Upload
hoangxuyen
View
217
Download
4
Embed Size (px)
Citation preview
ASM(J) Eagle XP – CVD350August 2014
ASM(J) Eagle XP - 3D model top/ right side view
GLOBALFOUNDRIES 2
ASM(J) Eagle XP - Top view
GLOBALFOUNDRIES 3
ASM(J) Eagle XP - Split unit view
GLOBALFOUNDRIES 4
ASM(J) Eagle XP - precursor vessels drawing
Here: VOL.=1.3 LITERS
GLOBALFOUNDRIES 5
ASM(J) Eagle XP – gas schematic drawing reactor 3
GLOBALFOUNDRIES 6
ASM(J) Eagle XP – gas schematic drawing reactor 4
GLOBALFOUNDRIES 7
ASM(J) Eagle XP – clean room front view picture
GLOBALFOUNDRIES 8
ASM(J) Eagle XP – clean room left side view picture
GLOBALFOUNDRIES 9