(E-GUN EVAPORATION)

2

||||

3|()

|(Physical Vapor DepositionPVD)

4|

5|

|

|

1~10-3 torr 10-3 ~10-7 torr 10-7 torr

6

7-

8-

9-

10

-

11

-CV-6S

12

-

13

-|

|1350

14

-|2

1.

2.

15

-|

1.

2.

16

-|

|

17

-||10-6torrMAIN PUMPING READY

1.

2.

18

-|

19

-|

|

20

-|KEYON

1. 3.2.

21

-

|Start7.3%

22

-|Shutter

|

23

-|Shutter

|

|

|

24

-|PUMPINGHVCP

1.

2.

3.

25

!!