5XPSXPSAES

5.0XPS XPSI (I ~ EB)XPS XPS

5.1XPS

5.1.1(photoelectron lines)XXPSXPS:C1sAg3d5/2

()EF-(FWHM)X0.31.7 eV1

XPS2

3-(SOS)-(s)(l) j =lsj- = 2j + 1s - XPSp, d, f - XPSjEB(EB 2p1/2 > EB 2p3/2)-Z-()

5.1.2(Auger lines)()XPShXPSKLL, LMM, MNNNOO

5.1.3

5.2XPS

5.2.1(shake-up lines)dfC 1s(*)6.7 eV

5.2.2(multiplet splitting) s

MnF2Mn3sXPS

5.2.3(energy loss lines) XPSb(b)

5.2.4X(X-ray satellites)XPSXXXX2p3/21s2p1/21sXK1,2()MgAlK3,4hK1,2910 eV3p1sK X

5.3AES AESFe LMMAESAES

XPS