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Jon Chang
May. 2005 P. 1
製造執行系統製造執行系統Manufacturing Execution System : MES Manufacturing Execution System : MES
製造執行系統製造執行系統Manufacturing Execution System : MES Manufacturing Execution System : MES
Jon Chang
May. 2005 P. 2
Outline
產業 Operation
產業 e 化架構 Manufacturing Sequence Flow
Why MES (factory operation point of view)
Why MES (Industry point of view)
MES 定義 MES 功能 MES 架構 MES 技術 MES 與其它 e 化系統的整合
Jon Chang
May. 2005 P. 3
產業活動
策略規劃
品
質
工
程
行 銷
工程與研發 生產規劃
廠區控制
(生產)工廠自動化
維修與服務
行政支援與管理
配 送
Jon Chang
May. 2005 P. 4
Outline
產業 Operation
產業 e 化架構 Manufacturing Sequence Flow
Why MES (factory operation point of view)
Why MES (Industry point of view)
MES 定義 MES 功能 MES 架構 MES 技術 MES 與其它 e 化系統的整合
Jon Chang
May. 2005 P. 5
產業電子化活動
供 應 商 之供 應 商 供 應 商 顧 客 之
顧 客顧 客主 企 業
採 購 生 產 配 銷 採 購 生 產 配 銷 採 購 生 產 配 銷
工 程 研 發工 程 研 發 工 程 研 發
行 政 支 援行 政 支 援 行 政 支 援
營 業營 業 營 業
Jon Chang
May. 2005 P. 6
電子化應用系統 (I)
供 應 商 之供 應 商 供 應 商 顧 客 之
顧 客顧 客主 企 業
MESPES/CSM SCM PES/CSM MES SCM MESPES/CSM SCM
CE/PDMCE/PDM CE/PDM
ERPERP ERP
EC/QREC/QR EC/QR
Jon Chang
May. 2005 P. 7
電子化應用系統 (II)
S u p p ly C h a in M a n a g e m e n t (S C M )
ProcurementExecutionSystem(PES)
Enterprise Information Management (PIM)C o m p o n e n t &
S u p p lie rM a n a g e m e n t
(C S M )
P r o d u c t D a taM a n a g e m e n t
(P D M )
E n te r p r iseD o c u m e n t
M a n a g e m e n t(E D M )
Engineering
CAD CAE CAPP
Manufacturing
CAM MES MCS
Q u ic kR e sp o n se
(Q R )
e -C o m m e r c e(E C )
C u sto m e rR e la tio n
M a n a g e m e n t(C R M )
E n te r p r ise R e so u r c e P la n n in g(E R P )
Q u ic kR e sp o n se
(Q R )
e -C o m m e r c e(E C )
C u sto m e rR e la tio n
M a n a g e m e n t(C R M )
K n o w led g e M a n a g em en t
。
Jon Chang
May. 2005 P. 8
供應鏈管理供應鏈管理SCMSCM
顧客關係管理顧客關係管理CRMCRM
企業智財 BIC /
企業資源規劃企業資源規劃ERPERP
EC Platform / WEB Application Server/ Application ServerEC Platform / WEB Application Server/ Application Server電子商務平台電子商務平台 // 網站應用程式伺服軟體網站應用程式伺服軟體 // 應用程式伺服軟體應用程式伺服軟體
基礎發展環境基礎發展環境
供應面 需求面知識管理 KM
工程資料管理工程資料管理PDMPDM
工程資料管理工程資料管理PDMPDM
製造執行系統製造執行系統MESMES
製造執行系統製造執行系統MESMES
電子化應用系統 (III)
Jon Chang
May. 2005 P. 9
Outline
產業 Operation
產業 e 化架構 Manufacturing Sequence Flow
Why MES (factory operation point of view)
Why MES (Industry point of view)
MES 定義 MES 功能 MES 架構 MES 技術 MES 與其它 e 化系統的整合
Jon Chang
May. 2005 P. 10
What is IC industry
Jon Chang
May. 2005 P. 11
IC Manufacturing Process (I)
Poly
P Substrate
Pwell
NAPT
Nwell
PAPT
VTP
Poly
PSD NSD NSD NSDPSD PSD
W W WWILD
Trench oxide
IMD-1
W W W W
Metal-1
Metal-2
Poly
P Substrate
Pwell
NAPT
Nwell
PAPT
VTP
Poly
PSD NSD NSD NSDPSD PSD
W W WWILD
Trench oxide
IMD-1
W W W W
Metal-1
Metal-2
Jon Chang
May. 2005 P. 12
IC Manufacturing Process (II)
黃光
薄膜
蝕刻植入
光阻去除
流程 說明 圖釋薄膜 (Thin_film)1. 化學氣相沉積 (CVD)2. 金屬濺鍍 (PVD)3. 擴散 (Diffusion)
黃光 (PHOTO)1. 光罩 (MASK)2. 光阻 (Coater)3. 曝光 (Exposure)4. 顯影 (Development)
蝕刻 (ETCH)1. 濕蝕刻 (Wet-ETCH)2. 乾蝕刻 (DRY-ETCH)
光阻去除 (PR remove)將光阻去除後就是我們所需的圖形 (PATTERN)
FILMWafer
Wafer
FILMWafer
光阻FILMWafer
光阻FILMWafer
光罩
Jon Chang
May. 2005 P. 13
IC Manufacturing Process (III)
HDP PSG
SiN 300A
W-Plug
FSG 1.7KA (2.9KA)
SiN 500A
SiN 300A
M1 (Cu) M1 (2.6K)
M2 (Cu) M2 (3.5K)
FSG 4.9KA
FSG 2.3KA (4.2KA)
Via1
STI
SiN 500A
SiN 300A
M3 (Cu) M3 (3.5K)
FSG 4.9KA
FSG 2.3KA (4.2KA)
Via2
SiN 500A
SiN 300A
M8 (Cu) M8 (9K)
USG 7.2KA
USG 7.5KA (9.9KA)
Via7
SiN 300AFSG 2.3KA (4.2KA)
SiN 500A
SiN 750A
M7 (3.5K)
5.5KA600A
900A
1200A
900A
AlCu 12KA
PESiN 6KAPEOX 4KA
4KA
SiN 400A
(IMD7=6.5KA)for V7=0.36*0.36
(IMD1~6=4.5KA)
Jon Chang
May. 2005 P. 14
IC Manufacturing Process (IV)
Jon Chang
May. 2005 P. 15
Outline
產業 Operation
產業 e 化架構 Manufacturing Sequence Flow
Why MES (factory operation point of view)
Why MES (Industry point of view)
MES 定義 MES 功能 MES 架構 MES 技術 MES 與其它 e 化系統的整合
Jon Chang
May. 2005 P. 16
IC Manufacturing Process Management (1)
整合4M (Man, Machine, Material and Method) 以最短的時間及最少的成本產出最好品質的產品. Cost Cycle Time Yield Productivity
Jon Chang
May. 2005 P. 17
IC Manufacturing Process Management (2)
There are 30-50 basic routes for production FAB
There are 500-1000 product routes in one FAB
There are 3000 tools monitoring routes in one FAB
There are 500-1000 production tools in one FAB
There are 1K wafers start in one FAB
There are daily 80K track-in-out in one FAB
There are daily 15M transactions in one FAB
There are average daily 600 people operation in one FAB
There are daily 1-2K tool monitoring operation in one FAB
There are average 10K control/dummy wafers in one FAB
There are average 14K SPC charts used in one FAB
There are 20K real-time tool monitoring charts in one FAB
There are average 4000 tool alarms in one FAB
There are average 2K final wafer test data files generated
Jon Chang
May. 2005 P. 18
Human Tool Material
TechnologyQualityKnowledge
IC Manufacturing Process Management (3)
Why we need MES ? More technologies More tighten process control More cost for any production lost More demand for cycle time management More automation operation is required
Jon Chang
May. 2005 P. 19
IC Manufacturing Process Management (4)
Sec. Min. Day MonthHour
Die
Site
Wafer
Resolution
CP
WAT
DefectScan
SPC
IM
FDC
Insp.
Lot
Real-timeReal-timeReal-timeReal-time
300mm
Sec. Min. Day MonthHour
Die
Site
Wafer
Resolution
CP
WAT
DefectScan
SPC
IM
FDC
Insp.
Lot
Real-timeReal-timeReal-timeReal-time
300mm
Human Dispatching
Human DecisionRTD dispatching
Auto DecisionRTD dispatching
Lot BaseDSA
DSA
CLIP KSR
DSA
SPC
300mm
Human Dispatching
Human DecisionRTD dispatching
Auto DecisionRTD dispatching
Lot BaseDSA
DSA
CLIP KSR
DSA
SPC
Human Dispatching
Human DecisionRTD dispatching
Auto DecisionRTD dispatching
Lot BaseDSA
DSA
CLIP KSR
DSA
SPC
300mm
Jon Chang
May. 2005 P. 20
Outline
產業 Operation
產業 e 化架構 Manufacturing Sequence Flow
Why MES (factory operation point of view)
Why MES (Industry point of view)
MES 定義 MES 功能 MES 架構 MES 技術 MES 與其它 e 化系統的整合
Jon Chang
May. 2005 P. 21
IC Manufacturing Process Management (4)
Quick Response to Business Change
Cycle
Jon Chang
May. 2005 P. 22
Complexity ManagementRapid changes to business needs and demands.
Increasing process and product complexity.
Larger wafers and carriers.
Increased reliance on factory information and control systems.
Factory and Process OptimizationIncreased customer expectation to meet on time deliver.
Increased urgency for improved factory effectiveness.
High factory yield at start-up.
Reduce wafer and product costs.
Extendibility, Flexibility and ScalabilityReuse of factory information and control systems.
Factory systems that support rapid process and technology changes.
Semiconductor challenge in ITRSSemiconductor challenge in ITRS
[Source : ITRS 2003]
Jon Chang
May. 2005 P. 23
Cost per unit area of silicon—Manufacturing cost per unit area of silicon is a easure of productivity. The capital cost of a factory has grown significantly each year, from $50M US in the 1980s to over $3B US in 2003.2
Time to ramp a factory to high-volume production with high yields—Decreasing time to ramp a factory to high volume production and high yield has more economic impact than reducing operating costs. New factories must be built and ramped to mature production at a much faster rate as reflected in Tables 86 and 89. Existing factories must be upgraded faster without impacting ongoing production.
Increasing flexibility to accommodate technology and business changes—Technology advances and the globalization of manufacturing enterprises have led to a decrease in cost for electronic components. This enables new markets to open and creates the need to increase the pace of new product introduction. The flexibility to accommodate these changes in business expectations must improve without significant cost impacts.
Improvement for Semiconductor challenge in ITRSImprovement for Semiconductor challenge in ITRS
Jon Chang
May. 2005 P. 24
KPI in ITRS – Factory OperationKPI in ITRS – Factory Operation
[Source : ITRS 2003]
Jon Chang
May. 2005 P. 25
KPI in ITRS – Production EquipmentKPI in ITRS – Production Equipment
[Source : ITRS 2003]
Jon Chang
May. 2005 P. 26
KPI in ITRS – FICSKPI in ITRS – FICS
[Source : ITRS 2003]
Jon Chang
May. 2005 P. 27
KPI in ITRS – FacilityKPI in ITRS – Facility
[Source : ITRS 2003]
Jon Chang
May. 2005 P. 28
KPI in ITRS – MetrologyKPI in ITRS – Metrology
[Source : ITRS 2003]
Jon Chang
May. 2005 P. 29
KPI in ITRS – Process IntegrationKPI in ITRS – Process Integration
Jon Chang
May. 2005 P. 30
KPI in ITRS – Yield LearningKPI in ITRS – Yield Learning
[Source : ITRS 2003]
Jon Chang
May. 2005 P. 31
KPI in ITRS – Yield EnhancementKPI in ITRS – Yield Enhancement
[Source : ITRS 2003]
Jon Chang
May. 2005 P. 32
Outline
產業 Operation
產業 e 化架構 Manufacturing Sequence Flow
Why MES (factory operation point of view)
Why MES (Industry point of view)
MES 定義 MES 功能 MES 架構 MES 技術 MES 與其它 e 化系統的整合
Jon Chang
May. 2005 P. 33
MES
Jon Chang
May. 2005 P. 34
manufacturing execution system: Software systems designed to integrate with enterprise systems to enhance the shop floor control functionality that is usually inadequate in ERP systems. MES provides for shop floor scheduling, production and labor reporting, integration with computerized manufacturing systems such as automatic data collection and computerized machinery.
MES is a term used to describe systems that track and manage all aspects of a job in real time while it is in the execution phase or in process It may include resource management, capacity scheduling, maintenance management, statistical quality control, laboratory information management, process management, data collection, plant wide document management and process optimisation. MES is focused on the short term and may link to ERP/MRPII software for higher level planning and control tasks.
Enables network managers to gather control data from the shop floor into coherent and relevant information. Key functions include data acquisition, dispatching, document control, scheduling, resource allocation, product history, operational analysis, and management of labor, maintenance, processes, and quality.
製造執行系統是一從接到訂單從事生產開始到產品完成,傳送產品在生產線上生產的即時資訊 給使用者監看。它將工廠生產的即時和準確資料回應於報表或其他方式上,呈現的結果會隨著 現在情況的不同迅速改變,其目的在於降低沒有附加價值的活動,如機台當機等,並提高有效 的生產。 MES 可以將讓產品準時交貨,提高庫存週轉率,增加總生產盈餘,和加速資金的流動, 當生產活動發生緊急事件時,他還提供現場緊急狀態的資訊,並可經由兩條以上的管道通知使用者
MES definition
Jon Chang
May. 2005 P. 35
MES History
1960 年代的晚期到 1970 年代初期
從會計系統衍生出物料需求規劃( MRP ),此系統用來協助工廠對物料需求做好規劃。
1970 年的晚期到 1980 年代初期
電腦對資料的處理能力越來越強, MRP 則衍生為 MRPII ,此 MRPII 則包含了現場報表系統( Shop Floor Reporting System )、採購系統( Purchasing System )與其他相關功能。在這段期間,許多公司開始認為他們需要其他系統去管理更多事物,因 MRPII 不強調預測及需求分配上的管理,對現場的管理功能也較缺乏;為了改善這些缺失,預測、配銷資源規劃( Distributed Resource Planning ; DRP )、 MES (強調 WIP 追蹤)與單一功能的系統(如品管功能)等相關系統就應運而生,但這些系統卻未完全整合,所以系統間資料的交換非常困難。
1980 年的晚期至 1990 年初期
這些系統開始嘗試藉著擴大功能來解決「資訊孤島的問題」。於是 MRPII 變成企業資源規劃( Enterprise Resource Planning, ERP )、 DRP 衍生為供應鏈管理,而現場管理功能則變為整合性的 MES 。到了 1990年代後期,傳統製造系統之間的界線就變得很模糊,如 ERP 逐漸含有現場管理功能。
以上資料整理自【 MESA International White Paper No. 5, 1997 】。
Jon Chang
May. 2005 P. 36
MES History
Jon Chang
May. 2005 P. 37
Jon Chang
May. 2005 P. 38
Jon Chang
May. 2005 P. 39
MES Response
PlanningLevel
ExecutionLevel
ControlLevel
SupervisoryLevel
ms seconds hours days weeks month years
ERP(Enterprise Resource
Planning)
DCS
MES(Manufacturing
Execution System)
PLC(Programmable Logic Controller)
(Distributed Control System)
(Supervisory Control and Data Acquisition)
SCADA
Jon Chang
May. 2005 P. 40
Outline
產業 Operation
產業 e 化架構 Manufacturing Sequence Flow
Why MES (factory operation point of view)
Why MES (Industry point of view)
MES 定義 MES 功能 MES 架構 MES 技術 MES 與其它 e 化系統的整合
Jon Chang
May. 2005 P. 41
MES core functions
Jon Chang
May. 2005 P. 42
MES assist functions
Jon Chang
May. 2005 P. 43
MES functions
MES系統
規劃及排程生產指令及操作程序
產品規格管理
資源使用及追縱
原物料 ( 特氣化 ) 需求
生產產品追蹤
追蹤及控制
作業員管理
SPC
工程資料收集
資料管理 自動化
自動化介面及pc 連線
MES資料連結
產能效率管理現場生產排單
維修保養管理
品質管理
Jon Chang
May. 2005 P. 44
How MES help
ME
S
Production Objects
生產 / 效率 / 品管
Fab In-line
Operations
• UPF 標準化 , 合理化• 減少 MO - 機台連線自動化• 減少人力 - 傳輸搬運自動化• 製造效率控制 ( 派工 )• 製程條件控制 ( 光罩 ,Recipe)• 即時品檢 – IPQC/OQC• 提高設備 /資產使用率• 現場產品狀況
Fab Off-line
Analysis
• 人機效能分析• 產能分析• 生產效率分析• 成本分析• QA 管理• 良率提昇
Fab Off-line
Management
• WIP 在製品管理• 良率統計• 機台管理• Cycle Time 管理• 工單管理• 材料管理
Manufacturing Flow + Process Criteria
Material Flow Resource ( 人 , 設備 , Cassette..)
Jon Chang
May. 2005 P. 45
How MES help
Challenge if Without MES
• Run Cards 記錄所有事件• 人工控制所有生產活動
生產流程控制靠 Run Card 人工機台操作 人工製程條件控制 生產資料收集困難 , 無即時 SPC 管制 品質管制不即時 ,需人工重新輸入 派工困難 材料管理
• 無即時現場管理資訊 (在製品 ,機台 ,人 )• 生產效率分析困難• 工程資料分析困難• 管理報表產生困難
With MES’s Help
• 所有資料存入電腦 , 方便資料擷取及管理• 電腦控制 ( 或建議 ) 所有生產活動
簡化操作流程並防止錯誤發生 自動化並防止 Miss Operation Recipe/Mask, Data Feedback/Forward 資料自動收集 , 分類 , 送給 SPC 管制 電腦即時管制 , 並採取 Actions 有效率的派工邏輯 材料比對及管理
• Real-time Fab-wide 管理• Real-time 資料隨時可作分析• 節省資料整理時間• Information at your fingertip
Jon Chang
May. 2005 P. 46
Manufacturing Function Group in semiconductor(1)
PART management BOM, Process management (tool, equipment) SPEC management (quality spec in each process, queue time) Technology Management Tool management Layout management
Scheduling and Dispatching management Priority management (Link with SCM) Capacity Planning Dispatching agent
Track-In-Out management Recipe management Tool ALM management Equipment management Process control management
Jon Chang
May. 2005 P. 47
Manufacturing Function Group in semiconductor(2)
Automatic Tool Control Integrated Material, MES and Tool Automatic data collection (MFG data and ENG data) Tool control (track-in, process, track-out) Real-time tool monitoring Real-time process monitoring
WIP tracking and decision support system Detail WIP tracking (WIP-Tool-Human-Time-Event) Tool Utilization (OEE) Super Hot Lot Management Hold Lot management Alarm management
Data quality control Queue time management Rework Management SPC control OCAP Yield analysis
Jon Chang
May. 2005 P. 48
Manufacturing Function Group in semiconductor (3)
Tool Management Tool ID, Capability Tool constraint Tool Layout (link with AMHS) AMHS management
Human Management Security Certification Time management
Material Management FOUP AMHS (MCS management) GAS/ Chemistry
Integration SCM integration (scheduling) PDM integration (PART) Engineering Data Integration
Jon Chang
May. 2005 P. 49
MES benefit
Benefit Type Description
Improve yield
Reduce cycle time
Production floor management
General Benefits
Improve customer satisfaction
Improve overall effectiveness
Improve competitiveness
Qualitative Benefits
Improve throughput
Improve equipment utilization
Eliminate/Reduce manual errors
Project-Specific Benefits
Source: TIBCO Software
Jon Chang
May. 2005 P. 50
MES benefitThe potential gain by implementing MES addresses the need for immediate current, on-line information that allows users of the MES system to make the best informed decisions regarding the application of inventory, plant resources and people:
•Reduces manufacturing cycle times •Reduces WIP Inventory •Reduces paperwork between shifts •Eliminates lost paperwork/blueprints •Improves customer services •Reduces or eliminates data entry •Reduces lead time •Improves product quality •Empowers plant operations people •Responds to unanticipated events
Jon Chang
May. 2005 P. 51
Outline
產業 Operation
產業 e 化架構 Manufacturing Sequence Flow
Why MES (factory operation point of view)
Why MES (Industry point of view)
MES 定義 MES 功能 MES 架構 MES 技術 MES 與其它 e 化系統的整合
Jon Chang
May. 2005 P. 52
MES 架構MES 的架構
關連式資料庫 (Relational Database) : MES 的最大特色就是資料庫,因它記錄著整廠的生產資訊,包括:統計品管分析、設備和人力追蹤( Labor Tracking )、物料追蹤( Material Tracking )、實驗室資料( Laboratory Data )、製程資料( Process Data )、工廠文件( PlantDocument )等。這些資訊可提供給各部門做成報表,進行分析,然而製作報表或進行分析的工具往往與 MES 數不同一系統。欲能提供簡單快速且能跨平台存取功能的資料庫類別,非關連式資料庫莫屬。
圖形使用者介面( Graphical User Interface ; GUI ): 圖形使用者介面的應用,提供使用者一個容易使用的環境。
開放式系統架構( Open System Architecture ):在開放式系統下才能不受電腦廠商 的技術牽絆,而且能使企業內『新』『舊』的電腦技術相容。開放式系統提供了標準的介面、跨平台的應用程式,且資料可跨平台的交換。
主從架構( Client/Server Architecture ) :這種架構比大型主機架構更節省成本。
系統訂做工具( System Customization Tools ): 每一企業對 MES 功能要求情況各有不 同, MES 廠商除了提供標準的功能模組外,還需提供一套良好訂做工具,根據客戶個別需要,快速符合顧客需求。
整合性工具( Integration Tools ) :企業內可能存在許多系統;如分散式控制系統 (Distributed Control System) 、工廠支援系統 (Plant Support System) 、 MRP II 與 ERP , MES 必需提供介面來連接這些系統,使資料能夠互通。
Reference From: Joe deSpautz, "Quantifying the benefits of automation", ISA Transaction, No.33, 1994, pp.107-102.
Jon Chang
May. 2005 P. 53
MES 架構
Factory ModelingFactory Modeling
WIP ManagementWIP Management
EQP ManagementEQP Management Security ControlSecurity Control
EDC/SPCEDC/SPC
SEMI DevSEMI DevNT ClientsNT Clients
Bus Bus rulesrules
Area Applications
FACTORYworks
Process PlanProcess Plan
Message Bus
• Semi-auto EDC
• Dispatch/What is next
• Lot Schedule/Based on C/T
• Reticle Usage forecast
• Reticle Management
• Recipe Management
• Event/Alarm Management
• Preventive Maintenance
• Carrier Management
• EEN/ECN
ToolTool
Intelligent User
InterfaceSECS I/F
ReportReport
EDAEDA
MonitoringMonitoring
IUI + Web UI
Jon Chang
May. 2005 P. 54
MES 架構
MES Server
TCS(Cell Level)
TAP300 + Process Equipment
InterBayXfer Eqp
IntraBayXfer Eqp
Stocker
AMHS Integrator
E5/E30/E37E42/E58E40/E90E87/E90
E5/E37E82
E5/E37E88
E84
E82 : IBSEM E84 : Parallel I/O InterfaceE88 : Stocker SEM
E5 : SECS-II, E30 :GEM E37 : HSMS Generic ServicesE40 : Standard for Processing Management(PJM)E42 : Recipe Management StandardE58 : ARMASE87 : Carrier ManagementE90 : Substrate trackingE94 : Control Job Management
OHV
FOUPFOUP
Jon Chang
May. 2005 P. 55
MES 架構
Group control
Unit control
Field
Sensors& actors A V
Supervisory
Primary technology
Workflow, order tracking, resources
SCADA =Supervisory ControlAnd Data Acquisition
T
Production planning, orders, purchase
1
2
3
4
0
Planning, Statistics, Finances5
(manufacturing) execution
enterprise
administration
Jon Chang
May. 2005 P. 56
MES 架構
DBSserversDBS
servers
AIX / HACMP
SharedStorage
NT or Win2000/PC
OMI SCH ClientSM Client
ALMGUI
RTMGUI
ECSGUI
AIX / HACMPAIX / HACMP
AMHS MCSStandby
SunSun AIX
i-EDAServer
APC300GUI
SharedStorage
RMSGUI
AIX
ReportingDB Server
DispatchingServer
(ISS report)
DispatchingServer(RTD)
PMSGUI
AMHS MCSServer
Orbix
CIM Framework
NT or Win2000/PC
ALMserver ADODB
serverOSS server
CFM server(f14cfm01)
CFM loader(f14sch01)
MDB server
TCS serversTCS serversTCS serversTCS servers(01-125)
DBSservers
PMSserver
RMSserver
ECSserver
RTMserver
OrbixSDEV F/W
CFM300Report Viewer
SPC Pro OSSGUI
OrbixSiView MainStarter
iEDAOrbix COMet SDEV F/W
OrbixOrbix
MMSserver
MMSGUI
COMet
GMPLoader
HACMP Cluster #2HACMP Cluster #1
MM Server
AIX / HACMP
Orbix
CIM Framework
Database Server
(MMDB/SPCDB)
AIX / HACMP
Orbix
CIM Framework
SM/SCH Server
AIX / HACMP
Ext I/F
RPTDB &Replication
HP 8400
RTMDB
CIMDB
Cluster
HP 8400
FIRSTDB
CIMDB(Hot-Standby)
HP 8400
EMRLES/eSPCEES ODS
EESMES
Jon Chang
May. 2005 P. 57
Outline
產業 Operation
產業 e 化架構 Manufacturing Sequence Flow
Why MES (factory operation point of view)
Why MES (Industry point of view)
MES 定義 MES 功能 MES 架構 MES operation
MES 技術 MES 與其它 e 化系統的整合
Jon Chang
May. 2005 P. 58
MES framework
Coat
Tra
ckIn
Set
Up
Eq
p
Tra
ckO
ut
Exposure
Dis
pat
ch
Tra
ckIn
Set
Up
Eq
p
Co
llec
tdat
a
Mo
nit
orA
larm
s
Tra
ckO
ut
…………………………………..
Develop
Tra
ckIn
Co
llect
Dat
a
Tra
ckO
ut
Equipment CommunicationsEquipment Communications
Eqp ManagerEqp Manager
(MBX)
PRPsrvPRPsrvMDLsrvMDLsrv WIPsrvWIPsrvEQPsrvEQPsrvOPRsrvOPRsrv EDCsrvEDCsrvCATsrvCATsrv
Dis
pla
y W
I
Lot 1234Lot 4567Lot 5678Lot 34324Lot 84567Lot 54877
Intelligent ClientIntelligent Client SpcClient/RuleSrvSpcClient/RuleSrv
Jon Chang
May. 2005 P. 59
How does MES function with operation
Lot03Lot03Lot02Lot02
Lot01Lot01
Setup EQSetup EQSetup EQSetup EQ
Lot01Lot01
Lot Load into EQLot Load into EQ& Setup Parameter& Setup Parameter
Lot Load into EQLot Load into EQ& Setup Parameter& Setup Parameter
Lot03Lot03Lot02Lot02
Track InTrack InLot List:Lot List:
Lot01 Lot02 Lot03Lot01 Lot02 Lot03Input Lot Id, EQ IdInput Lot Id, EQ Id
Track InTrack InLot List:Lot List:
Lot01 Lot02 Lot03Lot01 Lot02 Lot03Input Lot Id, EQ IdInput Lot Id, EQ Id
Display OperationsDisplay OperationsTemp: 75 CTemp: 75 CTime: 120 minTime: 120 min
** Data CollectionData Collection
Display OperationsDisplay OperationsTemp: 75 CTemp: 75 CTime: 120 minTime: 120 min
** Data CollectionData Collection
Process StartProcess StartProcess StartProcess Start
Process EndProcess EndProcess EndProcess End
Data CollectionData CollectionInput DataInput Data
Data CollectionData CollectionInput DataInput Data
Track OutTrack OutInput Lot Id, QtyInput Lot Id, Qty
Track OutTrack OutInput Lot Id, QtyInput Lot Id, Qty
Track Out Info.Track Out Info.Next StepNext Step
Next LocationNext Location
Track Out Info.Track Out Info.Next StepNext Step
Next LocationNext Location
Lot UnloadLot Unloadfrom EQfrom EQ
Lot UnloadLot Unloadfrom EQfrom EQ
Lot01Lot01 Transfer Lot to Next LocationTransfer Lot to Next LocationTransfer Lot to Next LocationTransfer Lot to Next Location
Jon Chang
May. 2005 P. 60
How does MES function with operation
Lot03Lot03Lot02Lot02
Lot01Lot01
Setup EQSetup EQSetup EQSetup EQ
Lot01Lot01
Lot Load into EQLot Load into EQ& Setup Parameter& Setup Parameter
Lot Load into EQLot Load into EQ& Setup Parameter& Setup Parameter
Lot03Lot03Lot02Lot02
Track InTrack InLot List:Lot List:
Lot01 Lot02 Lot03Lot01 Lot02 Lot03Input Lot Id, EQ IdInput Lot Id, EQ Id
Track InTrack InLot List:Lot List:
Lot01 Lot02 Lot03Lot01 Lot02 Lot03Input Lot Id, EQ IdInput Lot Id, EQ Id
Display OperationsDisplay OperationsTemp: 75 CTemp: 75 CTime: 120 minTime: 120 min
** Data CollectionData Collection
Display OperationsDisplay OperationsTemp: 75 CTemp: 75 CTime: 120 minTime: 120 min
** Data CollectionData Collection
Process StartProcess StartProcess StartProcess Start
Process EndProcess EndProcess EndProcess End
Data CollectionData CollectionInput DataInput Data
Data CollectionData CollectionInput DataInput Data
Track OutTrack OutInput Lot Id, QtyInput Lot Id, Qty
Track OutTrack OutInput Lot Id, QtyInput Lot Id, Qty
Track Out Info.Track Out Info.Next StepNext Step
Next LocationNext Location
Track Out Info.Track Out Info.Next StepNext Step
Next LocationNext Location
Lot UnloadLot Unloadfrom EQfrom EQ
Lot UnloadLot Unloadfrom EQfrom EQ
Lot01Lot01 Transfer Lot to Next LocationTransfer Lot to Next LocationTransfer Lot to Next LocationTransfer Lot to Next Location
Jon Chang
May. 2005 P. 61
How does MES function with operation
PPRROOCCEESSSS--SSTTEEPP
##11
In-Line In-Line Staging Staging Area Area
EQP2EQP2
EQP4EQP4
EQP5EQP5
EQP1EQP1
EquipmentEquipment
Staged Staged LotsLots
WAITWAIT StateState
Arrival TimeArrival Time
Track-InTrack-InRUNRUNStateState
Process Process Start TimeStart Time
Track-OutTrack-OutEQP3EQP3
Next Process Step Next Process Step Staging Staging AreaArea
#2#2
ScrapScrapScrapScrap
Process Process End TimeEnd TimeWAIT WAIT
State.State.
SSTTEEPP
CCYYCCLLEE
TTII
MMEEYield%Yield%Yield%Yield%
Jon Chang
May. 2005 P. 62
SiView DEMO - BR
Jon Chang
May. 2005 P. 63
SiView DEMO – Tool status
Jon Chang
May. 2005 P. 64
SiView DEMO – WIP tracking
Jon Chang
May. 2005 P. 65
SiView DEMO – WIP tracking
Jon Chang
May. 2005 P. 66
SiView DEMO – SPC
Jon Chang
May. 2005 P. 67
SiView DEMO – Decision Support
Jon Chang
May. 2005 P. 68
Outline
產業 Operation
產業 e 化架構 Manufacturing Sequence Flow
Why MES (factory operation point of view)
Why MES (Industry point of view)
MES 定義 MES 功能 MES 架構 MES operation
MES 技術 MES 與其它 e 化系統的整合
Jon Chang
May. 2005 P. 69
MES 技術
Message Bus (TIBCO, XML, SOAP, Rosetanet)
Database (Oracle, SQL, DB2, Informix)
Client/Server architecture (Client -> MM server)
GUI development library
Tool control development
SEMI SECS/GEM/XML standards
Decision support system (smart dispatching system)
Jon Chang
May. 2005 P. 70
Outline
產業 Operation
產業 e 化架構 Manufacturing Sequence Flow
Why MES (factory operation point of view)
Why MES (Industry point of view)
MES 定義 MES 功能 MES 架構 MES operation
MES 技術 MES 與其它 e 化系統的整合 MES 未來發展方向
Jon Chang
May. 2005 P. 71
MES and E-commerce
Production Information
TSMC Online
Assembly & Test
Business Transactions
Design Portal
Services & Technologies
Quality & Reliability
Technical Documents
Customer Satisfaction
an overview of services and technologies
an integrated environment forIC design assistance
book product names, submitservice requests, and access CyberShuttleTM services
information on sort, assemblyand final test services.
status tracking for customer corrective action request
policy and reviews on theprocess quality and reliabilityinformation
a virtual document center forproviding one click download
an array of up-to-date logistic status reports
Jon Chang
May. 2005 P. 72
MES and ERP
DemandForecast
PurchaseOrder
Customers ESCM Customer Interfacing (real-time)
ESCM Planning (batch run)
AllocationPlanning
DemandPlanning
CapacityModeling
Delivery Confirmation
PO entryand change
ATP Request/Consumption
ATP
(NSD)
CASD
Support Commitment
Support plan
AllocationManage-ment
ForecastJudged
Demand
CapacityPlan
OrderManagement
Output Planning
ATP
AdjustedCASD
ATP Plan
CapacityPlan
Demand-to-Support
Order-to-Confirm
Manufacturing
Planning
MPS
ConsumedATP
Actual Delivery
Order-to-Ship
Jon Chang
May. 2005 P. 73
MES and PDM
Customer ENG1 / RDCustomer Engineer Product Engineer
MT Form(Mask Tooling)
MaintainTechnology Infor.
Book TM number
Issue MT/TIP
EBO
EBO system
FSR Form(Foundry Service
Request)
Issue Engineering Notice
MES system
Issue lot handling request
Customer lot handling request
PE Infor. maintenance
Maintain holadable stage
: PDM system
: other system
Jon Chang
May. 2005 P. 74
Outline
產業 Operation
產業 e 化架構 Manufacturing Sequence Flow
Why MES (factory operation point of view)
Why MES (Industry point of view)
MES 定義 MES 功能 MES 架構 MES operation
MES 技術 MES 與其它 e 化系統的整合 MES 未來發展方向
Jon Chang
May. 2005 P. 75
Future Direction of MES
Scalability (support considerable transaction for bigger FABs and detail information)
System centric operation instead of human-centric operation (knowledge operation)
Simulation Capability is embedded for knowledge creation
Industry information sharing instead local information sharing (Virtual FAB support)
Friendly decision support system
Exception handling become only thing for human operation
Jon Chang
May. 2005 P. 76
Future Direction of MES
man-machine communication
instructor
logging
process data
actualization
operator
processdata base
plant
simulation
maintenanceengineer
history
knowledge base
Jon Chang
May. 2005 P. 77
Future Direction of MES
Jon Chang
May. 2005 P. 78
Q & A