Catalog No.16025(5)

SpaceTrac SER I ES


SpaceT rac SMR
XYZ


SMR Sphe r i ca l l y Moun ted Re t ro re f l e c to r
1

SpaceT rac SMR SMR XYZ 3000 SMR
SpaceTrac
SpaceTrac
2
CASE
01



3
CASE
02

Z


4
CASE
03


5
CASE
04
CASE
05





SpaceT rac






SMR



6
STRUCTURE S M R
He -Ne IFM
ADM
SMR
7



SMR ±12. μm ±2. μm 1 .50 .8750 .5 3
8 .2 kg 9 .8 kg
640°138°
8
LINE-UP

SpaceT rac -A I

SpaceT rac -AP/A


SpaceT rac -A I SpaceT rac -AP SpaceT rac -A
I FM / ADM ADM
640°±320° −59° +79° 40 m/100 m/160 m 50 m/80 m 50 m
*1 *2 ±10 μ m+5 μ m/m ±15 μ m+5 μ m/m 3 .5 μ m/m
*2
ADM ±10 μm 0.7 μm/m
±15 μ m 0 .7 μ m/m
8 .2 kg 9 .8 kg
*1ASME B89.4.19-2006ScaleBar *2MPE
JIS C 6802 2 2
SpaceT rac -A I SpaceT rac -AP/A
0.4 mW(peak) 633 nm He-Ne Laser 0.3 mW(peak) 1550 nm Semiconductor Laser
0.3 mW(peak) 635 nm Semiconductor Laser 0.3 mW(peak) 1550 nm Semiconductor Laser
9
U P





Po l yWorks ® | I n spec to r™





SMR 1040 mm 1450 mm 400 mm
vProbe vP rove


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