Transcript
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    TRNG I HC BCH KHOA H NI

    KHOA C KH

    BO CO

    NHP MN VI C IN T

    SINH VIN THC HIN: NGUYN THC DNG. MSSV:20109168

    NGUYN THXUN O. MSSV:20109125

    NGUYN MINH HI. MSSV:20109019

    NHM: 10

    GVHD: NG BO LM

    ***

    H NI, THNG 5 NM 2014

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    MC LCLI NI U .......................................................................................................... 3

    PHN A: MEMS V CNG NGHVI C..... Error! Bookmark not defined.

    1. TNG QUAN VMEMS........................... Error! Bookmark not defined.

    2. LCH SMEMS V CNG NGHVI C ............................................... 5

    3. NG DNG CA CC CM BIN MEMS .............................................. 6

    4. THTRNG MEMS. ................................................................................. 7

    5. CNG NGHCHTO CC SN PHM MEMS. ............................... 7

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    MU VMEMS

    MEMS( Micro-Electro Mechanical System-hthng vi c in t).

    Hnh 1 :Thnh phn ca MEMS

    MEMS l stch h p ca cc yu t c (structures), cm bin (sensors), b kchhot (actuators) v cc yu t in (electronics) trn mt nn Silicon (Substrate)bng cng nghvi ch t o (micro-fabrication tech).MEMS ha hn to mt cuc cch mng ha sn phm khi mang cc yu tvi in li vi nhau trn mt tm nn Silicon theo cng ngh vi c, bng cch tora cc hth ng trn chip hon chnh (systems on a chip). MEMS l mt cng nghcho php pht trin cc sn phm thng minh, tng kh nng tnh ton ca cc yut vi in t vi cc vi cm bin v cc bvi kch ho t c kh nng nhn bit v

    iu khin.

    http://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87nhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87nhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87nhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87nhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87nhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87nhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87nhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87nhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87n%20t%E1%BB%ADhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87n%20t%E1%BB%ADhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87n%20t%E1%BB%ADhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87n%20t%E1%BB%ADhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87n%20t%E1%BB%ADhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87n%20t%E1%BB%ADhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87nhttp://www.fotech.org/mediawiki/index.php/%C4%91i%E1%BB%87n
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    Vy l do ti sao MEMS li cn thit ? l do nhu cu ca con ngi khng baogigi i hn, con ngi cn cc thit b thng minh kch thc nhg n gip con ngi trong cuc sng cng nh trong cng vic. V thMEMS c phttrin v sd ng rt nhiu trong y t, in thoi thng minh, oto

    Hinh 2: ng dng ca MEMS trong oto

    Hnh 3: Tu ni soi thm d s d ng trong ngnh y t.

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    1. LCH SMEMS V CNG NGHVI CCng ngh vi c: cc quy trnh lng ng, khc hay xc nh vt liu vi t trngti thiu c o theo n v micro ho c nh hn.

    Cng nghMEMS: m i thit bv h th ng c sn xut theo cng nghvic khc vi mch tch hp hay vi linh kin bn dn truyn thng. Kch thc cachng c o theo n v nano (nm) n centimet (cm).

    Lch sMEMS, cng v i nh ngha ca n phthu c vo spht tri n cacc quy trnh vi c:

    - Trong nhng nm 1940, s pht tri n ca cht bn dn tinh khit (Ge vSi).

    - Nm 1947, s pht minh c a transistor tip xc, bo trc khi u cann cng nghm ch bn dn.

    - Nm 1949, kh nng pht trin Si n tinh th tinh khi t ci tin cchtrnh by ca transistor bn dn, tuy nhin chi ph cao v tin c y chat yu cu.

    - Nm 1959, tin s Feynman a ra bi din thuyt ni ting c ta C rt nhiu ch di y, trong ng c trnh by s lngkhong trng khng lc s n theo n vmicro.

    - Nm 1960, s pht minh c a quy trnh ch t o khi phng (planar) citin r rt tin c y v gi thnh ca linh kin bn dn. Ngoi ra, cng

    nghph ng cho php tch hp nhiu linh kin bn dn ln 1 mu Si. Spht trin bo trc skh i u ca nn cng nghip IC.

    - Nm 1960, vi spht tri n ca transistor hiu ng trng oxit bn dnkim loi (metal oxide seniconducor field effect transistor _MOSFET), nn cng nghip IC t c nhng hiu qulin ti p vi ccmch phc tp c thu nh.

    - Nm 1964, transistor cng cng hng, c sn xut bi Nahtensonc trnh by trong hnh di, linh kin MEMS ch t o khi u tin.S chuy n ng tnh in ca thanh m in cc cng bng vng thayi c tnh in ca linh kin.

    - Nm 1970, s pht tri n ca vi xl, c nhi u ng dng hp l lm bini x hi, p ng to nhu cu vcng ngh IC cao hn.

    - Trong nhng nm 1970 v 1980, nn thng mi MEMS c bt ubi nhiu cng ty sn xut ra cc phn cho nn cng nghip t ng.

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    - Nm 1982, bi tha lun ca Kurt Petersen vi ta Si mt vt liuc trnh by s pht tri n ca nhiu linh kin theo cng ngh vi c vc xem l cng c lm tng s hi u bit vnh ng kh nng m cngnghMEMS mang l i.

    - Nm 1984, Howe v Muller thuc i hc California pht trin quy trnhvi c bm t Si a tinh th v c dng s n xut cc mch tch hpdng cng ngh MEMS. Cng ngh ny l c bn cho cc sn phmMEMS.

    - Nm 1989, cc nh nghin cu UCB v MIT pht trin c lp ngc u tin theo cng ngh micro c iu khin bng tnh in.

    - Trong nhng nm 1990, s pht tri n mnh v s lng ln linh kin,cng nghv cc ng dng m r ng pham vi nh hng ca MEMS vngy nay vn ang tip tc.

    - Nm 1991, cc mu ni dng cng ngh micro c pht trin ti UCBbPister m r ng quy trnh x l poly c gia cng micro bm t saocho cu trc ln c th c tp hp li ra khi ng nn, cui cnggiwois thiu nhng bc x l c bit ca MEMS ba chiu.

    2. NG DNG CA CC CM BIN MEMS- Sensor p sut: kim tra t l nhin li u v cc chc nng o c khc

    trong oto, thit b o huyt p v cc ng dng dn dng khc.- Sensor gi tc v gyroscope: t kh trong oto, thit b nh hng cho tn

    la v cc phng tin vn ti.- Hin th: cc mn hnh phn gi i cao dng cc vi gng cho cc thit

    b in t.- u phun mc: hng trm triu chip phun mc mt nm cho cc my in

    laser en trng v mu.- Cc sensor ha hc: cho cc mc ch y t v y sinh h c.- Chuyn mch cho thng tin quang si: internet, truyn hnh v thng tin

    gii rng dng cp quang.- Vi van: cc hs c kkh c c nhs d ng cc dy vi van.- Chuyn mch in c: cc vi rle trong cc ng dng 1 chiu, xoay chiu

    v v tuyn.

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    3. THTRNG MEMS.Cc ng dng v th trng MEMS mra khi cc ng dng IC truyn thng

    kt thc. c bit cng nghch t o vi m v cng nghMEMS c th cung c pmtphng tin giao tip vi thgi i in ts , c chi phi bi IC, vi thgi ivt l tng t. Trong thgi i vt l, nhng tn hiu quan tm khng c bn chtin, cn cc my bin nng tn hiu vt l sang tn hiu in (v dc m bin) cth c x l b ng h th ng in t IC cho php. Ngoi ra, s lin k t cc mybin nng trong mt h th ng cng c nhiu thun li (v d u tin chuyn tnhiu nhit sang tn hiu c sau , thnh tn hiu quang , v cui cng thnh mttn hiu in). Hn na, c thk t hp b c m bin v bkch ho t to ra vi hthng hon chnh.

    Cc sn phm thnh cng v thng mi dng cng nghMEMS ph i k

    n l cc vi cm bin. V vy, sthnh cng c a hu ht cc sn phn dng cngnghMEMS l do khai thc cc tnh ch t sau y:

    - Thun li v t l : 1 vi hin tng vt l trnh by tt hn v hiu quhn khi ti thiu ha sang n v micro.

    - Ch t o khi: vi cc quy trnh in quang v ch t o khi (batchfabrication), chi ph sn xut cho 1 linh kin MEMS theo khi thp hnso vi chi ph sn xut ra nhiu linh kin MEMS.

    - Tch hp mch: stch h p mch theo cng nghMEMS mang l i gi trln, tuy nhin gi thnh v ph c tp c thb h n ch.

    4. CNG NGHCHTO CC SN PHM MEMS.Cc sn phm MEMS l s tch h p vi mch in tv i cc linh kin, cc

    chi tit vi c. Mch vi in t c cht o trn phin silic do xu hng chungl li dng ti a vt liu silic ch t o cc linh kin vi c theo nhng k thuttng tv i k thut lm mch vi in t, in hnh l k thut khc hnh.

    Tuy nhin cc linh kin ca mch vi in t u nm trn mt phng cnnhiu linh kin vi c phi thc hin nhng thao tc nh dch chuyn, rung, quay,u ko, bm v.v.v. Do chng khng ch n m trn 1 mt phng m c 1 phn,c khi hon ton tch ra khi mt phng.

    Mt khc cc chi tit vi c phi lm bng vt liu c tnh cht thch hp thd c chi ti t cn n hi nh l xo, c chi tit cn rt cng, c chi tit cn mm

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    do, c ch c n phn xt t vi nh sng, c ch c n dn in. May mn l trn cs silic c th lm ra 1 s v t liu p ng c nhu cu ni trn. Cng c th dng cc phng php bc bay, phn x t o nhng lp cht t bit nh lpkim loi phn x, lp p in, lp hp kim n hi v.v... ln bm t silic ri khc

    hnh ch ny c m t phn xt t dng lm gng, ch kia c l kim lo i n hidng lm l xo v.v...

    C th k n 1 s phng php v gia cng chi ti t c tiu biu cngngh MEMS nh sau:

    - Gia cng vi c khiGia cng vi c khi l ly i 1 phn thtch trong phi n vt liu hnhthnh chi tit vi c. Gi l gia cng nhng thc ra l dng cc phng

    php ha, l n mn to ra trn phin cc lsu, cc rnh, cc ch lm

    v.v... hnh thnh cc chi ti t c ph n cn li c 2 cch ph bi n: n mn t: thng dng i vi cc phin vt liu l silic, thch

    anh. y l qu trnh dng dung dch ha cht n mn theo nhngdin tch nh sn nh cc m t n (mask). Cc dung d ch ha chtthng dng i vi silic l cc dung dch axit hoc hn hp cc axitnh HF, HNO3, CH3COOH, hoc KOH. Vic n mn c th l nghng (n mn u nhau theo mi hng) hoc d hng (c hngtinh th n mn nhanh, c hng chm).

    n mn kh: n mn kh bng cch cho kh hoc hi ha cht tcdng thng l nhi t cao. Hnh d ng, din tch h n mn cxc nh theo mt n (mask) t ln bm t phin vt liu. tngcng tc n mn c th dng sng in t (RF) kch thchphn ng hoc dng in th tng tc ion t c l tng tc ccvin n bn ph.

    Vi c khi khc vi vi c b m t trong vt liu nn, Si n tinh th,c to mu v c nh dng hnh thnh m t thnh, c to mu v cnh dng hnh thnh m t thnh phn c chc nng quan trng trong sn phmcui cng (v d n n Si khng n gin hot ng nh mt nn th ng nh trongtrng hp vi c bm t).

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    Li dng c tnh khc khng ng hng d on c ca Si n tinh th,nhiu hnh dng ba chiu phc tp vi chnh xc cao nh rnh V, knh, via../ cth c hnh thnh.

    Minh ha quy trnh vi c khi.

    - Gia cng vi c bmt.Th d trn phi n silic cn to ra 1 m a tinh th silin 1 u.

    To ra lp oxid silic trn phin silic. Dng mt n1 khot (theo cch kh c hnh) din tch sau ny g n

    vo y u c nh ca dm. Ph ln ton b 1 l p a tinh th silic r i dng mt n2 kh c hnh

    khot i lp silic a tinh th, chch a li 1 dm.

    http://4.bp.blogspot.com/_4cnck3476DE/RxtzUEzqUQI/AAAAAAAAGj4/mPGvrUCynq0/s1600-h/vico06-728264.jpghttp://3.bp.blogspot.com/_4cnck3476DE/RxtzT0zqUPI/AAAAAAAAGjw/1roh75ez0Bs/s1600-h/vico05-726253.jpg
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    Nhng ton b vo 1 lo i axit ha tan h t SiO2 (nhng khng hatan silic) ta c c dm a tinh th 1 u bm vo phin silic, 1 utdo.

    Trong th dtrn c nh ng lp cht o ra nh lp SiO2 chc vai tr trong 1giai on gia cng, sau li ha tan lo i b. Ngi ta gi l lp hi sinh.

    Vi c bm t l 1 phng php sn xut MEMS bng cch lng ng, tomu v khc 1 chui cc mng mng, dy 1-100mm. 1 bc xl quan tr ng yucu vi linh kin MEMS ng l loi b i c chn lc.

    - Gia cng bng tia laze.C th dng tia laze t o ra nhng chi tit vi c theo kiu khot ln

    lt, theo kiu trc tip. Tuy nhin cch gia cng ny rt chm, khng giacng ng lot c.

    V cy cng ngh MEMS cch gia cng b ng laze thng ch dng lm khun. Laze dng l laze eximo mi m nh v vt liu gia cngthng l cht do, polymer.

    - Liga.Liga l t ghp c a Lithgraphie Galvanofruning und Abformung, ting

    c ngha l khc hnh, m in v lm khun. y l kthu t to ra cc hvi c 3 chiu ch khng ph i l 2 chiu nh cc cch kh c hnh bnhthng.

    http://1.bp.blogspot.com/_4cnck3476DE/RxtzTUzqUOI/AAAAAAAAGjo/12YmE0Ac3oE/s1600-h/vico04-725828.jpg
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    Liga ngi ta dng chm tia X cc mnh nn c th i su vo chtcm n hng milimet. Cht cm thng dng thuc loi acrylic vit tt lPMMA. Thng qua nhng ch b khot th ng trn khun, tia X chiu volp cm theo nhng din tch nht nh, lm bin cht cht cm c tia X

    chiu n sb ha tan.V trong k thut Liga ngi ta thng dng lp cht cm dy, v tia X

    mnh nn c th i su vo lp cht cm n hng trm, thm ch hngnghn micromet nh sau khi nhng vo dung dch, nhng chch t cm b ha tan i c th r t su, hnh khc thc s l 3 chi u chkhng ph i l 2chiu nh quang kh c thng thng.

    Liga l 1 qui trnh kt hp mt nphim dy (thng dy hn 1mm) vi 1in quang tia X nng lng cao (~1 GeV) m c tht o mu mt ndy v itin c y cao v cng to ra kt quvch bn th ng ng.

    http://3.bp.blogspot.com/_4cnck3476DE/RxtzV0zqUWI/AAAAAAAAGko/wKpiIN4MTYE/s1600-h/400x400_mem2-735146.jpg
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    Mc d 1 vi ng dng ch yu c u cc cu trc mt n t o khun caotheo chiu ng, cc ng dng khc thu c tvi c sd ng cu trc mtn dy nh mkhun (vd v t liu c th c lng ng nhanh chng vo 1khun chi tit cao bng m in). Hn chc a Liga l i hi 1 ngun nng

    lng tia X cao, iu ny i hi chi ph cao v him. Quy trnh Liga: