-A4980G006

(1)(2)

XY

1

1.2. 3.3D4.5.6.

(1)(2)(3)

(1)1. 2. SAM 3. PDMS 1. SAM SAM

(2)Hot Embossing Nanoimprint 1. 2. 3. HENIL

(3)UV-NIL1. 2. (4~5psi)He-Xe (Eximer laser)UV-NIL1. 2. (spincoating)(nano-dispensing)

Chou(Nano-imprint Lithography; NIL)10nm

(Wave Optics)

ITO/PEDOT:PSS(20nm)/P3HT:PCBM (80 nm)/Ca/Al500nm(Jsc)1.111.15

ITOITO (16-18)ITOITO(1)(2)ITO

http://kwsun7.ac.nctu.edu.tw/Facilities_1.htmlhttp://www.suss.com/tw/markets/nanoimprint-lithography.htmlhttp://www.src.nctu.edu.tw/nanobio/images/index/Obducat%20nanoimprint%20NCTU.pdfhttp://edm.itri.org.tw/enews/epaper/10009/e01.htmhttp://tw.wrs.yahoo.com/_ylt=A8tUwYRcKLlOS1UATHpr1gt.;_ylu=X3oDMTE1aGk2b2k3BHNlYwNzcgRwb3MDMQRjb2xvA3R3MQR2dGlkA1RXQzA3NV8zNjI-/SIG=18sdma3vg/EXP=1320786140/**http%3a//science.nchc.org.tw/old_science/nano_mems/97_works/nami/%25E6%259C%259F%25E6%259C%25AB%25E5%25A0%25B1%25E5%2591%258A/%25E6%259B%25B9%25E9%259F%25BB%25E5%259C%258B/%25E5%25A5%2588%25E7%25B1%25B3%25E5%25A3%2593%25E5%258D%25B0%25E5%25AF%25A6%25E9%25A9%2597.ppthttp://www.mdu.edu.tw/~mse/NSC/Documents/20080521/%e5%a5%88%e7%b1%b3%e5%a3%93%e5%8d%b0%e5%be%ae%e5%bd%b1%e6%95%99%e6%a1%88%ef%bc%88%e6%98%8e%e9%81%93%ef%bc%89-part2.pdf