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2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 11
Manufacturing Manufacturing
OperationsOperations
Dr. Len Mei Dr. Len Mei
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 22
What is a manufacturing What is a manufacturing
operationoperation
�� An operation using given An operation using given
resources to produce products resources to produce products
in volumein volume
�� Resources include: tools/ labor/ Resources include: tools/ labor/
materials/ utilities/ cashmaterials/ utilities/ cash
�� A manufacturing operation A manufacturing operation
without a competitive cost/ without a competitive cost/
quality cannot survive for longquality cannot survive for long
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 33
ProductivityProductivity
�� How efficiently an organization How efficiently an organization
can convert input resources into can convert input resources into
goods and servicesgoods and services
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 44
ChallengesChallenges
�� Every manufacturing operation is uniqueEvery manufacturing operation is unique
�� Manufacturing operation is also dynamic Manufacturing operation is also dynamic that is constantly changingthat is constantly changing
�� Knowing the operation theory can help to Knowing the operation theory can help to manage the operationmanage the operation
�� Establishing a good system can reduce Establishing a good system can reduce management intervention based on management intervention based on personal judgment (mostly biased), and personal judgment (mostly biased), and move the production like clockworkmove the production like clockwork
�� Managing manufacturing is like navigating Managing manufacturing is like navigating a large ship, a decision can change the a large ship, a decision can change the course and make it difficult to turn backcourse and make it difficult to turn back
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 55
ChallengesChallenges
�� A good operation requires precipitation of A good operation requires precipitation of every member in the factory with clear every member in the factory with clear understanding of his daily, weekly, monthly understanding of his daily, weekly, monthly goalsgoals
�� A good manufacturing system will reduce A good manufacturing system will reduce complex operations into easy to follow complex operations into easy to follow goals at different levels goals at different levels
�� The goals for each member, each team/ The goals for each member, each team/ task force/department need to be coherent task force/department need to be coherent and built toward the same ultimate goal and built toward the same ultimate goal ((HoshinHoshin 方针)方针)
�� Manufacturing requires disciplineManufacturing requires discipline�� This cannot be accomplished without an This cannot be accomplished without an
overall understanding of the operation itselfoverall understanding of the operation itself
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 66
ChallengesChallenges
�� Manufacturing operation is not an Manufacturing operation is not an isolated operation. It has to exist and isolated operation. It has to exist and operate under the business context. operate under the business context.
�� Factory priority is often set by Factory priority is often set by business priority and financial business priority and financial requirementsrequirements
�� Such interface must be well Such interface must be well established established
�� Manufacturing is a large organization. Manufacturing is a large organization. Any wavering or conflict of directions Any wavering or conflict of directions will result in the waste of resourcewill result in the waste of resource
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 77
A production system consists A production system consists
of 4 partnersof 4 partners
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 88
For a production to happen:For a production to happen:
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 99
Labor Labor
Labor is the most difficult Labor is the most difficult
managementmanagement
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1010
Capacity loss due to lacking Capacity loss due to lacking
laborlabor
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1111
TaskTask
�� Compiling hourly going rate Compiling hourly going rate
trend charttrend chart
�� Identify the low HGR root causeIdentify the low HGR root cause
�� Use management technique to Use management technique to
eliminate root causeeliminate root cause
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1212
Task Task
�� Synchronization can provide Synchronization can provide
efficiency without extra costefficiency without extra cost
�� Need to develop a matrix to Need to develop a matrix to
monitor synchronizationmonitor synchronization
management
productioninformation
managefeedback
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1313
Shift change managementShift change management
�� Shift change creates the biggest Shift change creates the biggest productivity loss due to labor productivity loss due to labor and often creates and often creates misoperationmisoperation
1st shift 2nd shift
Overlap/ Shift handover
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1414
Create working cellCreate working cell
�� A working cell, such as A working cell, such as
photolithography, involves photolithography, involves
operators, process engineers, operators, process engineers,
equipment engineers, equipment engineers,
integration. The communication integration. The communication
and cooperation among the and cooperation among the
working cell members are working cell members are
critical to the performance of the critical to the performance of the
cellcell
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1515
A matrix organizationA matrix organization
diffusion etchphotoThin film
operator
Eq eng
Proc eng
cell
department
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1616
ProcessProcess
Process is the keyProcess is the key
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1717
Process improvementProcess improvement
�� Process Process standarizationstandarization
�� Process simplificationProcess simplification
�� Yield improvementYield improvement
�� Process design to avoid Process design to avoid
excursionexcursion
�� Unnecessarily tight process Unnecessarily tight process
spec reduces efficiency without spec reduces efficiency without
buying more buying more quality or yieldquality or yield
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1818
Tools Tools
The most expensive resourceThe most expensive resource
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1919
ToolsTools
�� ““ToolsTools”” is the most expensive is the most expensive
partnerpartner
�� Two componentsTwo components
�� DepreciationDepreciation
�� MaintenanceMaintenance
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2020
Factors determining Factors determining
depreciation per unit outputdepreciation per unit output
�� Cost of acquisitionCost of acquisition
�� Capacity balanceCapacity balance
�� Utilization Utilization –– productive timeproductive time
�� Throughput Throughput
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2121
Task Task –– establish depreciation establish depreciation
bench markbench mark
�� $1.6 M/masking layer/1K wafers $1.6 M/masking layer/1K wafers
per month for 70 nm technologyper month for 70 nm technology
�� A A fabfab with 40K/m, 30 ML with 40K/m, 30 ML
process costs $1.92 Bprocess costs $1.92 B
�� Depreciation cost per wafer:Depreciation cost per wafer:
$1.6 Mx30/72/1000=$662$1.6 Mx30/72/1000=$662
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2222
UtilizationUtilization
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2323
Task Task
�� Compile utilization charts for each Compile utilization charts for each equipment and equipment typeequipment and equipment type
�� Evaluate the rationale for Evaluate the rationale for capexcapexexpansionexpansion�� cutting down Noncutting down Non--scheduled capacity is scheduled capacity is
a way to save money without sacrificing a way to save money without sacrificing capacitycapacity
�� Bottleneck equipment should always be Bottleneck equipment should always be the most expensive equipmentthe most expensive equipment
�� Ranking of the depreciation per wafer Ranking of the depreciation per wafer for equipment type should be the same for equipment type should be the same as ranking of bottleneck equipment typeas ranking of bottleneck equipment type
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2424
0000
5555
10101010
15151515
20202020
25252525
30303030
35353535
40404040
45454545
50505050
AAAA BBBB
NonNon--scheduled capacityscheduled capacity
K unit/month
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Capacity balanceCapacity balance
0000
10101010
20202020
30303030
40404040
50505050
60606060
70707070
80808080
90909090
AAAA BBBB CCCC DDDD
Bottleneck equipment
Identifying and improving the capacity of bottleneckequipment is a sure way to increase overall fab capacity
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2626
Task Task
�� Determine bottlenecks in the Determine bottlenecks in the
production lineproduction line
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2727
Unscheduled down timeUnscheduled down time
�� Unscheduled down usually Unscheduled down usually
means product damage means product damage
�� Its loss is two foldsIts loss is two folds--
�� Depreciation and maintenanceDepreciation and maintenance
�� Product scrap or downgradeProduct scrap or downgrade
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2828
0000
50505050
100100100100
150150150150
200200200200
250250250250
AAAA BBBB CCCC DDDD EEEE
Pareto charts Pareto charts
Time units
Root cause
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2929
Task Task
�� Compiling Compiling paretopareto charts to determine charts to determine the top three root causes for the the top three root causes for the unscheduled down and address the unscheduled down and address the problemproblemss
�� Fixing the unscheduled down root Fixing the unscheduled down root causes usually improves the qualitycauses usually improves the quality
�� Distinguish between the real root Distinguish between the real root cause and the apparent root causecause and the apparent root cause
�� Difference between assist and down Difference between assist and down (e.g. jammed wafer)(e.g. jammed wafer)
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3030
Scheduled down and taskScheduled down and task
�� Daily, weekly, monthly, quarterlyDaily, weekly, monthly, quarterly
�� How long takes to performHow long takes to perform
�� Which parts are changedWhich parts are changed
�� Second source spare partsSecond source spare parts
�� Review necessity of parts changeReview necessity of parts change
�� Internal vs. outsourcingInternal vs. outsourcing
�� SchedulingScheduling
�� Multiple toolsMultiple tools
�� Multiple chambersMultiple chambers
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3131
TaskTask
�� Compile trend chart data for the Compile trend chart data for the
total equipment maintenance total equipment maintenance
cost (parts/ labor for both cost (parts/ labor for both
internal and outsourcing)internal and outsourcing)
�� Add maintenance cost to the Add maintenance cost to the
equipment cost to determine the equipment cost to determine the
cost of ownershipcost of ownership
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3232
TaskTask
�� Compile trend charts for MTTF Compile trend charts for MTTF
and MTTR for each equipmentand MTTR for each equipment
�� Bench mark different equipment Bench mark different equipment
of the same equipment typeof the same equipment type
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3333
EngineeringEngineering
�� Daily performance checkDaily performance check
�� Kit change due to process Kit change due to process
changechange
�� CalibrationCalibration
�� Recipe management or editingRecipe management or editing
�� Self cleaningSelf cleaning
�� Test runsTest runs
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3434
TaskTask
�� Breakdown of engineering Breakdown of engineering
activities on tools and evaluate activities on tools and evaluate
its effectivenessits effectiveness
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3535
StandbyStandby
�� Task Task –– compile standby time for compile standby time for
each equipment typeeach equipment type
�� Standby due to lack of partnersStandby due to lack of partners
�� LaborLabor
�� WIPWIP
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3636
Improving bottleneck capacityImproving bottleneck capacity
For bottleneck equipment, we must minimize this.
For bottleneck equipment, we must maxmizethis.
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3737
Improving bottleneck capacityImproving bottleneck capacity
Equipment automation plays an important role!
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3838
OEE using equipment OEE using equipment
automationautomation
�� OEE (overall equipment OEE (overall equipment
efficiency) improvement by efficiency) improvement by
retrieving equipment retrieving equipment
performance data from performance data from
equipmentequipment
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3939
WIPWIP
Managing WIP intelligentlyManaging WIP intelligently
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Capacity loss due to lacking of Capacity loss due to lacking of
WIPWIP
�� Introduction of the theory of Introduction of the theory of
operating curve managementoperating curve management
�� Two normalized parametersTwo normalized parameters
�� UU UU –– fabfab capacity utilization capacity utilization
(capacity utilized vs. total capacity)(capacity utilized vs. total capacity)
�� FF FF –– flow factor (cycle time vs. flow factor (cycle time vs.
raw process time)raw process time)
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4141
OCMOCM
DGR – daily going rate(raw process time)
gap
Queuing theory
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4242
Operating curve with different Operating curve with different αα
�� Small Small ααis more efficientis more efficient
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4343
Cycle timeCycle time
�� Flow factor (FF) is the Flow factor (FF) is the
normalized cycle timenormalized cycle time
�� Too long cycle time is bad:Too long cycle time is bad:
�� Increase cost of WIPIncrease cost of WIP
�� Decrease qualityDecrease quality
�� Task Task –– create a trend chart for create a trend chart for
flow factor flow factor
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4444
Cycle time breakdownCycle time breakdown
�� Processing timeProcessing time
�� Queue time (waiting for tools)Queue time (waiting for tools)
�� Queue time (waiting for labor)Queue time (waiting for labor)
�� Hold time (waiting for engineers/ Hold time (waiting for engineers/
process)process)
�� Transport timeTransport time
�� Above CT analysis for each Above CT analysis for each
modulemodule
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4545
Example of detail CT reportExample of detail CT report
no. stage Q-tgt Q-actual SPT R-actual H-tgt H-actual Avg CT cum CT cum SPT FF
1 wfr start - - 0.2 0.2 - - 0.2 0.2 0.2 1.00
2 preanneal 1.0 2.0 7.3 7.0 0.2 1.0 10.0 10.2 7.5 1.36
3 pad nitride 3.0 2.0 6.3 6.5 - - 8.5 18.7 13.8 1.36
4 BSG mask 3.4 3.0 1.6 1.7 2.0 1.2 5.9 24.6 15.4 1.60
5 BSG anneal 2.3 2.0 4.8 4.5 1.2 3.0 9.5 34.1 20.2 1.69
6 DT photo 3.5 4.0 7.1 7.0 1.0 1.5 12.5 46.6 27.3 1.71
7 DT MOetch 2.2 4.0 5.7 6.0 1.1 2.1 12.1 58.7 33.0 1.78
8 DT etch 3.0 2.3 2.3 2.2 2.0 2.0 6.5 65.2 35.3 1.85
9 edge poly 2.0 2.5 2.3 2.2 1.0 3.1 7.8 73.0 37.6 1.94
10 DT etch+ cln 2.3 3.0 1.5 1.6 1.4 2.0 6.6 79.6 39.1 2.04
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4646
Task Task
�� Create cycle time reportsCreate cycle time reports
�� Identify long cycle time itemsIdentify long cycle time items
�� Eliminate long cycle time itemsEliminate long cycle time items
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4747
Daily management of WIPDaily management of WIP
no. stage BOH moves EOH turn turn tgt scrap rework
1 wfr start - - - - - - -
2 preanneal 200 200 350 0.73 0.80 21 -
3 pad nitride 340 650 435 1.68 1.50 - -
4 BSG mask 325 430 230 1.55 2.00 - -
5 BSG anneal 435 456 345 1.17 1.00 - -
6 DT photo 560 890 345 1.97 1.80 - 33
7 DT MOetch 325 232 230 0.84 2.00 - -
8 DT etch 450 270 230 0.79 2.40 - -
9 edge poly 325 435 235 1.55 1.60 - -
10 DT etch+ cln 421 534 411 1.28 1.60 - -
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4848
Gap Chart Gap Chart –– identifying the root identifying the root
cause of long cycle time and low cause of long cycle time and low
utilizationutilization
Gap too large
FF too large
efficient production
In-efficient production
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4949
Gap ChartGap Chart
�� Plotting daily gap chart is useful Plotting daily gap chart is useful
because one can tell the factory because one can tell the factory
efficiency at one glanceefficiency at one glance
�� The direction of moving of the The direction of moving of the
daily data point also tells us the daily data point also tells us the
production is moving toward production is moving toward
more efficiency or less efficiencymore efficiency or less efficiency
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5050
A Gap Trend ChartA Gap Trend Chart
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5151
Trend charts of efficiencyTrend charts of efficiency
�� Regardless of the manufacturing theory, Regardless of the manufacturing theory, we can set up many different trend charts we can set up many different trend charts to show the trend of efficiencyto show the trend of efficiency
�� It is easy to setup and powerfulIt is easy to setup and powerful
�� The design of trend charts should be The design of trend charts should be representative and the improvement should representative and the improvement should be directly linked to a few specific actions be directly linked to a few specific actions taken. Interdependent parameters should taken. Interdependent parameters should be removedbe removed
�� The trend charts should be The trend charts should be fabfabindependent so it can be benchmarked independent so it can be benchmarked
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5252
Trend charts of efficiency Trend charts of efficiency --11MLPW – Masking layer per week
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5353
Trend charts of efficiency Trend charts of efficiency --22
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5454
Trend chart of masking layer Trend chart of masking layer
productivityproductivity
�� Actual masking layer per week Actual masking layer per week
performed vs. targetperformed vs. target
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5555
How to monitor monthly targetHow to monitor monthly target
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Manufacturing variability Manufacturing variability αα
Not all the lots are equal
Queing theory CT/RPT=FF=αααα(u/(1- u)+1)
Where u=DGR/Capa
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5757
Example of OCM curveExample of OCM curve
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αα, uptime and utilization trend , uptime and utilization trend
chartchart
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5959
How to oHow to optimizing ptimizing αα
Optimizing Optimizing ααmeans to improve the operation efficiency means to improve the operation efficiency
(more output in less time) without adding capacity(more output in less time) without adding capacity
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Line control to optimizing Line control to optimizing αα
�� Using line control methodology Using line control methodology
to improve line balanceto improve line balance
�� Accurately forecast WIP for Accurately forecast WIP for
bottleneck equipmentbottleneck equipment
�� Establish alert for coming WIP too Establish alert for coming WIP too
high or too lowhigh or too low
�� Establish dispatch rulesEstablish dispatch rules
�� Always provide enough WIP to Always provide enough WIP to
feed bottleneck equipmentfeed bottleneck equipment
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 6161
Line balancingLine balancing
�� Daily WIP turn at 10 means a lot can go Daily WIP turn at 10 means a lot can go through 10 process recipes per daythrough 10 process recipes per day
�� Lot dispatching should avoid sending the Lot dispatching should avoid sending the lots toward process bottleneck within 10 lots toward process bottleneck within 10 process recipesprocess recipes
�� Dispatch rules need to be setup to arrange Dispatch rules need to be setup to arrange the lot processing priorities automaticallythe lot processing priorities automatically
�� Bottlenecks are dynamic and changing Bottlenecks are dynamic and changing constantlyconstantly
�� A control table with a list of all the A control table with a list of all the WIPWIP’’ss at at every equipment type should be generated every equipment type should be generated for production control reviewfor production control review
�� Manual intervention is occasionally needed Manual intervention is occasionally needed to override auto dispatch systemto override auto dispatch system
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Line balanceLine balance
�� Bottleneck equipment type should be given Bottleneck equipment type should be given highest priority for equipment maintenancehighest priority for equipment maintenance
�� Relationship between line balancing and Relationship between line balancing and production efficiency (production efficiency (αα) ) should be should be carefully monitoredcarefully monitored
�� Daily inventory turn for each equipment Daily inventory turn for each equipment type can be a good indicator for line type can be a good indicator for line balancebalance
�� Manufacturing system should flash alert for Manufacturing system should flash alert for the equipment type with inventory turn the equipment type with inventory turn trending down for prolong period or below trending down for prolong period or below certain valuecertain value
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Line balanceLine balance
�� WIP management and lot WIP management and lot
dispatching provide the biggest dispatching provide the biggest
opportunity to improve efficiency opportunity to improve efficiency
without extra cost.without extra cost.
�� The key tool is real time The key tool is real time
dispatching systemdispatching system
�� The theory is the OCMThe theory is the OCM
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Advanced techniques for line Advanced techniques for line
controlcontrol
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Planning of production startsPlanning of production starts
�� Production starts by pull and pushProduction starts by pull and push�� Pull Pull --Production backed by customer orderProduction backed by customer order
�� Push Push ––Production allocated for sales force to Production allocated for sales force to push push
�� Production starts plan is driven by sales. It Production starts plan is driven by sales. It is part of the business process.is part of the business process.
�� Erratic production plan is detrimental to the Erratic production plan is detrimental to the production efficiencyproduction efficiency
�� It is recommended to fix the production It is recommended to fix the production plan for at least plan for at least ½½ of cycle timeof cycle time
�� Monthly planning meeting for production Monthly planning meeting for production plan, capacity, production targetplan, capacity, production target
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Production planProduction plan
�� Mid term (6 months) production Mid term (6 months) production plan drives resource forecast, plan drives resource forecast, supply chain managementsupply chain management
�� Long term (1 year or more) Long term (1 year or more) production plan drives production plan drives capexcapex, , headcount, and other strategic headcount, and other strategic business plans (market share business plans (market share target, return on investment target, return on investment target, etc) target, etc)
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AutomationAutomation
Tool for productivity and quality Tool for productivity and quality
improvementimprovement
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AutomationAutomation
�� Automation is the essential tool Automation is the essential tool
for factory efficiency for factory efficiency
improvementimprovement
�� Three areas of automationThree areas of automation
�� Factory automationFactory automation
�� Equipment automationEquipment automation
�� Data automationData automation
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Purpose of automationPurpose of automation
�� Relief mundane task of data Relief mundane task of data
collection and calculationcollection and calculation
�� Shorten information feedback Shorten information feedback
looploop
�� ControlControl
�� Remove emotional decisions Remove emotional decisions
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Factory automationFactory automation
�� MES (manufacturing execution MES (manufacturing execution system)system)�� WIP/ DGR/ turn/ equipment statusWIP/ DGR/ turn/ equipment status
�� AMHS AMHS –– automatic materials automatic materials handling system (wafer transport handling system (wafer transport system)system)
�� Production control system Production control system (interfacing with supply chain (interfacing with supply chain management system and including management system and including factory resource management factory resource management system)system)
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7272
Equipment automationEquipment automation
�� Equipment automation has two Equipment automation has two
applications:applications:
�� OEE (Overall Equipment OEE (Overall Equipment
Efficiency)Efficiency)
�� APC (Advanced Process Control)APC (Advanced Process Control)
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7373
Equipment automationEquipment automation
�� Bring every piece equipment onBring every piece equipment on--lineline
�� APCAPC
�� CoCo--relating yield to equipment relating yield to equipment
parameters parameters
�� Monitor equipment performance data in Monitor equipment performance data in
real time real time
�� OEEOEE
�� Event based scheduling Event based scheduling vsvs time based time based
scheduling of equipment maintenance scheduling of equipment maintenance
�� Throughput improvement Throughput improvement
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Equipment automationEquipment automation
EAP
SERVER
Batch Creat
e
APC
SERVER
Trace
Data
Batc
h
EQ DATA
External
sensors
�� EAP Server APC Functions :EAP Server APC Functions :
�� Configurable Trace Data Configurable Trace Data Connection. Connection.
(Including All Logistic Data) (Including All Logistic Data)
�� External Sensor Integration. External Sensor Integration.
�� Equipment Alarm Collection.Equipment Alarm Collection.
�� APC Server Functions: APC Server Functions:
�� Data CollectionData Collection
�� Fault Detection Fault Detection
�� Data CorrelationData Correlation
10 ~ 20 toolsPer server
10 toolsPer server1 web server1 def/ metrology server1 WAT/yld server
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Equipment Maintenance Equipment Maintenance
Database (OEE)Database (OEE)
�� Equipment abnormal service Equipment abnormal service
record systemrecord system
�� Schedule preventive Schedule preventive
maintenance systemmaintenance system
�� Setting priority for scheduled and Setting priority for scheduled and
nonnon--scheduled maintenance scheduled maintenance
based on daily WIP based on daily WIP disbributiondisbribution
and line balanceand line balance
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Equipment throughput (OEE)Equipment throughput (OEE)
�� To improve bottleneck equipment To improve bottleneck equipment
throughtputthroughtput increases overall factory increases overall factory
capacitycapacity
�� Throughput improvement requires Throughput improvement requires
breakdown data for each process breakdown data for each process
stepstep
�� Benchmarking equipment of the Benchmarking equipment of the
same equipment type will bring the same equipment type will bring the
worst performer to the bestworst performer to the best
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Advanced Process ControlAdvanced Process Control
Data collection From equipment
automationData analysis/
Fault detection &classification
Process control
APC collects data from equipment in real time, analyzes by FDC, sends alarm to equipment engineers for decision.
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APC/OEEAPC/OEE
�� An abnormal parameter of an equipment An abnormal parameter of an equipment sends an alert to equipment supervisorsends an alert to equipment supervisor
�� Supervisor reviews the alert to determine Supervisor reviews the alert to determine whether shutdown is necessary. He whether shutdown is necessary. He reviews the database to find previous reviews the database to find previous cases of same alertcases of same alert
�� If the shutdown is required, he reviews the If the shutdown is required, he reviews the maintenance procedure (a check list) and maintenance procedure (a check list) and triggers a maintenance order.triggers a maintenance order.
�� The system automatically reThe system automatically re--schedule the schedule the priority and send an order to store for the priority and send an order to store for the maintenance kitmaintenance kit
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Run to Run ControlRun to Run Control
�� Use the data from previous step to control Use the data from previous step to control the process in the next stepthe process in the next step
Step N Step N+1
Data collection& analysis
Process control
�� Use the data from previous lots to control Use the data from previous lots to control the process the process for next lotfor next lot
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Data automationData automation
�� Recipe management systemRecipe management system
�� Yield enhancement systemYield enhancement system
�� SPC control system SPC control system
�� Equipment databaseEquipment database
�� Product knowledge databaseProduct knowledge database
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Link to the outside worldLink to the outside world
Factory data (WIP, cycle time, equipment, lots, process)
Accounting data (cost, ASP)
Business and planning data (order, capex, purchasing, inventory)
ERP
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Next level of business Next level of business
engineeringengineering
�� Establish supply chain control Establish supply chain control
system to reduce inventory (JIT)system to reduce inventory (JIT)
�� Improve CT for WIP reductionImprove CT for WIP reduction
�� Managing spare parts and raw Managing spare parts and raw
materials inventory by turnmaterials inventory by turn
�� Managing finished product Managing finished product
inventory by PULL (convert as inventory by PULL (convert as
much PUSH to PULL)much PUSH to PULL)
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A word about quality controlA word about quality control
�� Quality monitoring and control Quality monitoring and control
responsibility belong to QA/QC responsibility belong to QA/QC
departmentdepartment
�� Execution to achieve good Execution to achieve good
quality is the responsibility of quality is the responsibility of
manufacturingmanufacturing
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Business processBusiness process
�� Advanced Planning and Scheduling Advanced Planning and Scheduling System is the calculation of the System is the calculation of the production order based on forecast production order based on forecast of sales order, profit margin and of sales order, profit margin and other other stretegicstretegic considerations. considerations. �� What happens in sales for the next What happens in sales for the next
month, in material costs, labor costs and month, in material costs, labor costs and profit? What is going to happen with the profit? What is going to happen with the costs and the profit for this order? costs and the profit for this order?
�� Forecasting the future sales provides Forecasting the future sales provides the basic data for planning work. the basic data for planning work.
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ReportsReports
�� Manufacturing reports should be Manufacturing reports should be
comprehensive enough to have comprehensive enough to have
a birda bird’’s eye view of the overall s eye view of the overall
factoryfactory
�� All reports should contain All reports should contain
quantitative data that can be quantitative data that can be
benchbench--markedmarked
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8686
SummarySummary
�� Adapt OCM/Adapt OCM/HoshinHoshin/ automation / automation
/OEE/ APC techniques to /OEE/ APC techniques to
eliminate waste and create eliminate waste and create
competitiveness in competitiveness in
manufacturingmanufacturing
�� Integrate the above techniques Integrate the above techniques
into daily production into daily production
management systemmanagement system