Influence of oxygen ion implantation on the damage and annealing kinetics of iron –implanted sapphire
Carl J. McHarge, John D. Hunn, E. Alves, M.F. da Silva, J.C. Soares
Presentation by: Younes Sina, Uk huh
Fe+
O+Annealing
α-Al203 α-Al203
00010001
Al-Fe-O pseudo-binary section in air along the Fe2O3-Al2O3 join
Al2O3 and Fe2O3 are soluble in each other to 5-10% at 1100 ⁰C
(AlxFe1-x)2 O3
A solid solution in form of (AlxFe1-x)2 O3 may form during the oxygen implantation
FeAl204
Fe1-x0
α-Al203
Annealing for 120 hr @ 1500⁰C
O2
No residual polishing damageNo surface contamination
160 keV Fe+
54 keV O+
4x1016 Fe+/cm2 4x1016 O+/cm2
Annealing
1 hr @ 1500⁰C 800 1200 1500
Ar-4%H2
O2
Fe:O→1:1
Incident beam direction 5-7⁰ from crystal axes
α-Al203 α-Al203
00010001
4x1016 Fe+/cm2 6x1016 O+/cm2
Annealing
1 hr @ 1500⁰C 800 1200 1500
Ar-4%H2
O2
Fe:O→2:3
160 keV Fe+
54 keV O+
Incident beam direction 5-7⁰ from crystal axes
Residual damage(χ) by RBS-ion channelingOf 1.6 MeV He+
Temperature
Fe 4:4 4:6 Fe 4:4 4:6
500 0.9 0.89 0.88 0.9 0.89 0.89
800 0.2 0.19 0.26 0.53 0.19 0.22
1200 0.19 0.10 0.13 0.14 0.08 0.05
1500 0.05 - 0.05 - -
Oxidizing Reduction
Fraction damage remaining after annealing
10.58
0.6
0.62
0.64
0.66
0.68
0.7
0.680000000000001
0.62 0.62
Fe 4Fe:4O 4Fe:6O
Damage( χ)
Oxygen enhances dynamic recovery during implantation
Fe 4Fe:4O 4Fe:6O0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1
Total deposited damage energySD
4x1016 Fe+/cm2 4&6x1016 O+/cm2
160 keV Fe+
54 keV O+
disorder @1 > disorder@2
1 2
4:6
4:4Fe
O2
Recovery of disorder in Al- sublattice during post-implantation annealing
4:4
Fe
4:6
Recovery of disorder in Al- sublattice during post-implantation annealing
Ar-4%H2
significant slow rate
Iron spectra for 4Fe:4O annealed in air
O2
no shift in the position of the peak
5% iron was lost from the implanted zone
Iron spectra for 4Fe:4O annealed in Ar-4%H2
Ar-4%H2
no iron was lost from the implanted zone
no shift in the position of the peak
Some iron diffuses into and toward the surface of the sapphire during 1200⁰C annealing
Iron spectra for 4Fe:6O annealed in air
O2
no iron was lost from the implanted zone
no shift in the position of the peak
Iron spectra for 4Fe:6O annealed in Ar-4%H2
Ar-4%H2
no iron was lost from the implanted zone
no shift in the position of the peak
Crystal Damage
1500 Å
Fe
Annealing
Fe toward the surface
Reasons for reducing disorder:1. In situ compound formation2. Implanted oxygen replacing oxygen displaced by knock-ons
Oxygen implanted after the iron annihilates these vacancies causing the iron to precipitate
Fe2+ presents as iron –oxygen vacancy cluster
Thank you
Kurdistan, Iran