][
DP
NO
2_V
_] (
4)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
DP
NO
2_F
LOW
] (3
)[D
PN
O2_
FLO
W][
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (3
)[D
PN
O2_
FLO
W][
DP
NO
2_V
_] (
2)[D
PN
O2_
V_]
[DP
NO
2_F
LOW
] (2
)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
DP
NA
R_V
_] (
7)[D
PN
AR
_V_]
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (7
)[M
_F_A
PC
_][S
HU
NT
] (1
0)[S
HU
NT
][M
_F_A
PC
_] (
10)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][D
PN
N2_
V_]
(3)
[DP
NN
2_V
_][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(3)
[M_F
_AP
C_]
[ST
EP
_TIM
E]
(10)
[OT
F_R
OT
_CH
C_I
N][
OT
F_E
XT
_CH
C_I
N]
(10)
[ST
EP
_TIM
E][
M_F
_AP
C_]
(10
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][D
PN
N2_
FLO
W]
(10)
[DP
NN
2_F
LOW
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[OT
F_E
XT
_CH
C_O
UT
][O
TF
_EX
T_C
HC
_IN
] (1
0)[O
TF
_EX
T_C
HC
_IN
][O
TF
_RO
T_C
HC
_IN
] (1
0)[O
TF
_EX
T_C
HC
_IN
][O
TF
_EX
T_C
HC
_OU
T]
(10)
[DP
NA
R_F
LOW
][O
TF
_EX
T_C
HC
_IN
] (8
)[O
TF
_EX
T_C
HC
_IN
][D
PN
AR
_FLO
W]
(8)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][D
PN
O2_
FLO
W]
(1)
[DP
NO
2_F
LOW
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(1)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][D
PN
AR
_V_]
(4)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[ST
EP
_TIM
E]
(10)
[DP
NA
R_V
_][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(4)
[ST
EP
_TIM
E][
DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[D
PN
HE
_V_]
[DP
NO
2_V
_] (
5)[D
PN
O2_
V_]
[DP
NH
E_V
_] (
5)[O
TF
_EX
T_C
HC
_IN
][S
TE
P_T
IME
] (8
)[S
TE
P_T
IME
][O
TF
_EX
T_C
HC
_IN
] (8
)[A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R][
DP
NN
2_F
LOW
] (5
)[D
PN
N2_
FLO
W][
AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (5
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][E
SC
_HE
_PR
ES
SU
RE
] (6
)[E
SC
_HE
_PR
ES
SU
RE
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
6)[D
PN
N2_
FLO
W][
OT
F_E
XT
_CH
C_I
N]
(2)
[DP
NN
2_V
_][M
_F_A
PC
_] (
10)
[M_F
_AP
C_]
[DP
NN
2_V
_] (
10)
[OT
F_E
XT
_CH
C_I
N][
DP
NN
2_F
LOW
] (2
)[A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R][
OT
F_E
XT
_CH
C_O
UT
] (4
)[D
PN
HE
_V_]
[DP
NO
2_F
LOW
] (3
)[D
PN
N2_
V_]
[OT
F_E
XT
_CH
C_I
N]
(3)
[DP
NO
2_F
LOW
][D
PN
HE
_V_]
(3)
[OT
F_E
XT
_CH
C_I
N][
DP
NN
2_V
_] (
3)[O
TF
_EX
T_C
HC
_OU
T][
AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (4
)[O
TF
_RO
T_C
HC
_OU
T][
OT
F_E
XT
_CH
C_I
N]
(10)
[DP
NA
R_V
_][O
TF
_EX
T_C
HC
_IN
] (9
)[E
SC
_HE
_FLO
W][
M_F
_AP
C_]
(10
)[M
_F_A
PC
_][E
SC
_HE
_FLO
W]
(10)
[OT
F_E
XT
_CH
C_I
N][
DP
NA
R_V
_] (
9)[O
TF
_EX
T_C
HC
_IN
][O
TF
_RO
T_C
HC
_OU
T]
(10)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
9)[A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
[OT
F_E
XT
_CH
C_I
N]
(5)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L] (
9)[D
PN
HE
_FLO
W][
OT
F_E
XT
_CH
C_I
N]
(5)
[OT
F_E
XT
_CH
C_I
N][
AI_
HE
_PR
ES
SU
RE
_SIG
NA
L] (
5)[O
TF
_EX
T_C
HC
_IN
][D
PN
HE
_FLO
W]
(5)
[MA
INF
RA
ME
_PR
ES
S][
OT
F_E
XT
_CH
C_I
N]
(3)
[OT
F_E
XT
_CH
C_I
N][
MA
INF
RA
ME
_PR
ES
S]
(3)
[ES
C_H
E_P
RE
SS
UR
E][
OT
F_E
XT
_CH
C_I
N]
(5)
[OT
F_E
XT
_CH
C_I
N][
ES
C_H
E_P
RE
SS
UR
E]
(5)
[DP
NA
R_F
LOW
][M
_F_A
PC
_] (
10)
[M_F
_AP
C_]
[DP
NA
R_F
LOW
] (1
0)[A
I_H
E_F
LOW
_SIG
NA
L][M
_F_A
PC
_] (
10)
[M_F
_AP
C_]
[AI_
HE
_FLO
W_S
IGN
AL]
(10
)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(10)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][D
PN
HE
_V_]
(6)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (1
0)[D
PN
HE
_V_]
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (6
)[D
PN
HE
_V_]
[OT
F_E
XT
_CH
C_I
N]
(4)
[ES
C_H
E_P
RE
SS
UR
E][
M_F
_AP
C_]
(10
)[M
_F_A
PC
_][E
SC
_HE
_PR
ES
SU
RE
] (1
0)[M
_F_A
PC
_][O
TF
_EX
T_C
HC
_IN
] (6
)[O
TF
_EX
T_C
HC
_IN
][D
PN
HE
_V_]
(4)
[OT
F_E
XT
_CH
C_I
N][
M_F
_AP
C_]
(6)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
DP
NN
2_F
LOW
] (3
)[D
PN
N2_
FLO
W][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(3)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][O
TF
_RO
T_C
HC
_OU
T]
(4)
[OT
F_R
OT
_CH
C_O
UT
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(4)
[M_F
_AP
C_]
[SE
RIE
S]
(10)
[SE
RIE
S][
M_F
_AP
C_]
(10
)[A
I_H
E_F
LOW
_SIG
NA
L][O
TF
_EX
T_C
HC
_IN
] (3
)[E
SC
_HE
_FLO
W][
OT
F_E
XT
_CH
C_I
N]
(3)
[OT
F_E
XT
_CH
C_I
N][
AI_
HE
_FLO
W_S
IGN
AL]
(3)
[OT
F_E
XT
_CH
C_I
N][
ES
C_H
E_F
LOW
] (3
)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
DP
NO
2_V
_] (
7)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][O
TF
_EX
T_C
HC
_IN
] (4
)[D
PN
O2_
V_]
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (7
)[O
TF
_EX
T_C
HC
_IN
][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (4
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][S
TE
P_T
IME
] (3
)[S
TE
P_T
IME
][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (3
)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
8)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (8
)[M
_F_A
PC
_][M
AIN
FR
AM
E_P
RE
SS
] (1
0)[M
AIN
FR
AM
E_P
RE
SS
][M
_F_A
PC
_] (
10)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][D
PN
O2_
V_]
(4)
[DP
NH
E_F
LOW
][M
_F_A
PC
_] (
10)
[DP
NO
2_V
_][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(4)
[M_F
_AP
C_]
[DP
NH
E_F
LOW
] (1
0)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (7
)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (7
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][D
PN
N2_
V_]
(5)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[ES
C_H
E_F
LOW
] (1
0)[D
PN
N2_
V_]
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(5)
[ES
C_H
E_F
LOW
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[OT
F_E
XT
_CH
C_I
N][
SH
UN
T]
(9)
[SH
UN
T][
OT
F_E
XT
_CH
C_I
N]
(9)
[DP
NA
R_V
_][M
_F_A
PC
_] (
10)
[DP
NH
E_V
_][M
_F_A
PC
_] (
10)
[DP
NO
2_V
_][M
_F_A
PC
_] (
10)
[M_F
_AP
C_]
[DP
NA
R_V
_] (
10)
[M_F
_AP
C_]
[DP
NH
E_V
_] (
10)
[M_F
_AP
C_]
[DP
NO
2_V
_] (
10)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][M
_F_A
PC
_] (
10)
[M_F
_AP
C_]
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L] (
10)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
ES
C_H
E_P
RE
SS
UR
E]
(6)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][M
_F_A
PC
_] (
10)
[ES
C_H
E_P
RE
SS
UR
E][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(6)
[M_F
_AP
C_]
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (1
0)[A
I_H
E_F
LOW
_SIG
NA
L][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[AI_
HE
_FLO
W_S
IGN
AL]
(10
)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][M
_F_A
PC
_] (
10)
[M_F
_AP
C_]
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W]
(10)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
ES
C_H
E_F
LOW
] (5
)[E
SC
_HE
_FLO
W][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(5)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][D
PN
AR
_FLO
W]
(5)
[DP
NA
R_F
LOW
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(5)
[DP
NO
2_F
LOW
][M
_F_A
PC
_] (
10)
[M_F
_AP
C_]
[DP
NO
2_F
LOW
] (1
0)[D
PN
O2_
FLO
W][
OT
F_R
OT
_CH
C_I
N]
(2)
[OT
F_R
OT
_CH
C_I
N][
DP
NO
2_F
LOW
] (2
)[A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R][
SH
UN
T]
(5)
[SH
UN
T][
AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (5
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][D
PN
HE
_FLO
W]
(9)
[DP
NH
E_F
LOW
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
9)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
SE
RIE
S]
(4)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][S
HU
NT
] (2
)[S
ER
IES
][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(4)
[SH
UN
T][
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (2
)[A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R][
ST
EP
_TIM
E]
(4)
[ST
EP
_TIM
E][
AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (4
)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
DP
NA
R_F
LOW
] (3
)[D
PN
AR
_FLO
W][
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (3
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(7)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (7
)[D
PN
N2_
FLO
W][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(5)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
DP
NN
2_F
LOW
] (5
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][M
_F_A
PC
_] (
3)[M
_F_A
PC
_][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (3
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][D
PN
AR
_FLO
W]
(3)
[DP
NA
R_F
LOW
][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (3
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][O
TF
_EX
T_C
HC
_OU
T]
(8)
[OT
F_E
XT
_CH
C_O
UT
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (8
)[S
ER
IES
][O
TF
_EX
T_C
HC
_IN
] (4
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][D
PN
N2_
V_]
(5)
[DP
NN
2_V
_][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (5
)[O
TF
_EX
T_C
HC
_IN
][S
ER
IES
] (4
)[D
PN
O2_
V_]
[OT
F_R
OT
_CH
C_I
N]
(3)
[OT
F_R
OT
_CH
C_I
N][
DP
NO
2_V
_] (
3)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][S
HU
NT
] (1
0)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
OT
F_R
OT
_CH
C_I
N]
(2)
[OT
F_R
OT
_CH
C_I
N][
AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (2
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][O
TF
_EX
T_C
HC
_OU
T]
(3)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][D
PN
HE
_V_]
(4)
[DP
NH
E_V
_][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(4)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][O
TF
_EX
T_C
HC
_OU
T]
(6)
[OT
F_E
XT
_CH
C_O
UT
][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (3
)[O
TF
_EX
T_C
HC
_OU
T][
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (6
)[S
HU
NT
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(8)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(8)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
DP
NH
E_F
LOW
] (3
)[D
PN
HE
_FLO
W][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(3)
[DP
NA
R_V
_][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (9
)[D
PN
O2_
V_]
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(9)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
DP
NA
R_V
_] (
9)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][D
PN
O2_
V_]
(9)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (7
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(7)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][E
SC
_HE
_FLO
W]
(8)
[ES
C_H
E_F
LOW
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(8)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][E
SC
_HE
_FLO
W]
(3)
[ES
C_H
E_F
LOW
][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(3)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (9
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(9)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][D
PN
HE
_FLO
W]
(5)
[DP
NH
E_F
LOW
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(5)
[DP
NN
2_V
_][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (6
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][D
PN
N2_
V_]
(6)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][E
SC
_HE
_FLO
W]
(5)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][M
_F_A
PC
_] (
4)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (8
)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
ES
C_H
E_P
RE
SS
UR
E]
(5)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W]
(8)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
ES
C_H
E_F
LOW
] (7
)[E
SC
_HE
_FLO
W][
AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (5
)[E
SC
_HE
_FLO
W][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(7)
[ES
C_H
E_P
RE
SS
UR
E][
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (5
)[M
_F_A
PC
_][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(4)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][O
TF
_RO
T_C
HC
_IN
] (6
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
ES
C_H
E_P
RE
SS
UR
E]
(8)
[ES
C_H
E_P
RE
SS
UR
E][
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (8
)[O
TF
_RO
T_C
HC
_IN
][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(6)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][E
SC
_HE
_PR
ES
SU
RE
] (4
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][M
AIN
FR
AM
E_P
RE
SS
] (1
0)[E
SC
_HE
_PR
ES
SU
RE
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(4)
[MA
INF
RA
ME
_PR
ES
S][
DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][M
AIN
FR
AM
E_P
RE
SS
] (3
)[M
AIN
FR
AM
E_P
RE
SS
][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (3
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][S
ER
IES
] (1
0)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
OT
F_E
XT
_CH
C_O
UT
] (1
)[D
PN
O2_
V_]
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (4
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][E
SC
_HE
_PR
ES
SU
RE
] (7
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
DP
NO
2_V
_] (
4)[E
SC
_HE
_PR
ES
SU
RE
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (7
)[O
TF
_EX
T_C
HC
_OU
T][
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (1
)[S
ER
IES
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(6)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(6)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
ST
EP
_TIM
E]
(9)
[ST
EP
_TIM
E][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(9)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (8
)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
DP
NN
2_F
LOW
] (1
)[D
PN
N2_
FLO
W][
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (1
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(8)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(2)
[AI_
HE
_FLO
W_S
IGN
AL]
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(8)
[DP
NO
2_F
LOW
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
9)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][A
I_H
E_F
LOW
_SIG
NA
L] (
8)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (2
)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(2)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (2
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][D
PN
O2_
FLO
W]
(10)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][O
TF
_RO
T_C
HC
_OU
T]
(5)
[OT
F_R
OT
_CH
C_O
UT
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(5)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][D
PN
N2_
V_]
(5)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][M
AIN
FR
AM
E_P
RE
SS
] (3
)[D
PN
N2_
V_]
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (5
)[M
AIN
FR
AM
E_P
RE
SS
][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(3)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
DP
NA
R_V
_] (
8)[D
PN
AR
_V_]
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(8)
[AI_
HE
_FLO
W_S
IGN
AL]
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (8
)[D
PN
HE
_FLO
W][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(6)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
DP
NH
E_F
LOW
] (6
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
AI_
HE
_FLO
W_S
IGN
AL]
(8)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
OT
F_R
OT
_CH
C_O
UT
] (3
)[D
PN
HE
_FLO
W][
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (8
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
DP
NH
E_F
LOW
] (8
)[O
TF
_RO
T_C
HC
_OU
T][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(3)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][M
AIN
FR
AM
E_P
RE
SS
] (5
)[A
I_H
E_F
LOW
_SIG
NA
L][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(4)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][A
I_H
E_F
LOW
_SIG
NA
L] (
4)[M
AIN
FR
AM
E_P
RE
SS
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(5)
[DP
NA
R_F
LOW
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(8)
[DP
NN
2_F
LOW
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(5)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
OT
F_R
OT
_CH
C_O
UT
] (8
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
DP
NA
R_F
LOW
] (8
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
DP
NN
2_F
LOW
] (5
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
ST
EP
_TIM
E]
(8)
[OT
F_R
OT
_CH
C_O
UT
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (8
)[S
TE
P_T
IME
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(8)
[DP
NN
2_V
_][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(8)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][D
PN
N2_
V_]
(8)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
] (7
)[D
PN
_HE
LIU
M_B
YP
AS
S_F
LOW
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(7)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][D
PN
HE
_FLO
W]
(1)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][S
TE
P_T
IME
] (2
)[D
PN
HE
_FLO
W][
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (1
)[S
TE
P_T
IME
][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(2)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][M
_F_A
PC
_] (
1)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
OT
F_R
OT
_CH
C_I
N]
(1)
[DP
NA
R_V
_][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(4)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][D
PN
AR
_V_]
(4)
[M_F
_AP
C_]
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (1
)[O
TF
_RO
T_C
HC
_IN
][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(1)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
DP
NO
2_F
LOW
] (2
)[D
PN
O2_
FLO
W][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(2)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(3)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(3)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][O
TF
_RO
T_C
HC
_OU
T]
(1)
[OT
F_R
OT
_CH
C_O
UT
][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(1)
[DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W][
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (4
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
DP
N_H
ELI
UM
_BY
PA
SS
_FLO
W]
(4)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][A
I_H
E_P
RE
SS
UR
E_S
IGN
AL]
(6)
[AI_
HE
_PR
ES
SU
RE
_SIG
NA
L][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(6)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][A
I_H
E_F
LOW
_SIG
NA
L] (
6)[A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R][
OT
F_R
OT
_CH
C_I
N]
(4)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
AI_
HE
_FLO
W_S
IGN
AL]
(5)
[AI_
HE
_FLO
W_S
IGN
AL]
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (6
)[A
I_H
E_F
LOW
_SIG
NA
L][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (5
)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
DP
NN
2_V
_] (
3)[D
PN
N2_
V_]
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (3
)[O
TF
_RO
T_C
HC
_IN
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(4)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
DP
NO
2_V
_] (
8)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][S
HU
NT
] (3
)[D
PN
O2_
V_]
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(8)
[SH
UN
T][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(3)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (5
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(5)
[DP
NH
E_V
_][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (5
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][D
PN
HE
_V_]
(5)
[DP
NO
2_F
LOW
][O
TF
_EX
T_C
HC
_IN
] (5
)[O
TF
_EX
T_C
HC
_IN
][D
PN
O2_
FLO
W]
(5)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][D
PN
O2_
FLO
W]
(5)
[DP
NO
2_F
LOW
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(5)
[DP
NO
2_V
_][O
TF
_EX
T_C
HC
_IN
] (4
)[O
TF
_EX
T_C
HC
_IN
][D
PN
O2_
V_]
(4)
[OT
F_R
OT
_CH
C_I
N][
DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
OT
F_E
XT
_CH
C_I
N]
(3)
[OT
F_E
XT
_CH
C_I
N][
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (3
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][O
TF
_RO
T_C
HC
_IN
] (1
0)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][D
PN
AR
_FLO
W]
(9)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][D
PN
AR
_V_]
(4)
[DP
NA
R_F
LOW
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
9)[D
PN
AR
_V_]
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (4
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][D
PN
HE
_V_]
(6)
[DP
NH
E_V
_][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (6
)[D
PN
AR
_FLO
W][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(7)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
DP
NA
R_F
LOW
] (7
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(7)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (7
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
MA
INF
RA
ME
_PR
ES
S]
(8)
[MA
INF
RA
ME
_PR
ES
S][
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (8
)[D
PN
HE
_V_]
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (5
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
DP
NH
E_V
_] (
5)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][M
AIN
FR
AM
E_P
RE
SS
] (6
)[M
AIN
FR
AM
E_P
RE
SS
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (6
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][O
TF
_RO
T_C
HC
_IN
] (8
)[O
TF
_RO
T_C
HC
_IN
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (8
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][S
ER
IES
] (3
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][D
PN
AR
_V_]
(10
)[D
PN
AR
_V_]
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[S
ER
IES
][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (3
)[A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R][
SE
RIE
S]
(5)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][S
HU
NT
] (8
)[S
ER
IES
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(5)
[SH
UN
T][
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (8
)[D
PN
O2_
FLO
W][
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (4
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
DP
NO
2_F
LOW
] (4
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][S
HU
NT
] (7
)[S
HU
NT
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (7
)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
DP
NH
E_V
_] (
2)[D
PN
HE
_V_]
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (2
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
M_F
_AP
C_]
(4)
[M_F
_AP
C_]
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (4
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][M
_F_A
PC
_] (
9)[M
_F_A
PC
_][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (9
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(10)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[DP
NO
2_V
_] (
10)
[DP
NO
2_V
_][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][O
TF
_EX
T_C
HC
_IN
] (3
)[O
TF
_EX
T_C
HC
_IN
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(3)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][D
PN
AR
_V_]
(8)
[DP
NA
R_V
_][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(8)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][S
ER
IES
] (6
)[S
ER
IES
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(6)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[DP
NH
E_V
_] (
10)
[DP
NH
E_V
_][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
OT
F_R
OT
_CH
C_I
N]
(3)
[OT
F_R
OT
_CH
C_I
N][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(3)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][D
PN
O2_
V_]
(6)
[DP
NO
2_V
_][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(6)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][O
TF
_EX
T_C
HC
_IN
] (4
)[D
PN
O2_
FLO
W][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(5)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
DP
NO
2_F
LOW
] (5
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
OT
F_R
OT
_CH
C_I
N]
(7)
[OT
F_E
XT
_CH
C_I
N][
AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (4
)[O
TF
_RO
T_C
HC
_IN
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(7)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][D
PN
HE
_V_]
(6)
[DP
NH
E_V
_][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(6)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][D
PN
O2_
FLO
W]
(1)
[DP
NO
2_F
LOW
][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(1)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
OT
F_E
XT
_CH
C_I
N]
(7)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
SE
RIE
S]
(6)
[OT
F_E
XT
_CH
C_I
N][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(7)
[SE
RIE
S][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(6)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[M_F
_AP
C_]
(10
)[M
_F_A
PC
_][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][O
TF
_EX
T_C
HC
_IN
] (6
)[O
TF
_EX
T_C
HC
_IN
][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(6)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(2)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(2)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (2
)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(2)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (2
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(2)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (3
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(3)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (3
)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(3)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(3)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(3)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(3)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(3)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[OT
F_E
XT
_CH
C_I
N]
(10)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][D
PN
O2_
V_]
(3)
[DP
NO
2_V
_][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(3)
[OT
F_E
XT
_CH
C_I
N][
DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][O
TF
_EX
T_C
HC
_IN
] (3
)[O
TF
_EX
T_C
HC
_IN
][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (3
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
OT
F_E
XT
_CH
C_I
N]
(6)
[OT
F_E
XT
_CH
C_I
N][
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (6
)[A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R][
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (4
)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (4
)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (2
)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (2
)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (2
)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (2
)[A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R][
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (5
)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (5
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(7)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
7)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(10)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(10)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R][
DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(10)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (5
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(5)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (3
)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(3)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(3)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(3)
-13-
Best Perf. For Top-100 Sensor PairsAfter best LDA projection from 5*2 inputs
75
80
85
90
95
100
Rec
og.
rate
(%
)
Ranking of recog. rates
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
MA
INF
RA
ME
_PR
ES
S]
(6)
[MA
INF
RA
ME
_PR
ES
S][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(6)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
OT
F_R
OT
_CH
C_I
N]
(8)
[OT
F_R
OT
_CH
C_I
N][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(8)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
SE
RIE
S]
(3)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[DP
NA
R_V
_] (
10)
[DP
NA
R_V
_][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[SE
RIE
S][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(3)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][S
ER
IES
] (5
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
SH
UN
T]
(8)
[SE
RIE
S][
AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (5
)[S
HU
NT
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(8)
[DP
NO
2_F
LOW
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(4)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][D
PN
O2_
FLO
W]
(4)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
SH
UN
T]
(7)
[SH
UN
T][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(7)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][D
PN
HE
_V_]
(2)
[DP
NH
E_V
_][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(2)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][M
_F_A
PC
_] (
4)[M
_F_A
PC
_][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(4)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
M_F
_AP
C_]
(9)
[M_F
_AP
C_]
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(9)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (1
0)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][D
PN
O2_
V_]
(10
)[D
PN
O2_
V_]
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
OT
F_E
XT
_CH
C_I
N]
(3)
[OT
F_E
XT
_CH
C_I
N][
AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (3
)[A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R][
DP
NA
R_V
_] (
8)[D
PN
AR
_V_]
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (8
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
SE
RIE
S]
(6)
[SE
RIE
S][
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (6
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][D
PN
HE
_V_]
(10
)[D
PN
HE
_V_]
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][O
TF
_RO
T_C
HC
_IN
] (3
)[O
TF
_RO
T_C
HC
_IN
][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (3
)[A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R][
DP
NO
2_V
_] (
6)[D
PN
O2_
V_]
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (6
)[A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R][
OT
F_E
XT
_CH
C_I
N]
(4)
[DP
NO
2_F
LOW
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (5
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][D
PN
O2_
FLO
W]
(5)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][O
TF
_RO
T_C
HC
_IN
] (7
)[O
TF
_EX
T_C
HC
_IN
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(4)
[OT
F_R
OT
_CH
C_I
N][
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (7
)[A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R][
DP
NH
E_V
_] (
6)[D
PN
HE
_V_]
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (6
)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
DP
NO
2_F
LOW
] (1
)[D
PN
O2_
FLO
W][
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (1
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][O
TF
_EX
T_C
HC
_IN
] (7
)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][S
ER
IES
] (6
)[O
TF
_EX
T_C
HC
_IN
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (7
)[S
ER
IES
][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (6
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][M
_F_A
PC
_] (
10)
[M_F
_AP
C_]
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
OT
F_E
XT
_CH
C_I
N]
(6)
[OT
F_E
XT
_CH
C_I
N][
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (6
)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (2
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (2
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(2)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (2
)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(2)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (2
)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(3)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (3
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(3)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (3
)[A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R][
AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
] (3
)[A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N][
AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (3
)[D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E][
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (3
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
] (3
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][O
TF
_EX
T_C
HC
_IN
] (1
0)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
DP
NO
2_V
_] (
3)[D
PN
O2_
V_]
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (3
)[O
TF
_EX
T_C
HC
_IN
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
OT
F_E
XT
_CH
C_I
N]
(3)
[OT
F_E
XT
_CH
C_I
N][
AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R]
(3)
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
][O
TF
_EX
T_C
HC
_IN
] (6
)[O
TF
_EX
T_C
HC
_IN
][E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G]
(6)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(4)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(4)
[DP
N_F
OR
ELI
NE
_PR
ES
SU
RE
][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(2)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][D
PN
_FO
RE
LIN
E_P
RE
SS
UR
E]
(2)
[AI_
FO
RE
LIN
E_C
ON
VE
CT
ON
][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(2)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][A
I_F
OR
ELI
NE
_CO
NV
EC
TO
N]
(2)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(5)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][A
I_E
SC
_CU
RR
EN
T_M
ON
ITO
R]
(5)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (7
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(7)
[AI_
ES
C_V
OLT
AG
E_M
ON
ITO
R][
DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
(10
)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (1
0)[D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_][E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
] (1
0)[E
CH
UC
K_C
UR
RE
NT
_RE
AD
ING
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
][D
PN
_OF
FS
ET
_TA
BLE
_PW
R_W
_] (
10)
[DP
N_O
FF
SE
T_T
AB
LE_P
WR
_W_]
[AI_
ES
C_C
UR
RE
NT
_MO
NIT
OR
] (1
0)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G]
(5)
[EC
HU
CK
_CU
RR
EN
T_R
EA
DIN
G][
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (5
)[A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
][D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N]
(3)
[DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
][A
I_E
SC
_VO
LTA
GE
_MO
NIT
OR
] (3
)[D
PN
_TH
RO
TT
LE_V
ALV
E_P
OS
ITIO
N][
EC
HU
CK
_VO
LTA
GE
_RE
AD
ING
] (3
)[E
CH
UC
K_V
OLT
AG
E_R
EA
DIN
G][
DP
N_T
HR
OT
TLE
_VA
LVE
_PO
SIT
ION
] (3
)
-14-
Confusion Matrix and Error Positions
Confusion matrix Error positions
-15-
Future Work
To explore further: Which recipe is the most influential? Within the most influential recipe, which sensors
are the most influential? How to further explore feature
extraction/selection? Machine-dependent modeling?
-16-
Thank you for your listening!
-17-
Application Case 3
Characteristics 9 maintenance stages
-18-
Best Performance For Each SensorAfter best LDA projection from 5 inputs
-19-
Best Perf. For All 435 Sensor Pairs
After best LDA projection from 5*2 inputs
