PT19-6-0530 coreano

530 Polymer Science and Technology Vol. 19, No. 6, December 2008

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Technology for Hyper-Structure Control of Organic/Inorganic Hybrid (Soonho Lim and Soon Man Hong, Polymer Hybrid Research Center, KoreaInstitute of Science and Technology, P.O. Box 131 Cheongryang, Seoul 130-650, Korea) e-mail: [email protected] (Ji Young Chang, Department of Materials Science and Engineering, Seoul National University,Seoul 151-744, Korea) (Mijeong Han, Device Materials Research Center, Korea Research Institute of ChemicalTechnology, 100 Jang-dong, Yuseong-gu, Daejeon 305-600, Korea) (Seok-Ho Hwang, Korea Institute of Industrial Technology, 35-3, Hongcheon-Ri, Ipchang-Myun,Seobuk-gu, Cheonan-Si, Chungnam 331-825, Korea) (Moon-Kwang Um, Composite Materials Group, Korea Institute of Materials Science,66 Sangnamdong, Changwon, Gyungnam 641-010, Korea)

1980 1983 1991 1992

1992 1992

() KAIST () () (Post Doc)

1979 1981 1988

1989 1989

19921992

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() () Dept. of Chemistry, University of Michigan() Dept. of Chemistry, Pennsylvania State University (Postdoc.) ()

1990 2000 1990

1995 2001 2002

() () 4 (Post-doc)

1980 1982 1992 1993

1994 1996 1982

() () KAIST () Univ. of Illinois at Urbana- Champaign (Post-Doc.) IBM Almaden () KIST

1988 1990 1995 1998

19991995

() () () Northwestern (Post Doc)

1992 1994 2006 1994

2000 2006

() () University of Akron, Dept. of PolymerScience()

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, , Dainippon Chemical(), Nippon Oil & Fats(), Nisshin Steel(), Oha-shi Chemical(), Shikibo(), Showa Technocoat(, ) .

, Virginia Polytech - Drexel University electroactive , UCLA , Sandia National Lab. , State University of New York , University of Massachusettes .

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Cambridge Matthew J. Rosseinsky Andrew I. Cooper California Jonathan Germain hypercrosslinked polymer . . - .

- 1960 Tomic 2 sheet (coordination polymer) . 1970 1980 2 , 1980 Hoskins 3 . .

2000 - . Berne N.-R. Behrnd . . Stellenbosch Barbour .

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4. IT solder

Nihon Solder() Lead-free

solder NH-070A

(, ,)NH-HP10

, Ag nano paste

(Harima ()) Ag Ag 3-7 nm Ag Sn-Ag-Cu Epoxy Epoxy - 180 /1+

255 /60 reflow 110 /40+

190 /5 185 /20+ 200 /10

180-220 /60

cm 15 1000 40 8-50 W/mk 50 1.5 10-20 -

kgf 4.0 5.6 2.2 1-4

5. Molecular model of PIM.

19 6 2008 12 535

. 2000 UCLA Yaghi organic dicarboxylate , - . Yaghi ZnO4 core stone benzene dicarboxylate MOF-5 78 K 4 wt%, 1 wt% .

UC Berkeley Long Mn metal center . 77 K 6.9 wt% , open metal site . , .

Ferey Cr . Zn (6.1 wt%, 77 K) .

. MIT Swager , . , .

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6. Molecular structures of PIMs and simplified structure of ahypercrosslinked polymer.


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Virginia Polytechnic Institute & State University - 2 nm . POSS(polyhedral oligometric silses-quinoxanes) .

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7. ATRP .

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, BASF Oppanol Glissopal , Kuraray , --(PS-PI-PS) , .

, (1990 ) , , , , , , , , , , Dupont Performance Coating , . , Ciba Specialty Chemicals , . Kaneka ATRP telechelic . ,

nitroxide-mediated (NMRP) , Arkema BlocBulider Controller , . 6 .

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PS-PI Star Polymer(Solprene) Philips PS-PI-PMMA(Nanostrength) Arkema

PS-PEP-PS(Septon) Kuraray Polyisobutene(Oppanol, Glissopal) BASF

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2000 (: Orgacon) Agfa

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2004 PEDOT PEG ClO4 (: Aedotron, Oligotron), : 0.3 S/cm TDA

Nanoshield SWNT (: Inviscon), : 200/sq Eikos

Hollingsworth & Vose

graphite filament or metal-coated graphite filament+resin Martin Marietta -

(: Denatron), : 600 /sq Nagase Chemtex Koshibe

( , 0.08 /sq) Mitsubishi Mat. & Dainippon

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(ACF) (ACF/ACP) Telephus (ACF/ACP) LG

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19 6 2008 12 539

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a-carbon ( 8). a-Carbon strip , a-Carbon BARC CVD SiON a- carbon/SiON/BARC . , Spin-On carbon polymer Si BARC /Si-BARC/PR pattern transferring , NISSAN .

Rohm & Hass Electric Materials Dow Corning 65 nm , DRAM (Si-BARC) .

JSR(Japan Synthetic Rubber, Co., Ltd) , ArF , , .

( 10).

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2007 10 21 DPT(double pat-terning technology) 30 nm flash ( 9). , substrate DPT 9 . , sin-gle-layer .

carbon polymer BARC /Si-BARC/PR pattern transferring

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Dutour, S. Surble, and I. Margiolaki, Science, 309, 2040 (2005). 9. T. M. Long and T. M. J. Swager, J. Am. Chem. Soc., 124, 3826,

2002 10. J. W. Yoon, S. H. Jhung, Y. K. Hwang, S. M. Humphrey, P. T.

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(2006). 12. , ,

, . 13. D. Dong, S. Jiang, Y. Men, X. Ji, and B. Jiang, Adv. Mater., 12,

646 (2000). 14. Antenna Effect, Material Research, 4 (2001) 15. B. S. Bae, Polymer Science and Technology, 12, 716 (2001). 16. , ,

(2002). 17. J. Pyun and K. Matyjaszewski, Chemistry of Materials, 13, 3436

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(1999). 19. J. Pyun, J. Xia, and K. Matyjaszewski, ACS Symposium Series,

838, 273 (2003). 20. , KISTI (2005). 21 , ReSeat, , . 22. , (2003). 23. , KISTI, , . 24. www.compositesworld.com/.../2006/July. 25. , , p.55 (2006). 26. Fuji chimera, 2003 & 2004, DPI solutions, (2005). 27. J. H. Han, Polymer Science and Technology, 16, 162 (2005). 28. , COG

.

Hard mask

BARC

ResistTARC

SiONa-carbon

Sub.wafer

BARC etchSiON etcha-carbon etchHard mask etchcleaning

a-carbon depositionSiON depositionBARC coatingResist coatingTARC coatingBARC etch

SiON etchA-carbon etchSOC etchHardmask etchCleaning

Sub etchingSub cleaning

Photo mask

Hard mask

BARC

ResistTARC

SiONa-carbon

Sub.wafer

BARC etchSiON etcha-carbon etchHard mask etchcleaning

a-carbon depositionSiON depositionBARC coatingResist coatingTARC coatingBARC etch

SiON etchA-carbon etchSOC etchHardmask etchCleaning

Sub etchingSub cleaning

Photo mask

9. DPT(Double Patterning Technology) .

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PT19-6-0530 coreano