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清華大學電機系 金雅琴 Introduction To CMOS Image Sensor Design

Introduction To CMOS Image Sensor Designccf.ee.ntu.edu.tw/~ypchiou/Intro_EO/CMOS_Image_Sensor.pdf · 2 CCD vs. CMOS • Charge-Coupled Device Image Sensor – Higher Quality – Lower

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  • Introduction ToCMOS Image Sensor Design

  • 2

    CCD vs. CMOS

    Charge-Coupled Device Image Sensor Higher Quality Lower Dark Current Lower Noise Higher Dynamic Range (because of higher VDD)

    CMOS image sensor Easier to Integrate with Periphery Lower Power Dissipation Higher Speed (Higher Frame Rate)

  • 3

    Outline

    Introduction Basic Architecture Photo-Sensing Operation Design Characteristics

    Logarithmic Sensor High Dynamic-Range Sensor Digital Pixel Sensor (DPS)

  • 4

    Architecture Of CMOS Image Sensor

    imagesensorarray

    CDS(correlated double sampling)

    Multiplexor

    Analog-to-DigitalConverter

    decoderand

    controller

    8-bit digital outputclock enable

    pixel

  • 5

    Resolution

    Resolution CIF (352x288 ~ 10 ), VGA (640x480 ~ 30 ) SVGA (800x600 ~ 48 ), XGA (1024x768 ~ 79 )

    Typical pixel size 0.35 m process (7.5mx7.5m) 0.25 m process (5mx5m) 0.18 m process (3mx3m)

  • 6

    3-Transistor Sensor Cell

    Operation of a cell (1) Reset (2) Integration

    CDS

    MUX

    ADC

    Con.

    A sensor cell

    reset

    RS

    columnline

    sourcefollowerVDD VDD

    RS: row select

    photodiode

    X

    Iph

  • 7

    The Operation Of A Cell

    XReset

    Time1 ms

    weak illumination

    strongerillumination

    Voltageat

    node X

    AB

    CD

    E

    integration time

  • 8

    Photo-Electrical Characteristic

    Illumination (Lux)

    analogoutput

    after CDS(volt)

    1

    1.2

    1.4

    1.6

    1.8

    2.0

    Saturation region

    5000 2500010000 20000150000

    DR: Dynamic Range

    Linearregion

  • 9

    Scanning Operation

    CDS

    MUX

    ADC

    Con.

    Row 1

    Row 2

    Row 3

    Last row

    ..

    .

    Integration time

    Reset Signal For Each Row

  • 10

    Sensor Characteristics

    Quality ofCMOS Image Sensor

    ResolutionPixel TypePixel SizeFill Factor

    ADC overhead

    Q.E.(Quantum Efficiency)

    Conversion Gain

    Configuration Responsivity TransferFunction Noise

    SensitivitySaturation LevelDynamic Range

    Dark SignalTemporal noise

    Fixed-Pattern Noise

  • 11

    Pixel Layout

    PhotodiodePhotodiode

    ResetReset

    VddVdd OutputOutput

    nn++

    P-substrate is grounded

    FOXFOX FOXFOX

    A A

    Reset-Ring isolates diode from FOX Helps reduce the dark current

    Cross-Sectional ViewTop View

    X

    x

    RSRS

  • 12

    Fill Factor

    The ratio between the light sensitive pixel area and the total pixel area.

    Total pixel area:5m x 5m

    Fill factor 40%

    PhotoSensing

    Area

  • 13

    Signal Path: Light To Digital Code

    reset

    columnline

    VDD VDD

    X

    n+n+

    P-substrate

    Light Source (Lux)

    Electrons

    Analog Voltage (V)

    Digital Code (8-bit)

    Quantum Efficiency(e- / photon)

    Conversion Gain

    Analog-To-Digital Conversion

    RS

  • 14

    Sensor Characteristics

    Quality ofCMOS Image Sensor

    ResolutionPixel TypePixel SizeFill Factor

    ADC overhead

    Q.E.(Quantum Efficiency)

    Conversion Gain

    Configuration Responsivity TransferFunction Noise

    SensitivitySaturation LevelDynamic Range

    Dark SignalTemporal noise

    Fixed-Pattern Noise

  • 15

    Sensitivity

    V

    Reset

    Output

    Tint Light intensity (lx)

    Volta

    ge D

    rop

    (V/s

    )Slope = sensitivity

    ( V / lx-s)

    Sensitivity is the ratio of voltage response to the photo energy illuminated.

  • 16

    Dark Current

    Dark current is the photo-detector leakage current under no illumination.

    Dark signalResetReset

    OutputOutput

    TTintint

    nn++LOCOSLOCOS

    pp--subsub

  • 17

    Noise of CMOS Imager

    Temporal noise : Thermal noise ~ reset, readout. Shot noise, 1/f noise ~ integration. Substrate noise ~ readout.

    Spatial noise : Fixed pattern noise ~ process non-uniformity.

  • 18

    Fixed-Pattern Noise

    FPN is the spatial variations at pixel outputs Due to the device parameter variations (non-uniformity)

    Pixel FPNPixel FPN Column FPNColumn FPN

  • 19

    Cell Array and CDS

    reset

    RS

    CDS CDS CDS CDS

    Column-parallel Correlated Double Sampling (CDS) Circuitry

  • 20

    CDS (Correlated Double Sampling)

    Goal: To eliminate the Fixed-Pattern Noise (FPN) due to pixel mismatch

    time

    voltage

    integration phaseReset

    Vx

    V = Vx Vreset V = 0 Vreset Vx

    pixeloutput

    CDSoutput

    SH SEL

    CLC2

    C1 resetRSCLSH

    vreset

  • 21

    CCD vs. CMOS

    Charge-Coupled Device Image Sensor Higher Quality Lower Dark Current Lower Noise Higher Dynamic Range (because of higher VDD)

    CMOS image sensor Easier to Integrate with Periphery Lower Power Dissipation Higher Speed (Higher Frame Rate)

  • 22

    Optimization of Transfer Curve

    (Step 1) Logarithmic Output Response (Step 2) Dynamic Range Enhancement

    Illumination (Lux)

    Output(volt)

    enhanceresponse

    underlow-light

    Illumination (Lux)

    Output(volt)

  • 23

    Logarithmic Sensor (1/2)

  • 24

    Logarithmic Sensor (2/2)

    Linear ADC multi-resolution ADC

  • 25

    Optimization Of Transfer Curve

    (Step 1) Logarithmic Output Response (Step 2) Dynamic Range Enhancement

    Illumination (Lux)

    Output(volt)

    enhanceresponse

    underhigh-light

    Illumination (Lux)

    Output(volt)

    higherdynamic

    range

  • 26

    High Dynamic-Range Image

    Original High-Dynamic-Range

  • 27

    Outline

    Introduction Logarithmic Sensor

    Logarithmic Sensor Cell Multi-Resolution ADC

    High Dynamic-Range Sensor Digital Pixel Sensor (DPS)

  • 28

    Logarithmic Sensor Cell

    columnline

    photodiode

    X

    VDD VDD

    Iph

    Circled transistor is in sub-threshold region:

    Vx = VDD ln (Iph/I0)

    Main Problems:(1) mismatches harder to resolve(2) small output swing

  • 29

    Low-Cost Nearly Logarithmic Sensor

    (1) Pixel-Level Logarithm much larger pixel(2) Chip-Level Logarithm via multi-resolution ADC

    Illumination (Lux)

    CDS output code

    Illumination (Lux)

    x =

    outputcode

    analog inputto ADC

    255

  • 30

    Multi-Resolution ADC

    Linear ADC

    Multi-Resolution ADC

  • 31

    Spectrum of ADC

    Speed

    Accuracy

    integrating

    SuccessiveApproximation

    Flash ADC,Pipelined ADC

    8~10 bits

    3 M-sample/s

  • 32

    The Problem of ADC

    Digital Code0 1684 12

    Input: Given an analog voltage, say 0.35Output: What is the digital output code?

    Analog Voltage

    0 V 1 V0.5 V0.25 V 0.75 V

    0.35 V

  • 33

    Successive Approximation (SA)

    Narrow down the possible code ranges step-by-step

    0 V 1 V0.5 V0.25 V 0.75 V

    0 V 1 V0.5 V0.25 V 0.75 V

    0 V 1 V0.5 V0.25 V 0.75 V

    0 V 1 V0.5 V0.25 V 0.75 V

    Output bit

    D3=0

    D2=1

    D1=0

    D0=1

    Final output code for 0.35 V is D3 D2 D1 D0 = 0101

    pivot

    pivot

    pivot0.35

    0.35

    0.35

    0.35

    pivot

  • 34

    Naive Architecture

    com-parator

    10-bitDAC

    S/H

    clk

    Vin

    controllogic

    10-bitSAR

    clk

    Linear ADC

    10-bitcode

    8-bit

    10-bit

    1024 x 8mapping

    table

    Table lookup

    8-bitcode

    AnalogPivot Voltage

  • 35

    Interleaved Architecture

    com-parator

    10-bitDAC

    S/Hclk

    Vin

    controllogic

    8-bitSAR

    clk

    256 x 10mapping

    table8-bitcode

    Advantages:(1) conversion time is reduced from 11 to 9 cycles(2) table size is reduced to ~ 1/4

    8-bit

    10-bit

  • 36

    Modified Successive Approximation

    Digital Code

    Analog Pivot Value012

    6

    345

    7

    0.5V (110)2

    1st pivot

    3rd pivot2nd pivot

    8

    1 V

    0.5V

  • 37

    Chip Layout

    CDSBuf

    Periphery

    Con-troller

    176 x 144 SensorArray

    ADCBIST

    BIST: Built-In Self-Test

  • 38

    Outline

    Introduction Logarithmic Sensor High Dynamic-Range Sensor

    (1) Well Capacity Adjusting (2) Conditional Reset (3) Two-Frame Composition

    Digital Pixel Sensor (DPS)

  • 39

    A High Dynamic-Range Sensor Cell

    Vout

    Ref: Steven Decker et. al., A 256x256 CMOS Imaging Array WithWide Dynamic Range Pixels and Column-Parallel Digital Output,

    IEEE Journal of Solid-State Circuits, Vol. 33, No. 12, Dec. 1998.

    ColumnlineVDD VDD

    Iph

    X

    RS

    ChargeSense

    Diffusion

    b(t)v1

    High Dynamic Range is achieved by dynamic reset

  • 40

    Cross-Section View

    n+ n+ n+ n+n+

    photo-diode

    chargespill gate

    lateraloverflow gate

    chargesense

    Diffusion

    VDD

    rowselect

    columnoutput

    p-substrate

    (1) Rest is now called lateral overflow gate(2) Another charge spill gate is added

  • 41

    Well Capacity Adjusting (WCA)

    n+ n+ n+ n+n+ VDD

    Cross-Section

    0V

    5V

    potential

    1V

    b(t)

    Spill gate

    Overflowgate

    drain

    The well capacity at is controlled by b(t)

  • 42

    Transfer Function of WCA

    Overflow barrier

    time Light illumination

    Charge atsense diffusion

    x

    time

    b(t)

    Control Signalb(t)

  • 43

    Outline

    Introduction Logarithmic Sensor High Dynamic-Range Sensor

    (1) Well Capacity Adjusting (2) Conditional Reset (3) Two-Frame Composition

    Digital Pixel Sensor (DPS)

  • 44

    Conditional Reset

    Ref: Sung-Hyun Yang, Kyoung-Rok Cho, High Dynamic Range CMOS Image Sensor with Conditional Reset. IEEE 2002.

    High Dynamic Range was achieved by (1) Multiple Sampling (2) Conditional Reset

    x

    A pixel is reset again wheneverits value is lower than a referencevoltage at certain sample points.

    x

  • 45

    A Sensor Cell with Conditional Reset

    Light

    VDD

    RowSelect

    C-Reset(Vsample > Vref)

    ColumnLine

    VDDPixel

    Reset

    The pixel is conditionally reset whenC-reset and Row-Select are both on

  • 46

    Extend Dynamic Range By N Times

    T 2T 4T 8T

    Integrationtime

    I2I4I8I

    PixelVoltage

    1st 2nd 4th

    3T 5T 6T 7T

    Normal integration period is 8T

    Information to be recorded: The first conditional reset.

    3rd 5th 6th 8th7th

  • 47

    Examples: Pixel Response

    Integrationtime

    PixelVoltage

    Integrationtime

    PixelVoltage

    Vref

    Vref

    T 2T 4T 8T3T 5T 6T 7T

    T 2T 4T 8T3T 5T 6T 7T

    Final output = (V1) * 8/2 = 4V1

    V1

    Final output = (V2) * 8/2 = 4V2

    V2

  • 48

    Outline

    Introduction Logarithmic Sensor High Dynamic-Range Sensor

    (1) Well Capacity Adjusting (2) Conditional Reset (3) Two-Frame Composition

    Digital Pixel Sensor (DPS)

  • 49

    Effect of Integration Time

    Light intensity

    Pixe

    l out

    put

    Curve 1: (longer integration time)

    Curve 2: (shorter integration time)

    DR of curve 2

    DR of curve 1

    DR: dynamic range

  • 50

    Logarithmic Responses

    Light intensity

    Pixe

    l out

    put

    Low-Frame

    High-Frame

  • 51

    Two-Frame Composition

    An Image is composed of two frames Low Frame (focuses on low-light part) High Frame (focuses high-light part)

    Low-frame value x High-frame value y

    + =

    Final value z

    Sensitive to dark objectsAnd also responsive to bright objects

    Sensitive to dark objects Responsive to bright object

  • 52

    Composition Rule

    Low-frame value x High-frame value y

    + =

    Final value z

    Composition Rule y81x

    87z +=

    Low-frame hi0 255

    Code Range Distribution

    223

  • 53

    Composite Image

    Ref: O. Schrey, J. Huppertz, G. Filimonovie, A. Bumann, W. Brockherde, B.J. Hosticka A 1k x 1k High Dynamic Range CMOS Image Sensor with on-chip Programmable Region-of-Interest readout. IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 37, NO. 7, JULY 2002.

    High-frameLow-frame Composed

  • 54

    Outline

    Introduction Logarithmic Sensor High Dynamic-Range Sensor Digital Pixel Sensor (DPS)

  • 55

    Digital Pixel Sensor (DPS)

    Granularity of ADC Chip Level Column Level Pixel Level, (I.e., one ADC per pixel)

    Digital Pixel Sensor Digital Pixel Output Snap-shot image acquisition (High Speed) Scalable Lower Power Immune to the read-out noise (or column FPN)

    ADC 8-bitmemory

    Digital Pixel

    DigitalOutput

  • 56

    Pixel Schematic for DPS

    * 3.3V thick-oxidetransistors

    storage

    Stuart Kleinfelder, SukHwan Lim, Xinqiao Liu, and Abbas El Gamal, A 10000 Frames/sCMOS Digital Pixel Sensor, IEEE Journal of Solid-State, Vol. 36, pp. 2049-2059, Dec. 2001.

  • 57

    Low-Cost ADC

    Counter value is loaded into memorywhen ramp meets pixel value

    Pixel value

  • 58

    Operation Sequences

    Reset Integrate ADC Read

    Single Sampling:

    Reset Integrate ADC Read

    Digital Correlated Double Sampling:

    ADC Read

    Multiple Sampling (To Enhance Dynamic Range):

    Reset Integrate ADC ReadADC ReadIntegrate

    Integrate ADC ReadADC ReadIntegraten

  • 59

    Effect of Digital CDS

    Fixed-Pattern Noise

    Without Digital CDS With Digital CDS

    The integration time is set to 1 ms

  • 60

    Characteristics Of A DPS Chip

    nMOS Photo-GatePhoto-Detector

    37No. of Transistors/Pixel

    3.8 millionNumber of Transistors

    64-bit (167MHz)Readout Architecture

    > 1.33 GB/sMax Output Data Rate

    > 10,000 frames/sMax. Frame Rate

    15%Sensor Fill Factor

    9.4 x 9.4 umPixel Size

    > 1 G-pixels/sMax. Pixel Rate

    352 x 288 pixels (CIF)Array Size

    5x5 mmDie Size

    0.18um 5-metal CMOSTechnology

  • 61

    Conclusions

    CIS (CMOS Image Sensor) over CCD Ease of integration with periphery Lower power dissipation

    CIS Optimization Just like human eyes Logarithmic Sensitivity High Dynamic Range (50dB 70dB 90dB) Low-Noise and High Speed via DPS