Microsoft PowerPoint - Ch11_Metallization.pptAl•Cu USG
W
Metal:
3
5

• _______________
6



1.6 µ⋅cm 1.7 µ⋅cm Gold silver 2.2 µ⋅cm 2.65 µ⋅cm
1970
4
7

Al-Cu (0.5%)

Ar

- V

10




t w I L
I V, : R = V/I = ρL/(wt) , L = w, R = ρ/t = Rs Rs: (/ )
7
13

Ti (______)
PSG
RF
, 2 WF6 + 3 Si -> 2 W (s) + 3 SiF4 WF6 + 3 H2 -> W (s) + 6 HF
18




FSG Cu