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PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder CO 80305 Phone: +1-303-497-7365 FAX: +1-303-497-7364 E-mail: [email protected] Presented at the THIC Meeting at the STK Bldg 8 Auditorium, 1 Storage Tek Dr, Louisville CO 80027- 9451 July 22 - 23, 2003

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Page 1: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

Logo of Your organization

PAST, PRESENT, and FUTURE of MRAM

Shehzaad KakaNIST Magnetic Technology

325 Broadway, Boulder CO 80305Phone: +1-303-497-7365 FAX: +1-303-497-7364

E-mail: [email protected]

Presented at the THIC Meeting at the STK Bldg 8 Auditorium, 1 Storage Tek Dr, Louisville CO 80027-

9451July 22 - 23, 2003

Page 2: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

Outline

•Introduction

•Basics of MRAM operation

•Prototype MRAM design

•Possible Future Directions •Magnetization Dynamics•Spin Momentum Transfer

Page 3: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

-120 -80 -40 0 40 80 120

114

116

118

120

122

R (Ω

)

Happl (Oe)

Beginnings

Non-Volatile Magnetic Memory c.a. 1950(but a destructive read!)

ferrite toroidSpintronics:GMR, TMR

Page 4: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

Why Now?Memory market dominated by pure semiconductortechnology

DRAM $16 billion LEAKYSRAM $ 4 billion BIGFLASH $ 9 billion (Non-Volatile) SLOW

MRAM (spintronics technology)

May be able to compete!

Page 5: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

Universal Memory*but maybe first embedded memory

Desired non-volatile, fast, low power memory,low cost, technology widely being sought.

MRAM : IBM, Motorola, Infineon, Toshiba, Cypress, Micron, . . .

FRAM : Ramtron, Texas Instruments, Fujitsu, Samsung,NEC, …

Other Options – Ovonics, Polymer Ferroelectric memory,Nanotubes, PMC, …???FLASH???

Page 6: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

MRAM (Attractive) Properties

• Non-Volatile

• High Density

• High Speed

• Non-Destructive Read

• Low Voltage Operation

• Unlimited Endurance

• Scalable?

• Reliable?

!!! Instant-ON computers !!!

Page 7: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

MRAM Elements (Bits) Magnetic Tunnel Junctions

FM/Insulator/FM/AFM Spin-Dependent Tunnelingε

g(ε)

ε

g(ε)

Low Resistance

High ResistanceLarge Resistance Change

1

0

Page 8: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

Cross Point Architecture

IBM

Programming Method u M Hs K app= − •12 0

20µ φ µsin M H

φHx

Hy

-50 0 50 100 150 200

Ener

gy (a

rb. u

nits

)

Magnetization Angle (degrees)

Single Domain

Hx

Hy

program

half-select

Astroid

Page 9: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

Bit Sense1 Transistor and 1 MTJ element per unit cellAllows for a non-destructive read process

Bit cell size < 1 µm2 using 0.18 µm technology

Page 10: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

ComplicationsTunnel Barrier

-very thin (< 2 nm); R, ∆R depends on barrier thickness

-∆R depends on interfaces to the barrier-Pinholes and roughness are problems

Micromagnetic Effects- magnetization not exactly single domain- switching fields sensitive to device shape

Layer Coupling Effects- edge charges on FM layers cause AP ground state- film roughness leads to Neel coupling – Parallel state

Thermal Stability Issues for small bits- caution for half-selected bits switching via thermal activation

+-

++

- ----

+++

---

Page 11: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

State of the artMotorola* 1Mbit MRAM chip in 2002

0.6 µm process technology, 7.2 µm cell size, 50 ns read access time, 24 mW at 3V 20 MHz

IBM/Infineon 128 kbit MRAM0.18 µm technology, write/read access ~2ns

bitline

Cypress 64 kb and 256 kb product data sheets on website70 ns access time

Field

Innovations-SAF pinning structure

-Flux concentrating-cladded Cu lines MTJ

* IEEE J. Solid State Circ. 38 769 (2003)

Page 12: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

High Bandwidth Magnetic MeasurementsMF HpTest structure with CPW and

µ-strip lines; sub-µm device

MP

Device Easy-axis field switching data

1 2 3 4 5

-1.0

-0.5

0.0

0.5

1.0

Mx/M

s

Time (ns)

24.4 mT 21.5 18.9 16.6 14.5 12.6 11.0 9.5

3 mm X 3 mmSEM Micrograph

Page 13: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

Precessional SwitchingMF

MPHL

Hp

APL 80 2958 (2002)

ddt eff effM M H

MM M H= − × − × ×µ γ α µ γ

00 ( )

Landau-Lifshitz equation - dynamics

0 1 2 3 4 5

-1.0

-0.5

0.0

0.5

1.0

Mx/M

Time (ns)

Pulse ∆t (FWHM) 230 ps 280 ps 325 ps

Pulse Response

-1.0 -0.5 0.0 0.5 1.0

-0.05

0.00

0.05

-0.50.0

0.51.0

Mz/M

s

My/M

s

Mx /M

s

Simulation

Hp = 21.5 mT

Page 14: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

Precessional Switching – Resulting Remanent States

0.0 0.5 1.0 1.5 2.0 2.5 3.0

0

20

40

60

80

100-1.0

-0.5

0.0

0.5Pr

obab

ility

%

Pulse Duration (ns)

Metastable Full Switch

Mx/M

Hp = 17 mT

Page 15: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

The Spin Momentum Transfer Effectτ2 ∝ I M2 X (M1 X M2) ; I ~ 107A/cm2

(-) Current Stable Parallel Alignment Torque

e-

M1 M2(+) CurrentStable Anti-parallel Alignment Torque

e-

M1 M2

Slonczewski, JMMM 159 (1996)

Page 16: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

The SMT Effect Nanopillar

-150 -100 -50 0 50 100 150 200

16.35

16.40

16.45

16.50

16.55

16.60

200 mΩ

R (Ω

)

µ0Hx (mT)

-4 -2 0 2 4

7.35

7.40

7.45

7.50

7.55

7.60

7.65

200 mΩdV

/dI (Ω

)

Current (mA)

50-100 nm

SMT ~ 1/r2

Oersted ~ 1/r

Hx = 65 mT

Magnetization control withouta magnetic field!

Page 17: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

6.5 7.0 7.5 8.0 8.5

0.0

0.5

1.0

1.5

5 6 7 8

6.9

7.2

7.5

7.8

0 2 4 6 8 10 127.6

7.7

7.8

7.9

8.0

Current (mA)

8.5 mA

7.5 mA

6.5 mA

5.5 mA

4.5 mA

4.0 mA

Ampl

itude

(nV/

Hz1/

2 )

Frequency (GHz)

-0.23 GHz/mA

Pea

k f (

GH

z)

Current (mA)

= spectra

dV/

dI (Ω

)

Magnetization dynamics at in-plane fixed field (0.1T)•Excitation frequency is a

linear function of current•Only on for limited range

of currentpoint contact

Narrow Linewidths !∆f (6.5 mA) ~ 30 MHz

Q = f/∆f ~ 250α < 0.001 ??

Frequency decrease in current – Red Shift

Page 18: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

Out of plane precession for out of plane field

5 10 15 2012

14

16

18

20

22

24 m8000sm

X Axis Title

Y Ax

is T

itle

-2E-10-1.12E-10-2.4E-116.4E-111.52E-102.4E-103.28E-104.16E-105.04E-105.92E-106.8E-107.68E-108.56E-109.44E-101.032E-91.12E-91.208E-91.296E-91.384E-91.472E-91.56E-91.648E-91.736E-91.824E-91.912E-92E-9

2 12 2 Bias Current (mA)

Freq

uenc

y (G

Hz)

Experimental Geometry

Currentflow

Mfixed

MInitial

CoFe

NiFe

Applied Field 0.8 T

12 25Frequency (GHz)

0

2

Am

pl. (

nV/H

z1/2 )

V/(Hz)0.5Point Contact Sample

Page 19: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

Comparison ChartSRAM DRAM FLASH FRAM MRAM

read time Fast Moderate Fast Moderate Moderate/Fast

write time Fast Moderate Slow Moderate Moderate/Fast

nonvolatile? No No Yes** Yes* Yes

refresh No Yes No No No

cell size Large Small Small Medium Small

low voltage Yes Limited No Limited Yes

*Destructive read** Limited endurance

Motorola

Page 20: PAST, PRESENT, and FUTURE of MRAM -  · PDF fileLogo of Your organization PAST, PRESENT, and FUTURE of MRAM Shehzaad Kaka NIST Magnetic Technology 325 Broadway, Boulder

Conclusions

MRAM product will utilize MTJ elements in a cross pointarchitecture

MRAM has attractive properties – maybe capable of surpassing conventional semiconductor memories

Fabrication challenges are being met as MRAM approachesproduction

Increases in magnetic memory speed performance willrequire understanding and control of dynamicsand damping

Spin Momentum Transfer effect may be utilized in advancedMRAM designs eliminating half-select problem

MRAM