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1 Recent Progress for LED Device and Package for SSL Presented by Carson Hsieh 01/11/2013 CONFIDENTIAL

Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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Page 1: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

1

Recent Progress for LED Device and Package for SSL

Presented by Carson Hsieh 01/11/2013

CONFIDENTIAL

Page 2: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

2

Outline

• Introduction

• Recent progress for LED Device

• New Package for SSL

• Summary

Page 3: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

Ⓒ2013 Epistar Corporation. All Right Reserved.

LED Adoption : Key for Growth in the Lighting Industry 3

Source: Philips Lighting 2010, OSRAM 2012, LEDinside 2012

• PHILIPS predicts ~ 50% lighting revenue from LED by 2015 • LED light bulb show ~ 50% volume share in Japan

Page 4: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

Ⓒ2013 Epistar Corporation. All Right Reserved.

Package Device for Backlighting Applications 4

• Total flux and power per package increases with time • Number of package decreased to reduce the cost

8.5 25

100

68

Page 5: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

Ⓒ2013 Epistar Corporation. All Right Reserved.

Mid Power Chip for A-Bulb – Low Cost Approach 5

Small/Medium power chips have better flexibility and broader applications. …… may results in a lower cost.

Choices

20

Page 6: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

Ⓒ2013 Epistar Corporation. All Right Reserved.

6

Next: ~200 lm/W; 500 lm/$ vs. ~150 lm/W; 1,000 lm/$ @2015 ??

Same performance for cool white and warm white @2020 ??

LED Efficacy (lm/W) and Price ($/Klm) Roadmap

Page 7: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

Ⓒ2013 Epistar Corporation. All Right Reserved.

How to Achieve 10x lm/$ Improvement… … 7

Performance up

Cost Down

Manufacturing improvement New package technologies

Efficacy improvement Package improvement Droop reduction

$

lm

2x

5x

Between 2010 and 2020 … …

Lm/$

$/mm2

W/mm2

lm/W

$/pkg

W/pkg

Page 8: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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Outline

• Introduction

• Recent progress for LED Device

• New Package for SSL

• Summary

Page 9: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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Low droop Lm/$, ..

PKG factor Lux/Lm, PKG efficiency

Cost 2”,4”,6”,… GaN/Si,…

Efficiency Vf, Po, Lm/W

Special Func. chip Binning POC,

Solid State Lighting

LED Chip for Solid State Lighting

Page 10: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

LED Epitaxy Develop Trend V type

(horizontal)

F type (horizontal)

Active Layer n-pad

TCL

n-GaN

p-GaN

Buffer Layer

Al2O3 Substrate

p-pad

Backside metal (mirror)

Active Layer n-pad

TCL(ITO)

n-GaN

p-GaN

Buffer Layer

p-pad

Backside metal (mirror)

Al2O3 Substrate

Active Layer n-pad

TCL(NiAu)

n-GaN

p-GaN

Buffer Layer

p-pad

Backside metal (mirror)

Al2O3 Substrate

Next ? Next? Next ?? Next ???

Page 11: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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PSS type change

Patterned sapphire substrate (PSS) can effectively enhance light extraction efficiency from LED. Smaller and denser pattern structure is the trend of development.

Sapphire substrate with periodical microstructure formed by dry or wet etch provides a platform for GaN epitaxy and is now widely used for high-brightness LED.

Change in height & shape

Change in size &

pitch

Page 12: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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Advantages of nano-scale patterned sapphire substrate(NPSS): light extraction enhancement & higher epitaxy productivity due to thinner epitaxial layer required for coalescence.

PSS & NPSS

Page 13: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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Various substrate tech. PSS

GaN on Si

u-/n-GaN

Sapphire

LED

nRoS Nano-Porous

n-GaN

Sapphire

LED

u-GaN

u-/n-GaN

Si

LED

buffer layer

Page 14: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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• nRoS vs PSS : thinner epitaxial layer and shorter growth time make nRoS effective on cost reduction.

SEM – nRoS & PSS

Page 15: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

15 Nano- porous (NP) LED process

Morphology of NP with different process time

Page 16: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

16 Venus vs NP Venus

Sapphire

u-GaN

NP

n-GaN

Sapphire

n-GaN

u-GaN

Venus NP Venus

SEM

vs

P-GaN

NP

LED n-GaN

V45H V45H

Au-TO (s-site) w/o Glue 326 mW 334 mWAg-TO (N-site) w/o Glue 427 mW 428 mWAg-TO (N-site) w/ Glue 489 mW 502 mW

346 356

Type

MAP RS-Power

Venus NP Venus

Light extraction efficiency of InGaN LED can also be improved by nano-porous (NP) structure. Po of LED on NP is equivalent to that of LED on PSS.

NP

u-GaN

n-GaN

TEM

Page 17: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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Flat & PSS & NP (TEM)

Conclusion: performance of NP LED is equivalent to that of PSS LED. Higher dislocation density in NP LED can be reduced by optimizing NP density and size and also the growth parameters.

Page 18: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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GaN LED on Si Advantages of GaN LEDon Si: low substrate cost, large wafer size and hence low fabrication cost Challenges: large stress in epitaxial layer, epi crack, low epi quality wafer bowing, bad wavelength uniformity

Page 19: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

Substrate revolution

6” Sapphire

2” Sapphire

4” Sapphire

6” Sapphire

??

Page 20: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

LED Chip technology trend

thermal management !!!!!

Page 21: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

Reduce the die thickness

Replace the substrate with high thermal conductivity material

Flip Chip

How to improve the thermal resistance

Page 22: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

LED chip technology platform

V type (horizontal)

F type (horizontal)

SN type (vertical)

Active Layer n-pad

TCL

n-GaN

p-GaN

Buffer Layer

Al2O3 Substrate

p-pad

Backside metal (mirror)

Active layer P-GaN

Conductive substrate

Metal layer

Backside electrode

N-pad

N-GaN

Volume-emitter Surface-emitter

Active Layer n-pad

TCL

n-GaN

p-GaN

Buffer Layer

p-pad

Backside metal (mirror)

Al2O3 Substrate

Page 23: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

LED chip technology platform

HV type (horizontal)

Flip Chip type (horizontal)

Page 24: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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Outline

• Introduction

• Recent progress for LED Device

• New Package for SSL

• Summary

Page 26: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

EMC and SMC 26

The reflector requires a higher resistance for the high brightness light of an LED chip, so a silicone or epoxy compound replaces the injection PPA molding compound.

Page 27: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

Ⓒ2013 Epistar Corporation. All Right Reserved.

LED Efficiency Improvement 27

LER (Lm/W)

10-20% increase in performance is real and achievable

Page 28: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

28 Epistar Transparency LED Patent Application (Priority Date: Apr. 13, 2006)

Page 29: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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Transparent LED (Filed: Nov 15, 2007) CONFIDENTIAL

Page 30: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

30 CONFIDENTIAL

FV60 + HA40

F). Chip connection: 2S2P

G). Operating current: 16mA (8mA per chip)

H). Power consumption: 68V x 0.016A = 1.09W

+ - P

P P

P N

N N

N

Page 31: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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Result -- package CONFIDENTIAL

HA40 Transparent encapsulating

FV60 NYAG encapsulating

Page 32: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

Ⓒ2013 Epistar Corporation. All Right Reserved.

Candle Bulb with HV B & R LED Filament 32

+

Self heat dissipation

Page 33: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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HV FV60/HA40 HV filament 4pcs 2S2P Switching driver 6mA/filament Filament VF=58.5V @ 10mA ※ Filament 2串 VF≒114V AC110V input時 因壓差較大driver效率較差。

Page 34: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

Epistar Reinvented the Edison Bulb

Reduced heat sink cost !

Filament solution

Page 35: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

35 Frame Free Study LED Package Cost Structure

• Chip size reduction • Performance Improvement • Frame Free • Reduce encapsulation

Delete frame/ gold wire/ ……..

Page 36: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

CSP: Chip scale package

Flip Chip

TSMC Flip chip approach

Toshiba CSP:GaN on Si

Page 37: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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CSP: Chip scale package

Philips Lumileds

Page 38: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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• The Co-Activation Service Model

• LED Lighting Ready

• Actualize LED Potential

Embedded LED Chip:直接貼片使用的Chip

2010 12 15

Page 39: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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Outline

• Introduction

• Recent progress for LED Device

• New Package for SSL

• Summary

Page 40: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

40 Summary

• LED應用從背光移動到照明 • 為了提升磊晶效率及降低成本、磊晶基板有不同嘗試

• 為解決LED散熱等問題、晶片及封裝有不同解決方案

• 透明基板封裝有較好的封裝效率 • 新穎的趨勢:不只CSP、而且無支架

Page 41: Recent Progress for LED Device and Package for SSL - SEMI Progress... · •Recent progress for LED Device ... Package Device for Backlighting Applications . 4 ... resistance for

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Thank You!