Kobe University Repository : Thesis · 2017-12-19 · Kobe University Repository : Thesis 学位論文題目 Title 高周波アナログ・デジタル混載LSIのための基板結合

Kobe University Repository : Thesis学位論文題目Tit le

高周波アナログ・デジタル混載ＬＳＩのための基板結合解析と評価技術に関する研究

氏名Author 小坂, 大輔

専攻分野Degree 博士（工学）

学位授与の日付Date of Degree 2007-09-25

資源タイプResource Type Thesis or Dissertat ion / 学位論文

報告番号Report Number 甲4075

権利Rights

URL http://www.lib.kobe-u.ac.jp/handle_kernel/D1004075

※当コンテンツは神戸大学の学術成果です。無断複製・不正使用等を禁じます。著作権法で認められている範囲内で、適切にご利用ください。

Create Date: 2017-12-20

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4.3.1 0.3µm F9HACWNrO . . . . . . . . . . . . . . 47

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5.2.2 !Ps)=$ . . . . . . . . . . . . . . . . . . . . . 59

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5.3.2 pDbGjs0 . . . . . . . . . . . . . . . . . . . . 63

5.3.3 pDkg,j79F‘N7_el<7gs . . . . . 63

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5.5 k@ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67

6 k@ 71

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Figure 3.9: G#<W n &’k,<Ijs0=$NbGjs0

,<Ijs0rMCHj9HG==9k?aK (Fig. 3.7(b))"S3KX"

9k3liN]<H (S3inner"S3outer"S3bottom) O"H6&LFL Cper"

ZSH6lLFL Cbtm rp7F S3top K\35lk#

Figure 3.8O"G#<W n &’k]1CH=$NbGk=j!G"k#

3Nlg"=LbGkN S3 N n+NQ,@Ohj|+l"5iK&’k

bGkGbG#<W n &’k]1CHG$ol?NhNQ,@r4Fo

|9k#l"S3outer N]<HO"G#<W n&’k]1CH~ONQ,

@r;m7FjA5lk#p Pk/bGkGO"S3 OG#<W n &’k

]1CHNlLH18AuG S3bottom ]<HH7FjA5lk#

=7F"FjA5l?G#<Wn&’kN S3]<HOS3outer HS3bottom

K\35l"5iK"G#<W n&’k]1CHr=9?aK (Fig. 3.8)"

34 h 3 O IjNhpDkgrO

Table 3.1: rO39H

h ~V (s)

Q,@[V 300

FTsi;"F-YQ9 1800

Q,@N;m?o|"5VbGkkg 30

7_el<7gs (SPICE) 30-120

S3bottom O S1]<HNlLNs8FLrp7F S1K\35lk#

Figure 3.9O"G#<W n&’k,<Ijs0=$NbGk=j!G"

k#bGk=j!O n+,<Ijs0=$H1M@,"=L?&’k>

NbGkG S3bNQ,@r|n7"S3inner H S3outer r8.9k#>N

bGkGS3top rFjA7"33GOG<tNp?Pk/bGkGS3bottom

rjA9k#5iK"G#<Wn&’k,<Ijs0rMCHj9HG==

9k?aK (Fig. 3.9(b))"S3KX"9k]<H (S3inner"S3outer"S3bottom)

O"FLG S3top K\35lk#

3.2.7 pDyAs)bGk8.39H

3liNFo,<Ijs0NdoC->AK++kW;39HO"0

n~Ht 750MHz"g-1 2GBNo</9F<7gs (Ultra SPARC III)

rHQ7?H-"H%7? F Tsi;Um<rQ$?F9H=$NyA

s)8.K?Qs 30 ,"SPICEKhk SQia<?7_el<7gsK

t,rW7?#

3.3 7_el<7gsKhk>A&rO

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L=$KhkzLNc$"pDq3(Nc$r7_el<7gsKhC

F>A"rO9k#

3.3.1 l$"&HM8->A

Figure 3.10K"p+,<Ijs0NLVdg-5XNM8-rB,"Z

S7_el<7gs7?kLr(9#S1H S2]<HVNw%rQ=5;

3.3. 7_el<7gsKhk>A&rO 35

Figure 3.10: (a) w%M8-"(b)LQM8-

?j"S1"ZS S2]<HNLQrQ(F (S3N,<Ijs0b91<j

s05;FQ=)>A7?#B,H7_el<7gskLOh/lW7F

*j",<Ijs0KhkdozLOLQKMi:s 10dBG"k3H,

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3.3.2 ,%=$&pDq3(KhkfS

Figures 3.11"3.12"3.13GO"p+"n+ZSG#<W n &’k,<I

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B,H1MK"p+"n+,<Ijs0GOe\9k~HtShK*$F

30dBJ<NdozL7+?:"3lO"pDq3(KMiJ$#l"

G#<W n &’krQ$?=$GOhjb$dozL,|TG-k#C

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dozL,g-/Jk#3lO">hNG#<W n &’k]1CH=$

O-$lLQrD?aFL-kg,g-/"~HtKhkdo-c<

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bzL*KdoG-k?a@HM(ilk#

5iK"Fig. 3.14NXJkg,J$lgN,<Ijs0=$NzLr

+kH"n+,<Ijs0dG#<W n&’k]1CHGO"^jzLO

36 h 3 O IjNhpDkgrO

Figure 3.11: F,<Ijs0=$Nq3(4HNzL (10Ωcm)

QoiJ$,"G#<W n &’k,<Ijs0=$GOb~HhN.f

KP9kdo-,g-/~e9k3H,o+k#

3.3.3 G#<Wn&’k=$NfS

Figure 3.15O"G#<W n&’k,<Ijs0"ZSG#<W n&’k

]1CHG@ilk"c~Hth (100MHz)H5~~Hth (2GHz)Nd

o-Nl$"&HM8-G"k#b~HNhGO"G#<W n&’k,<

Ijs0N,b$do-rD3HO@i+@,"S3H S1NLQ,g

-/Jk3HGFL-kg,g7"do-,c<9k#

3.4 k@

\OGO"ACWbNIj*J 2 @VNpDkg,%C-r>A9k

?aK"FTsi;j!KhkpDq3yAs)8.rH%7?"pD$

sT<@s9yAs)8.j!rsF7?#5iK"sFj!r,Q7

F p+,<Ijs0"n+,<Ijs0"G#<W n &’k,<Ijs0"

G#<W n &’k]1CH=$NpDyAs)bGkr8.7"7_e

l<7gsKhCF>A"rO7?#

FTsi;j!KhkpD$sT<@s9NbGk=GO"(;Nm~

3.4. k@ 37

Figure 3.12: F,<Ijs0=$Nq3(4HNzL (100Ωcm)

@d!P@H7FQ,@,,WG"k#=3G"Q,@rF9HQ?<s

NH6NhNAuKP~7F[V9k3HG"m~]<HNLQd,<

Ijs0Nr==7"5iK;m?+|j!KhCFK-r==9k

;Qr+/7?#^?"lL*KpDO=LNt µmNq3(,soK.

5/"<$t,Oq3(,b$3Hr==9k?aK"?XQXbGk=

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3liN;Qr,Q7F F Tsi;j!KhkpD$sT<@s9y

As)8.rH%7"B]K#tNpDkg,%=$KD$FbGk="

7_el<7gsKhjrO7?kL"B,HsoKh/lW7F$?#

sF9kpDyAs)8.j!O"\FGP]H7?GL=$@1GJ

/"G#<WHlsAd SOI =$NbGk=Kb,QD=G"k#

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bq3pDrH_go;k3HGb$dozL,@ilkH@(k#7

+7"bq3pDOsoKb39HJWm;9G"k?a"lL*J

vH7FO"c~HN$:.fPvH7F p ?,<Ijs0r"b~H

N$:PvH7FG#<W n &’k,<Ijs0rQ$?">TNH_

go;,-z@HM(ilk#

38 h 3 O IjNhpDkgrO

Figure 3.13: F,<Ijs0=$Nq3(4HNzL (1kΩcm)

3.4. k@ 39

Figure 3.14: XJkg,J$H-NF,<Ijs0=$NzL

40 h 3 O IjNhpDkgrO

Figure 3.15: G#<W n &’k=$NfS#(a)100MHz"(b)2GHz

41

h4O

ACWlYkpD(;,[rO

4.1 o@

0OGO"1mmQJ<NIj*JNhK*1k 2@VNpDkg"J

iSK,%=$NzLr>A7?#=Nj!H7F"FTsi;j!Kp

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hkH6AuN==;Q"ZS?XQXbGjs0Khk7j3spD

Nb>~NTc*;YWmU!$kF=;Qr7?K+/7?#7+

7"LSI_WT,aakbNOIj*JpDkg/Y@1GOJ/"AC

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[7">Ns)VmC/KFA9k+r=,G-kj!r,WH7F$

k#3l^G?/N&fT,1MNj!NN)r\X7"$/D+N&

QD<k,+/5lF$k#7+7"=NIlb,~V*J39HL""

k$O:YK*$FJsi+NdjrCF$k#l"\&fGQ$

F$k F Tsi;j!OACWlYkGNpDkgrOKQ$ilF-

?BS,"j":Y"~V39HNLG>N0hjb%lF$k#l

L*Jq3(NpDGOpDq3(rlMHM(FbGk=7?lgH"

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0OG(7? 2 DN;QrH_~‘3HKhCF"hjFQ*JACW

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@s9bGk8.Um<r(7"G**J7_el<7gsbGkN5

Wrb@9k#GeK"0.3µm CMOS"0.18µm CMOS Wm;9N 2 o

NF9HACWKD$FbGkr8."7_el<7gs7"B,kL

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42 h 4O ACWlYkpD(;,[rO

Figure 4.1: G8?ks)N<|E0n

Figure 4.2: TSDPC bGk

4.2 ACWlYkpDkgbGjs0

\aGO"F9HACWKBu5lF$kN$:; (TCNS)KP~9k"

~,ds8FL (TSDPC:Time-Seriese Division Parasitic Capacitance)b

GkKD$F [76–78]"M("ZSTCNS HNP~rRYk#

4.2.1 TSDPCbGkHTCNS

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4.2. ACWlYkpDkgbGjs0 43

Figure 4.3: TCNS s)H TSDPC bGkNP~

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ZS|E5lkFLr^‘#FLN<EK*$FO Cres +iEYN\0

,88"|EK*$FOMOSNAcMkq3rL7FIj*J;mE.

,88k#7+7"3liNE.OIj*JbNG"j"s)4Nr.

lkE;E.XNFAO.5$#EYF,[axK*$FC:7?EY

O"0tE;+iFS!k5lk#3N]KE;[~"ZS0i&sI

[~KE;E.,/89k#E;E.OEYF,[axKs?7?s8

FLNg-5KhCFhj5l"^?"=NQ=O9$CAs00nK

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Figure 4.4: >hNpDkgbGk8.Um<

EaxN(Mk.<6oO5kG-k#

JeNh&JM!+i"Fig. 4.2G(5lkTSDPCbGk,MF5l

F$k#g,OJG8?ks)K*1k~V4eN@0nrlj~V

VV (T) G,d7"F~VVmC/hKs8FLXN<E0nKV-9

(F==7F$k#TSDPCbGkO"l$"&H+ijP5lk2<H

lYk"^?OHis89?lYkNMCHj9HrQ$F~OY/?

hK~"3N7_el<7gsrT&3HG8.9k#

TSDPCbGkOs8FLH9$CAK^^lkq3.,N_G==5

lkNG"g,OJG8?ks)KD$Fb7_el<7gs~Vrg

K:i93H,G-k#^?"@ilk7_el<7gskLN:Y

b"His89?lYkG7_el<7gsrT&lgH[\1yG"

k#5iK"bGkOlY8.9lP$UN95N~VNhK*1kE

.HArrO9k3H,D=G"QC1<8o‘d\sF#s0o$d

tNQ9H$C?M9JH_)FM8-N>AKFxQG-k#

F9HACWNTCNSs)O"TSDPCbGkN6r=N^^s)=

7?bNG"k (Fig. 4.3)#TCNSO"l$uK[V5l?(;;fKC

H (NSU)H?j(C88.s)G=.5lF$k#NSUOPO<KMOS

G=.5l?FLr\37?$sP<?"l$Hn0s)G=.5lF

4.2. ACWlYkpDkgbGjs0 45

$k#~O5lk/mC/(C8KP7Fj>NDtNNSUr0n5;

k3H,G-k#NSU G/mC/+\,88k3HKhCF MOS FL

XN<E0n,88k#?j(C88.s)O/mC/Ydr/85;

k?aNs)G=.5lF*j"FVmC/VN/mC/ABYd~V

r_jG-k#^?"?j(C88.s)bG/mC/(C8N+\

~r)f9k3HbG-k#0n NSU"/mC/ABYd~V"/mC

/+\~O7UHl89?KhCF)f9k3H,D=G"?oNp

D(;HAr/89k3H,G-k#

4.2.2 ACWlYkGNpDbGjs0NUm<

4.2.2.1 >hj!KhkbGjs0 (0.3µm F9HACW)

TCNSs)+iNpDN$:r7_el<7gs9k?aKO"TCNS

s)r=9 TSDPC bGkHE;[~"JiSK0i&sI[~r^‘

pDyAs)bGk"ZSQC1<8d\<IKs89k*UACW$

sT<@s9rH_go;?7_el<7gsbGk,,WG"k [20]#Figure 4.4K>hNpDkgbGk8.Um<r(9# :"E; (Vdd)

[~H"pDK\@rD0i&sI (Vss)[~rl$"&H+ijP9

k#Vdd [~NbGkO"2 X F Tsi;KhCF8.9k#l"0

i&sI[~"ZSpDq3yAs)bGkO"pDr 3!5Nq3aC

7eK,d7?e"F Tsi;KhCF 2 !5Nq3MCHo</KQ

99k#>bGkKO"TSDPCbGkrkg9k?aNQ,@r_1F

*/#pDbGkKO,WK~8F,<Ijs0r=9Q,@r[V9

k#E;bGk"TSDPCbGk"pDbGkr=l>lkg7?e"*

UACWGRH3liNbGkr\39k#c(P"E;H0i&sI

NVKOG+CWjs0-cQ7?s9rIC9k#^?"QCI+i

E;^GNP)Ks89kq3"ZS$s@/?s9bUC9k#

4.2.2.2 H%j!KhkbGjs0 (0.18µm F9HACW)

0aG=7?0.3µm F9HACWO"NMOSrppDHR,C?p&’

keKA.9k"D$s?V=$NWm;9G"k#=N?a"PMOS

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r5NKbGk=9k3H,G-J+C??a"IjNhpDkgrO


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hj!rH%9k#c(P"ACWlYkpDN$:rOOIjNhh

jb^/mJlYkGM(k?a",:=L"&’k"Pk/bGkH

3XK,1kNGOJ/",WK~8F=L+ &’kHPk/bGkN 2

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>hj!H1MK"O8aKE; (Vdd)[~H"pDK\@rD0i&

sI (Vss)[~rl$"&H+ijP7"E;[~bGkr8.9k#H

%j!GOpDbGk8.Um<,>hHO[Jk#0.18µm F9HAC

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^:"pDN=LUaNq3(,soK.5/"</JkHpDq3

(,b/Jk3Hd"G#<W n &’k=$r==9k?aK"IjN

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!K"F5VbGkbG;m?+| (gK+|)r,Q9k3HG"(G

#<W) n&’kr==9k#=LbGkGOTCNS,[V5lF$kN

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4.3. F9HACWKhk>A 47

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kgHJk?a"VKTc*;Y+iW;7?MrDFLr^~9k#

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G"?LaC7e,dtO 250×250G"k#D^j"aC7e1DvjN

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K"F9HACWNaC7e,dc"ZS\O9k~UQCIr(9#3

NACWNLQO 5mmQ"?LaC7e,dtr 200× 200H7F$k#

D^j"aC7e1 DvjNg-5O*h= 25µmQHJk#TSDPC b

GkHpDHr\39kQ,@r 36@[V7"pDN$:!P@dQC

IHNR.~_r==9k?aK"H<?k 113@NQ,@r[V7?#

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kKhk7_el<7gskLr(9#B,H1MK 2o‘N=$KP7

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7_el<7gskLO6"HAN>L+iB,kLH0g,hlF

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k#D$s?V=$GOp\*KN$:,/87?eOeKLuNHA

KJk9~K"k,"HjWk&’k=$GOHA,lV)Ae,C?

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k&’k=$NlgpDXN3l~_P),FL*JkgKJk?aK

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Kobe University Repository : Thesis · 2017-12-19 · Kobe University Repository : Thesis 学位論文題目 Title 高周波アナログ・デジタル混載LSIのための基板結合