SU-8 surface-micromachining process utilizing PMGI as a sacrificial material

2007 IEEE MEMSG. Foulds , R. W. JohnstoneM. Parameswaran

學號 :9635517

姓名 :陳立仁

Outline

Introduction Fabrication process Result Conclusion

Introduction

A novel process uses PMGI as sacrificial layer and lift-off resist for SU-8. The whole process can be completed in a single day .

Fabrication process

Fabrication process (cont.)

Fabrication process (cont.)

Fabrication process (cont.)

Result

Result (cont.)

Result (cont.)

“Automated assembly of hingeless 90° out-of-plane microstructures,”

S H Tsang, D Sameoto, I G Foulds, R W Johnstone, M parameswaran

Result (cont.)

“Automated assembly of hingeless 90° out-of-plane microstructures,”

S H Tsang, D Sameoto, I G Foulds, R W Johnstone, M parameswaran

Conclusion

An ideal process for proof of concept prototyping .

The height and thickness of the structure can be changed easily to fit different applications .