半導體生產自動化與

智慧工廠

UMC/IT 王邦明

5/22/2012

P. 2

半導體產業資訊系統

半導體生產自動化系統

半導體智慧工廠的需求

半導體智慧工廠的新挑戰

Contents

EQ Online

Equipment Automation

APC FDC RCMS/

ECMS

Transport Automation

Interbay/Intrabay & STK

FOUP/

ID

MCS/

RMS Sorter

Manufacturing Execution System

SPC RTD WFA

Manufacturing Execution

Infrastructure

Network

Hardware

Service

Software

Service

Planning

Applications

MRP

Fab

Scheduling

Fab

Planning

Supply Chain

Planning

Strategic

Planning

Enterprise

Applications

ERP

CRM

EIS/CIS

Portal/KM

e-Business

Production Data Warehouse

EDA AMAS Reporting

Production Information

Information System of Foundry

Office

Automation

E-Procurement

E-HR

P. 4

半導體產業資訊系統

半導體生產自動化系統

半導體智慧工廠的需求

半導體智慧工廠的新挑戰

Contents

Production Automation Introduction

to replace all human operations and decisions by

means of computer hardware and software.

to develop intelligent systems which can simplify

human works.

Major Benefits: 1. Eliminate the human operation cost in Fab

2. Increasing the throughput and reducing cycle-

time

3. Help yield control and advanced process

development

4. Support more flexible and complex

manufacturing operations

5. Optimizing and standardizing business process

to reducing waste and miss-operation

Production Automation Scope

Operation Automation

Replace Human Efforts

=>Reduce HR Cost, Reduce M/O,

Improve CT, Improve Productivity,

Increase MM ratio

Engineering Automation

Support Engineer do job better and

smarter

=>Sustain EQ variance, Improve

quality, Yield, Support RD, Reduce

Engineering Cost, Improve Time-to-

Market

EAP (Eqp Automation Program)

Equipment

CIM System Overview

MCS (Material Control System)

EQ

Intrabay Interbay

Sto

cker

EQ

EQ

EQ

EQ

EQ

EQ

EQ

Sto

cker

Sto

cker

Sto

cker

Sto

cker

Sto

cker

MES (Manufacturing Execution System)

Continuous

Loader

Views

Views

Views Views

eFAB

Reports

Reports Reports

EDA

Loader

EDA GUI

SDB (Summarized

Database)

MES DB

EDA (Klarity

ACE XP)

RCMS (Recipe Ctrl Mgmt)

FDC (Fault Detection

& Classfication)

APC (Advance Process Ctrl)

SPC RTD (Dispatching &

u-Scheduling)

AM (Activity manager)

Operation Automation

Job Prep. (Lot selection)

Transfer Lot

To Eq. Job In

Activate

Process

Data

Collection Job Out

Transfer Lot

To next Dest.

Verify Eq. &

Lot Status

Semi-Auto

Auto-2

Auto-3

Definition of Automation Modes

Job Prep. Transfer

Lot to Eq.

Verify

Eq&Lot

Status

Job In Start

Process

Data

Collection

Job Out Transfer

Lot to next

Dest.

Manual Mode Human Human Human Human Human Human Human Human

Semi-Auto Mode Human Human System System System System System Human

Full Auto-2 Mode Human System System System System System System System

Full Auto-3 Mode System System System System System System System System

OHT (Intrabay) Stocker

Interbay rail

1FL

2FL

3FL

OHB (Overhead Buffer)

Automatic Material Handing System

Engineering Automation

Automatic Engineering System

EDA

Offline

Historical

Engineering Data

Analysis

SPC Product

SPC

Monitor SPC

WAT SPC

EQ SPC

FE SPC

Process Control

via past data

Online

Equipment Automation Avoid Human MO

APC

CMP

APC

PH APC

ETCH

APC

Process Control

via previous

processed results

FDC

Micro-view

Historical Analysis

Real time

In site Control

Intelligent Factory

Very high use of APC and Yield systems

Manufacturing Execution Systems

Some Wafer Level Tracking &

Recipe/Parameter Changes

100% AMHS

Storage and

Intrabay Transport

Systems in place

Equipment Performance

Tracking (EPT) Data

Syste

ms S

cale

d

for

> 1

00k

Aggressive focus

on lot cycle time

reduction

All lots and wafers

tracked and processed

using the MES Some use of

E-Diagnostics

Data

SPC R2R FDC

Yield PCS EPT

APC, Yield, and E-Manufacturing

Capabilities (EEC)

Recipes

E-Diag

On-line Equipment Control Systems

Partner, Customer

Or Supplier

High product mix

operations enabled

using automation

FOUP carrier

tracking using ID

tags at load ports

Pervasive use of Standards for

carriers, equipment interfaces,

and software systems

Factory Scheduler And Material Control

Most equipment data feed through SECS/GEM & IF/A communications

Achievement of FAB automation Today

P. 15

半導體智慧工廠的新挑戰

Contents

P. 16

Predicable PM

Virtual metrology

Waste Time reduction

Material consumption

Intelligent Data mining

半導體智慧工廠的新挑戰

Q&A

P. 17