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Nippon Steel Chemical Co.,Ltd. ポリイミドの接着特性とその制御 ポリイミドの接着特性とその制御 新日鐵化学㈱ 新日鐵化学㈱ ○湯浅正敏 和田幸裕 ○湯浅正敏 和田幸裕

ポリイミドの接着特性とその制御 - nscc.nssmc.com · Nippon Steel Chemical Co.,Ltd. ポリイミドの接着特性とその制御 新日鐵化学㈱ 湯浅正敏 和田幸裕

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  • Nippon Steel Chemical Co.,Ltd.

  • Nippon Steel Chemical Co.,Ltd.

    //

  • Nippon Steel Chemical Co.,Ltd.

    (A)

    (B)

    (C)

  • Nippon Steel Chemical Co.,Ltd.

  • Nippon Steel Chemical Co.,Ltd.

  • Nippon Steel Chemical Co.,Ltd.

    200

    0 100 200 300

    T g

    PIPBIPBO

    300

    400

    500

    400

    T

    d

  • Nippon Steel Chemical Co.,Ltd.

  • Nippon Steel Chemical Co.,Ltd.

    N N O

    O

    O

    O

    O

    N N

    O

    O

    O

    O

    N N

    OO

    O

    O

    O

    O

    O

    N N

    O

    O O

    O O

    NC

    CF3

    CF3

    N

    O

    O

    O

    O

    O C

    CF3

    CF3

    O

    N N

    OO

    O O

    O O O

    N N O O

    O

    O

    O

    O

    N N

    O

    O

    O

    O

    O C

    CH3

    CH3

    C

    CH3

    CH3

    O

    Sky Bond

    LARC-TPI

    LARC-CPI

    NR-150

    AURUM

    KAPTON

    UPILEX

  • Nippon Steel Chemical Co.,Ltd.

  • Nippon Steel Chemical Co.,Ltd.

    Si OH2C SiCH3CH3

    CH2O SiCH3

    CH3Ar1 N

    O

    O

    NAr2

    O

    Ar1 N

    O

    O

    N

    O

    OO

    3 3lx

    yCH3CH3

    1) 2)1) 2)

    Ar1 Ar2 : Aromatic structure

    1)N. Furukawa, M. Yuasa, F. Omori and Y. Yamada, J. Adhesion, 59 (1996) 281 .2)N. Furukawa, M. Yuasa, J. Adhesion Society .Japan., 33(2), (1997) 63 .

  • Nippon Steel Chemical Co.,Ltd.

    1.0

    (kgf/mm2)

    (1MHz)

    (wt%)

    Film

    .. ..

    ..

    Poor Good

    Poor Good

    Virnish Poor Exellent

    ..

  • Nippon Steel Chemical Co.,Ltd.

    SPISPI

    Poly amic acid

    at 25 in NMP / Xylen

    Solution imidization at 160in NMP / Xylen

    Aromatic carboxlic dianhydride

    Aromatic diamine

    SPIsolution

    Si OH2C Si

    CH3CH3

    CH2 NH2O Si

    CH3

    CH3

    3lCH3CH3

    H2N 3

    Cast on glass plate and dry at 100Heat at 150

    SPISPI--A,BA,Bfilmsfilms

  • Nippon Steel Chemical Co.,Ltd.

    SLSS(Mpa)Initial (F.M)*1

    SLSS(Mpa)Initial (F.M)

    - 0 28.4 (co) 12.7 (co)10 28.9 (co) 29.4 (co)20 18.1 (co/ad) 9.8 (ad)30 14.2 (co/ad) 4.9 (ad)10 28.6 (co)20 20.2 (co/ad)30 6.5 (ad)

    Siloxanecontent(wt%)

    Mw ofSiloxanediamine

    SPI (Type A) SPI (Type B )

    750

    1200

    SPISPI))

    Table 2Single lap shear strength of SPI at initial

    Single lap shear strength(SLSS) (JIS K 6850)

    Adhesive filmSteel (JIS G 3141)

    Bonding pressure:196MpaBonding temperature:Tg + 50

    *1 Fracture mode of SPI films (co:cohesive, ad:adhesive)

  • Nippon Steel Chemical Co.,Ltd.

    Fig.2Fig.2Relationship between the content of Relationship between the content of Siloxane diamineSiloxane diamine and and TgTg , Tensile modulus of SPI, Tensile modulus of SPI

    0

    50

    100

    150

    200

    250

    0 10 20 300

    10

    20

    30

    40

    Tg(

    )

    Tens

    ile m

    odul

    us (M

    pa)

    Siloxane content (%)

    Tg

    SPISPI--

  • Nippon Steel Chemical Co.,Ltd.

    SPISPI--

    4

    6

    8

    10

    12

    14

    0 2 4 6 8 10Ar sputtering time (min)

    Rel

    ativ

    e pe

    ak a

    rea

    of S

    i (%

    )

    750-15wt% (4.6%)

    750-30wt% (8.6%)

    1200-30wt% (9.6%)Siloxane

    Fig.3 Results of XPS analysis of SPI filmsFig.3 Results of XPS analysis of SPI films

    (Ar sputtering rate : 30-40 /min)

    (Si bulk %)

    Si

    2020wtwt

  • Nippon Steel Chemical Co.,Ltd.

    SLSS(Mpa)After treatment*1 (F.M)

    SLSS(Mpa)initial

    - 0 17.6 (co) 28.410 28.0 (co/ad) 28.920 13.7 (co/ad) 18.130 7.8 (ad) 14.210 27.2 (co) 28.620 4.3 (ad) 20.230 1.5 (ad) 6.5

    SPI (Type A)

    1200

    Siloxanecontent(wt%)

    Mw ofSiloxanediamine

    750

    SPISPI))

    Table 3Single lap shear strength of SPI after treatment

    *1 After 72hr at 25, 90%RH(JIS K 6856)

  • Nippon Steel Chemical Co.,Ltd.

    SPISPI--22

    Siloxanecontent(wt%)

    Mw ofSiloxanediamine

    Moisturesorption(wt%)

    WVPC*1Retention ofSLSS (%)*2

    0 - 0.6 0.4 66

    750

  • Nippon Steel Chemical Co.,Ltd.

    PolysiloxanePolysiloxane contentcontent

    (Surface tension)

    Elastic propertyFluidity (Viscosity)

    (stress relaxation)

    Lap shear strength

    Surface Property

    Sing

    le la

    p sh

    ear

    stre

    ngth

    Sing

    le la

    p sh

    ear

    stre

    ngth

  • Nippon Steel Chemical Co.,Ltd.

    //

  • Nippon Steel Chemical Co.,Ltd.

    Si OH2C SiCH3CH3

    CH2O SiCH3

    CH3Ar1 N

    O

    O

    NAr2

    O

    Ar1 N

    O

    O

    N

    O

    OO

    3 3lx

    yCH3

    Functional groupFunctional group

    -)

    1)M.Yuasa,et al., J.Photopolym. Sci. Technol., Vol.16, No.2,227-232 (2003).

  • Nippon Steel Chemical Co.,Ltd.

    SiCH3

    OH2C SiCH3

    CH3CH3CH2O Si

    CH3O Si

    CH3

    CH3Ar1 N

    O

    O

    NAr2

    O

    O

    Ar1 N

    O

    O

    N

    O

    O

    3 3l mx y

    HC CH2VmPI

    Si-(OCH2CH3)2HCH3

    / H2PtCl6

    SiCH3

    OH2C SiCH3

    CH3CH3CH2O Si

    CH3O Si

    CH3

    CH3Ar1 N

    O

    O

    NAr2

    O

    O

    Ar1 N

    O

    O

    N

    O

    O

    3 3l mx y

    CH2CH2SiH3C (OCH2CH3)2SSmmPIPI

    DEMS

  • Nippon Steel Chemical Co.,Ltd.

    SmPI

    SiCH3

    OH2C SiCH3

    CH3CH3CH2O Si

    CH3O Si

    CH3

    CH3Ar1 N

    O

    O

    NAr2

    O

    O

    Ar1 N

    O

    O

    N

    O

    O

    3 3l mx y

    CH2CH2SiH3C (OCH2CH3)2

    SmPIH2O

    CH3CH2OH

    SiCH3

    OH2C SiCH3

    CH3CH3CH2O Si

    CH3O Si

    CH3

    CH3CH2

    Ar1 N

    O

    O

    SiCH3

    OH2C SiCH3

    CH3CH3CH2O Si

    CH2O Si

    CH3

    CH3CH3

    Ar1 N

    O

    O

    CH2

    CH2

    NAr2

    O

    O

    Ar1 N

    O

    O

    N

    O

    O

    NAr2

    O

    O

    Ar1 N

    O

    O

    N

    O

    O

    3 3l mx y

    3 3l mx y

    SiOSi

    H3C

    CH3O

    O

    CC--SSmmPIPI

  • Nippon Steel Chemical Co.,Ltd.

    Table 5 Solubility of VmPI and C-SmPI films

    Polymer DEMS 1)(wt%) (mol/mol) NMP THF CHCL3

    V2PI-10 V2PSX 10 - S S SCC--SS22PIPI--1010--22 10 2.0 ISIS ISIS ISISV2PI-30 30 - S S SCC--SS22PIPI--3030--22 30 2.0 ISIS ISIS ISISV2PI-50 50 - S S SCC--SS2PIPI--5050--22 50 2.0 ISIS ISIS ISISV4PI-30 V4PSX 30 - S S SCC--SS4PIPI--3030--11 30 1.0 ISIS ISIS ISISV4PI-50 50 - S S SCC--SS44PIPI--5050--11 50 1.0 ISIS ISIS ISIS

    Polysiloxane Solvent solubility 2)

    1) DEMS=[DEMS (mol)] / [Vinyl group (mol)].]

    2) S : Soluble, IS : Insoluble

  • Nippon Steel Chemical Co.,Ltd.

    Fig. 4 Temperature-dependent changes in storage modulus(E)and loss modulus (E) of the polyimide film of V4PI-30 and C-S4PI-30-1.

    DMA

    0.0001

    0.001

    0.01

    0.1

    1

    10

    -200 -100 0 100 200 300 400Temperature ()

    V4PI-30

    C-S4PI-30-10

    E, E

    (G

    Pa)

  • Nippon Steel Chemical Co.,Ltd.

    Table 6 Thermal and mechanical property of VmPI and C-SmPI films

    TMA

    a) Thermal deformation temperature determined by TMAb) Determined by TMA (Temperature range; 50-100)c) Determined by TMA (Temperature range; Thd-Thd+50)

    Polymer Thda)

    1b)

    2c) Tensile

    modulusTensile

    strength() (ppm/) (ppm/) (Gpa) (Mpa)

    V2PI-10 192 116 >5000 2.62 79.4C-S2PI-10-2 199 130 23002300 2.65 83.3V2PI-30 150 155 >5000 1.17 41.2C-S2PI-30-2 158 132 601601 1.23 35.3V2PI-50 98 204 >5000 0.35 11.8C-S2PI-50-2 100 189 354354 0.610.61 23.523.5V4PI-30 154 105 >5000 1.22 47C-S4PI-30-1 156 109 740 1.35 50V4PI-50 97 201 >5000 0.36 11.8C-S4PI-50-1 102 185 348348 0.590.59 27.427.4

    1

    2

    Thd

  • Nippon Steel Chemical Co.,Ltd.

    1) mol%= [H2O (mol)]/[DEMS(mol)]2) Determined by TMA (Temperature range; 50-100)3) Determined by TMA (Temperature range; Thd-Thd+50)4) Caluculted from Monny-Revins equation

    Table 7 Effect of water addition on the thermal properties of C-SmPI films.

    Polymer Amount of H2O1)

    12)

    23) Cross linking

    density4)

    (mol%) (ppm/) (ppm/) (10-3 mol/cm3 )C-S4PI-30-2 0 105 740 0.40C-S4PI-30-2' 20 109 243243 0.890.89

    C-S4PI-30-5 0 109 362 0.61C-S4PI-30-5' 20 106 161161 1.661.66

    C-S4PI-30-10 0 106 250 1.10C-S4PI-30-10' 20 115 108108 1.681.68

  • Nippon Steel Chemical Co.,Ltd.

    Test condition : 250Test condition : 250, 100hr, 100hr Test condition : 25Test condition : 25, 95%RH, 72hr, 95%RH, 72hr

    Figure 5 Adhesive property of VmPI and C-SmPI on glass after treatment (a) V2PI-10,(b)S2PI-10-2, (c)S2PI-10-5, (d) S2PI-30-2, (e)S2PI-30-5

    0

    20

    40

    60

    80

    100

    ( a ) ( b ) ( c ) ( d ) ( e )

    Res

    udur

    e (%

    )

    0

    20

    40

    60

    80

    100

    120

    ( a ) ( b ) ( c ) ( d ) ( e )R

    esud

    ure

    (%)

  • Nippon Steel Chemical Co.,Ltd.

    SmPISilicate compound /H2O

    -HOR

    SiCH3

    OH2C SiCH3

    CH3CH3CH2O Si

    CH3O Si

    CH3

    CH3CH2

    Ar1 N

    O

    O

    SiCH3

    OH2C SiCH3

    CH3CH3CH2O Si

    CH2O Si

    CH3

    CH3CH3

    Ar1 N

    O

    O

    CH2Si

    O

    Si

    H3C

    O

    O

    CH2

    Si

    Si

    NAr2

    O

    O

    Ar1 N

    O

    O

    N

    O

    O

    NAr2

    O

    O

    Ar1 N

    O

    O

    N

    O

    O

    3 3l mx y

    3 3l mx y

    OO

    OO

    OSiO

    O

    SiOO

    O

    CH3

    SiO O

    O

    Si

    O

    Si

    O

    O

    O

    Si

    O

    O OO

    Si OO

    SiO

    OO

    Si OO

    Si(OR)4

    PolyimidePolyimide--siloxanesiloxane //Silica hybrid materialsSilica hybrid materials

  • Nippon Steel Chemical Co.,Ltd.

    Material Polymer(2.0g)TEOS(mmol) Transparency

    ( a ) S4PI-50-2 - TransparentTransparent( b ) S4PI-50-2 0.7 TransparentTransparent( c ) S4PI-50-2 2.0 TransparentTransparent( d ) S4PI-50-2 3.3 TransparentTransparent( e ) V4PI-50 3.3 Opaque

    SPI/Silica hybrid film

  • Nippon Steel Chemical Co.,Ltd.

    SPI/Silica hybrid films

    Temperature /0.0001

    0.001

    0.01

    0.1

    1

    10

    -100 0 100 200 300

    E

    , E

    / GPa

    ( b )( d )

    Material Polymer (2.0g) TEOS (mmol)

    ( a ) S4PI-50-2 0.0S4PI-50-2 0.7S4PI-50-2 3.3

    ---100 0 100 200 3000.0001

    0.001

    0.01

    0.1

    1

    10

    tan

    Temperature /

  • Nippon Steel Chemical Co.,Ltd.

    --//

    X O

    N

    O

    NR

    R

    BXZ)BXZ) 1)1)

    TdTdTgTg

    1)T.Takeichi, R.Zeidam, T. Agag, Polymer, Vol.43, 45(2002) .

    OH

    N

    R

    OH

    X X

    N

    R

    OHOH n

    ((

    SPISPI

  • Nippon Steel Chemical Co.,Ltd.

    BXZBXZSPISPI

    X OHHO

    R-NH2X O

    N

    O

    NR

    R

    HCOH

    100120

    X=SPI/BXZSPI/BXZ

    SPIsolution

    Cast on glass plate and dryed at 100 Heated at 150

    BXZ

    SPI/BXZSPI/BXZfilmsfilms

    BXZBXZ

    BXZ-x

    CCH3

    CH3CH2 S O

    y:80%

  • Nippon Steel Chemical Co.,Ltd.

    SPI/BXZSPI/BXZ

    Fig.6 Glass transition temperature of SPI/BXZ filmsFig.6 Glass transition temperature of SPI/BXZ films

    020406080

    100120140160180200

    0 10 20 30 40BXZ content (wt%)

    Tg

    ()

    200Cure

    150Cure

    C O

    N

    O

    N

    CH3

    CH3

    BXZ-C(CH3)2

    OH

    N

    Ph

    OH

    C C

    N

    Ph

    OHOH

    H3C CH3 H3C CH3

    n

    >150

  • Nippon Steel Chemical Co.,Ltd.

    SPI/BXZSPI/BXZ

    BXZ-C(CH3)2

    Fig.7 Single lap shear strength of SPI/BXZ filmsFig.7 Single lap shear strength of SPI/BXZ films

    C O

    N

    O

    N

    CH3

    CH3

    02468

    101214161820

    0 10 20 30 40BXZ content (wt%)

    SLSS

    (Mpa

    )

    Single lap shear strength(SLSS) (JIS K 6850)

    Adhesive filmSteel (JIS G 3141)

    Bonding pressure:196MpaBonding temperature:Tg + 50

  • Nippon Steel Chemical Co.,Ltd.

    SPI/BXZSPI/BXZ

    SLSS

    (Mpa

    )

    BXZ-X(30wt%)

    Fig.8 Single lap shear strength of SPI/BXZ filmsFig.8 Single lap shear strength of SPI/BXZ films

    X ON

    O

    N

    0

    2

    4

    6

    8

    10

    12

    14

    16

    18

    20

    non CH2 S - O