회 사 소 개 서

C F O

국내영업팀

해외영업팀

영업관리팀

파주사무소

오창사무소

재무/회계팀

구매/자재팀

총무/공무팀

품질관리팀

기술팀(C/S)

생산팀

생산관리팀

설계팀

개발팀

영업본부 경영지원 기술본부 부설연구소

Organization Structure

C E O

Leading Company

Product Leadership

혁신 중심 기업 문화 ☞ 최고의 인재 육성 ☞ 고객 중심의 Process ☞ 최상의 서비스 제공

Competitiveness &

Profitability

World Best 경쟁력 ☞ 사람의 경쟁력 ☞ 기술의 경쟁력 ☞ Cost 의 경쟁력

Vision

Global 초우량 기업 실현

기술

혁신 인재

A/S 가격

Target & Vision

경기도

오창/구미

광주

LG Innotek.

KEC. LG Siltron.

EpiValley.

Heesung Electronics.

Samsung CII

LG Innotek.

THELEDS.

Kodenshi AUK

LG Innotek.

Seoul OptoDivice.

KANC R&D Center.

THELEDS. Fairchild.

Galaxia Photonics.

SKC Solmics.

Business Area

Japan

China

Taiwan

Singapore

Malaysia

Europe TOSHIBA. SANYO. SHARP. FUJI

ELPIDA. ASMC. SMIC. CSMC

WINTECH. HANSTAR. STM

Globalfoundries

Business Area_Overseas

Lift-off/ Auto Wet Station/ Probe&Sorter

Plating/ Etch System/ Mask Rinse

Track System/ Chemical Supply System

DNS/ SES Wet Station/ OKAMOTO/ DISCO

Business Item

1. Application

- Wafer : 2”~6”Inch T : 300um~1,000um

- Application metal : Au, Cr, Cu, W, Ni, Al, Ti, Mo

2. Main Features

- Soaking(Dip) Chamber

- Chemical Process Chamber

- Point Vacuum Chuck

- Chemical recycle

- Auto Transfer System

1. Application

- Wafer : 2~6Inch

- Sorting Bin : 150Bin

2. Main Features

- Tact Time : 0.18sec/prober , 0.13sec/sorter

- Sorting Accuracy : ±10um

- Alignment Time : 1 min

- Throughput : 20,000 Chip/Hr

Product Intro_Ⅰ

LIFT-OFF

Prober & Sorter

1. Application

- Au, Ni, Cu Electric Plating System

- 5~8” Wafer 6Amount

2. Main Features

- Batch Process (Through put)

- PLC Control System

- Flow-rate by Inverter

- Circulation & Temp Control

- Auto Moving Type (Product)

1. Application

- 6~12” Silicon Wafer

- Auto / Semi-Auto / Manual

- Cassette or Cassette-less

2. Main Features

- Circulation & Filtering/ -Pre Diff / Metal / Photo

- Post Diff / PR Strip / Dummy / -Processing Scheduler

3. Refurbishing & Modify

- DNS FS820L/ WS820L/ WS625

- SES PHY / PEGASUS / -Other (Kaijo / CFM…)

Product Intro_Ⅱ

Plating Equipment

Wet Clean/ Etch Station

1. Application

- 6”X6”, 7”X7”, 9”X9”, 14”X14” Multi Type

- Acetone Bath – D.I Rinse - Spin Dry Module

2. Main Features

- Batch Process (Through put)

- PLC Control System

- Manual Damper (Fire Extinguisher : Auto Damper)

- Chemical : Canister CDA Pumping Type(Single Tank)

- Option : Fire Extinguisher/ Hot DI Unit/ FFU

- Foot Print : 1500(W) X 1000(D) X 1800(H)

Product Intro_Ⅲ

Dip & Spin Mask Cleaner

1. Application

- Canister 20 Set

2. Main Features

- Conveyor Moving System

- PLC Control System

- Chemical : R. G. B

- Load Cell, Max. 50 kgf

- 6260(W) x 3820(D) x 2100(H)

Canister Filling System

Product Intro_Ⅳ

Multi Chemical Supply Tube Stocker Pre Mixing Unit Organic Supply System

Chemical Dispense Unit Part Stocker Develop

Chamber

Canister Supply Unit

Multi Loader Tube Cleaner FC Cleaner DEV Dilution System

LIFT-OFF

LIFT-OFF(2”~6”)

Lay-out 2020(W) x 1120(D) x 2010(H)

POS 1 L/D &

UL/D

2”Inch 2 Cassette / 4” & 6”Inch 1Cassette

Triple Arm

POS 2 DIP Bath RT ~ 80±3℃, Up-Down Lifting, Ultra Sonic,

Agitation

EKC,

LGE-102

Acetone

POS 3 SPIN 1 RT ~ 80±3℃, High Pressure Pump,

Mesh Filter 5㎛ & 1㎛, Chemical Recycle

Acetone

Methanol

POS 4 SPIN 2 RT ~ 80±3℃, High Pressure Pump,

Mesh Filter 5㎛ & 1㎛, Chemical Recycle

Acetone

Methanol

POS 5 SPIN 3 Spin Dry, Front & Back Rinse IPA, DIW

ELEC.

POWER MAIN 3Ø, 220V±10%, 75A, 60Hz, R,S,T,N,G

Other Safety Fire Extinguisher, Temp Sensor, Safety Interlocks

LIFT-

OFF

Wet Station

Auto ACID Wet Station (2”~6”)

Lay-out 5960(W) x 1750(D) x 2355(H)

POS 1 L/D L/D(2Cassette 3Port)

POS 2 SPM 120±3℃, Quartz Bath, Pump, Damper, Filter 0.1㎛,

Cooling Tank, Concentration

H₂SO₄+

H₂O₂

POS 3 H.QDR 60~75±3℃, Quartz Bath, Jet Supply, Quick Drain,

Shower, Bubble

POS 4 BOE 23±1℃, PTFE Bath, Pump, Damper, Filter 0.1㎛,

Heating Exchanger

POS 5 O/R RT, PVDF Bath, Sink, Drain

POS 6 HCL RT, Quartz Bath, Pump, Damper HCL+DIW

POS 7 QDR RT, Quartz Bath, Sink, Drain

POS 8 F/R RT, Quartz Bath, Resist, Meter

POS 9 DRYER Spin Dryer or Apet Dryer

POS 10 UL/D UL/D(2Cassette 3Port)

ELEC.

POWER

MAIN

UPS 3Ø, 220V, 150A/ 3Ø, 220V, 75A

Wet Station

Wet Station

Wet

Station

Auto PEC Wet Station (2”~6”)

Lay-out 4600(W) x 1860(D) x 2355(H)

POS 1 L/D L/D(1Cassette 3Port)

POS 2 Pre QDR RT, Pump, Damper, Filter 1㎛, Overflow, N2 Bubble, Spray Shower

POS 3 PEC RT, Teflon Bath, UV System, Clean Unit, Concentration , Filter 0.1㎛

NaOH+

H₂O₂+DIW

POS 4 QDR RT, Quartz Bath, Sink, Drain

POS 5 F/R RT, Quartz Bath, Resist, Meter

POS 6 DRYER Spin Dryer or Apet Dryer

POS 7 UL/D UL/D(1Cassette 3Port)

ELEC.

POWER

MAIN

UPS 3Ø, 220V, 150A/ 3Ø, 220V, 75A

Auto Cu/Ni Plating System

Auto Plating System

Auto Plating System

Lay-out 2030(W) x 4570(D) x 2500(H)

POS 1 L/D & UL/D 2 Cassette Loading ( 25 Slot)

POS 2 Robot 2 Arm Rotation Robot RND社

POS 3 Align 1 Unit/ CCD Camera Align/ X, Y, θ Axis RND社

POS 4 전처리 3 Unit/ DI Clean & N2 Dry

POS 5 Cu Plating 4 Unit

POS 6 Ni Plating 2 Unit

POS 7 Clean &

Dry 2 Unit/ DI Clean & N2 Dry

ELEC.

POWER

MAIN

UPS 3￠ 220V 150A

Option : Host On-Line

Process Load Align Pre treatment Cu Clean Ni Clean & Dry

Unload

Canister Filling System

Canister Filling

System

Canister Filling System

Lay-out 6260(W) x 3820(D) x 2100(H)

POS 1 L/D Conveyor 2 Conveyor(20 Slot)

POS 2 Air Blowing Max. 500 mm/sec Grip Chuck Uni, Aligner System

POS 3 Rotating Unit Turning Module, AC Servo Motor

POS 4 Canister Moving

Unit Max. 1000 mm/sec, AC Servo Motor

POS 5 CR Filling Unit Load Cell/ Max. 50 kgf CAS

POS 6 UL/D Conveyor 2 Conveyor

ELEC.

POWER

MAIN

UPS

3Ø, 220V, 50A/ 60Hz

3Ø, 220V, 3W

Probe & Sorter System

Probe &

Sorter

Probe & Sorter

Lay-out 2200(W) x 2000(D) x 1750(H)

Model APS-1P-1S

Wafer Size Up to 6"

Chip Size 250 ㎛ ~ 1000 ㎛

POS 1 Loading Elevator Hoop ring on Metal Plate (10ea Cassette)

POS 2 Wafer Loading Robot with two Arm

POS 3 Probe Stage Unit 4 CH Tester

Porous Vacuum Chuck (TTV < 10 ㎛ )

POS 4 Camera &

Detector Unit LE-5400 (Built-In Cooling System)

POS 5 Sorter Buffer Unit Multi Collet (10~12ea)

0.13 sec/chip / 27700 chips/Hr

POS 6 Unloading

Elevator Unit Hoop Ring on Metal Plate (10ea Cassette)

POS 7 Program Visual Basic 6 with PC Control Type

ELEC.

POWER MAIN 3Ø, 220V, 50A/ 60Hz

Double Side Scrubber

Double Side Scrubber

Double Side Scrubber

Lay-out 1300(W) x 1200(D) x 1900(H)

POS 1 L/D Unit 1 Cassette (25 Slot)

POS 2 Transfer Robot Dual Arm Type, 360° Rotation

POS 3 DBC

(Double Brush Chamber)

PVA Roll Brush, AC Speed Control Motor Wafer Edge Mechanical Grip

POS 4

DTC

(Double Brush Chamber)

SUS Bowl Type, AC Servo Motor 200W Max. 3000RPM±1%

POS 5 UL/D Unit 1 Cassette (25 Slot)

ELEC.

POWER MAIN 1Ø, 220V, 50A/ 60Hz, 5KVA

CERTIFICATIONS

PATENTS

03

Nikon Stepper & Scanner

GNT 04

AMAT Sputter & CVD

Russell 05

Dry & Turbo Pump Repair

IVAC

KRC 회원사 [Korea Refurbishment Consortium]

08

TEL/ KE Furnace

GST 06

AMAT / LAM Dry Etch

Garam 07

Varian Implanter

Global ENG

01

Buy & Sell, Management

CNDsemi

ㄹ

10

Back Grinder / E-Beam

Trissystem 09

Valve Repair

SunRin

02

Wet/ DNS Clean Track

SFE

11

TEL Clean Track

TS ENG

Thank You