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Sachiko Suzuki1, Akira Yoshikawa1, Hirotada Ishikawa1, Yohei Kikuchi1,
Yuji Inagaki1, Naoko Ashikawa2, Akio Sagara2, Naoaki Yoshida3,
Yasuhisa Oya1 and Kenji Okuno1
1 Radioscience Research Laboratory, Faculty of Science, Shizuoka University, Japan2 National Institute for Fusion Science, Japan
3 Institute of Applied Mechanics, Kyushu University, Japan
Hydrogen isotope behavior in C+ and D2
+ simultaneous implanted tungsten
Combination usage of tungsten (W) and carbon fiber composite (CFC)
Sputtering by direct contact of plasma
Forming of re-deposition layer (WxCy)
Elucidation of chemical behavior of hydrogen isotopes implanted into C/W mixed materialsElucidation of chemical behavior of hydrogen isotopes implanted into C/W mixed materials
BackgroundBackground
Fig. 1 D2 TDS spectrum in WC
Previous studyPrevious study[1][1]
Peak 1 at 400 K400 K Peak 2 at 490 K 490 K Peak 3 at 600 K600 K Carbon vacancy Peak 4 at 930 K 930 K C-D bond
Trapping sites of deuterium
Interstitial sites
300 500 700 900 11000.0
0.5
1.0
1.5
Des
orpt
ion
rate
/ 10
18 D
2 m-2
s-1
Temperature / K
Peak 1 Peak 2 Peak 3 Peak 4
[1] H. Kimura, et al., Fusion Eng. Des. 81 (2006) 295-299.
Objective Objective
Elucidation of hydrogen isotope behavior in C+ and D2
+ simultaneous implanted tungstenElucidation of hydrogen isotope behavior in C+ and D2
+ simultaneous implanted tungsten
D2+ gun
Ion implantation chamber
Sample insert port
Fig. 2 The simultaneous C+ and D2+ implantation system
C+ gun
ApparatusApparatus
TDS chamber
Ion source gas: CO2E×B mass separation filter
0 100 200 300 400 500 600 7000.0
1.0
2.0
3.0
Ions
D (3 keV D2
+)
C (10 keV C+)
Depth / Ang.
Fig. 3 SRIM calculation results for implantation depth
Energy: 0.5 - 10 keV C+
Flux: 2.0×1017 - 2.0×1018 C+ m-2 s-1
Energy: 0.5 - 3 keV D2
+
Flux: 2.0×1017
– 2.0×1018
D2+ m-2 s-1
SamplesSamples
W (under stress-relieved conditions )
purchased from A.L.M.T. Corp.
Density: 19.3 g/cm3
Size: 10 mmФ0.5 mm
Prepared and polished
Implantation conditions Energy: 3.0 keV D2
+, 10 keV C+
Flux: 1.0 × 1018 ions m-2 s-1
Fluence: 1.0 × 1022 ions m-2
Imp. temp.: R.T.
Heating rate: 0.5 K s-1
Heating temp.: R.T. – 1173 K
C+, D2+
implantations
TDS
XPS
X-ray source: Al K
Implantation procedures Only D2
+ imp. C+ and D2
+ simultaneous imp. D2
+ imp. after C+ imp.
XPS
Experimental procedure 1Experimental procedure 1
Heating temp.: 1173 K Time: 10 min
Preheating
C+ imp.D2
+ imp. and C+ imp.D2+ imp.
Implantation proceduresImplantation procedures
Only D2+ imp. C+ and D2
+ simultaneous imp. C+ and D2+ sequential imp.
D2+ imp.
D2+ gun C+ gun
Implantation conditions Energy: 3.0 keV D2
+, 10 keV C+
Flux: 1.0 × 1018 ions m-2 s-1
Fluence: 1.0 × 1022 ions m-2
Imp. temp.: R.T.
Heating rate: 0.5 K s-1
Heating temp.: R.T. – 1173 K
C+, D2+
implantations
TDS
XPS
X-ray source: Al K
Implantation procedures Only D2
+ imp. C+ and D2
+ simultaneous imp. D2
+ imp. after C+ imp.
XPS
Experimental procedure 1Experimental procedure 1
Heating temp.: 1173 K Time: 10 min
Preheating
Implantation conditions Energy: 3.0 keV D2
+, 10 keV C+
Flux: 1.0 × 1018 D2+ m-2 s-1
Flux: 2.0 × 1017 - 2.0 × 1018 C+ m-2 s-1
Flux ratio of C+/D+: 0.2 -2.00.2 -2.0Fluence: 1.0 × 1022 D2
+ m-2
Fluence: 2.0 × 1021 - 2.0 × 1022 C+ m-2
Imp. temp.: R.T.
Heating rate: 0.5 K s-1
Heating temp.: R.T. – 1173 K
C+, D2+
implantations
TDS
XPS
X-ray source: Al KXPS
Experimental procedure 2Experimental procedure 2
Heating temp.: 1173 K Time: 10 min
Preheating
CC++ and D and D22++ simultaneous imp. simultaneous imp.
Implantation proceduresThe flux dependence of CThe flux dependence of C++
Results and Discussion (1)Results and Discussion (1)
Fig. 4 XPS spectra of C-1s with various implantation procedures
C-W bond ・・・ 282.7 eV [1] C-C bond ・・・ 284.6 eV [2]
[1] H. Kimura, et al., Fus. Eng. Des. 81 (2006) 295-299.
[2] C. D. Wagner, et al. Handbook of X-ray photoelectron spectroscopy, Rerking- Elmer Corp., Physical Electronics, Division.
Fig. 5 Peak areas of C-C and C-W bonds with various implantation procedures
The decrease of C-C bond by D2+ imp. on C+-D2
+ sequential imp.
The sputtering of carbon by D2+ imp.
The area of C-C bondSimultaneous imp. Simultaneous imp. > > Sequential imp.Sequential imp.
Aggregation of carbon on surface after C+-D2+ simultaneous imp.
C-W bondC-C bond
295 290 285 280 2752.0
2.5
3.0
3.5 Only C+ imp. Sequential imp. Simultaneous imp.
Inte
nsit
y / a
rb.u
nit
Binding energy / eV1 2 3
0.0
0.2
0.4
0.6
0.8
1.0
1.2
1.4
SimultaneousOnly C+
Peak
are
a / a
rb.u
nit
C-C bond C-W bond
SequentialImplantation procedures
Fig. 6 XPS spectra of W-4f with various implantation procedures
[3] J. Kovac, et al., Vacuum 82 (2008) 150-153.
C+-D2+ simultaneous imp. ・・・ The positive peak shift of about 0.4 eV
Only C+ imp. ・・・ The positive peak shift of about 0.9 eV
C+-D2+ simultaneous implantation→C-W bond
Only C+ implantation → carbon rich tungsten carbide (WCx)
Main chemical states
Results and Discussion (2)Results and Discussion (2)W : 31.5 eV [3]
38 36 34 32 300.0
1.0
2.0
3.0
4.0
Inte
nsit
y / a
rb.u
nit
Binding energy / eV
Simultaneous imp. Sequential imp.
Only C+ imp.
Only D2
+ imp.
After preheating
The higher desorption peak at around 800K800K ・・・ C-D bondC-D bondThe least total deuterium retention in Simultaneous imp.
[4] T. Suda, et al., Fus. Eng. Des. 82 (2007) 1762-1766.
In C+-D2+ simultaneous implantation
deuterium was hardly trapped at higher temperature.
Results and Discussion (3)Results and Discussion (3)
Fig. 7 TDS spectra with various implantation procedures
Fig. 8 Total D retention with various implantation procedures
400 600 800 1000 12000.0
0.5
1.0
1.5
2.0
2.5
3.0
D
esor
ptio
n ra
te /
1017
D2 m
-2 s
-1 Only D2
+ imp.
Sequential imp. Simultaneous imp.
Temperature / K
600-1100 K
400 K
0.0
1.0
2.0
3.0
4.0
Des
orpt
ion
rate
/ 10
18 D
2 m-2 s
-1
HOPG[4]
1 2 34.0
5.0
6.0
7.0
8.0
Simultaneous imp.Sequential imp.
D retention
D r
eten
tion
/ 10
19 D
2 m-2
Implantation proceduresOnly D
2
+ imp
The large desorption peak at around 400 K 400 K → Interstitial of WInterstitial of W
300 400 500 600 700 800 900 1000 11000.0
0.5
1.0
1.5
2.0
2.5
3.0
C+/D+=0.2
C+/D+=1
C+/D+=2
Des
orp
tion
rat
e / 1
017 D
m-2
s-1
Temperature / K
Results and Discussion (4)Results and Discussion (4)The flux dependence of CThe flux dependence of C++
Fig. 9 TDS spectra for the simultaneous implanted W with various C+/D+ flux ratio
Fig. 10 Total peak area of C-1s as a function of C+/D+ flux ratio
C+/D+ = 0.2 : The large desorption peak at around 800 K 800 K → C-D bondC-D bond Carbon concentration was decreased as the C+/D+ ratio increased
The enhancement of carbon re-emission in high C+/D+ ratio The low re-emission of carbon leads high retention of D trapped by carbon.
SummarySummary
Elucidation of the trapping sites and role of carbon on hydrogen isotope retention in C/W mixed materials
Elucidation of the trapping sites and role of carbon on hydrogen isotope retention in C/W mixed materials
D desorption at higher temperature side in C+-D2+ sequential imp.
→ C-D bond Total D retention Only D2
+ imp. C+-D2
+ sequential imp.
Further studies Further studies
Establishment of the simultaneous CEstablishment of the simultaneous C++ and D and D22
++ implantation system implantation system
<About 25%
C+-D2+ simultaneous imp.
Elucidation of hydrogen isotope behavior in C+ and D2
+ simultaneous implanted tungsten
The flux dependence of CThe flux dependence of C++
The low reemission of carbon leads high retention of D trapped by carbon.
Thank you for your attention
42 40 38 36 34 32 30 280.0
0.5
1.0
1.5
2.0
Inte
nsi
ty /
arb
. un
it
Binding energy / eV
Imp. Temp. 873 K 773 K 673 K 573 K 423 K 323 K Before
295 290 285 280 2750.0
0.5
1.0
1.5
2.0
2.5
Inte
nsit
y / a
rb. u
nit
Binding energy / eV
Imp. Temp. 873 K 773 K 673 K 573 K 423 K 323 K before
284.6 eV C-C + C-D 31.4 eV W-C
Fig. 11 C-1s and W-4f XPS spectra after D2+ implantation at various implantation temperatures.
282.7 eV C-W
Interstitial site I Interstitial site II
W DC
Dependence of implantation temperature on change of Dependence of implantation temperature on change of chemical state of C and W in WCchemical state of C and W in WC
Peak 1Peak 1: Interstitial site IPeak 2Peak 2: Interstitial site II
300 500 700 900 1100 13000.0
0.5
1.0
1.5
Des
orpt
ion
rate
/ 10
18 D
2 m-2
s-1
Temperature / K
Imp. temp. / K 323 423 573 673 873
Energy : 1 keV D2
+
flux : 1.0 x 1018 D+ m-2 s-1
Fluence : 1.0 x 1020 D+ m-2
Analysis methodsAnalysis methods
• TDS (Thermal Desorption Spectroscopy)• XPS (X-ray Photoelectron Spectroscopy)
D2+ implantation
QMS
Heating
Analyzer
X-ray
XPSTDS
Fig. 6 XPS spectra of W-4f with various implantation procedures
[4] J. Kovac, et al., Vacuum 82 (2008) 150-153.
C+-D2+ simultaneous imp. ・・・ The positive peak shift of about 0.4 eV
Only C+ imp. ・・・ The positive peak shift of about 0.9 eV
W : 31.5 eV [4]
38 36 34 32 300.0
1.0
2.0
3.0
4.0
Inte
nsit
y / a
rb.u
nit
Binding energy / eV
C+-D2
+ simultaneous imp.
C+-D2
+ sequential imp.
Only C+ imp.
Only D2
+ imp.
After preheating
C+-D2+ simultaneous implantation→C-W bond
Only C+ implantation → carbon rich tungsten carbide (WCx)
Main Chemical states
Results and Discussion (2)Results and Discussion (2)
400 600 800 1000 12000.0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0 W imp. D
2
+
Simultaneous Sequential
WC imp. D2
+
Temperature/K
Fig. TDS spectra with various implantation procedures
0.0 0.5 1.0 1.5 2.0
1.0
1.5
2.0
2.5
3.0
Ret
enti
on /
1017
D m
-2
C+/D+ / -
Fig. Total retention for the simultaneous implanted W with various C+/D+ ratio
0 100 200 300 400 500 600 7000.0
1.0
2.0
3.0
Ions
D (3 keV D2
+)
C (10 keV C+)
Depth / Ang.
Implantation DepthImplantation Depth
Fig. 2 SRIM calculation results for implantation depth
The implantation depth of 10 keV C+ is almost the same as that of 3 keV D2+
Deuterium ion gun
Ion implantation chamber
Sample insert port
Fig. 1 The simultaneous C+ and D2+ implantation system
(a) Photograph (b) Diagrammatic illustration
Carbon ion gun
ApparatusApparatus
TDS chamber
D2+ ion gun
QMS
Manupilator
Differential pumping system
G.V.
C+ ion gun
TDS chamber
Ion implantation chamber
(a) (b)Ion source gas: CO2
E×B mass separation filter