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8

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VACUUM RESEARCH LTD. BAKYYMHbIE 3ATBOPbI PA3/1101 11HbIX T111110B Amu BCEX

3a-reopu cepmm LPWA: • anrommHmeabie innm 113 HepwaBerouteii crank C gy or 63 go 400 MM

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3aTeopu cepmm OP: • aniommHmeabie MOHOFIVITHble C Ay OT 63 go 320 MM naHLAamm ISO, ANSI i JIS (no 3aKa3y

BO3MO?KHbI pa3Hbie TV111b1 C pa3HbIX CT0p0H);

• BbICOKBA Flage>KHOCTb — pecypc pa6orbi 250000 WIK.11013 OTKPb111451/3aKpbITMA (Ha 3aKa3 goorynHbi cneLtmanbHbie aepcmm C pecypcom 000000 W1K.110B);

• F11,13K1,11%1ypoeeHb HareKaHmq — He 6onee 2*10 9 m6ap*n/c; • maKcmmanbHurn nepenag gaeneHma 3 6ap; • ace 1- 1411b1 npmaogoe — 3nerrponHeemarin4econn, aneKrpomexaHmvecKmin, py4Hoi1 (pyLmoin pemonm

gocryneH gna ecex TNfOB npmeoga — B cnyHae orKa3a ninraHms).

3a-mop.' cepmm END: • amommHmeabie C gy OT 63 go 630 MM N cpnaHLAamm ISO, ANSI; • npocraft m Hamm-lac! KOHCTpyKLALIFI C nHeemarmtnecKmm LtinnmHgpom B roppe; • BbICOKBA HagewHocrb — pecypc pa6orbi 100000 WelK.110B OTKPb1T14F1/3BKPb1T1,151;

• FIM3K1/11%lyp0BeHb HareKaHms — He 6onee 2*10 9 m6ap*.n/c; • BO3MO)KHOCTb yCTB1-10BK1,1 BCflOMOraTellbHbIX noproa; • maKcmmanbHHO nepenag gaeneHmq — 3 6ap; • 6narogap9 o r111OCKO6D KOHCTpyKLAMM mgeanbHo nogxogmr KpmoaaKyymHbix VIM

gincl4y3moHHbix HacocoB; • aeromarwiecKoe 3aKpbrrme npm orKa3e nmraHms.

3areopu cepmm BEL: • aniommmeable c gy OT 63 go 250 MM N cpnaHqamin ISO, ANSI i CF; • WTOK LtmninHgpa y11110THFIeTCA CBapHbIM C11111bCPOHOM, LITO o6ecne4Neaer noebiweHHyK)

Hage>Kmocrb — pecypc pa6orbi 1000000 W4K110B OTKpbITIN/3aKpb1T1451;

• F11,13011%1 yPOBeHb HareKaHma — He 6onee 2*10 -9 m6ap*n/c; • merannw-lecKoe ini BI4TOHOBOB ynnorHeHme cegna; • maKcinmanbHurn nepenag gaeneHmsi — 3 6ap; • aeromarmLiecKoe 3aKpbri-me npm orKa3e nmraHma.

3areopu cepmm Mini -SS: • 113 Hepwaaeiou.te0 cram C gy or 16 go 50 MM N cOnaHLtamm NW in CF; • BbICOKBA Flage)KHOCTb — pecypc pa6orbi 250000 W1K110B OTKPbITIN/3aKpb11 - 1151;

• 1-11,13101171ypoBeHb HareKaHma — He 6onee 2*10 9 m6ap*n/c; • aneKrponHeamartn4ecKm0 npmeog; • maKcinmanbHuin nepenag gaaneHmR — 3 6ap; • cmcrema 6bicrporo 3aKpbmna npm orKa3e nwraHma.

Oxnamc,eaembie 3a.reopu: • amommHmeable (B03M0)KHbl 1,13 Hep)Kaaeloutein cranm) C qy OT 63 go 630 MM C

cpnaHLAamin nio6oro rmna; • HM31(110 ypoBeHb HareKaHma — He 6onee 10 9 m6ap*.n/c; • anerrponHeamarmLiecKmin 11111,13neKrpomexaHo4ecK10 npmaog; • maKcmmanbHurn nepenag gaaneHma — go 10 6ap. gpyrme TNnbl 3anopmoil apMaTypbl: ymoabie KnanaHbi C gy or 63 go 500 MM (ISO, ANSI); npsimoyranbHbie 3aTB0pb1 C npoxogHum ceyeHmem OT 25*160 go 100*609 MM; cnewnanbHue 3aTB0pb1 TWA t< 11DA3HbDO) npoueccoe, ycroinwable K

arpeccineHbim cpegam 1,1a6pa3mBHum Hacrmom C gy or 50 go 630 MM (ISO, ANSI, JIS).

9

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SR-500 33 6,710-3 (6,710) 2,5 0,75 74 SR-800 48 6,710 -3 (6,7*10 - ) 3 1,5 105

SR-1500B 92,4 6,710 -3 (6,710 - ') 4 2,2 210 SR-20B11 122,4 6,710 -3 (6,710 -) 5 3,7 260 SR-25B11 151,2 6,710 -3 (6,710 -) 5 3,7 260 SR-30B11 182,4 6,710 -3 (6,710 -) 11 3,7 400 SR-37B11 224,4 6,710 -3 (6,710 -) 11 5,5 400 SR-60B11 370,8 5,310-3 (5,310 -) 20 7,5 725 SR-75B11 459,6 5,3*10 (5,310) 20 11 725

SRP- 15000B

918 5,310-3 (5,310 -) 54 22 1560

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10

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Macca, Kr

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B0/40KOI1bLIEBblE HACOCbI

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1 1

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I I

•

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12

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895x410 x678

940x420 x689

814x380 x887

895x410 x943

940x420 x1044

Macca, Kr 280 300 320 450 520 550

YpoBeHb wyma, REA <68 <68 <68 <70 <70 <70

160

140

180 2000

1400

1200

1000

800

600

400

200

0

1,E-04 1,E-03 1,E-02 1,E-01 1,E+00 1,E+01 1,E+02 1,E+03

p, Torr

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120 .c

100 .c

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E 80

60

40

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/ \ IF WAVIIIIIMMIIM I

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10.

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SucTpora olecicrema, n/c

N2 200 550 1000 1300 1800 2800 3200 200

H2 150 370 1000 1000 1100 2400 2500 150

KomnpeccHe N2 1x10 8 1x10 8 1x10 8 1x10 8 1x10 8 1X10 8 1x10 8 1x10 8

H2 4x10 3 3x10 3 4x10 3 4x10 3 3x10 3 6x10 3 3x10 4 4x10 3

ilpextenbriblii BaKyym, He Krim, M6ap

CF 1x109 1x10 -9 1x10 -9 1x10' 1x10 -9 1x10 -9 1x10"

ISO 1x10" 1x10 -8 1x10" 1x10' 1x10" 1x108 1x10' 1x10'

MaKcHmanbHam nponycKalowasi CBOCO6HOCTb, SCCM

543 1500 2715 2715 2444 543 2000 543

Spew! 3anycKa, MmH. 4-6 8-13 9-12 9-12 11-16 10-15 10-15 4-6

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cOoprtHHHH, M6ap 5,5 3 3 3 2,7 2,7 2,7 5,5

npota3130,1114TeribtiOCTb

peKomeHAyemoro cpopaaKyymHoro Hacoca, m 3/4

4,8 15 30 30 30 90 90 4,8

BxoxiHoci clmaHeLt, ily, MM 1S0100 CF100

1S0160 CF160

1S0160 CF160

1S0200 CF200

1S0250 1S0250 1S0320 1S0500

BbixogiHok ctinaHeg KF25 KF40 KF40 KF40 KF40 KF40 KF40 KF50

Macca, Kr 11 41 50 50 80 100 100 250

14

OSAKA VACUUM TYPSOM0J1EKY/151PHblE HACOCbI OSAKA VACUUM CEPIIM TG-F

• rm6pmgHble 6e3macnAHble Typ6omoneKynApHble Hacocu Ha nogeece c Kepammt-lecKmmm Heo6cnywmaaembimm nogumnHmKamm;

• BO3M0)KeH MOHTMK B J1l060M nono>KeHmm; • nP01,13BOPPITeilbHOCTb OT 50 n/c go 2400 n/c (no a3oTy); • BbicoKas npoeogt.t1a51 cnoco6Hocm, Heo6xogmmam grm o6ecneveHmfl HenpepboHoM

OTKe4K11 B npoueccax C BbICOKI1MVI re3OBbIMPI Harpy3Kamm; • CneumanbHaq KOHCTPyKLAPIFI, ycroAitmeasi K MHOI-OKPaTHb1M npopbleam a-rmoccpepbi -

Hanpmmep, B pe3ynbTaTe TeCTOB, Hacoc TG240F abigep>Kmaaer 400 (Hemipecra!!!) npopbmoa armoccpepbi;

• alVITellbFlbli;1 COOK cny,K6b1 - 6onee 100000 4aCOB HenpepbieHoct pa6OTbI; • Bepcmm C BO3AyWHb1M H BORAHbIM oxna)KgeHmem;

• BbICOKaA CKOPOCTb 3anycKa-Topmo>KeHms (TG240F - 1,5-2 MI4HyTb1) o6ecne4maaeT Ml4HIAMallbHble 3egkep>KKI4 B reveHme TeXH01101- 1,14eCK010 npol4ecca.

1,..:•■•■■■_4

Xapaicrepric-rwca TG5OF TG7OF TG240F TG350F TG450F TG800F TG1100F TG1400F TG2400F

Bucrpora geii. crEskm, rilc

N2 51 70 240 330 450 820 1100 1400 2400

H2 12 40 160 210 240 650 720 750 1100

Komnpeccm N2 1,4x10 7 1x10 8 1x10 8 1x10 8 1x10 8 1x10 8 1x10 8 1x10 8 1x10 8

H2 5x16 1x10 5 4x10 4 2x10 3 2x10 3 1x10 4 1x10 4 4,3x10 3 1,3x10 3

npegemaiblk BaKyym, He xywe, M6ap

3x10 -8 1x10 -9 1x10 -8 1x10 -8 1x10 -8 1x10 -8 1x10 -8 1x10 -8 1x10 -8

MakcHmamman nponyckatowan Crl0006HOCTb, sccm

80 HO 400 500 500 860 860 450 1500

Sperm 3anycKa, MHH. 1-1,5 2 1-1,2 2-2,5 2-2,5 5,5-7 5,5-7 5,5-7 5-7

Bpemsa Topmowemisa, MHH.

1-1,5 2 2,5-3,5 5-6,5 5-6,5 12-15 15-18 15-18 15-18

MaKcHmanbHoe Menem% Ha exo,oe B

Hacoc, M6ap 0,1 0,5 0,2 0,9 0,6 0,3 0,3 0,03 0,2

MaxcHman6Hoe Aaarietwe B

cpoprtHHHH, M6ap 13 12 2,6 2,6 2,6 3,3 3,3 3,3 2

np0H3BOAHTerlbHOCTb

pexomeHAyemoro cPopeaxyymHoro

3 2

Hacoca, m3/4

4 4,8 4,8 15 15 15 30

BxoxiHoil cOnaHem, ily, MM

IS063 CF63

IS063 CF63

ISO100 CF100

ISO100 CF100

1S0160 CF160

1S0160/C F160

1S0200/C F200

1S0200/C F200

1S0250

Bbixo,oHoii" cOnaHeq KF16 KF16 KF25 KF25 KF25 KF40 KF40 KF40 KF40

Macca, Kr 5 4 8 7 9 26 27 29 45

5E3MACJ151HblE TYPBOMOIlEKY/151PHblE FlOCTbl

• B coc-raee TMH TG7OF m 6e3macnflHoro gmacpparmeHHoro Hacoca npomatogmTenbHoc -rbio 0,3 m 3/4 1111140,8 m3/4;

• BecnpemegeHrHo manaR 3aHmmaemas1 nnoutagb (338x283 MM) - cpaeHmma C nnoutagbio nmc-ra cipopma-ra A4!

• flonHaI affromam3apms! nom-a o6ecne4maaer npocTory ynpaaneHmst H 3au4Nry OT Kpfrn-mHecKmx pewmmoe pa6orbi;

• 1--IpegenbHbli4 BaKyym -,go 1x10 9 M6ap; • nP01,13B00,11TellbHOCTb -go 70 n/c; • MgeanbHo g.1151 He60.11bLLWIX Fle6OpeTOPHbIX yCTaHOBOK

opraHm3aumm gmcpcpepeHLtmanbHo0 OTKe4Klel He6onbwVx eaKyymHbix )13110B ( aHantnaTopoa OCTaTOLIHbIX ra3OB, 11044131X II

• alleKTPOHHbIX nyweK).

15

TYPSOMOJ1EKYJ151PHblE HACOCbI TYPBOMOIlEKYI151PHblE HACOCbI OSAKA VACUUM CEP1,111 TG-M HA

MA1HMTHOM nogisEcE • Em6pvigHue 1-10.11HOCTb1-0 6e3Maall5IHble Typ6omoneKyricipHbie HaCOCbl Ha marvm -rHom nogBece, cnegyanbHo

cKoHci-pympoBaHHble gn9 TA)KeflIDIX ycnoBvii,i 3KcnnyaraLtvivi; • B03M0)KeH MOHT8>K B nFo6om nano)KeHvm; • n00143BORNTallbHOCTb OT 340 n/c go 3400 n/c

(no a3oTy);

• BbICOKa51 nO0B0gBLIAeci C110C06HOCTb,

Heo6xogvima5 gnq o6ecne4eHvm HenpepbiBHoci OTKa4KV1 B 1-1001..1eCCaX c BbICOK14M14 fa3OBb1M14

Halpy3KaM14;

• CneLmanbHaq KoHci-pyKLmq, yCT0c141,1BeCI K

MH010KpaTHb1M npopbiBam aTmocctDepbi; • ABTomarviHecKasa cincTema 6allaHCV1p0BKVI 14

Kanm6pomm, BcTpoeHHaq B Kom-ponnep; • 1,4HTennerryanbHaq cvicTema nporHo3vipoBaHvm

BO3M0)KHblX c6oeB; • CnamanbHaq KoHc-rpylamsl, yc -roViLmBaci K

npopuBam aTmoccIpepbi; • ,E1,1114TellbHblV1 cpoK Cily>K6b1 — 6onee 100000

HacoB HenpepuBHoi4 pa6oTbl; • Bo Hoe vinv Bo3gywHoe oxna)KgeHme; • HeCK0.11bK0 .1114Heek B pamKax 0,D,FION Ce01414:

C M — yHviBepcanbHbie HaCOCbl ,E1.11S1 14C110.11630BaH1451 B 06b14HbIX nponoweHmsix, rpe He06XOnklMa

BbICOK011p0143BOTANTellbHa51 6e3macncmas;ioTKaHKa; O MI — gnq pa6o -rb1 C arpeccvmHbimvi N aKT14BH6111/114 ra3amvt — Bc-rpoeHHaq cycTema TepmoperynvipoBaHmq

1103130.1151eT vt36e)KaTb KoHgeHcaLtvm napoB BpegHbix fa30B BHy-rpvi Hacoca. OCHOBHOe npHno>KeHme — nonynpoBogHHKoBasi 1100MblWfleHHOCTb, npow3Bogc -mo riflOCK011aHarlbHbIX gvicnneeB vi T. 11.

o ML — .1114H14F1 HaCOCOB CO CBBOXF1143K14M ypoBHem By6paLmvi — go 0,1 HM. O MU — cBepxBbicoKoBaKyymHaci .1114H14F1 HaCOCOB — AOCT14>K14Mblki npegenbHbM BaKyym 3x10 11 M6ap. O XHV — 11141-INSI ynb-rpa-cBepxBbicoKoBaKyymHbix HaCOCOB — M1400BOVi peKopgcmeH no gOCTH>KHMOMy

npegenbHomy BaKyymy - 1x10 -12 m6ap.

TYPBOMO/lEKYJISIPHblE HACOCbI OSAKA VACUUM HA MAIHVITHOM rlOrIBECE CEPP1I4 TG-MI /41151 11011YIIPOBOTIHMKOBbIX 11POLIECCOB

O6naRaFoT Bcemy oco6eHHoc -rqmvi, xapaK -repHbimvi grisl HaCOCOB cepvm TG-M. B Rom-mei-lye K

NNW

• 3anaTevroBaHHaq TeXH011011453 TemneparypHoro KOHT00.115:1 BHy-rpeHHeVi 11000CT14 Hacoca

no3Bonsier 110.11HOCTb10 vi36eraTb ocawgeHmq N KoHgeHcau,vivi pa6oHmx fa3OB BHyT1314

Hacoca; • BHyTpeHHqq cvc -rema TepmoperynmpoBaHvg, noggepimBaFou4a9 TeMnepaTypbl

anemewroB Hacoca go 120°C; YHmKanbHaq Tepmovmonqi..msl no3Bonqe -r Hanpaansrrb Termo klMeHHO B Te y3nbl, rge

BO3M0>KHa KoHgeHcaLmq pa6oHmx fa30B.

TYPBOMOIlEKY1151PHblE HACOCbI OSAKA VACUUM HA MA1HMTHOM norwEcE CEPHI4 TG-ML CO CBEPXHI43KPIM YPOBHEM BilBPALIP111

Cepoq Typ6omoneKynqpHbix HaCOCOB OSAKA VACUUM TG-ML CO CBel:DXH143K14M

ypOBHeM Bvi6paumvi 6bina cneLmanbHo pa3pa6o -raHa, 4TO6b1 r10.11HOCTbF0 arBeHaTb

Bb1COKV1M Tpe6oBaHvi9m, npegb9Bnqembim TaKk1M14 npyno>KeHvicimv KaK 3Y(1)

nwrorpacpvq, M3MC, cKaHvipyKpume 311eKT0OHHble mviKpocKonbi

HaHoTexHonorviyecKvie CNCTeMbl.

Ty060MOIleKyllApHble HaCOCbl 3T0f4 cepum oanagaEoT Bcemo oco6eHHocTqw,

xapaKTepHbimm gnsi cepvm TG-M . gononHeHvie K HVIM:

• YpoBeHb Bvi6paLmvi meHee Hem 1 HM K8K B 11P0,1:10.11bHOM, TaK

nonepekmom ceyemn;

• nocT ynHa Bepcmq c BHeWH14M14 gemntepamm, ypoBeHb Bvi6paLmy

KOT00014 meHee 0,1 HM.

16

101/r 11.. .444'1

OSAKA VACUUM TYPBOMOIlEKY/151PHblE HACOCbI OSAKA VACUUM HA MA1HMTHOM

r10/1BECE CBEPXBbICOKOBAKYYMHOril CEP1,111 TG-MU

CepiN ceepxabicomaaxyymHbtx Typ6omonexyruipHbtx HaCOCOB OSAKA VACUUM TG- MU 6bt.na cneumanbHo pa3pa6oTaHa gATIA npfrino*etimci, B KOTOpbIX He06xopmmo OTKa41,1BaTb nerKme fa3b1 Li gOCTI,IraTb

CBepXBbICOK010 BaKyyma. BbICOK03CIDIDeKTVIBHbl npm 1,1C110.11630BaHlAtil B

TaKtiX nptinoweHmstx KaK COL131,1Ka BbICOKI1X oFteprmii, ycxopm -renbHo-HaxonLiTeribmzde Komnnexcbi, yCTaHOBK1,1 C01,131,11(14 TeepRoro Tana M T. n. Typ6omonexyrutpHble HaCOCbl 3T01%1' cepfrim o6nagatoT acemy OCO6eHHOCTSIMPI, xaparrepribimm OnA ceptim TG-M. B RononHeHme K

1-114M:

• lipegenbHoe ouraTok--me gaanewe — 3x10 -11 M6ap (33x10 -9 fla).

TYPBOMO/lEKY/151PHblE HACOCbI OSAKA VACUUM

1 0'

1 0'

ro

ti t0 66. 0

n' 10 x 1

a)

ff.' 10 01:1

10'

10' 103 HA MArEWITHOM 110/113ECE YrIbTPA-CBEPXBbICOKOBAKYYMHOPI CEP10111 TG-M-XHV

rIHHHA yrib-rpa-caepxabicoxoaaxyymHbix HaCOCOB OSAKA VACUUM TG-M-XHV — mooaor4 pexoprtcmeH

cpegy Typ6omonexyricipHbix HaCOCOB no goc-mx<mmomy npegenbHomy Baxyymy - 1x10 -12 M6ap (1x10 -19 fla). naHHble HaCOCbl 11cnonb3yKn-cB B ripw.noweEmstx, rqe Tpe6ye -rut 6ecKomnpommccHble

xapata-epwc-rwm no ROCTI,I)KeHl4K) npegeribHoro amyyma — aHant4TH4ectuie yCTaHOBKM,

HaHorexHonorw-tecxwe CVICTeMbl.

eltd1116

XapaKTBOHCTIIKH 6e3MaCrISIHbIX Typ6omoneKyrimpliblX HaCOCOB OSAKA VACUUM ceptik TG-M, TG-ML, TG-M , TG-MU, TG-M-XHV

Xapax -repHcrkwa TG390M

TG390ML TG390MI

TG420M TG420ML TG420MI

TG900M TG900MI TG900ML

TG900MU TG1121M

-XHV

TG1300M TG1300MI TG1300ML

TG1300MU TG2400M TG2400MI

TG3260M TG3251M1

661CTp0Ta /4e -tic -mm, o/c

N2 340 400 900 1100 1300 2400 3200

H2 290 300 1050 820 1200 1100 2700

Komnpecckm N2 1 X1 0 8

H2 4,5x10 3 1,5x10 4 6x10 4 1x10 6 1,5x10 4 6x104 1,4x10 3 3x10 4

ripe/gm-16HW easyym, He xywe, M6ap 1x10 -9 1x10 - 9 1x10 -3 1x10 -8 1x10 -9 3x10 - 11 1x10 -12 1x10 -9 3x10 - 11 1x10 -8 1x10 -9

MaxcHman6Ham nponycxwouom CHOCO6HOCTb, sccm

2000 1000 2000 1000 3000 895 3000 2000

Bpems 3anycxa, MMH. 2-3 4-5 3,5-5,5 4-5 13 Bpems Topmomemm, MMH.

4-5 3,5-5 4-5 14

MaxcHmammoe igaeneHme Ha mom B

Hacoc, M6ap 1 0,5 1 0,5 1 0,1 1 1 0,5

Maxcmman6Hoe meneHme B

cDoprimm, M6ap 4 3,5 4 3,5 5 6,6 5 2 4

npom3BoxiwrenbHOCTb pesomewiyemoro ctoopeasyymHoro Hacoca, m 3/g

9,6 15 30 90

BxogHori cOnaHey, Ay, MM

1S0100 CF100

1S0100 1S0160 CF160 1S0160

1S0160 CF160

CF160 CF200 1S0200 CF200

CF200 1S0250 1S0320

136txo/lHoil ctmaHeLA KF25 KF40 Macca, Kr 14 18 14 18 42 38 42 54 80

17

Bperot orKavKii, vac

E+1 0.8SEC

.100 E+1

REAL G

' { ri i iii11 111 1 11 11 111'11 1 1 1 , 1 11 ' X1

—.100

KPVIOBAKYYMHOE 050PY/40BAHME KomnaHinsi Suzuki Shokan, opraHmoaaHHa53 B 1905 ropy, BilOalleaCTI31/11/1

cTana H no cev geHb RallFleTCR nvgepom B odnacTin flp0MbILLIcleHHbIX

fa3OBbIX cincrem. Suzuki Shokan — nvoHep F1110HCK010 puma KpVICIFeHH010

o6opygoBaHv1, 4b51 geATerlbHOCTb B gaHHoin o6nacTin HaHanacb B 1970 ropy C pa3pa6oTKin renveabix Kpl/101-eHHbIX cincTem Tinci npinnowevmin nonynpoi3ogHinKosoin npombiwneHHocrm, KOCMW-leCKOVi V1 aBinawnoHHoci TeXHVIKVI. Suzuki Shokan sianvercq OCHOBHbIM nocTaawinKom renveBbix K13001eHHbIX cincTem A.119 flnoHCKoro npoeKTa noe3ga Ha Mal- 1-11/1THOM

nogaece (JR, Japan RailRoad), npinHoin gsvi>KeHmq KoToporo OCHOBaH Ha neBinTawnv, gocTinraemoin C 1-10MOLLAblO ci3expnpoaogsiwinx MaIHVITOB.

Suzuki Shokan — On0H H3 ningepoa mmpoBoro pbiHKa ci3epxnpoi3ogHinKola OCHOBHOH mrpoK B o6nacTin caepxnpoeogmiAmx cucTem B HnOHHH V1 A3MVI.

6onee Hem 37-neTHinM onbir Suzuki Shokan pa3pa6orKin H npoin3aogcn3a Kpinopectopm>KepaTopoa 1103B011ReT o6ecneHmaarb BbicoLiainwinin ypoBeHb KatlecTBa, winpoKyio Homemmarypy V1 HenpeBaoi?igeHHbie TexHinHecKme xapaKrepocTinKin KpooreHHoro KpooBaKyymHoro o6opygoaaHmq, KOTOpOe 11011b3yeTCR 3acny)KeHHo0 nonyn5=ipHocrb[o B pa3TIVI4HbIX oTpaccipx, TaKVIX KaK

nonynpoi3ogHmKoBaq inFigycTpinsg, cbminKal-103KVIX remneparyp, yCTaHOBKV1mogerimpoBaHinsi KOCM0HeCKHX ycnoBinin H T. n.

KomnaHinsi Suzuki Shokan npegnaraeT KpooBaKymHbie Hacocbl c Ay or 100 go 800 MM gnq pa3nin4vbix o6nacTeci npomeHeHinsi, BbICOK011001/13B0,0,VITenbHble V1 minHinanopHble KpinopecOpmeparopbi, Komnpeccopbi, KpV10.110ByWKVI vl gpyroe KpinoreHHoe o6opygoBaHme gflA o6ecne4eHinsi npoueccoi3 BbICOKOTeXH0110104HbIX flp01/13BOnCTB H HayLiFibix occnegoaaHvO.

C pa3B1/1T1/1eM nonynpoBogvinKoBoM npombiwneHHocrm Suzuki Shokan cKom_ieHTpmpoBanacb Ha gaHHOM cermeHTe, LITO

no3Boncier eN 10B0p1/1Tb 0 nvginpyrowein panin B gaHHoCA 06nacTin B 51noHinv in A31/10 — OK0110 80% 300 MM «cba6oB» B S=InoHinin yKomnneKroBaHbi KpinoHacocamv Suzuki Shokan, Hanpvmep: Yamagata NEC, Toshiba Yottukaichi, Fujitsu Mie, Matsushita Uodu, Toshiba Oita, SONY Ku mamoto, SONY Nagasaki.

KpinoBaKyymHble HaCOCbl Suzuki Shokan ABTIFIFOTCA OnHOMVI 03 HeMHOIVIX KpinoHacocoi3 Ha KoTopbie MeHRK)T HaCOCbl 0,D,H01-0

OLleHb VI3BeCTHOM amepinKaHcKoro npoin3BoginTenci nawe B HOBbIX ycTaHoEsKax gflA nonynpoBogmmKoBoin npombiwneHHocTin amepinKaHcKoro >Ke npov3BogcTaa gflA pbIHKOB FInomnin H A300. genae-rcq 3T0 noromy, 4TO KpinoHacocbi Suzuki Shokan inmeEoT cyw,ecTBeHHo nyHwine TexHinvecKme xapaKrepvcrinKin H odnagaioT 6onee BbICOKOVi Hage>KHOCTIDIO.

TaK, B 2001 rogy TOTlbK0 Ha cpa6pinKax UMC (Tak3aHb) 6onee HOBbIX 30 HaCOCOBVI3BeCTHORD amepinKaHcKoro flpON3BOAVITe1151

B yCTaHOBKaX VIOHH00 inmnnaHTaumvi 6binv 3ameHeHbr Ha 6onee npoin3aoginTenbhibie H vagewHbie Hacocbl Suzuki Shokan C

aHaf1011/14HbIM ginameTpom. KpoMe TOM, KomnaHm5R-npov3BoginTenb yCTaHOBOK 6bina npoinHcpopminpoaaHa 0 Heo6xoginmocTin nocTaBKH 3TVIX cmcrem C npegycTaHoanemHbimm Hacocamm Suzuki Shokan, H Tenepb ace yCTaHOBKV1 nocTaBncaoTcp yKOM1111eKTOBaHHble o6opygoBaHmem Suzuki Shokan.

BAKYYMHbIE KPIIOHACOCbI SUZUKI SHOKAN SPACETORR

KomnaHmi Suzuki Shokan npegnaraer winpoKylo ninve0Ky KpinoaaKyymHbix HacocoB C Ay OT

100 no 800 MM HIlp0143BOTAVITellbHOCTbE0 OT 360 go 28000 nic no ao3gyxy (a3oTy). Pqg yH1/1KaflbHbIX peweHmin B 06nacTin KpooaaKyymHoin TeXHVKVI 1103B0.11ReT KOMIlaHVIVI

ygep>Kmaarb ninginpyK -Awne n03inuinin Ha pbIHKaX F1110FIV11/1 VI A31,10 KaK B o6nacTH o6opygoBaHinq

flonynpoBogHoKoBoO npoMbiwneHHocTH, TaK H B abepe caepxnpov3BoginTenbHbix

BaKyymHbix cincTem, me veo6xorivimo OTKaLIVIBaTb Kamepbi 60nbwinx 06 -bemoB.

TaK, KpmoHacocbi SpaceTorr cepmm "E" o6ecne4vaaFoT 11p01/13B0g1/1TeflbHOCTb Ha 50% (!!!)

BblWe aHanoroB C TeM >Ke ginameTpom yallOBH0f0 npoxoga - Hanpinmep, 11001,13BORVITellbHOCTb

KpooHacoca Suzuki Shokan SAl2SI-01E (c cOnaHLiem 320 MM) cocTaiangeT 4500 n/c, B To

Bpemq KaK aHanorw-mbie peweHmq gpyrinx npoo3BoriviTenein 3Toro pa3mepa inmeEoT

flp0M3B0rAVITailbHOCTb 3000 n/c. flpH 3TOM ga>Ke cTaHgaprHbie KpooHacocbi Suzuki Shokan

Tpe6yR-.)T cywecTBeHHo meHbwe apemeHin gnsi 3axana>KmBaHinsi (go 50%), Hem aHanorink-mbie

peweHmq gpyrinx npommoginTeneci. Anci ygoBneTiaopeHinq >KeCTKVIX Tpe6oBaHm0 nonynpoBogHmKoBbix TeXH0110r0V1 K ypOBHIC

BA6paPVIVI, B KpmaaaKyymHom o6opygoBaHvin Suzuki Shokan

npinmeHmoTcsi CVIHXpOHHble gBinrareno cneLtmanbHoin

KOHCTpyKLAVIVI, yp0BeHb ain6pau,vv1 KOTOpbIX COCTa13115ReT OK0110

10% OT xapaKTepincrinK 06614HbIX gBinraTenern. 3TO

f103BOngeT 3Ha4VITellbH0 CH1/131/1Tb aninsiHme KpinoBaKyymHoin

sin6pawnin alleMeHTb1

(HanpvlMep, cincTembi

OTTIVILlaFOT BbICOLIal;IWaR

Ki310HaCOC C f101114)1SeHHtrIM CTaHApaTH 611;1 MM. yposeHem em6pawnin lipootiacoc

18

nogcmcTembi Ha LlyBCTBVITellbHble K

nonynpoaogvinKoBoro o6opygoaaHmsR

n03mL4woHmpoBaHinq 110,0,110)KKVI, 0 T. n.).

FlpogyntinFo KomnaHmin Suzuki Shokan

Hage>KHocTb H p,110TellbHb16 pecypc pa6oTbi: 100000 HacoB

HenpepbnaHoin pa6oTbi gn i HaCOCOB c Ay go 250 MM H 80000

Liacoa Henpepbmvoi>1 pa6oTbi p,f1F1 HaCOCOB C Ay OT 320 go 800

SUZUKI SHOKAN CTaHgaIDTHb11%1 KOMIlfleKT noc-i-aam BK.I1K)4aeT B ce6s KpmoHacoc, Komnpeccop ( C -rpaHccpopmaTopom), renmeabie .1114H1414 3 M, mHgviKa-rop TemnepaTypbi V1 gaaneHms ET000 (vinvi KoHipannep SELCON-AC P.11S1

CVCTM C ycKopeHHoM pereHepaume0) N sce Heo6xogmmbie Ka6enin.

HY>KHO OTMeTl4Tb, LITO rta)Ke 6a3OBbli4 KOM11.11eKT noc-rasKin BK.11104aBT B ce6s coapemeHHble KOHTOOT1.11BObl, no3BonstoLume pea111/130BblB8Tb 1-1011HOCTbK)

aa-roma-rmt-tecKoe ynpaaneHme. TaK whip/war-op TemnepaTypbi ET000 1103B0.11ABT

1:18BaTb r101-1630BaTeilK) mvicl:topmaumio o Temneparype En-opoM cTyneHm (ace KpvioHacocbi Suzuki Shokan Komnnerrytoi-cs SID TemneparypHum ceHcopoM), 110,E1K.11104aTb gaP-11/1K gaaneHms ( He BX0,0,14T B KomnneKT) nporpammmpoaarb no 2 KOHTO0.11bHbIX TO4K14 no -remnepaType

gaaneHmkt gns ynpaaneHms BHeW1-114M14 npvt6opamm. V1Hgv1KaTop Temneparypu mmee-r ac-rpoeHHbie pene

IMP 6.110K141DOBK14, KOTOPble MOrYT BK11FO4aTb/BbIK.11104aTb

yc-rpoMc-raa nonb3oaaTen5 npvt gOCTIOKeH1414 onpegeneHHbix Temneparyp/gaaneHmM, 3anporpammviposaHHbix nonb3oaaTenem Vl BO3M0)KHOCT14 yganeHHoro ynpaaneHms.

BAKYYMHbIE KPI1OHACOCbl SUZUKI SHOKAN SPACETORR C CMCTEMOii YCKOPEHHOR PEFEHEPALWIll

KpmoHacocbi Suzuki Shokan SpaceTorr c cinc -remoM ycKopeHHoVi pereHepaumm flO3B0.11910T CYLLIeCTI3eFIHO

CF114314Tb BOOMA, 1-1e06X0r114MOB ,C0151 BOCCTal-101311BH145,1

pa6oTocnoco6Hoc-rm KpmoHacoca nocne pereHepaumm. Hanpvimep, grm Hacocoa SpaceTorr c ycKopeHHo0 pereHepaumm c fly 250 MM spew nonHoro LiviKna pereHepaumm «cold to cold» (oT Hat-ona Harpeea go nonHoro 3axona)KmeaHms V1 abixoga Ha pa6o4mM pewinm) coc-raanser meHee 100 MVIHyT, a gns HacocoB c fly 320 MM — acero 102 M14HYTbl ( apems gaHo grill LlaCTOTbl

3neK-rp0ce-rm 50 ru). aro nony-ropa pa3 6bicrpee cambix coapemeHHbix aHanorw-mbix peweHmM Ha pbiHKe!

Kolirponnep

SELCON-AC

OCHOBHble XapaKTePHCTHKH K HOHBCOCOB CTaHile THOH KOH 14 14 C clicTemok yCKOpeHHON ereHe awn'

Mogenb (Ay B MM)

BbICTIDOTa AelACTB14f1, n/c Bpems 3axonax<maaHvis

c-raHgapi- Hb11%1 (ycKopeHHas

pereHepaums), Ml4H

EMKOCTb, ci-g. 11

Hacoc

PeKomeHgyembi0 pemamem-Horo

06C.11Y)K14BBF11451,

HenpepbiaHoM

nepmog

Hacoa pa6oTbi

KoMnpeccop A3OT AproH Bogopog Boa AproH Bogopog SA04(100) 360 300 500 1100 55/47* 300 3,5 16000 He -rpe6yercs SA06(160) 800 660 1200 2500 55 (40) 250 4 16000 He -rpe6ye-rcs SA08(200) 1700 1400 2700 4600 70 (45) 1200 12 16000 He Tpe6ye-rcs SA10(250) 2400 2000 4000 7000 80/65* (50) 1500 12 16000 He -rpe6yercs SAl2(320) 4500 3500 6500 10000 80 (65) 2100 24 16000 40000 SA16(400) 6000 5000 10000 17000 110/108* (85) 2100 24 16000 40000 SA20(500) 12000 10000 20000 29000 150 5000 130 16000 40000 SA24(630) 17000 14000 27000 42000 180 7000 130 16000 30000 SA30(800) 28000 23000 38000 67000 200 6000 130 16000 30000 *apems 4epe3 gpo6b — inmepeHo B AKTAH, (380 B, 50 RA)

MYTIbTl1HACOCHblE CliCTEMbl

BbICOKOTIO0143B0/114TellbHble Komnpeccopbi Suzuki Shokan 1103130.11ROT 0131aF11430BblBaTb MYTIbT14HaCOCHble KoHdwrypaumm, Korga ogmH KoMnpeccop ogHoa emeHHo ynpaBnseT N o6ecne4maaer nOnHOLLeHH

MynurviKomnpeccop C200G -M (3,5 KBT) SAO8 (gy 200 MM)*3

Myrib-rmkomnpeccop C300H -M (6,1 KBT) SAO8 (gy 200 MM)*4

SA10 (,thy 250 MM)*2 + SA08 (gy 200 MM)*1 SA10 (ny 250 MM)*4 SAl2 (Ay 320 MM)*1 SAl2 (gy 320 MM)*2; SAl2 (gy 320 MM)*1 + SA10 (gy 250 MM)*2 SA16 (gy 400 MM)*1 SA16 (gy 400 MM)*2; SA16 (gy 400 MM)*1 + SA10 (gy 250 MM)*2

KPI#10110BYWKI1

KpvionoaywKm Suzuki Shokan Ha 6a3e Kpmopecbpm>Kepa -ropoe rviclx1Dopga-MaKmaroHa nO3B0F15110T OTKa414BaTb fa3b1, KoHgeHcmpytouimecs npm -remnepaType 80 K (napbl BO/Abl, ymeaogopogbi 14 T. n.) C11130143BORWTellbHOCTbK) OT 1100 n/c (Ay 100 MM) go 96000 n/c (gy 900 MM).

19

1_ 1

BAKYYMHblE KflAilAHbl B TeLienvivi HeCK011bK14X geCATKOB neT gaTcKa9 KomnaHmq Danfoss npom3Borwr BbICOKOKaLleCTBeHHble KflaflaHbl g.1151 MHOIVIX

oTpacne0 11P0MblailleHHOCTVI. BaKyymHbie KnanaHbi Danfoss oTrivHae-r BbicoHaVwee KaHeci-Bo nro-roaneHmi N yHliKaflbHble

TexHw-lecKve xaparrepvicTvw. TaK, Hapa6o-rKa Ha OTKa3 p,1151 alleKTp0MalThIVITHbIX

BaKyyMHbIX KnanaHoe cocTaansleT 2 Mf1H.

1.114KTIOB 1/1 10 MTIH. 14111K.11013 ,n,nq nHeBma-rwiecKfrix BaKyyMHbIX KnanaHoB ()0y 16, 25, 5 mnH. — gnq Ay 40, 50). MHorme BegyuAve npovi3BogyTenki BaKyyMHbIX 14.1114 flarlyilp0B0gHl4K08b1X

cfricTeM Bbl6pany BaKyymHbie KflanaHbl

Danfoss ,q11F1 Hav6onee OTBeTCTBeHHbIX

y3.110B BbinycKaemoro vmm o6opyp,oBaHvq. Komnamv BbinycKaer yMOBble Vl nmHeVHbie KnanaHbi c pa3mepamv cl:maHLlee NW16, NW25, NW40, NW50. Kopnyc: cranbHo6

aill0M1/1HVleBb11). lipVIBOrt: pyHHoV, nHeBmani4ecKvi0 v1111/1311eKTp0MaiHMTHb114.

06upie ceep,emin: • pa3pa6oTaHbi anFiBbICOKOBaKyyMHbIX flp14.110)KeH140

• OCHOBHOcl aKi.teHT cgenaH Ha KaHecTBe BaKyyMHbIX KrIallaHOB

• na3epHaq mapKvipoma • 3au4V1rHas1 BbIT04Ka Ha crinaHL4ax

KIIAIIAHbI HAIIYCKA ATMOCOEPbI (cpoTo cneBa): • KomnaKTHaq N nerKap KoHcTpynonq 6.narogapq 3anaTeHToBaHHoV cinc -reme

cepBonpvBona • HopmanbHo 3aKPb1Tb11%11/1 OTKpb1Tb10 Bapinawrbi • 1-11/13KaSinoTpe6nclemasi MOLLAHOCTb

• 6onee 500 000 L11,1K110B Cpa6aTblBaHl4F1

• amommHineBbiV Kopnyc, BHyrpeHHve Hacnii — Hep>xaBeroulasi cTanb

IIPIIHAW1EWHOCTI4 /11151 BAKYYMHbIX KTIATIAHOB

3neKTpomarmiTHbiH KnanaH /Ann ynpaaneHHH nHeamaTHHecKlim npmeogom • 3nerrpoynpaBneHvie BaKyymHbimm KnanaHamvi c nHeBroaTvLiecKvim npvBogom

• Hanpq>KeHoe min-am/is': 24B nocT. ToKa, 24B 50/60E14, 115B 50/601 -q, 230B 50/601-q

• Tvn: 3-x xon,oBoO, H3

• K .somnnerr noc -raBKA BK.moHaeT: KnanaH, B03,EtyLLJHb10 rnywwrenb, pacnpegeninTenbHaq Kopo6Ka, ynnoTHeHme, ureKep, 60.11Tbl

I4H,qHKaTop nonoweHmn

• V1HpyiKa -rop nano>KeHmi nperAcTaBncter 1,13

ce6v repKoHoBoe pene c BcTpoeHHbIM cBeTonvorlom prnsi B1/13yallbH010 KOHTP0.1151

• flpegHa3HaHeH gnq 3neKTpwHecKoiii

cvrHany13aqvun COCTOCIHOS=1 (oTKpbn-/3aKpbn- )

BaKyyMHbIX KnanaHoB npvi yCTaHOBKe cneqvanbHb10 BHeLLIFIV10 BXOP, KnanaHa

• Elpv1meHcieTc9 C BaKyymHbimv KnanaHamvi c

nHeBmaToHecKvm 1,4 arleKTp0MaiHkITHbIM

npviBogtom C BCTpOeHHbIM Mal- FIV1TOM

• HOMI4HaflbH0e HanpmKeHme noTaHwq 24 B

nOCT TOKa

OCHOBHbIE TEXHMLIECKME XAPAKTENICTI/K11

IlpHcoe,w4Hemie KF16 KF25 KF40 KF50

ny , MM 16 25 40 50

BHyTpeHHoe YTeHKL,I, m6ap n/c, He < 10-9

HapywHble yret-Ran, m6ap n/c, He < 10-9 MaKC. TemnepaTypa oKp. cpegbi, eC 60 (100% Harpy3Ka KarywKii)

MV1H. Temneparypa op. cpeRbi, eC 0 MaKC. TemnepaTypa HarpeBa, eC 80

MaTepinan Kopnyca AlMgS11

Hep>KaBeioutas; cTanb HermaBelowasi cTanb

FKM (Bvi -roH) MaTepvian mem6paHbi KarlbLieBble ynnoTHeHvici

20

DAN FOSS BAKYYMHbIE KilArlAHbl C 3I1EKTPOMArlitiTHb1M TIPPIBOAOM

• BbicoKan Hage)KHOCTb >5 MJ1H.1.1,11K110B

• H1,13KaA noTpe6nsema5 MOLLAHOCTb <300/8 BT • HopmanbHo 3aKpb1Tb10 N OTKpb1TbIVI Bapplawrbi, KarywKa 3ameHse -rcs -6e3 pa36opKvi KnanaHa,

• BcTpoeman cOyHKL11,151 ynpaBnemin CkliHaflOM 9 - 30B, pa6oTaiou4an KaK C NPN TaK M C PNP cywHanamm, LITO MO>KeT

6b1Tb PIC110.11b30BaHO R1151 npsmoro ynpaBneffins

• HeLlyBCTBLITellbHOCTb K nageHMIO Hanpswei-mg

• Bc-rpoeHHan namn -rb Bo3Bpau.4aer KnanaH B vicxogHoe COCTOSIHMe nocne nponagaHmn nm -raHpin

• YHmKanbHan naTewroBaHHan cinc -rema cepBonpmBoga gnn KnanaHoB C pa3mep0B ny 25 - 50

• no 3aKa3y B03MOWHa yCTaHOBKa sHgviKaTopa nonowewn

Tin KnanaHa VV213B 16 VV243B 25 VV243B 40 VV243B 50

AY, mm 16 25 40 50

MaKC. nepenag gaeneHms B HanpaeneHmi 3aKpbn - HH, 6ap 1 4 2 1,2

Patio ii gmana3oH gaeneHHO or 10 -8 M6ap go 5 6ap (a6c.) OT 10-8 M6ap go 3 6ap (a6c.)

Bpems 3aKpbrrms, MC 100 100 200 200

Bpems OTKpb1T1151, MC 200 200 200 200

MoneKynspHas nponycKHas cnoco6Hocrb yrnoeux KnanaHoe, n/c 5,5 14,5 49,5 70

MoneKynspHas nponycKHas C110C06HOCTbIll4H61HbIX KnanaHoe, n/c 3,4 7,2 20,2 25,7

flpinHumn geincrems npsmoci cepeo cepeo cepeo

Tin Karywnl BN (Knacc 3aL111111,1 IP 65)

HanpsweHme nwraHms Karywm 115B Hn14230 B nepemeHHoro roKa

floTpeSn1eMai MOLLAHOCTb, BT nycKoBaH 300

ygemmeatow,as 8

MaKcHmanbHaH Hacrora cpa6arbleaHHH y111(11013 B Llac 360

YnpaensFouoici cHrHan aKT1113HbliA 9 - 30B110CTOAHH010 TOKa, 15 MA

naccineHbii4 0 - 4B flOCTOAHH010 TOKa

14HgtiKarop nom:mei-4ns repKoHoeoe pene

BAKYYMHbIE KTIAllAHbl C 11HEBMATMECKIIIM 11P11130/10M

• BbICOKaA HagewHocm >5 MJ1H. LtliK110B

• Bm3yanbHoe onpegenewe nonmemin

• Mai-me-rHoe ynnomeHme npliBogia

• BeCWOBHIAVI C1,111bCPOH

• 0111.41,10HHO - ycTaHoaKa viHrwaTopa nonoweHvin (C repKOHOBbIM pene) M ynpaanniomero 3.11eKTp0MaIHMTH010 KnanaHa

IlHeBm8Tv4ecKm0 npviBog, npnmoro ger/lc -I- m/1n 111111 C ynpaBneHmem OT 3nerrp0ma1-wn-Horo KnanaHa

Tian KnanaHa VV213P 16 VV213P 25 VV213P 40 VV213P 50

Ay, MM 16 25 40 50

MaKC. nepenag gaeneHms B HanpaeneHHH 3aKpbrrms, 6ap 4 4 2 2 MaKC. nepenag gaeneHms B HanpaBneHmi orKpbrrms, 6ap 2 2 2 1.2

Pa6o4inci gmana3oH gam-lei-1HO OT 10 -8 M6ap go 5 6ap (a6c.) or 10 -8 m6ap go 3 6ap (a6c.)

BpeM513aKO61 -11,151, MC 100 100 200 200

BpeMA OTKpb1TWA, MC 200 200 200 200

Ynpaensiowee Hanpsweive, 6ap 4 - 7 MoneKynspHas nponycKHas Crl0006HOCTb y1110BbIX KnanaHoe, n/c 5,5 14,5 49,5 77 MoneKynspHas nponycKHas C110C06HOCTb nwHeiiiibix KnanaHoe, n/c 3,4 7,2 20,2 28,2 1-1pHcoegmeHme ynpaensiowero gam -lei-1ms M5 xis B03,EWWHbIX WflaHrOBbIX CIDPITI41-110B

MarepHan ynnorHeHmii FKM (eHroH) V1HgvKarop110.110N<B1-11,131 cramapTHO B11,0,11MbIll

onwoHanbHo repKoHoeoe pene (CM. CTp. 11)

BAKYYMHbIE KflArIAHbl C PYLIHbIM npmBogom • BbICOKaB HagewHoci-b >100 000141/W10B

• 311.1114 5 cpmcfripobaHHbix nono)KeHm6

• BeCWOBHIDIVIC1/11bC130H

Tin KnanaHa VV213H 16 VV213H 25 VV213H 40 VV213H 50 Ay, MM 16 25 40 50 MaKC. nepenag ga13.11e1-114FIB HanpaeneHHH 3aKpbrrms, 6ap 4 4 2 2 MaKc. nepenag gaeneHHH B Hanpaenernim OTKpbIT1151, 6ap 2 2 2 1.2 Pa6oHmiA gwana3oH RaBnemici or 10 -8 m6ap go 5 6ap (a6c.) or 10 -8 M6ap go 3 6ap (a6c.) MoneKynspHas nponycKHas C110C06HOCTb ymoebix KnanaHoe, n/c 5,5 14,5 49,5 77 MoneKynspHas nponycKHas CrIOCO6HOCTb1114HeriHbIX KnanaHoe, n/c 3,4 7,2 20,2 28,2 Hage*Hocrb He meHee 100 000 LAPIKTIOB

MarepHan ynnorHeHi4H" FKM (ewroH) Wary OTKOIDITI4A, % 10, 20, 30, 50,

100 10, 20, 30, 50,

100 10, 50, 100 10, 50, 100

21

BAKYYM H bl E HEAOPOrtlE HALIENCHblE BAKYYMHbIE KllArlAHbl AKTAH

AKTAH npegcTasnset - Heopporme BaxyymHbie KnanaHbt 3KOHOMIINHOL71 Ce131114.

Hapsgy C HeBbicoxoci CTOVIMOCTb10 gaHHble xnanaHbi oanagaior BbICOKOlil

Hage)KHOCTb10 (Hapa6o -rxa Ha OTKa3 — 1 500 000 141K110B OTKObITLIA/3aKpb11 - 11A),

wmpoxoin 1114Her/IKOVI goc-rynHux pa3mepoB (Ay OT 16 go 250 MM) N pa3HEnmin Tmnamm npmsogos. Bce KnanaHbl 1131-0Ta13.1114BalOTCA 1,13 BbICOKOKa4eCTBeHI-106 HepAaBelou.tein

cranin (304 SS), mmeloT CliclbC1301-1H0e ynnoTHeHme WTOKa

(cBapHble C11.111430Hbl 1131-0Taa1111BalOTCA 113 Hep)KaBelOWel%1

cranes AM350 piny 316 SS) H 3nacTomepHoe ynnoTHeHme cegna (Viton, Kalrez m T. n.). noc-rynique ont.onm:

• 14HgnaTop no3mt.mm (12-240 B nepemeHHoro TOKa,

12-24 B flOCTOAHH010 Toxa);

• ConeHomg 110/220 B nepemeHHoro Toxa, 12/24 B 110CTOAHHOr0 roxa;

• Pa3Hble maTepmanbi gFIFI cBapHoro cmnbcpoHa, y11.110THAIOLLte10 WTOK;

• Pa3Hble maTepmanbi rtns 3nacTomepHoro KOrlbLia,

ynnorHsFou.tero ceRno;

• Pa3Hble 1-1411b1clanaHuee mnin 6e3 1-11,1X (nog BapKy); • CneumanbHoe mcnormeHme g.1151 BbICOKOLIPICTbIX npmnoxemni,i, mcnonb3poLI4mx cEsepx ■-uncTue fa3b1

II T. 11.

XapaKTepNCTNKN BaK MHbIX KnanaHoe

AY, mm 16 25 40 50 63 80 100 160 200 250 rlocTynHoe ricnonHeHme YMOBOO, rlIDAMOTO4Hb11%1 YMOBOV1

tDnaHmea KF, CF, 6e3 cl3naHLtel3 ISO, CF, 6e3 cl3namtee

lipmeog PyinHoM, aneoponHel3marmtnecionin (nHemmo — OTKObITIle, npy)KmHa —3axpbm-me)

arleKTO0111-1eBMaTLILleCK146 ,41300H010 geVic-rsms — nHesmo OTKpbITL1e H 3axpbrrme

MaKcHmanbmzaci ypoeem, HaTeKamin, m6ap*.n/c 1)(10 -9

MaKcHmanbmkai nepenazi xtaenemiiii, 6ap

Amana3oH pa6o4mx AaeneHmia, m6ap

1x10 -8 ...5000

BOBMA OTKObITHA/3aKpbITHR

KnanaHoe C Hem/Hi-lbw npmeoLlom, MC

100/200

MaKcHmanbHan TemnepaTypa Harpeea Viton/Kalrez, C 150/170

rtaeneHme B nmeemocHcTeme, 6ap

4...5,5

Hapa6oTKa Ha OTKa3, LIHK.BOB

OTKpb1T1151/3aKpb1THS1 1 500 000

Py4Hble 11pSIMOTO4Hble wapoebie Knanaiibi: • RY OT 16 go 50 mm, clDnaHLIbi KF vinm 6e3 (PnaHLIel3;

• n ,pocTas HagewHas KOHCTOyKWIA gns 0113A3HbIXD npogecco3;

• Bucoxas npoBogmmocTb — r1011HOCTbK) OTKPb1T0e onTmtnecol npo3pa4Hoe

ceLneHme KnanaHa;

• g1ana3oH pa6o4inx gasnemm0 1x10 -6 ...6000 M6ap;

• 11113KaA CTOI/IMOCTb;

• Pa36opHa1 KOHCTOyKIVIA o6nemaeT TexHintneme o6c.nywymaHme;

• VlgeanbHbi B Ka4ecT3e monmppowero KnanaHa cpopsaxyymHoro Hacoca.

ABTOMaTINeCKNe OTCe4Hble KnanaHbi: • flpocTal HagewHas KOHCTOyKLAVIA, OCHOBaHHaA Ha TOM, 4TO KnanaH 3axpbsaercs nog

B03geinummem nepenaga gaBneHms — Korga nepenag CTaHOBMTCA cmnbHee, Hem npyxonHa —

KnanaH 3axpbu3aeTcs. Ygo6Ho 11C110111330BaTb B KaLlecTse OTCe41-101-0 KnanaHa 43opsaxyymHoro

Hacoca ( ecnH HeT Bc-rpoeHHoro) gns npegompaw,eHms nageHms gasneHms B Kamepe m

npegoTBpaweHms B Hee nonagaHms macna;

• Wmpoxmin Bbi6op gmameTpol3 N cOnaHLIeB, pa36opHa1 KOHCTOyKLVIA, HeBbICOKaA CTOHMOCTb.

22

J11O6bIE eaKyymHbie Kamepbi 1,13 Hep)KaaekmAeil cTarni Ha 3aKa3: • Flio6bie, cambia C110)Kable KOHCOrypaL11414 eaKyymHbix KaMep,

143FOTOB11CleMble no miginevigyanbHomy 3aKa3y — OT cpopaaKyymHbix caepxBbicoKoaaKyymHbix Kamep gflA BbICOKOTeXH0101-144HbIX V Har-lHbIX

npvino>KeHm0;

bonbwoe K0.11144eCTB0 gocTynHbix ont.46 V gononHeHAO — CNCTeMbl

Harpeaa/oxna>KgeHvisi, BaKyymHbie OKHa V gaepvi, flpOT04K14 eHy-rpvi CTeHOK

Kamepum T. n.; Pa3Hble T1411b1 Hep>KaBeFouvx c-raneCi — 304 SS, 316 SS, AM 350 V T. n.;

Pa3Hble -11411b1 061Da60TKI4 noeepxHoc-rei;i nanwpoaKa, ma-roBbie

noaepxHoc-rm; fllo6ble pa3mepbi OT gonef;i nvi -rpa Ky6ome-rpoe. flpV 3TOM

o6ecne4friaaim-c9 flOCTOCIHHbie BbICOKNe xapaK-rewc-rviKfrl nonyvaemoro

BaKyyMa;

BbicoKosaKyymHaq Kamepa qnA Hay4HbIX BaKyymHbie Kamepbi grIP yCTaHOBOK chfri3viKfri of a3mbi

viccnegoaaH140

KOMT1OHEHTbl alELIMATIbHblE N 101H,4liBilaYAI1bHblE PEWEHMS1 NEOMA

KomnaHm51 Neoma Ha ripoTsmeHinvi 6onee 20 neT 5113.11AeTCFI ogHvim V3 J114gepOB a3VaTckoro pbiHKa B odnacTvi cnewnaribHbix

viHgvemgyanbHbix peweHVV. Cpegy flOCTOAHHbIX 3aKa34VKOB npogyKuvivi TaKyle 03BeCTHble KomnaHfrivi FInomm V KopeV KaK Jeol

Active Co., Ltd., Ulvac, Samsung, LG Philips vi gpyrme. flpogyKumq KomnaH1414 Neoma xapaK -repv3yeTcci 6ecKomnpompiccHbim

'<avec-mom V npvic-ranbHum aHinmaHmem KO 'Kam, gawe CdMbIM He3Ha414TellbHbIM n05KanaHwqm noTpe6mTensi.

CneumanbHaH eaKyymHble KnanaHbl 14 apmaTypa • KnanaHbl, paccytn -raHHbie ogHoepemeHHo Ha eaKyymHbie F11314.110>KeH149 V Ha pa6oTy C

1436bITO4Hb1M14 I:panel-114qm fa30B;

• KnanaHbl gnsi npvinoweHm0, rge Tpe6yKxrcsi cneumanbHbie xaparrepvicTvKin no BO3MO)KHOCTV Harpesa;

• Pa3Hble TI4r1b1 npvieogoe gnq KnanaHoB acex pa3mep0a — pytmbie, aneKTponHeema-rw-lecKvie, aneK -rpomexaHvNecKvie;

• 110BOIDOTHble 33TBOIDIDI Tvina Butterfly C pa3HbIMv Tvinamvi npvieoga; • Tpo0Hbie 3aKyymHbie KnanaHbl grIA

peano3aLmin 6a1;inaccHoi;1 orKaLiKvi; • KnanaHbl AIN Mc11-K010)) c-rap-ra OTKa4K14.

23

BAKYYMHbIE KAMEPbI

CBEPXBbICOKOBAKYYMHbIE KAMEPbI (10PPI3OHTAJ1bHblE N KY5114ECKPIE)

BaKyymHbie Kamepbi gaHHoVi cepmv pa3pa6oTaHbl Rn i CO3ABHI/IFI B

HI/IX BaKyyma Hvi>Ke 10 9 Topp ( MM. pT. CT.). ViC110.11b3y1-0TCA B

npvino>KeHocix, npegbFlansiFoLgox BbICOKVIe Tpe6oBaHvg no LIVICTOTe

v my6vme BaKyyma. BaKyyMHble Kamepu gaHHOO CepVIV

V31-0TOBIleHbl I/13 HepKaaeFoLgeVi CT8.111/1 V VIMBFOT meTannmHecKoe

ynnoTHeHvie gaepvi.

gng gaHHOO Kamepu peKomeHgye -mq 1/1310TOBIleHOB

g011011H14TellbHbIX flOOTOB C cpnaHLtamvi ConFlat.

BbICOKOBAKYYMHbIE KAMEPbI

BbICOKOBBKyyMHble Kamepu cepmo AC-VHE (BBOTVIKarlbHble) w cepvm AC-HHE

(ropvi3oHTanbHble) 5=1B119K)TCF1 OrtHI/IMVI I/13 Havi6onee 3KOHOMVI4HbIX Kamep Ha

pbIHKe. l/1cn0nb3yForcq wig npono)KeHmiii oagero xapaKTepa, Tpe6yKpumx

.- 7 - 10 6 TOW. CTB1-1K1/1 Kamepu 110.11V1p0BaHbl co3gaHme BaKyyma nopFigKa in

caepxcKopoc-rHoVi CTpyeH menmx CTBK.115:1HHbIX wapviKoa.

Sanaa goporve 10p1/130HTBIlbHble BaKyymHbie Kamepbr cepovi AC-HHS

npegHa3Ha4eHbi p115,1

co3gaHOSI BaKyyma 1X1 8 Topp. Ky6w4ecKve

aaKyymHble Kamepu

cepvm AC-CHS vimeroT

KOHKypeHTOC110C06HyFO

LAeHy, npegnoLrro -renbHbi

BO MH011/IX npvino>KeHosix

3a CLIeT BO3M0>KHOCTO

6onee ygo6Horo

pacnonoweHosi o6pa6a -rboaembix geTaneV V1fV1 ma-repvanoa aHy-rpvi

Ky6oHecKoro npocTpaHc -raa. Bb111011HeHbl V13 HepKaaeFoigeVi c -ranv.

ElpegHa3Ha4eHbi gnsi co3gaHvici BaKyyma nopqgKa 1 0-7 - 1 0 -8 Topp.

00PBAKYYMHblE KAMEPbI

Mbl TaloKe floc-mans:2m Kamepu Ha gvana3oH go 1...10-3 Topp,

oinoHgvipLiecKve ( aep -rviKanbHble MTV 10p1/130HTBIlbHble), C

me-rannyHecKoV KObILIJKOV Vl npo3pa4Humo c-reHKamo 1/1.111/1 C

me-rannoyecKomv c-reHKamo N np03pa4m00 KpbILLIKOV, Ky6o4ecKvie.

24

BAKYYMHblE KOMnoHEHTbl BAKYYMHblE OKHA, /413EP14 N KOM1110HEHTb1 143 CTEKTIA MDC VACUUM

AKTAH npeacTaermeT wmpoKvV) cnerrp KOM110HeHTOB eaKyymvibix cvic-rem 143 cTeKna, eaKyymHble OKHa w geepvi pa3.11W4FIbIX paamepoe 14 T1411013.

Onatnibi C eaKyymEnAmm oKriamm: • OKHa, 14310TOBJleHHble 143 60P0C141114KaTHOM CTeKrla (Pyrex), keapqa,

canctwpa; • PaaHble T14116114 paamepu clinaFwee — CF,

KF, ISO C pmameTpamvi yallOBH01-0

npoxopa OT 16 go 500 MM; • BO3M0>KHOCTb nDorpeea go 450°C vi

oxnaKgeHmsR p0 -200°C;

E•bicTpopamemHble gBeplI C eaKyymHbuni OKHarolli:

• (1).navaAbi o -r CF40 p0 CF320; • BO3MOWHOCTb nporpeea go 150°C; • BIDICTOOpa3beMHblii1 mexa-mam 1103B0.11BeT flerKC w 6b1CTp0

OTKpb1BaTb/3aKpb1BaTb peepb.

KOMr1OHOHTbl 113 cTeKna: • Cneumanbi-ible y3f1b1 griq npvcoegvii-revivq CTBKIWIHHbIX KOM1-10HeHT0B

BaKyymHbix cmc -rem K me-rammyecKom eakyymHum -rparram; • PaaHbie evgbi w paamepu ciDnaHLtee — KF, ISO, CF C gviame -rpamm

yarlOBH010 npoxopa OT 16 go 100 MM; • flytAwee pewevioq grip yCTaHOBOK, rpe Tpe6yeTcc oi-Kayka CTeKTIAHHbIX

nanom-e0 c nocnegyrow0 vix o-rnakoi%i — oHcppaKpacHbie CeHCopbI, npv60pu HOLIHOM evigeFivm w T. rl.

25

BAKYYMHA51 APMATYPA

AKTAH nocTaermeT BaKyymHble KOM110HeHTbl amepviKaHcKoci KomnaHvivi MDC Vacuum: ctinaHubi Bcex cTaHgapToB (ISO, Klamp Flange - 6bicTpopa3bemHbie coegvmeHmR, ConFlat — no megHylo npoKnagq), nepexogHmi C ogHoro pa3mepa Ha gpyroi;i pa3mep, nepexogHoKvi C OgH01-0 cTaHgapTa Ha gpyroVi, 3arnywKvi, X0MyTbl, Tp0HHHK111, KpecTbi, BaKyymHbie KoneHa, C1/111bCOOHbl, ynaBrimBaTenvi napoB macna (nporpeBaeMble, pa36opHbie, Hepa36opHbie), BaKyymHble OKHa (CO creKnom, KBapuem, canampom), repmoBBogbi (3neKTpvi4ecKme BBOgbl: viHurpymeHranbHbie MHOFOLLITblObKOBble, KOaKCHallbHble (Anq BbICOKOHaCTOTH010

Hanpq>KeHmq), C1/1.11bHOTOLIHble (B TOM Hvicne C BOggHbIM oxna)K.geHvem), BbICOKOIO HanpsweHmq (go geCATKOB KB), BBORbI g.I1A nogaLivi )KvigKocTe0,

fa30B, wvigKoro a3OTa B BaKyymHpo KaMepy, BBOabl gBvpKeHvici (FIMHBHHble, Bpau4aTenbHble, Kom6v1HwpoBaHHbie). Af1CI 1-10CT0OBHIASI pa3HeceHHbix B npocTpaHcTBe Ha 60/1bLIJNe paccTopiHm53 BaKyymHbix cvicTem Mb!

nocTaBom Tpy6bi N3 HepKaBeEoLue0 CTa1114 pa3mepom OT 1/4 g0 10 gE01-4MOB (mviHvimanbHaq gnviHa 30 cm). Tpy6bi vimefoT 3neKTpoxymvi4ecKpo nonvipoBKy BHyTpeHHeiA noBepxHocTvi N vigeanbHo nogoOgyr griq MOHTaKa BbICOKOBaKyyMHbIX cm-rem. [1.1151 nourpoeHvisi cpopBaKyymHbix cvicTem Mbl nocTaBom apmvpoBaHHbie meTannwHecKoci npy>KviHoiA EIBX wroHm.

EC111/1 6[0g)KeT griq co3gaHvm BaKyymHoVi cvicTembl He no3BonfleT 1-1131406peCTI/1 KOMnneicrpowyte

amepmKaHcKmx vinv eBponeOcKvix npovi3BogyTenei4, Mbl moxem npegno>KviTb npoBepeHHble, KaHecTBeHHbie KOMI1OHBHTbI gnq nom-poem/15i BaKyymHbix cmcrem a3viaTcKvix npovi3Bogwrene0. B 3TOM

cny.ae 14eHbl Ha cl3naHubi, C1411140Hbl, KnanaHbl, BaKyymHbie OKHa N gpyrvie BaKyymHbie KOM110HeHTb1

6yRyT gewesne 6onee Hem Ha 30%.

BbICOKOKaLleCTBeHHble BaKyymHbie KOM110HeHTbl SIB115110TCF1 KJ1KNeBbIM arleMeHTOM RJ1A flOCTpOeHHFI

HagewHoi;i H KaHecTBeHHoVi BaKyymHoi;i CVICTeMbl , OT na6opaTopHbix yCTaHOBOK HCC.FlegOBaH1/19 HacTviu

go npombiumeHHbix BaKyymHbix Hallb1.1114TellbHbIX yCTaHOBOK. lipegenbHuVi BaKyyM, nonyHaembh) B TaKHX

ycTaHoBKax, onpegen5ReTcq KaKgbIM 311eMeHTOM, BX0AcILL4HM B AX cocTaB: OT pe314H0B010 01114 megHoro

yr1TIOTHMTe1151 RO CBepXCJ10)KHbIX Kamep npegBapyTenbHo0 3arpy3Kvi AIM BbICOKOBaKyyMHbIX 3aTBOPOB C

B0g,C1Hb1M oxna>KgeHmem.

06pau.00 -recb, m Mbl Haingem on -rwmanbiloe peweHme gnn BaweVI 3aga4vi.

26

25 go 205 C.

BAKYYMHbIE BBOAbl Komnal-wm Solid Sealing Technology Limeer 6onee Hem 100-neTHmin onbrr npoinalogurBa KepammHecKmx

merannoKepammHecKmx monciropoB 14 npom3B0glir nonHblin cnerrp BaKyymHbix BBOROB. Solid Sealing Technology

o6ecne4mBaer BbicoHainwLie HaLe)KHOCTb lel KaHecrBo npogyKumm, HTO HapFigy C BbICOMMIll TexHiiHeciunmin

aKcnnyaTau,moHHbimli xaparrepmcniKamm 1103B0.11FleT 3aHl/MaTb nLiginpyioame n03mwit4 Ha mmpoBom pbIHKe B TaKI1X o6nacrsix

KaK:

• ElanynpoBo,4Ht4KoBoe N aHanwrminecKoe o6opygoBaHme;

• HaHeceHme TOHKVIX nneHoK;

• Elp0MbILLIFIeHHbie na3epbl;

• CI,ICTeMbl pagliaLAWOHHOM KOHTPOTISI N 6e3onacHocrm;

• PeHrreHoBcKme CIACTeMbl BbICOKOVI MOLLAHOCTI4;

• MegmumHcKoe o6opygoBaHme;

• HaHOTeXH0110111111;

• ABIllaW4OHHblellKocmm4ecKLie cmcrembi;

• BbICOKOTeXH0.1101114eCK14e 3Hepremp4ecKme CliCTeMbl

cBepxnporitogRuAme ycraHoBKL4 nepegaHm 3Heprinm, cmc -rembi

C 3K0.11011/14eCKIll 4leICTb1M11 aflbTePHaTI4BHb1M1/1 14CTOHHMKaM14

3Heprini1, anermoaHeprennKa Ha OCHOBe mmKpo- N MHI-111-

TO11.111,1BHUX alleMeHTOB;

• TeneKommyHmKawm;

• 41:43i4Ka BbICOKV1X 3HeP1161.

YHIIKaflbHble pa3pa6oTKL4 N TexHonormi4 Solid Sealing Technology

BO3B0.11HIOT npom3B0gwrb BeCb cnerrp coBpemeHHbix BaKyymHbix

repmerLigHbix BBOROB, ygOBJleTB0pRKAWX cambim WeCTKVIM rpe6oBaHmsm K

yCf1013L151M aKcnnyaTaumm:

• Amana3oH pa6o4mx remneparyp OT 4 go 723 K (-269 — 450 C);

• Hanpsmemisl — CBblWe 200 KB;

• 3nerrpm4ecKme TOK14 — CBblWe 1000 A;

• B03MOWHOCTbliC11011630BaHlifl HeMailiVITHbIX marepmanoB;

• BO3M0>KHOCTb pa6orbi npin CBePXBbICOKOM BaKyyme N BbICOK11X

gaBneHm9x.

Komnavivm AKTAH B KparHainwme CPOK1,1 N 110 BblrOgHbIM ugHam

nom-am-icier Becb cneap npogyntmm Solid Sealing Technology:

• BaKyymHbie MylibTLIKOHTaKTHble 3nermm4ecK41e BBOgbl ( B TOM

Hmcne BbICOKOHaCTOTHble ) N COBAMHVITe.1114 — Hanp9>KeHm9 cgo 30 KB, TOKIel go 1000 A, gmana3oH pa6oHmx gaBneHmM OT 10 1 TOPP go 240 aTM, gmana30H pa6o4mx TemnepaTyp OT -269 go 450 C, go 12 KOHTaKTOB Ha ogHom BBoge m go 50 — Ha coegmmiTene, nto6bie T1,11161113naHLteB N npmcoegmineHm0.

• BbICOKOBallbTHble 1,13011FITOPb1 — HanpmKeHL451 go 65 KB ( no cneLmanbHomy 3aKa3y — CBblWe 200 KB), gmana3oH pa6o4L4x gaBneHL4M OT 10 10 ropp go 70 aTM, gmana3oH pa6o4mx Temneparyp OT -269 go 450 C, mo6bie T1411bIclinaHues m npLicoegmHeHL4M.

• KoaKcmanbHble anerrpmyecKme BBOgbl — HanpmKeHt4si go 20 KB 110CTOAHH010 TOKa, TOK1/1g0 16,5 A, gmana3oH pa6oHmx gaBneiniiin OT 10 10 Topp go 270 aTM, gmana3oH pa6oHmx remneparyp OT -269 go 450 C, nio6bie TNnbI cianaHLteB npmcoegmHeHmin.

• TepmonapHbie BBOgbl Pa3HbIX rinnoB: T (Megb-KOHCTaHTaHOBble), K (xpomenb-aniomeneBbie), J (WeJle30-KOHCTaHTaHOBble), R/S (nnarL4Hopogmin- nnarinHoBbie), C (Bonbcppam-peHmeBbi q E (xpomenb- KOHCTaHTaHOBble) — gmana3oH pa6oHmx gaBfleF1161 OT 10 Topp go 240 arm, gmana3oH pa6o4mx remneparyp or -269 go 450 C, go 5 nap KOHTaKTOB Ha ogHom BB0Re, ni06bie TNnbi cpnaHupB LI npincoegmHeHmin.

• KpmcrannmHecKine ceHcopu — gmana3oH pa6o4mx remneparyp or -25 go 205 C, moue T11111,1c1DnaHt.tee m npmcoegmHeHmin.

• nepwarenin - gmana3oH

pa6o4mx gaBneHmii OT 10-10 Topp go 13 aTM, gmana3oH

pa6o4mx Temneparyp OT

• - BBORIDI >KligKOCTI4 — ginana3oH pa6oHinx gaBneHm0 OT 1010

Topp ,4o 350 aTM, gmana3oH pa6oHmx remneparyp OT -200 go 450 C, coegmHemisi gn9 noriBoga >KLigKoc -rm — Tpy6Ka 1/4"(go 2 wryK Ha ogHom BBoge), Swagelok mrim VCR, nio6bie TNnbl cOnaHL4eB14 npLicoegmHeiniii71.

• 110J1HbIcl cnerrp BCeX Heo6xogimmbix aKceccyapoB Ka6enm, coegLiHmTenm, pa3beMbl N T. n.

27

0

HAIL bill liTEJlbH bl E YCTAHOBKM HACTOJ1bHbIE BAYYMHbIE HAilb1/11 01TEJ1bHblE YCTAHOBKII DESK IV

BaKyymHaq yc -raHoma X0110gH010 pacnbineHvm DESK IV npeRHa3HaHeHa Ansi HanbineHmq TOHKAX ToKonpoBogqi_umx cnoea Ha o6pa3ubi nepeg vx mccnegoBaHmem Ha pacTpoBbix 3lleKTp0HHbIX MviKpocKonax,

npegBapvirenbHoVI OLIVCTKOLA noaepxHoc-rvi C 110M01.11bK)

TpaaneHvq. OCHOBb1BaC1Cb 6onee Hem Ha 40 nemem onbrre, KomnaHmq Denton Vacuum npov3Bogm -r HaCT011bHble ( 3aHmmaemaA nnoLuagb 65x45 CM) BaKyymHbie Hallb1.1114TallbHble yCTaHOBK14 AJ1 HanbineHmq o6pa3uo6 nepeg mccnegoBaHmem Ha cKaHoppoLuem 141114

npocaeHvBaEoLgem 3.fleKTIDOHHOM mviKpocKone. 11011HOCTb10

aB-roma-mHecKve, OLleHb Hage*Hbie H yg06Hbie B pa6oTe, gaHHbie Hanbinv -renbHble yCTaHOBKI/1 mcn0nb3yF0 -rcq BO

MH01- 14X HayyHbix na6oparopvisix BO 'Kam mvpe. YCTaHOBKa

3a 3 MVH. o6ecneHvBaeT HanbineHme npoBoggLuero cnoci TOTIL1414H0i4 100A, vmeFoLuero meriKo3epHvicTyK) CTpyKTypy. YnyHweHHa51 KoHurpyKym54 marHerpoHa, coegmHeHHaq C

3ana-reHToBaHHoCi aHORHOC;1 CeTKOA, npego-rapaLuaer 6om6aprImpoaKy aneKTpoHamm o6pa3L4a, 6naroRapi HeMy goc-rmrae-rcsi geACT814TellbH0 qxonogHoe» pacnbineHme.

KpaTKoe ornicamie yCTaHOBKV1. BaKyymHbiVi Hac0C, ynpaansiroLuaq anerrpoHma, ga -mviKm m BaKyymHbie KflarlaHbl — BCe 3T0

pacnonaraeTc9 BHy-rpvi Kopnyca ycraHoBKm. BaKyyMHai KaMepa H3 c-reKna vinyl HepwaBeioLueVi cranes C OTKaLIKOA

Typ6omoneKyrisipHbim H3COCOM ( mogenb TSC). YCTaHOBKa cHa6>KeHa aBTOMaTHHeCKHM KnanaHom HanycKa armoccPepb1, cocToqHme KOTOPOIO (OTKpbIT 14.1114 3aKpbIT) 3aBl4C14T OT COCTOFIHVM cpopBaKyymHoro Hacoca (BK.1110 1-1eH A.1114 BbIKTIFOLleH). B Kamepe

vimeeTcq perynopyembi'M no BbICOTe CT0.1114K AfA KpenneHAq o6pa3uoa. ,{1,0110.11H14TeflbH0 MO>KeT flOCTaBIWITbCq C BO3M0>KHOCTb10

BpatileHvici H HaK110Ha. PyLlHaA 3aCTIOHKa ycTaHaBrimBae-rc9 C 1.1ellbF0 3aL1114Tbl KaTOga OT 3arp5:13HeHmq BO Bpemq 0414CTKI4

o6pa3ua C 110MOLgbF0 TpaBneHmq. B03M0>KHOCTb TpaBneHmq 14 BpauleHmq nogno>KKogep>KaTenq mmeKxrcq He BO BCeX yCTaHOBKaX 14 g0110.11FINTellbH0 o6roBapvBa10rcs--1 BO BpeMA 3aKa3a. Elporpammvpyembli;i .normHecKviVi KoH -rponnep yripaansier aB-roma-rvHecKoV pa6o-roVi. cmc-rembi . CeHcopHbIL gvicnneVi H rpacpvHecKoe nporpammHoe o6ecneHeHme cgenaFoT pa6oTy c yc-raHoBKoVi nerKoVi 14 111314c1THOO.

KoHcOmpypaqpiR BaKyymHbux HanurniTenbribix yCTaHOBOK DESK IV

DESK IV Kamepa 143 creKna 015cm

Pacnbinsier gparoueHHbie me -rannbi He Tpe6yeT nogaw ra3a

DESK IV XLS KaMepa v3 CTeKna 025CM

Pacnbincier gparoueHHbie me-rannbi He Tpe6yeT nogaHo ra3a

15 vinvi 20 cm nogno>KKogep>KaTenb

DESK IV TSC KaMepa H3 Hepx.c-ranv 015cm C OKHOM

PacnbinqeT BCe me-rannbr Tpe6yeTcsi nogaya ra3a

Typ6omoneKy.nqpHbi0 Hacoc

Onumm, KoTopbie moryT cogepKaTb Bce mogenv DESK IV: v3mepvrrenb TO1lLgl4Hbl noKpbrum, mcnapm -renb yrnepoga (c -rep>KH6i WW1 HATO), BpaLgeHme, ogHoBpemeHHoe H3K110H H BpaLgeHme.

HACTOJ1bHbIE BAKYYMHbIE HAilb11111TEJ1bHblE YCTAHOBK101 DESK PRO

YCTaHOBKa npeRHa3HaHeHa RDA marHeTpoHHoro pacnbineHmq

me-rannoa H A143.11eKTpl4KOB B HayHHbix 1.1erisix. OT.1114LIATellbH014

OCO6eHHOCTb10 yCTaHOBK1,4 F113.1151eTC51 ee KOMIlaKTHOCTb, 3aHvmaemaq

nnow,agb coc-raansieT Bcero 79x80 CM. Pa6oTaer B aB -romaTvHecKom pewyme nog ynpaBneHmem nporpaMMbl, vimerou4e0 ygo6HbiO uBeTHo6

rpacpmyecKm0 vm -repcpei;ic. YCTaHOBKa MO>KeT 6bITb yKomnneKToBaHa

0gH14M 141114 glaymq marHeTpoHamv 05cm, Ko -ropbie 1114Ta1OTCCI OT 6noKa

nvn-aHmg npqmoro TOKa RPM BbICOKOLlaCTOTH010 reHeparopa, a TaK>Ke

Typ6omoneKyncipHbim HacocoM CO CKOpOCTE10 OTKaLIKO 65 11/C.

01114140HHO MO>KeT flOCTaBINTbC51 C n0110.11H1/1TellbHb1M14 marHm -ramm ,41151

pacnbineHvq cpeppomamv -mbix maTepvanoB. gnci npvtrio>KeHmin,

Tpe6yrow4mx 6onbwoV1 OK0p0C -114 OTKaL1K14 napoa BO ,QbI, yc-raHoBKa

MO>KeT 6bITb cHa6)KeHa 110ByLL1K00 C >K14,13,K14M a3OTOM.

28

DENTON VACUUM KomnaHmq Denton Vacuum pa3pa6arbieaeT M EIP0143BORMT Hallb11114TellbHble CVICTeMbl gnq HaHeceHmA CBerATOHKOX nneHoK meTannoa V P,14311eKTpMKOB. 4aHHble TeXH01101- 1414 V nriemn 1.111/100K0 14C1-1011b3yFOTCA 41-1S1 HayHi-ibix uene0 V BO MHOINX OTPaCflAX

npombiumeHHocm: 011TM4eCKOM, nanynpoaogHmKoeo6, 3pM npov3aogcTae megvuvHcKmx m3genmi/i, gmcnneea, C011He4HbIX

6aTapev, P,J1FlynpoHHeHmq V ynyHtgeHmsi CBOMCTB 141-ICTPyMeHTOB. 11P14 npoinaogcTee CBepXTORKI4X nneHoK, TOnLLVHa KOTOpbIX

MO>KeT 6bITb ecero HeCK011bK0 aTomHbIX cnoeB, Heo6xogmmo go6vaa -rbcq MX 04eHb BbICOKOV 414CTOTbl, 4TO Tpe6yeT npoaegeHmsi npoueccoe TepmidHecKoro 1/1CflapeH1451 B rry6oKom eaKyyme. ,Lt.11A nanyHeHmq CBOOCTB C 3apaHee 38,0,aHHb1M14

cao0c-reamm KomnaHvici Denton Vacuum npegnowyrr Han6onee nogxogsligmM npouecc V onTvmanbHpo yc -raHoaKy, -raK KaK c1131151eTC51 KomnaHme0 C 60.1lee Hem copoKanel-Hvm 011bIT010 B npovi3eogcTae eaKyymHbix Hailb11114TaflbHbIX cmc-rem.110Tpe6yeTC5=1 nN BaM yCTaHOBKa gflA HaHeceHmci TOHKVX nneHoK C 110MOL14bK) pe314CTMBH010 MPH marHe-rpoHHoro mcnapeHvq, C

140-1011630BaHMeM 3lleKTPOHHO-Py4eB010 VICHap141 -efl5=1 11.1114 marHeTpoHHoro vicnapeHms" C gonanHmTenbHo0 o6pa6o-i-Ko0 110BepXHOCTI4 VOHHbIM nyHKom, Kom6mHvpoaaHHa1 YCTaHCBKa C HeCK0116104M14 Tmnamv mcnapeHmsi (pacnbineHmq), 06parvn -ecb K

Ham V HawV cneumanmeTbi COBMeCTHO co cneuvanmci-amm KomnaHmm Denton Vacuum npegnowar HagewHyie BaKyymHyic Hanbinv-renbHyro yCTaHOBKy C allP0614P0BaHHOO TexHonorme0.

INTEGRITY® - YCTAHOBKA BAKYYMH0r0 HAHECEHMA TOHKI4X IMEHOK 3/1EKTPOHHO-11YLIEBbIM METOjOM g11510r1TilKil.

YcTaHOBKa cepmv Integrity® siarmeTcsi clonarmaHom Arm HaHecei-mq on-rm4ecKm0 noKpbiTi40. Pa3Mep KaMep B 3TVX yCTaHOBKaX eapbmpyeTcsi OT

65 CM RO 2 M. flogaanqFoulee 60.11bLUMHCTBO BaKyymHbix Hallblf1MTeJlbHbIX

cmc-rem cepvm Integrity® nom-am-mei-cc c ACTOHHIAKaM14 gclq HanbineHMA C accmc-rmpoaaHmem MOHHbIM nyyKom V onToyecKomm moHoTopamm, HTo n03i3onsgeT VX npmmeHm -b B cambix OTBeTCTBeHHbIX npvinowei-wx. MO>KeT

TaK>Ke 6bITb nocTaaneHa C pe3IACTI4BHb1M mcnapeHmem L4.110 gil5=1 oca>K,n,eHinq TOHKVX nneHom meTogom PECVD. BaKyymHaq oi - KaHHaq cmc-rema nog6mpaercA, vcxogq V3 maTepmana nogno*Km, nocTa3neHHblx 3aga4 Tpe60BaHm0 K KoHeHHomy npogyKry, KOTOPEDle, eCTeCTBeHHO, 01 -11144Hbl OT

Tpe6oBaHvi0 rip c-raHgap-rHo0 eaKyymHo0 meTannv3auvm. BbICOK14e

Tpe6oBaHmq K KoHeHHomy npogyKTy BbIg131/11-aFOT BbICOKL4e Tpe6oBaHvci K

ypOBHEO ae-romaTv3aumm. TvrivHFibie npmno>KeHmp gnsi gaHH014 YCTaHOBKV1:

npoTmaooTpa>KaFoupie noKpbiTmci, COMPbT0b1 C y3Kvm nponycKaHmem cneKTpa, cneumanbHbie oTpa>KaEoulve 110KpbIT14ft 3epKana C Kopperrvp0aKo6 cneKTpa o-rpa>KeHH010 ceeTa.

BAKYYMHAA YCTAHOBKA PE311CTIIBH0r0 HArlbIJ1EHMA CEPP111 DV-502B

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yHmaepcm -re-rax M vccnegoaaTenbcKmx 1.4eHTpax no acemy MVpy. V1cnonb3yEou.taqcsi B cepmm DV-502B coepemeHHaq 3neKTpoHVKa, yny4LueHHas=1 BaKyymHaA cxema M coapemeHHbie BaKyymHbie KOMPOHeHTbl BenyLLAAX MVPOBbIX 1 -100V13B0P,14TelleM 06ecne4maai-o-r 6bicTpyie M HeORHOKPaTHY10 OTKaLiKy OT aTmocciDepu AO BbICOK01-0 eaKyyma. B 4vicT00 V o6e3ra>KeHHoM BaKyyMHOc1 :3 c-r e m e npv 14C110.11630BaHV1V1KonnaKa gvameTpom 30 CM 14 BbICOTOM

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29

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oPa6oLlein nowagKoViD N cTabigap -mbim Bbl6opoM ,q1151 HayHHo-vicanegoBaTenbcKvix pa6oT B o6nac -rvi HaHeceHMA TOHK14X

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30

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pacnbinpembix aTOMOB V 1-10,EI110>KKOf4.

31

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gonornonenbmbie onwim ► BaKyymHaq KaMepa, mroToBneHHaB C yHerom Tpe6oBaHmVi KOHKpeTHOO

TexHonorw-iecKoVi 3aga41/1, MO}KeT cogep>KaTb cne,gyHmgme onumm: HeCK0.11bK0

3anacHbix BaKyymHbix noproB; Bogsmoe oxna)KgeHme; HarpeB CTeHOK; pa3Hbie

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► OXIla>fcaaeMblV >KNAK1/1M a3OTOM CTOFIVK R1151 pawneweHmq 06pa3uoB

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110. 3.11eKTp0HHO-Ily4eB0c11/1CTOLIHV1K mcnapeHmq C OaHI/1M NuN HeCKanbKV1M1/1 TVMFIM1/1

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32

407 • J. 410. _ Ant

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DENTON VACUUM BAKYYMHblE CliCTEMbl MArHETPOHHoro HAllbITIEH1151 DISCOVERY®

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KaHec -rBeHHoe HanbineHme Ha 06pa3ubi 60.11bLUMX pa3mepoB, gocTorasi npin 3TOM BbicoLiakuyio cTeneHb HeogHopogHocTin.

gaHHoe pacnonoweHme marHe -rpoHa N minweHin ymeHbwaeT CTOMMOCTb 14X cKnagcKoro xpaHeHvm, a cama Hanbinv -renbHaq

cVcTeMa MO)KeT FlOCTaBTIFITbC5=1 C MeHbWOM14 no MOLIAHOC114 MCTO4H14KaMV noTaHinci, LITO rIpl4B0,0,14T K 3ameTHomy yMeHbWeHMK)

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BbI60p KOHKIDeTHOC4 KoHcporypauvun HarIbIllVTellbH0c1 CVICTeMbl onpegencieTcci

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► BO3MO>KHOCTb Bc -rpaviBaHing B 414CTble nomeweHvici

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TOKa 14.11V omnynbcHoe marHeTpoHHoe pacnbineHine

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► mexaHin3m nogaHin KacceTHoro Tona C « MAI-K00» noga4e0

o6paatoB

► Bpautatowinincp nognomogepwaTenb (onuinoHHo — C nogaHein

BL1 cmeweilvq)

► nogno>KKogep>KaTenb C BO3M0>KHOCTbF0 nepeBopatnviBaHinst

11.11aCT141-161 B npouecce marHeTpoHHoro HanbineHusi g115:1

HanbineHosi TOHKVX nneHoK C gByx CT0p0H nnac -rmHbi

► pacnono)KeHme marHeTpoHoB B1-1143y N HaBepxy BaKyymHoin

Kamepbi

► KoHcOoKanbHoe innin nepneH,EtvwynsipHoe pacnonoweHme

marHeTp0HOB

1111' 60.11bW0C1 Bb1600 6.110KOB ninTaHmq

► ynpaaneHine HanycKom ra3OB C 1-10M01116F0 rOLIHbIX

KOHTp0.11.11epOB pacxoga ra3a

► cnowHoe BpaweHHe nogno>KKo

► KOHTparlb napameTpoB HanbineHinci B pe>Kvme peanbHoro

BpemeHin

► KOHTparlb napameTpoB nna3mbi

MarHeTpoHHasi HanbinriTer.Han ycTaHoBKa cepHH Discovery® 635

ElpombiwneHHaq 11011HOCTbK) aB -romaTint-iecKasi marHeTpc , HHaq HanbinvTenbHal cvc -rema C 3arpy3oHHoin KamepoVi grist nepemeweHL451 o6pantos g0 200 MM, V1 BO3MO)KHbIM K011144eCTBOM marHe -rpoHoB g0 4 WTyK. VCnonb3yeMa 3arpy3o4Hast Kamepa 3Ha414TellbH0 rIOBbILL3eT flp0143B0 00,14TellbHOCTb CI4CTeMbl N LIVCTOTy TexHononnvecKoro npouecca, TaK KaK 3Ha414TellbH0 coKpawaeTcB K011144eCTBO OTKpb1BaH14(4 gBepo pa6oyein BaKyymHoin Kamepbi mist 3arpy3Km Vl

BblIpy3K14 o6pa3tAoB. 3arpy3o4Hast Kamepa inmeeT Bce He06xoginmbie 1100Tbl AIN nogcoegmHeHinq fepMOBBOROB, BBOTIOB nevoKeHinci, BaKyymmeTpoB N OTKa-lHbIX CpenCTB. ElHeBMaT14-leCKI4i4 BbICOKOBaKyyMHb10 3a -mop pa3gensieT 3arpy3o4HyEo Kamepy OT pa6oHeii1, a maininnynwrop, ynpaBnqembiln" nporpaMMHblM o6ecne4eHinem cinc -rembi, o6ecneHvBae -r aB -romaTmLiecKyFo 3arpy3Ky • Bbirpy3Ky o6pa3uoB 143 pa6o4eVi Kamepbi. B c -raHgapTHoin Komtvirypauvivi 3arpy3o4HaFi Kamepa oTKaHviBaeTcci gBynamepHum nnac -nnHtna -ro-poTopHbim Hacocom, KOTOpbIV1 orKavinBaer pa6oHyto Kamepy marHe -rpoHHoin Harlb1.1114TellbH0i4 CV1CTeMbI. OrILMOHHO 3arpy3o4Hasi Kamepa MO>KeT OTKa414BaTbC51 6e3MaCrIFIFIbIM cninparibHbim cpopBaKyymHbim HaCocoM TypoomoneKyncipHbim BaKyyMHbrM HacocoM. B 3arpy3oHHoin Kamepe moryT 6bITb yc -raHoBneHbi pa3Hble onwnin gnci npegBapinTenbHoin 110,0,1-0TOBKI4 nosepxHocTin nepeg marHe -rpoHHbim HanbineHinem: By -maim-rem/le, Trietowvin pa3pH,q C alleKTIDOHHO-W4KJ10Tp0HHbIM pe3oHaHcom, 140HHOe TpaBneHme, TfleK)1.414C1pa3psig 110CT05:11-1H010 TOKa, HarpeB.

33

HATIb11111TEJ1bHblE YCTAHOBKM MarHerpowiasi HanbmprrenksHasi yc-raHoeKa ceptiti Discovery® 785

B pa6oYe0 Kamepe Hallb1.1114TellbH0i4 yCTaHOBKI4 Discovery 785 mower 661Tb yCTaHOBJleHO g0 6 KaTOROB Pa3r1V4HOi;1

KOHC13141-YPaq1414 0=1,11A pacnbineHon Marl-WITHbIX 14 HeMar1-114THbIX maTepoanos). KawgbiO pacnbinnembiO Karog ( pa3mep Karoga MO)KeT 6bITb ,E10 300 MM B gvamerpe) MO>KeT 661Tb He3aBocomo HacTpoeH grin o6ecne4eHmn Hav6onee 011 -114MallbH01-0

pacnbineHvin V1 o6ecneyeHmn napameTpos r exnpouecca N HanbinnemoO nneHKo. 3arpy3o4Han Kamepa cnoco6Ha TpaHcnopTmpoBaTb 110g.110)KK14 gmame-rpom go 75 CM, npv 3TOM npouecc Mo)KeT 6b1Tb

11011HOCTE40 aBromaToyecKmM. TpaHcnop-ropoBoyHHO mexaHm3m moweT aKKypaTHo nepemewaTb 1-10R1-10>KK14 06L1414M BecoM g0 25 Kr.

B craHgap-i-HoO Komnnerrawno marHe-rpoHHan Hallb1.1114TellbHaF1 yCTaHOBKa Discovery 785 nocTaBnnercn C nporpammHbim o6ecneyeHmem ProcessPro, o6ecne4visaFoLgom 3anyCK yo-aHoi3Km Hawaroem ogHoO KHOI1K14 cTapT C nocnegyrouvm as-romaTmyecKom Bb111011FieHl4eM scex TeXH01101144eCKL4X onepauvO, TOLIHOe BbinanHeHoe «peuenra» HanbineHon nyTeM TO4H01-0

BbICTaBfleHl4F1 V1 OTC.11e>K1413aHl4F1 TexHanormyecKmx napameTpoB, iX 3anocb B >KypHan, gl4CTaHLAMOHHbliA MOM/ITC314Hr

Harlb1.1114TellbH01,%1 C14CTeMbl.

Harnorniren6Hasi ycraHoeu ceproi Discovery ® HDG Ann mommo-nrieeoro manbinemmn (tinm manunemmn C accmcmpoeammem MOHHbIM nyworm) h Tpannemmn

CocTema saKyymHoro HanbineHvin DiscOveryv HDG grin TpaBneHon V1 pacnbineHon mmweHm 140HHbIM nyyKom o6nagaeT 'Kew Heo6xogombimm onuonmo N Tpe6yembimo napamerpamv, npeg -b5i3nnembimm K saKyymHbim ycraHosKam gaHHoro Tina, BbICOK0i4 1146KOCTbK), 1103B0.119EOLL.10 pewaTb 3aga4o gilF1 MH01- 14X odnacTeM HayKo. naHHan BaKyymHan yCTaHOBKa npegnaraeT 3Ha414TellbH0 6onbwe onum0 N o6ecne4maaeT nyywvie napame-mbi Hanbinnembix nneHoK no cpaBHeHolo C KoHKypmpylowomm cocTemam.

Discovery® HDG — roroBan, nocraenneman « no Krnos-i» cmcTema gnn: 110.- VoHHo-nyHesoro HaHeceHon marepvianos

HanbineHmn C accmcropoBaHmem 140HHbIM nyYKom • BbICOKag 11110THOCTb Hanbinnembix11.116HOK • BbICOKaFI CTa614.11bHOCTb napamerpos

Texnpoqecca

• cra6mnbHan CKOpOCTb pocTa 11.116HKI4

• ynpasneHme crexoomeTpmeM ma-repoana 1-1116HKV1

► V1OHHO-fly4eB01-0 TpaBneHvn N peaKTIABH010 140HHO-

ny4eeoro TpaBrieHon • BbICOKag paaHomepHocrb TpasneHn

► LUmpoKm0 cneKTp npegnaraembix onumO 14CTO4FII4K14 140HHbIX ny4Koi3 paanvyHan ocHacTKa grin nogno>KeK

• RGA • aB-romaTm3aumn npouecca

ripemmywecrea mommo-nygeeoro manbinemmn: • 6onee BbICOKag 3Hepron Hanbinnembix VOHOB no

cpai3HeHolo C 3HeprveO aTOMOB npvi marHeTpoHHom HanbineHoo 1-11314B0,3,14T K o6pa3oBaHmEo 11.116HKI4 C

60.11bW61 r1.110THOCTb10

6onee 1-1143K0e pa6o4ee gaGneHme (rny6vHa BaKyyma Howe 10-4 Topp) npoBogm -r K 6onee BbICOKOC1 414CTOTe HanbinnemoO nneHKm

• BO3M0)KHOCTb ynpaann-rb 3HeprveO N rlflOTHOCTIDIO VIOHH010 nyHKa 1103B011fleT

KOHTp0.1114p0BaTb mvwpoci- pyrrypy, crexmomerpoHecKoO COCTaB N yp0BeHb HanpnweHon

11.1-16HK14

• cra6onbHa1 CKOpOCTb pocTa 11.116HKI4 — npeBocxogHoe ynpaaneHme pOCTOM 1-1116HK14,

CTa614.11bHOCTb npouecca xaparrepliCTOK

HanbineHon, BbICOKag pai3HomepHocTb N ogHopogHocrb

34

VloHHo-nyHeBoe rpasneHoe COBMeCTI4M0 CO criegpow,omo ma -repvanamo: • g14311eKTpl4K1/1

• Si, Si02 ,Al 203 ,poiyiamide,etc.

• meTannbi

• Au, Cu, NiFe, Al, etc.

Aommo-nyLieeoe manbinemme coamecTmmo CO cnegyFouAomo maTepoanamo: • goaneK-rpoKo

• sin TA n AI (--) si N ptr, .-2-5,, ..— 2, —.3-4,.

• MeTailflbl

• W, Au, Cu, Pt, NiFe, CrCo, Si, etc.

DENTON VACUUM VOYAGER® - YHMBEPCM1bHAS1 CPICTEMA W151 PECVD r1POLIECCOB

YHmBepcanbHan yc -raHoBka nna3moxvmmyeckoro ocaxcgeHvin cepAm Voyager npegnaraer 6onbwiie gnn nonytieHvin TOHKI,IX 11.116HOK, rpm 3TOM npobecc npoxogvn- B Hinko-remnepaTypHom pexwime, BbICOKOVI cTeneHbio OHOpOHOCTM.

Sacnyx(nBaiouvimm oco6oro BM/Mal-MA npekimmec -marAvi PECVD npouecca sanneTcsi TO, LiTo ma -repwana nparmLieckvi HeorpaHmeH, a Tame BO3MO)KHOCTb nonyLia -rb 3apaHee onpegeneHHoe nneHke.

BO3M0)KHOCTLI N rw6KOCTb

a nneHka o6pa3yercn c

1,1CTO4H1,1K Hanbinnemoro 3Ha4eHme Haripn>keHmn B

Ilptinomenme: • pa3pa6oTka N AccnegoBaHvie PECVD npouecca

• menkocepvii%1Hoe np0113B0gCTBO

• HaHeceHAe orrroveckmx AHTepcbepeHLAmoHHbix nokpbn- friA

• HaHeceHAe gm3nekTpi/4eckmx crioeB gns nponsogc -ma M3MC Vl nonynposogHmkosbix c-rpyrryp

• HaileceHme ci3epx -membix nneHok:

• anma3onogo6Hbie nnemon

• HATpAg Tin -raHa

• nonyLieHme amopcbHoro kperviHkin

• nonyveHme nonmkpmc -rannw-ieckoro kpemilms

YcTanoenennbie npoqeccbr • SiO, • SiN

• TiO2 • DLC (Diamond Like Carbon)

BO3MCMHble KoncOnrypaqmn: • Typ6omonekyn1pHbiA Hacoc cnoco6HbiA pa6OTaTb B

cpege arpeccvieHbix fa3013

• BLI cmeigeHme Ha

gogooxnaxcgaemom

nognowkogepwaTene

• pa3Hble pa3OBble pacnpegenwrenbHbie CkICTeMbl

• ci3eOXTO4HbIcl eMKOCTHOcl Bakyymme -rp

• onumoHHo:

• 3arpy304Han Kamepa

• Ma1FIBTP0Hbl C 6nokamm nATaHvin

• HOHHbIII L1CTO4HVIK C 6nokamt1 nmTaHt4n

• anbTepHaTmsHbie ra3opacnpegenmTenbHbie cvicTembi , B TOM Limcne V1CTO4HVIK1,1 napoi3o0 cba3bi

KoHd3Arypatvin BakyymHoVi pa6o4e0 kamepbi nna3moxinmv14eckoro peakTopa, nomonniotilas yCTal-10BOTb ilICTOLIHMK WOHOB N nogcoegmHATb 3arpy304Hylo KaMepy

Ygo6HbiA gocTyn npoBegeHAR CepBI1CHbIX

pa6oT

Ko3d4muyieHT orpaxceHmn

nneHkA, nonyLieHHoi;i meTogom nna3moxI1mm4eckoro ocaxcgeHiv, 143meHne -rcn B Lumpokmx npegenax npv 113meHeHmm noga41,1

TexHonormLieckwx ra3OB

35

IlapameTpbt pa3pnga yc-raHoemi MINIPLASMA-ATOS LAB

nna3meHHoro pa3pnga

Tyn nna3meHHoro pa3psiga

nflOTHOCTb pa3pnga

TemnepaTypa ra3a

06-bem

Tnetou.mii pa3psig

Tnefouwill pa3png

10" -101z cm-3

< 250 C (npv nogaHe OT reHeparopa 300 BT)

200 x 10 x 5 / 100 x 25 x 5

CnegincpviKaultisi cricTembi MINIPLASMA-ATOS LAB

nion-aHtie CI.ICTeMbI s 220 B, 50 1111V160 FLA

BLI reHepaTop 600 BT rpm 13.56 mal 300 BT at 13.56 MHz

flogaHa ra3a

flogasaembie ra3bl

PeaKTPIBHble ra3b1 0

Ronycrvimag winpfrma o6pa3qoa CKOpOCTb nepmeutemn o6paata

Xog mexam43ma nepemeweHvig Pa3mepbr (MM)

Bonbr-amnepHaR xaparrepincrma pa3pqga

3rleKTp0H1-1851 Temnepa -rypa - oginH 1,13 miry napamerpoB. Koropbie 1103BOTIFIBT

aHanvi3mp0a8rb DLP2000

rl11A3MEHHAR TEXHMKA PLASMART 11111A3MEHHASI CliCTEMA MINIPLASMA-ATMOS (PLASMART, KOREA)

Cocrema nna3MeHHoLl o6pa6orKfri noeepxHocry nocraarmercp B na6oparopHom wcnanHeHviv ( moganb MINIPLASMA-ATMOS LAB) vino mroraanmaaercp nog 3aKa34mKa (mogenb MINIPLASMA-ATMOS CUSTOM). O6pa6oTKa noaepxHocro nnaameHHbIM pa3p5agom yRanieT 3arpi3HeHmq C noaepxHocrvi, aKrviampyer ee, LITO BO MHOI-VIX cnyHaqx KaLleCTBeHHbIM 06pa3om Ha pe3ynbrarbi TeXH0f101VI4BCKI4X npoimccoa, npoaogmmbix C noaepxmocrbio. ECTM Ha aawem np0w3aogcrae mcnonb3yercsi o6pa6orKa noaepxHocry, 06parwrecb K Hawom cneivanmcram C onocaHmem aawer4 3aga4m, vi no Baum rpe6or3aHvisi 6yger 1,1310TOBIleHa ycraHoaKa Flfla3MBHHOiii 06pa6orKvi noaepxHocro, vicn0nb3yq Koropm B CBOeM

TeXH0.1101W4eCKOM npoLlecce, Bbl nanr-mre 3HB4VITeflbH0

6anee KaLtecraeHHHI) KOHBLIHblcl npogyKr.

< 5 n/ MI1H < 2.511/MI4H

Ar, He

02, N2, CF4

MaKC. 200 MM / MaKC. 100 MM

maKc. 200 MM/C / maKc. 100 MM/C

OCb X - 250 MM, OCb Z - 20 MM /

OCb X - 200 MM, OCb Z - 20 MM (pyHH) 11308001400/ 750 LI 800 LI 1400

CI'ICTEMA AHAJ1113A 11,I1A3Mbl TIEHIMFOPOBCKI1M 30H/ 40M

flapameTpbi N BO3MONCHOCTb

11110THOCTb

TeMnepaTypa alleKTOOHOB

ElnaaaFou.Wi noreHqvan EloreHuman B nna3Me 110TOK VIOHOB

3nek-rmi4ecKHe napame -rpbi

11X gmarHoc-mpoeamin B nna3me 10 8 ... 10 13 CM 3 < 10 eB -250 ... +250 B gocrynHo gocrynHO

Hanpq>KeHvie noraHosa

220 B, 60 EL4 HanpsDKeHme noraHvig 3oHga -50 .. +50 B MaKCVIMarlbHbli4 TOK 30HAB

25 MA

gvana3oH nnaaaEowero noreHLmana -250 ... +250 B LUmpviHa nonocbi nponycKaHo925 KFLA aHanoroaoro corHana

flapameTpbu gnH 4WICTKI1

TOK

HanpmKeHme Bpemsi LIVICTKV1

Pa3mepbi Tvn Pa3mepbi, MM Bec

MaTepHanbi 3oHga DLP2000 Kepanowa (oKvicb aril-ow-1mq 99.8 %), 018" KpemHmeabi0 op,HoHanpaaneHHbiL) nepeKnEoHarenb,01" Bonbcppam, 00,5/1,0 MM, gnwHa 10/20 mm

< 50 mA ... +125 B

0,1 ... 5 ceK

CraHgaprHbliA 19" 446 x 133 x 450 18 K1

38

LlacToTa CT0.11KHOBeHl4f4 311eKTp0HOB

ConpoTinsneHine nna3Mbl

tilinpinHa npoc-rpaHc -raeHHoro 3apAp,a

BLI TOK

V13mepeFne niva HanpsweHlisi

paccHeTHasi

pa

pa

pa

pa

paccHeTHaq

pa

pa HeT

pa

pa

-pa

noc-r.

pa

HeT

pa

pa

HeT

pa

HeT

pa

pa

pa

pa

noc-r.

Hercules® PMX 500

Hercules® Hercules® Hercules® PMX 1000 C 500 C 1000

Hercules® N 100

nr1OTHOCTb alleKTOOHOB pa pa pa pa HeT

NEED HeT 60 fla - 1 Kila

(0.5 - 7.5 Topp) 60 fla - 1 Kfla

(0.5 - 7.5 Topp)

CfricTembt cpegHero

gaaneHmq g1151 nna3meHH01-0 Tpaenewsi

CVICTeMbl ToasneHinq RIE-, MERIE anc-rembi RIE-, MERIE-cincTembf

TCP, ICP Dual TCP, ICP Dual frequency frequency

AHAJ1113 CBOACTB nnA3mbi PLASMETREX, rEPMAHNS1

l/13mepwrenbHaci cHcTeMa Hercules Ansi LumepeHinsi CBOOCTB nna3Mbl HemegKoin KomnaHfrun Plasmetrex incn0nb3yeTcq Ansi c03naHtnq N oTnap,Kin nna3meHHoro o6opyflosaffinci, Hanpmep, cinc-rem TpasneHinq V1 nna3moxinmin4ecKoro ocaNKAeHvq, a Tame WA KOH -10011g napame -rpos nonynposogHtiKoro TeXH0110111HeCK010 06opygosaHinci V1fV1 HHblX 3aAa4, B KOTOpIDIX incn0nb3yeTcp By nna3meHHIA pa3pFig. Cinc -rema Hercules in3mepfle -r OCHOBHble napame-mbi nna3Mbl B pewinme peanbHoro spemeHin in He BHOC14T KaK14X-F11460 in3meHeHinin B nna3my vi3yLiaembici npouecc. Cinc -rema Hercules COCT014T 143 RaTt-ma (sing gaminKa noKa3aH Ha pincyHKe cripaea), BbICOKOCKOIDOCTH010 umcppoeoro npeo6pa3oeaTen5 Ansi KoHeepTaumn cmrHana OT gaTyinKa B Lunchooeoin C141-Hall ( BHeuJHVi1 stng n0Ka3aH Ha ci - paHinue caepxy cnpaaa), nporpammHoro o6ecneHeHinq Anq

aHarm3a N sin3yanvi3aulny CincTema moHinTopinHra napameTpos nna3Mbl Hercules ocHosaHa Ha aHanv3e cnerrpa pe3oHaHcHoro camoso36pK,AeHinci 3nerrp0Hos nna3Mbl (Self Excited Electron Plasma Resonance Spectroscopy,

SEERS) pni nna3Mbl 11143K01-0 gaeneHvici in Ha Me -rope NEED (Nonlinear Extended Electron Dynamics) Ansi cpegHinx nasneHviO. anc -rema moHin -ropinHra napaMerpoB nna3Mbl Hercules o6ecneweaer BbICOKOe epemeHHoe pa3petgeHme, 14C110.11b3yg

cBepx6bicTpuin anropNTM aHanin3a paHHbIX. 1114K0B0e 3HaileHine BLI 143ny1eHinq t4.1114 HanpmKeFivie cmeLueHinsi in3mepFie -rui c FlOMOLLtbE0 eMKOCTH010 genvTenq Hanpq>KeHmq.

Me -roAbi SEERS in NEED no3songioT onpegeninTb cpegtHine no o6 -bemy napame -rpbi nna3Mbl. naTLIMK moHTvipyeTcq Ha cTeHky KaMepbl, HI4KaK14X

,C1,0110.11HVITeJlbHbIX tn3meHeHfr1N B KOHCIpyKL114F0 kamepu BHOCVTb He Harp. OaKTyvecKin ceHcop BepeT ce6ci KaK

LlaCTip CTeHbl, OH 3a3eMneH V1 TaK14M 06pa3OM He

oKa3bisae -r B11149H14f1 Ha nna3meHHble nooLeccbi. CeHcop 143MepfleT TOrIbK0 But TOK, TaKVM o6pa3om oTcyTurayeT BnNAHIne nonymepoa 14.1114 KaKI4X-.111460 gpyryx

1430.1114pyK)1.414X 11.116HOK Ha pe3yrIbTaT 143Mepehll4i4.

HanpqweHme me)mgy CTeHK01%1 Kamepbi N anerrpoAamin garyinKa meHee 100 MB.

gaHHble OT nan-unKa, yCTaHOBJleHHOM Ha cTeHKe saKyymHovi Kamepbi, nonagaicIT Ranbuie B Lncpposyi-o cincTemy Anci nocnegyrowein sin3yanin3awnin N aHanin3a

gunana3oH in3mepeHinfA

n110THOCTb afleKTOOHOB io9 -10"

109

10 11 cm-3

Llac-ro-ra CT011KHOBeHal alleKTOOHOB

107 — 5 x 10 9c-1

10 7 — 5 x10 9c-1

SEERS

pa pa

pa pa

HeT

NEED

OrWOHHO onqmoHHo

HeT HeT

pa

LlacToTa Bo36y>KReH1453-

10 - 35 MHz 10 - 70 MHz 10 - 35 MHz i 10 - 70 MHz

13.56 MHz

gwana3oH gaaneHmh: 3aawcti1r oT Twna ra3a, reomeTpmvi peatcropa L4 BLI - M01.14HOCTI4

SEERS go 35 -la

(250 MTOpp) go 35 fla

(250 MTOpp) HeT

CliCTeMbl CVD HDP HDP (PE) CVD

39

3J1EKTPOHHO - J1YLIEBblE lialAPVITEJ111 Pa3pa6oTaHHoe N npom3Bogqweecq B EepmaHinv KomnaHveL) FerroTec o6opygoBaHve Ann aneKTpoHHo-nyyeBoro HanbineHmq TOHK1/1X nneHoK B BaKyyme 03BeCTHO BO BceM mmpe N omeeT penyTaumv3 HagewHoro o6opygoBaHvisi , mcnonb3yemoro B cambix OTBeTCTBeHHbIX

npmno>KeHoqx no nonyveHmo TOHKI4X 11.11eHOK: M3MC nonynpoBogHoKoBaci npombILLIfleHHOCTb, 1-131-10TeXH011011414, onTmHecKme

FerroTec npov3B0gwr 3neKTpoHHo-nyHeBbie MCTOLIHMK0

mcnapeHinq C opHinm 0.110 HeCK011bKMMV1 TV1MFIMM, OCTO ,IHNKV1 no-raHmq KoH -rponnepu ,W1A HMX. Bce o6opypoBaHme npom3Bogin -rcq B reptvlaH141,1

Ha coapemeHHom ripoH38ucTae, Hmeroutem cep -HO/mar DIN EN 15090001.

3J1EKTPOHHO-J1YYEBbIE VICTOLIFOIKII

MaKcvmanbHaq 3HeprinsR, KoTopasi MO>KeT 6bITb B110>KeHa

B 3fleKTp0HH610 nyv, goc-rviraer 12 KBT. 1/1cnapvTenb MO>KeT

14MeTb 1 TIffellb (npv 3TOM

0MeTb oftem go 190 Ky6.CM), 4, 6, 8 inn 12 Tornein. B o-rnmvve OT mcnapvTenein KOHKypeHTOB, oTcyTm-ByeT gwviammHecKoe ynnoTHeHve Boga-BaKyym, LITO 3HBLIMTBflbH0 nosbiwaeT HapewHocTb BceO cmcTembi m 3HaHmTenbHo cHowaeT Be0OATHOCTb nonapaHmq BOgbl B BaKyymHyro KaMepy.

snoK YI1PAIMEHM51 (KOHTPOJ1J1EP)

Elporpammvpyembun KoHTponnep Genius o6ecneHmBaEoT ynyk-iweHHyFo CIDyHK01,10HailbHOCTb 0 mcnonb3yeTcq BO MH01- 1/1X cvcTeMax, Tpe6yFoLuvx npeuvi3HoHHoro Hanbinevanq TOHK0X 0.116HOK. KoH-rponnep Genius KowrponopyeT N yripaBrmeT Bcemv napameTpamm B npouecce HanbineHmq: HanpmKeHme, MOLLAHOCTb, corm ToKa nyHa, pa3BepTKa nyLia, BpaipeHvie Tvimein, xpaHeHme gaHHbIX npouecca

HanbineHmq. C nomoLubh3 nynbTa ynpaBneHmq KoHTponnep no3Boncier JlerK0

3anporpammmpoBaTb <<peuenTbi» HanbmeHmq (K01104eCTBO Cfl0613, MX

TompinHy N maTepmanbi), coxpaHmTb NX (331.LAMTHB naponeM), nocne Vero onepaTopy ocTaeTcq TOflbK0 ab16paTb opeuenT» N 3anyurmTb npouecc. BbICOKBA noBTopemocTb pe3ynbT8ToB rapaH -ropyeTcsi. KoHTponep MOWHO

1-100KFIFOLIVITb K BHeWHeM cmcTeme ynpaBneHmsi, a MO>KHO Ha ero 6a3e CO3RBTb cocTemy ynpaBneHosi Hanbinv -renbHoin cmuremoin.

5/10K11 1111TAH1151 3,11.-J1Y4. MalAPIVITEJ1SIMII

KOMFIBKTHble 6110Km no -ram/151 cepvin Carrera gnq 3neKTpoHHo-nyHeBbm mcnapmTenein pa3pa6oTaHbl Ha 6a3e mmnynbcHbm HCTOLIHMKOB nmTaHm9, LITO o6ecneHvBaeT BbICOKyK) 344eKTMBHOCTb pa6oTbi, 6blurpoe BbipBneHme nyroBoro pa3p5=Iga 0

BoccTaHomeHme pa6oTbi mcnapv -renq. He6onbume pa3mepu 110380.1-151K)T nerKo ero BCTp0VTb B cToOKy yripaBneHvq. HoBbM MOgyflbHUO gv3a0H 6noKa rim -ram/1cl noaaormer cKoHcOnrypinpoBaTb cmcTemy 3neKTpoHHo-nyHeBoro Mcnapewq gnq

npvinoweHmin, Tpe6yFoLuvx nopBog MOLLAHOCTO OT 3 ,no 12 KBT, npv 3TOM

BapmatAq HanpqweHmq 3fleKTpOHH010 nyHa cocTaBnqeT OT 2 no 10 KB. BnoK

noTaHmq mmeeT mHTepcOei>icHwo KapTy, KoTopaq mo)KeT 6bITb cKoHcimrypinpoBaHa nog paaninumbie KoHcOrypaumm HanbmvTenbHo CMCTeMbL OH ,name moweT 6bITb COBMeCTHMIA no pa3-bemy vinv BbiBogam C 6noKamv noTaHvA ppyrox npom3BoginTene0, HTO no3BoncleT ero 0C0011630B3Tb C OCTOLIHMKBMIA mcnapeHmq gtpyrkix KomnaHHO. 1/1H -renneKTy8nbHa1 cmc-rema p8cn03HaBaHoq H raweHmq nyr pa6oTaeT aKcTpemanbHo oblurpo: nocne B03HOKHOBe11051 gy114 cVcTeMa 110F1HOCTbE0

BoccTaHaBnoBaeT CBOE0 pa60Tocnoco6HocTb B Teyevive minnninceKyHg, ripm 3TOM pacn03HaBaHve pyrin npoincxogoT 3a 200 HaHoceKyHp, a raweHme pyrm — meHee Hem 3a 1 mvKpoceKyHgy. KomnaHmq AKTAH TaK)Ke nocTaansleT BaKyymHble HanbmvTenbvible cincTembi C 3fleKTp0HHO-flyLleBbIM mcnapvTenem (c OgH0M 0.00 HeCK0flbK0M0 VCTOLIHNKBM0),

11011HOCTbF0 aErromaTmHecKyFo 01-10 60flee 6Fog>KeTHbC6 BapmaHT C LIBCTMLIHOO

aBromaTmaume0.

40

RF273S 0

2.0 4.0 fi.0 8.0 100 12.0 14.0

XOSIOgOrlp014330A14TefIbnOCTb II cryneHm npm 20 K, BT

RF7OS

RF371S

so

0 RF271S 0 RF373S

KPHOTEHHOE OBOPYAOBAHliE KPNOPEOPPDKEPATOPb1 SUZUKI SHOKAN RF

ORHO- H gByxc-ryneHHaTbie kpmopecOpvukepa -ropbi rvicpdpopga-MakmaroHa Suzuki Shokan cepvim RF o6nagaicT BbICOLIaMLIJI4M14 TexHint-leckvmm

xapak-repmc-rmkamm, HMBFOT CH14>KeliHblii yp0BeHb Bm6paumm H moryT, KaK H KpvoHacocbl, 06-beRVIHRTbCF1 B mynurvikoH(13virypaumm. OgHoc-ryneHyaTbie pectxm>kepaTopbi pa6oTalc-r Ha TemneparypHom ypOBHe 80 K, gByxc-ryneHvaTbie — Ha 20 m 80 K.

Ha 6a3e kpmopecppvukepa -ropoi3 Suzuki Shokan npegnaraeT Lumpokm0 cnek -rp o6opyg0BaHmsa — OT cBepxnpoBogBigmx cvic-rem g0 yCTaHOBOK AnA

mccnegoBaHvm npoLleccoB npvi CIElepXH143K14X

Temneparypax.

.•

BbICOK011P0113BOLINTE/1bHblE 3AMKHYTbIE L4NPKY/1SI14VIOHHblE CliCTEMbl OXTIANMEHN51 SUZUKI SHOKAN HA YPOBEHb 80 K

3amkHyTa5:1 umpkyrwiumoHHaci cmcTema oxna>kgeHmq >kingKI4M a30TOM 1-103B0FIReT oxna>kgarb, Hanpmmep, kpmonaHenm B

yeTaHOBKaX mmvn-aumm KOCMA4eCK010 npoc-rpaHc-naa, KaTyLIJK14 BbicokoTemnepaTypHbix cBepxnpoBogsqulmx Mall-IHTOB H T . n. Oxna>kgeHme ocymeci- Bnsie-rcci 3a CveT umpkynsmmin >K14,E1KCIFO a3oTa B 3aMKHyTOM umkne, npvi 3TOM cam a3OT oxnaKgaeTc51 C FlOMOLLAbH) renmeBbix kpviopecppm>kepaTopoi3 rviclxpopga-MakMaroHa, LITO 1103B0.11FleT cyLgem- BeHHo CHH3HTb

143Rep)KKI4, TaK KaK oTcyTm- Bye-i- He06X0r114MOCTb ROI-114MM

)1O4F1KOF0 a3oTa. Elpm 3TOM o6ecneymBaeTcci BbICOKaR

xonogonpou3Bogvn-enbHOCTb 3a1114BHbIX cmc-rem. 1._1,eHTpanm3oBaHHa1 cmc -rema KOHTpOf5 H ynpaBneHmq npoqeccom oxna>kgeHmq o6ecneLmBakr . gnm-renbHpo HenpepbiBHylo 6ecnepe6o0Hpo pa6oTy.

TexHiitiectuie xapaKTepmc -rviKii TemnepaTypa >kingkoro a3oTa B FIVHVII4

FIOTOK )1C14,E1K0r0 a30Ta B .1114H1414

naBneHme >kvigkoro a3oTa B.1114H1414

Xonogonpom3Bogm -renbHocTb TennoBbie no-repm

BbICOK0111PON3BOLINTE/IbHblE 3AMKHYTb1E LINPKYJ15114140HHblE CNCTEMbl OX/1AW/IEHMS1 TELEMARK HA YPOBEHb 140-160 K

BbICOKOF1130143BORI4TellbHble 3amkHyTbie cmc -rembi ox.na>kgeHim Telemark o6ecne4mBaikyr BbIC0KY10 X0.110g0ilp0143BOTWITellbHOCTb

Ha yporaHe 140-160 K H MOryT 14CF1011b30BaTbCR KaK grisi ueneVi nonyLieHmci H143KNX TeMllepaTyp, TaK H B kat-lecTBe kpmoBakyymHbix HaCOCOB grisi OTKaLIK14 napoB BOP,b1 H3 60.11bLJOX BakyymHux KaMep.

Bum- pas:I orkaLika C 3C1X0eKTI4BHbIM yganeHmem napoB B0Th , I 143 BakyymHcA kamepbi FiBriqeTcsi K1110 14eBbIM Tpe6oBaHmem Arm o6ecne4eHmq MaKCI4MaJlbHOM 11130143BOAMTellbHOCT14 npoueccoB HaHeceHmsa TOHKHX nneHok.

1/1C11011b3yR MH01-01-1eTHI41) 011b1T H nvigmppouve no3miAmm B 06flaCTI4 06opy0,oBaHmq gr-19 npoqeccoB PVD komnaHvm Telemark npegnaraer cambia cospemeHHble TexHonormm KpHO3aXBaTa, rapaHTmpyFoulme grim-enblvo 6ecnepe6o&yro pa6oTy yH141<allbHble TexHmveckme xapakTepvicTium BbICOKOFIP0143BOTIVTaflbHbIX HaCOCOB Telemark cepmm TVP qnA OTKaLIKM napoB BOrtbl, KOTOPble o6ecnet-imBaicT:

• BbicTpoe 3axona>kmBaHme gnsi CHI/Mel-MA BpemeHm pa6o4ero uvula; • BbICOKyK) 11p0143BORI4TellbHOCTb OTKa4KI4 BO,E1F1HbIX napoB — go 220000 n/c 14.1114

X01100:101-1P0143B0/114TarlbHOCTb — go 3500 BT nom 160 K; • Bbic-rpoe pa3mopa>kmBaHme;

• KOMIlaKTHOCTb CACTeMbl — komnpeccop 3aHl4MaeT He60.11b1DyK) LlaCTb pa6oHero npourpaHm- Ba;

• MmkponpoueccopHaq cocTema ynpaaneHmsi C B031\10>KHOCTbF0 o6meHa RaHHb1M14 no umcppoBomy KaHany RS232 vinv RS485;

• CHwkeHme BpemeHm OTKa4K14 Ha 25-90%;

• noci-mx(eFivie 6onee rny6oKoro Bakyyma — napumanbHoe gaBneHme BOgFIHbIX napoB 10' m6ap;

• OcBo6o>kgeHme OT goporocToqwero 14C11011b30BaH1451>KHgKOM a3oTa; • YnyHweHme kaHec-rBa HaHeceHmq POKPUT1414.

41

67 — 85 K go 12 .n/mmH go 2 aTm (a6c.) 450 BT npm 80 K 0,35 BT /M

.erg 1"*

4 44 t" 17 1:

KPMOIEHHOE flABOPATOPHblE rEHEPATOPb1 maigKoro A3OTA

AKTAH npegcTaBnBeT He6onbwme na6oparopHble yCTaHOBKI/1 nonyHeHms4 )104,11K010

a30Ta 113 oKpy*mowero B034yxa:

• 11100143130,1111TerlbHOCTb OT 5 n/cyT. go 120 n/cyT. )1(14,0,K010 a3o -ra;

• CTeneHb 411CTOTb1 — nyHwe Hem 99%, BO3MO)KHO go 99,995%; • 110TIDe6f15eMaR MOLLAHOCTb OT 0,7 go 43 KBT;

• Bo34ywHoe N Bogcmoe oxnaKgeHme;

• Macca OT 160 go 1550 Kr;

• BCTIDOeHH611-4 pe3epByap Ansi >K14,E1K010 npogyKTa OT 28 g0 280 n;

• H143K140 yp0BeHb wyma — meHee 72 gba;

• lionHoc-rbio aaroma -mHecKaB paboTa N ynpaBneHtie;

• B03MCDKHOCTb 14C11011630BaTb KaK CPICTeMy 0>K14)KeH145,1y>Ke OHIALLAeHHOW a3o-ra;

• ManaB 3aHvimaemaB nnowagb — yCTaHOBKa flp0143BOTAI/TellbHOCTbK) 120 n/cy-r. 3aHmmae-r meHee 3 m 2 — n03Bor5eT 14010.11630BaTb yCTaHOBKy B yanoBviqx Fla6OpaT013141-4 WW1 MallblX npommogcTB.

flABOPATOPHblE CliCTEMbl ONODICEH1151 rums' • 1-1130143B0414TellbHOCTb OT 6 n/cyT. g0 21 FI/CyT. )101,4K010 re-1mq,

• Flo-rpe6n5ema5 MOLLIHOCTb OT 8,0,o 16 KBT;

• BoRBHoe oxnaw,geHve;

• BC-1130eHHbliii pe3epByap grm ›Klir4K010 npogyKTa 50 n;

• 110.11HOCTbK) aBTomarkiHecKaB pa6oTa N ynpaBneHme, BO3M0)KHOCTb yganeHHoro ynpaBneHvB

MOHI4T0p14Hia;

• ManaB 3aHvimaema5 nnowagb — n03Bon5eT 14C110.11630BaTb yCTaHOBKy B ycnoemBx

na60pa -ropm4 141114 MallblX npovi3BogcTB.

CPICTEMbl 3AMOP03101, KIMOCTATVIPOBAHMA 11 XPAHEHI*1$1 KPVIOIEHHbIX 11POgYKTOB

Cocygbi Rbloapa gr - I )104111(010 re111451:

o 06beM OT 30 go 1000 11;

o nOTepl/1 Ha vicnapeHvie OT 0,5% go 1,7% B geHb; o ropnoBoHa — cTaH4api -Hbi0 cp.naHeq B 6a30B014 KoHlvirypawnv KF50 go6aanBeT

y1,06OTBa B 14C11011630BaH1414;

o gBo0HaR cocTema npegoxpaHm -renbHbix KnanaHoB yBenoveHHoV

6e3onacHocTA; o BO3MO*Hbl pa3Hbie pa3mepbi 1013.110B14Hbl;

o Ygo6Hasi N HagexcHai yCTaHOBKa N TpaHcnopTvipoma — Koneca vimeloT TOpMO3a, npegycmoTpeHbi cneolanbHbie gepwaTenvi gnci TpaHcnopmpoBKvi

cTaHgap -mbimin norpy34viKamm.

• KIDNOCTaTb1 N Kplioo6opygoBaHme griq Harmbix mccnegoBaHviV;

o TemnepaTypbi /4 4,2 K; o B03MON<HOCTb BcTpafriBaHmi TpexmepHoV Cl4CTeMbl 110314L4NOHI4P0BaHl4g;

o MviKpoKpvoreHHble CMCTeMbl Ha OCHOBe uyiKna CTvipnviHra.

• CACTeMbl 3amop03Kin N xpaHeHvici KO1401-eHHbIX FlpOgyKTOB Ha

OCHOBe cmeceBbix 3aMKHyTbIX KID1401-eHHbIX LI14K110B:

o TeMnepaTypa 3amopo3Kv — go 70 K;

o 11011e3HbIli1 o6beM — go 300 n;

o CTa61,111bHOCTb noggep>KaHvq TeMnepaTypbl no o6beMy —±5 K;

o 11011HOCTb10 aaroma -roHecKaB cincTema ynpaaneHin9 KOHTp0191;

o BurpoeHHaB aBapo0Ha9 cmc -rema noggepKaHmB ycnoBwV

B Kamepe B cnyHae OTKI1H04eHMA aneK -rponwraHvB;

o YganeHHbici KoHTponb/ynpaBneHoe no RS232/485.

42

OBOPYROBAHME HN3KOTEMilEPATYPHblE CNCTEMbl J111001111bH0ii CYWKI1

• CyW1411bHble KaMe0b1 110F1M0yrallbHOL;1 (13013Mbl C C13100HTallbHOM geepbio,

cHa6>KeHHoVi OKHOM — Hav6onee ygo6Has KOHCTpyKLAM1 g.11 ,1 maKcmmanemo none3Horo mcnonb3oB8Hms ecero o6bema;

• BHy-rpm Kamepbi pacnonmeHbi nonKm, Temnepa-rypa KOTO0b1X perynmpye-rcs

npegenax OT -55°C go +70°C;

• O6beM cywmnbHoVi Kamepbi — OT 60 go 600 n;

• O6beM Kamepbi g.1151nbga — OT 6 go 111 11;

• TeMnepaTypa KpmoreHHoM noeywKm -120°C; • Ae-romaTmvecKas cmc-rema 6bic-rpoM pa3M0003Klel C nomouAblo nogagm ropsLiero

ra3a; • AeTomaTmLiecKoe 141114 pr4Hoe ynpaeneHme — BO3MO)KHO KaK pyHHoe ynpaeneHme,

TaK 11 aeToma-rmHecKoe yganeHHoe WfW C 110MOLLUDIO BCTOOeHH010

mmKponpotleccopa, KOTO0bI1i1 o6ecne4meaer B03M0>KHOCTb nporpammmpoeaHms

nO 8 pa3HbIX pe>Kmmoe, 9 cTyneHeO, 999 L1,111C110B;

• KomnaKTHas KoHci-pyKLAms nomonseT 11C11011b30BaTb yCTaHOBKy B yCF10B1,1FIX

na6opa-ropmm 11F111 manor° npomeogcTea.

1-1113KOTEMr1EPATYPHblE MalbITATE/lbHblE KAMEPb1

• WmpoKmii gmana30H pa604mx Temneparyp my-rpm mcnbn-aTenbHoM Kamepbi — OT

-20°C go -165°C 6e3 LICr1011630BaHMF1 WIlAK01-0 a30T8 111114 gpyrmx 3a11MBHbIX

cmc-rem; • BO3M0>KHOCTb KOHT00/11/100BaTb TemnepaTypy B Kamepe C TO4HOCTE40 ±0,5°C;

• HeorpaHmHeHHoe He06xogmmoc-rbio 3a51118101xnagareftroe epems mcnbn-aHmci;

• BbICOK01100113B0gliTeflbHaS1 KpmoreHHas cmc-rema Ha cmecsx —

X0110R01100M3BORMTeflbHCTb 1000 BT;

• BHyTpeHHIIe pa3mepu Kamepu 356x356x660 MM;

• Bonbwas ygo6Has geepb C OKHOM grici 3arpy3Km Tec-rmpyemoro 06beKTa;

• BHy-rpeHHss nogceeTKa KaMepbl;

• KOMIlaKTHafl KOHCTOyKLMS1 r103B01151eT liC11011b30BaTb yCTaHOBKy B ycnoemsx

na60paTopmm mnm manor° npomeogc -rea.

r1P0MblW11EHHblE EIN3KOTEMFIEPATYPHblE 4N11/1EPb1

• VigeanbHbi gns 3ameHbi BORRHbIX cmc-rem B pa3F11,14HbIX cfmnbTpax

floaywKax — MX 1100113BORLiTellbHOCTb W 31:114eKTLIBHOCTb ebipac-raeT

MH01-0KpaTHO;

• gmana30H pa604mx Temneparyp OT +20°C go -120°C;

• 110TOK xnagareHTa — go 28 n/mmH.

• BCTOOOHHbIM Kom- ponnep 06ecne4meae-r ynpaeneHme m 6bicTppo pa3mopo3Ky.

43

onTmy ECKME 050PYLIOBAHME jJ11A 113MEPEH1151 TO/1114101Hb1 rlflEHK11

11 0111WIECKMX CBOACTB

06opygoeaHvie OJ1 v3mepeHmq xaparrepvci - mK TO.111.1414Hbl nneHmi N on -rwHecKvie CB06CTBa ( noKa3arenb npenomneHmq KoacbcfniumeHT nomoLgeHmq). VHc -rpymem-bi: cneK -rpocKonvHecKve pecOneKTomeTpu, moKpocrieKTpocOo -romeTpbi annoncomeTpu friccnegyFur gaHHble xapaKTeplic -rman C BbICOKOL;1 TO4HOCTb10, 6eCKOHTaKTHO. CneK -rpocKonviHecKine annvincome -mbi N cneKTpocKormHecKme pecbneKTomeTpu VIC110.11b3y1OT orynnHecKve MeTORbl, KoTopbie °noel:Aar-m[0T on -mHecKvie • cpm3w4ecKme CBOOCTBa pa3Hbix maTepwanoe TOHK11X IlneHOK, TaK1/X KaK oKcing KpemHfrisi, Hvyrpmg, KpeMH141;1 N ga)Ke meTannwHecKvx nneHoK. ElpvHLAwn 6eCKOHTaKTH01-0 aHanti3a no3eormeT 11C110.11b30BaTb 3T11 flpk160pb1 B HayyHo- occnegoeaTenbmix N flp0113BORCTBeHHbIX na6opaTopffix, gnsi Ha6nlogeHmi OCTpa TOHKI/1X nneHoK V1 npoqeccoe cmet.geHvm B

TOHKLIX nneHKax. inmepeHmq TOM.LAMHbl, o6a meToga nonaraFoTcsi Ha mogenopoeaHine. Boo61ge, annvincome -rpvm gaeT nyywpo TOHHOCTb, Hem peclaneK -romeTpmp npvi TO.11L14V1He nopqp,Ka minKpoHa. grIA 141-11141-101;1 KoHcbvirypapivi annvincomeTpa, maKcvimanbHaq v13mepomasi TO.111.414Ha - HmKe 10 MIAKIDOH. OALHaK0 pecbneKTome -rp mo)KeT v13meperb TO111.1.411Hy noKpbn- vii%i g0 COTH11 MLIKpOH.

IlpmmeHemie: • OnpegeneHtne KoHugH -rpaqvivi cnnaea B pa3rIV14HbIX TOHKVX nnewax, Tone Ge B cnnaee SiGe, Al B nneHKaxAlGaN

• 03mepeHoe cbv3m4ecKoVi TO11111,1Hbl V1 oni- mHecKve CB01;1CTBa 0V15,1 KaKtpro C.110FI B MH01-0C1101;1HOM naKere.

• L/13mepeHme gmaneKTpw-lecKvix KOHCTaHT B TOHKL1X nnemax,110Kpb1T1151X.

CilEKTPOCK0r1W4ECK11171 PEOTIEKTOMETP

MCTOHHPIK Li3nyHeHmq: BbICOKOCTa611.11bHblc114 C gonrwm cpoKom Crly)K6b1

ranoreH FOCTI4IDOBOHHbli-1 CTOIl: amomviHmeebiCi ulnae C flerKLIM no3v1LmoHylpoeaHv1em o6pa3qa no BbICOTe, pa3mep 200 MM X 200 MM flporpammHoe o6ecneHeHvie TFProbe 2.2 CoegmHeHme c KoMnbloTepoM: USB Tonbi w3mepeHvie: TO.1111.411Ha nneman, cneKTp oTpa)KeHvie, vihigeKc npenomneHmi goana3oH g.1111H BOTIH 400 HM — 1100 HM

Pa3Mep nm- Ha 500MKM — 5 MKM

Pa3mep obpaata 200 MM X 200 MM TO111.104Ha 110,W10>KKI/1 TtO 50 MKM

amana3oH mmepeHme TO111.1.1,14Hbl 2OHM - 50MKM 06nac-ni nwimeHemisi: • ElonynpoeogHviKoeaq npombiwneHHocTb

• >KK gocnnew • BmonorviHecoie nnewm Vl marepwanbi

• flaCTbl, mviHepanorvie, Kpacfrifenv, ToHepbi

• (1)apmaL4eeToKa, megmqviHcKvie npv16opb1

alEKTPOCK0i1VILIECKIlii 3,11111111COMETP

• flerKo HacTpaineaembi0

• IlerkVll7 B pa6oTe C fricnonb3oBaHviem nporpammHoro o6ecneHeHmq

• ABTOMaTI1HeCKIA MO*H0 MeHATb nagaroLgv,%i yron CO cTeneHbFo pa3peweHoq

• MOLL4H611;111CTOLIFINK cee -ra DUV-VIS AnA 1/10-10.11630BaHlelg 1.111/1130K010 gmana3oHa HaCTOT

• Tpm ypoeHq H3CTO0f/K11 KoHclovirypaivvi CL/CTeMbl

• 110.11HOCTb10 ae -roma -roHecKaq KanV6poBKa N noc -raHoeKa B mcxogHoe nonoweHine cmc -rembi

• TI/111 inmepeHiN: cneKTp oTpa>KeHmq, nponycKaHvie, TO.1111414Hy nneHKvi, viHgeKc npenomneHoq, oco6eHHbie pa3mepbp

• OCTOHHIIK vi3ny4eHmq:

• - KOM614H14130BaHHEL11%1: gallbHMC1Y(1), B1/1g1,11Mblc1, 6.nyuKHL/0 14K

• gmana3oH 41111H BM-1H 250 HM — 1000 HM

• Pa3mep o6pa3L4a go 300MM B gmamerpe

• gviana3oHmmepqemoiii TO/1LL4I/Mbl: 0 HM-10MKM

44

0.01

06nacni npmmeHemisc • ElonynpoeogHmKoea9 Elp0MbILIHIeHHOCTb

• >KK gmcnneo

• ElneHKm 6vionormHecKvie N maTepvtanbi

• flaCTbl, myHepanorinq, Kpacvn-envi, TOHepb1

• (1)apmagee -rma, megvnvHcKine npv6opbi

• OymumoHanbHbie nneHKvi (M3MC)

• OnnnHecKine noKpbn - ing, Ti02, Si02, Ta205

11P1150Pb1 MMKPOalEKTPOOOTOMETP

MmpocneKTpocpoTomeTp vicnonb3yeTcq, p,11C1 vi3mepeHinsi OFITVIHeCKVIX CBOrICTB TOHKVIX

nneHoK, TO.I1CTbIX nombn- vn) TOTILW4H01,-4 6011bLI.Je MVIKOOHEI. MVIKOOCIleKTpOCIDOTOMeTO

OXBeTblBaeT 0611aCTb OT my6oKo-ynbTpacrivaneToaoro (DUV) go 6.11143K01-0

vHcbpaKpacHoro (NIR) v3nyLieHmq. Vicnonb3oBaHme nporpavimHoro npogyKra TFProbe no3Bon5eT n0nb3oaaTengm B pewvme peanbHoro apemeHv nonyHaTb gaHHue: Ko3c14mmeHT oTpa>KeHviq, Ko3cpcbmqv1eHT nponycKaHvq, aenvyvHy TOTILLI,VIHbl

nombrrvq, noKa3aTenb npenomneHvm. flepvlop o6pa6oTKv cvrHana N BbIB0,0,e Ha 3KpaH COCTeatlFleT mynnviceKyHgbi. B HeKOTOpbIX MOgef1SIX mvKpocneKTpocl)oTomeTpa eCTb B03M0>KHOCTb incanegoaarb KapTy noaepxHocm nneHKm 141114 110Kpb1T145:1, vicnonb3yq MOTOOL430BeHHble IOCTI4p0B04Hble

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Photon Near-Field Profiler Systems

Parameter NFP-VIS NFP-980 NFP-1550 NFP-Pyro

Tester Wavelength Range

400.700nm

<380 optional 700 - 1100nm 1300.1700nm 190nm - >20t.r -

Lens spread function 0 49pm 1 1pm 2 6pm 2 6um

Maximum Source 140pm 14Ou 200pm '4:,- -

Objective focal length 3mm imm 5 tmm 3mrr

Objective Working distance

0 3mrn 0,3mm, 3mm 0 3rnm

Objective Rear Focal Distance 160mm 207mm 160mm

Objective Numerical Aperture 085 085 048 068

Objective Magnification 60.1 60 1 40 1 60 1

NanoScan Model NSSI19/5 NSGE/9/5 NSG'E, r, NSPyro9/5

Aperture size 9mm 9mm 9mm

Slit *vldth 5pm 50M 5j.m Sum

3 Axis Stage Travel

X (Across rail) 13mm micrometer adjust

l'(normal io rail) 6 5mm fine pitch actuator

2 (along rail) 13rnm micrometer adjust

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nocropoHHinx npVMeceV. KpoMe TOM, yvinnepbi cHa6>KeHbi dwribrparnin gnsi 6noKinpoaaHvici nonagamnsi nocropoHHinx npvmecein BHyTpb L11,1Kfla.

X01100,011001,13B0,3,14TallbHOCTb cmc-rem C 3aMKHyTbIM 1.1141(110M — OT 750 BT go 105600 BT ( npvi 16 C, oKpy>KaEoLgasi cpega 32 C).

TexHmvecKme xa aue LICT141%1 cHcrem C 3aMKHyTbIM wacnom Mogen!. OC- 25R 33R 50R 75R 100R 150R 200R 300R 400R 500R 750R 1000R 1500R 2000R 2500R 3000R Xonogo- np0V13BOAVITerlbHOCTb, BT (nom 16C)

750 970 1760 2350 3520 5280 7040 10560 14000 17600 26400 35200 52800 70400 88000 105600

Ilpowaaomirenbilocrb Hacoca, ninom.

6 6 9 15 23 30 30 45 60 75 112 150 225 300 375 450

06-bowl pe3epayapa, n 7,5 7,5 15 15 38 38 54 75 120 120 180 225 375 560 560 750 Macca, Kr 60 80 90 90 180 180 250 273 320 395 460 550 680 1150 1150 1300

CIACTEMA OXTIANMEHI151 C OTKPbITbIM LitiKflOM (OPEN LOOP)

ancTema oxnawgeHmq C OTKpb1TbIM 014KFI0M (open loop) vicnanb3yercq B cnyyae, Korga y nonb3oaaTerm ywe eCTb pe3epayap gng oxna>KgaKxge(4" wingKocro N Hacoc RFIA 06ecneHeHinq ee peuvpKyncluviv mewgy pe3epayapom N 0 oxnawgaembim o6beKrom. Livinnep o6ecne4maaer oxna>K,geHine wingKocrvi B 3TOM peaepayape, opraHm3yq ee peuinpKynquinio c 1-10MOLLAbK) C06CTBeHH010 Hacoca. Cvcrema mower 6blTb cHa6>KeHa BCTpOeHHbIM KoHrponnepom TemnepaTypbi oxnawgalow,eCt N<V1AKOCT14, no3Bonszi[oulein ynpaansrrb ee TemnepaTypoi,i C TOHHOCTbE0 ±0,3 C, 6noKom ynpaaneHinq FIOTOKOM oxnawgalowein wingKocrin, ycraHaaninaaa.onct Havi6onee 0171 ,1MaJlbHblVi 110TOK C 1.1e.111.HD

o6ecneyeHosR oraoRa Heo6xogvmoro KonvHecTaa Tenna 1,4 3KOHOM141,1 oneKTpoaHeprow, a TaK?Ke Heo6xogymbimo cincTemamin 6.110KV1p0BK1,1 N CV11Haf1143aL.1141,1 B cnyHae HecooTaeTc -ravisi ycnoavin aKcnnyarawnin pa6o4vim Tpe6oBaHinFim. KpoMe TO1O, incnapinTenb meal - nerKo pa36opHylo KOHCTpyKL114[0 TATIFI o6neryeHmq ero OHI4CTKVI B npinno>KeHinqx, rge OXIIWK,E1a1-01.48A >i<HRKOCTb mower 6bITb 3arpci3HeHa.

54

Kopnyc 414nilepa autaxgaembra

obbewr 6notc

11 PETY1111POBAHMS1 TEMflEPATYPbI KoHTaK -rmpytou.Ime C oxnamcgatoweCI )404gKOCT61-0 sewec -rBa — Hepwaselowas

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nocTopowmx npmmeceiA. KpoMe Toro, Hmnnepbi cHa6>KeHbi cpmnbrpamm gns 6nomposaHms nonagaHms nocTopommx npmmeceiA BHyTpb w/Kna. Xonogonpom3sogmTenbHocTb cmdTem C OTKpbITbIM LIMK.110M — OT 750 BT go 105600 BT ( npm 16 C, oKpywarowas cpega 32 C).

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Pe3epeyap noftecearensi

Mogenb OC- 25R0 33R0 50R0 75R0 100RO 150R0 200R0 300R0 400R0 500R0 750R0 1000R0 1500R0 2000R0 2500R0 3000R0 Xonogo- npommElogwrenb-HOCTb, BT (npm 16C)

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6 6 9 15 23 30 30 45 60 75 112 150 225 300 375 450

Macca, Kr 68 68 90 90 135 160 250 273 320 395 460 550 680 1150 1150 1300

CMCTEMA OXJ1AWAEH1151 1101-PYWHOr0 TIMM (DROP-IN SYSTEM)

Cmorema norpywHoro Tina cKoHurpymposaHa TaKVIM o6pa3om, 4TO6b1

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55

Pe3epayap nonh3ooarenn

C, oKpy)KaKmgas cpega 32 C).

0

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56

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57

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Ay, noon NW, KF ISO CF (DelSeal CF) ANSI ASA JIS VG

Tim ynnomeHme BVITOH, eaKyymHaR pe3vnia Megb BIITOH, eaKyymHasi pe3inHa

10 NW10 KF10 - - - -

16 NW16 KF16

- CF1 1/3" CF1,33" DN16CF

- -

25 NW25 KF25

- CF2 1/8" - -

40 NW40 KF40

-

CF2 3/4" CF2,75" DN40CF DN35CF

- VG40

50 NW50 KF50

- CF3 3/8" CF3,375"

- VG50

63 - IS063

ISO NW63

CF4 IA" CF4,5"

DN63CF ANSI ASA 2 VG65

80 - IS080

ISO NW80 CF4 5/8" CF4,625"

ANSI ASA 3 VG80

100 - IS0100

ISO NW100 CF6"

DN100CF ANSI ASA 4 VG100

160 - IS0160

ISO NW160

CF8"

DN160CF DN150CF

ANSI ASA 6 VG150

200 - IS0200

ISO NW200 CF10"

DN200CF ANSI ASA 8 VG200

250 - IS0250

ISO NW250 CF12"

DN250CF ANSI ASA 10 VG250

320 - IS0320

ISO NW320 CF14"

DN320CF ANSI ASA 10

(12) VG300

400 ISO400 - ANSI ASA 16 VG400

500 - ISO500 - ANSI ASA 20 VG500

630 - IS0630 - - VG600

800 - ISO800 - - VG750

1000 - ISO1000 - ANSI ASA 35 VG900

1250 - IS01250 - ANSI ASA 53 -

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