3D

4B 951520 4B 951546

WiiWii3D2D3D3D

3D3D3D2D3D3D3D

3D

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3D

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3D3D2D3D3DWindows VISTA3D3D3D2D3D2D3D

micro-electro-mechanical systems, MEMSInvenSenseITG-3200MEMS()3D

1.(XY)2.(XY)3.(XY)4.(XY)5. (Z)Z6. (Z)Z

3D3DWII SEGA 35EA 09ATARI Crashday

3D3D3D2000/sec(full scale range)0.03/s/Hz10,000g3D3D3DInvenSenseITG-3200MEMS3DXYZ

2D3D3D3D

micro-electro-mechanical systems, MEMSMEMS MEMS

ITG-3200[4]InvenSenseITG-3200MEMS(XpitchYrollZyaw)3D

ITG-3200ITG-320050%(4x4x0.9mm QFN)67%ITG-3200InvenSenseUS$3InvenSenseNasiri-FabricationInvenSense68ITG-3200CMOSInvenSenseITG-3200InvenSense

ITG MEMS(zero rate offset shift)/(ADC)MEMS(4x4x0.9mm)ITG-3200MEMS16-bit/(ADC)ITG-3200I2C(Fast Mode I2C)ITG-32002010

micro-electro-mechanical systems, MEMS[5] Nasiri-Fabrication [6]Nasiri-FabricationInvenSenseMEMSNasiriCMOSMEMSMEMSCMOS

1.3D[] http://nctur.lib.nctu.edu.tw/handle/987654321/99872. http://ntur.lib.ntu.edu.tw/handle/246246/575763.http://web1.nsc.gov.tw/ct.aspx?xItem=9562&ctNode=40&mp=14.InvenSenseMEMShttp://www.eettaiwan.com/ART_8800587967_480502_NP_704c0678.HTM5.http://zh.wikipedia.org/zh-tw/%E5%BE%AE%E6%A9%9F%E9%9B%BB%E7%B3%BB%E7%B5%B1()6.MEMSNasiri Fabricationhttp://www.eefocus.com/user111313/blog/09-03/167167_c5358.html