M IC R ONANO TOOLS & PRODUCTS IN MICRO & NANOTECHNOLOGY

www.rdmag.com July 2007

2007 Micro/Nano 25 Winners

Non-reflective Coating − RensselaerPolytechnic Institutewww.rpi.eduThree titanium dioxide nanorod layers andtwo silicon dioxide nanorod layers placedvia oblique-angle deposition on the surfaceof a transparent sheet of aluminum nitrideresult in a coated material that re�ects virtu-ally no light. The thin �lms are progressivelylayered more densely such that the bound-ary layers are more gradual, reducing there�ection of light.

M IC R ONANO TOOLS & PRODUCTS IN MICRO & NANOTECHNOLOGY

Engineered Carbon Nanotube (CNT) andNanofiber Buckypapers−Florida State Univ.www.fsu.eduThese materials are macroscopic or continuousthin �lms or membranes comprised of randomlyoriented and magnetically aligned CNTs andnano�bers. These buckypapers combine theadvantages of large dimensions, superior elec-trical conductivity, nanotube alignment, and con-tinuous production.

Enhanced Deformable Mirror (DM)−BostonMicromachines Corp.www.bostonmicromachines.comThese devices are used for ultra-high resolutionretinal imaging, which is necessary for the earlydetection of ocular diseases. An enhancementof the Multi-DM, this new mirror deliversincreased stroke while maintaining high resolu-tion. The mirror’s 3 kHz frequency capabilityallows for high-speed real-time imaging with a 6-mm aperture perfectly suited for a dilated pupil.

Functionalized Nanoporous Thin Film (FNTF)−Pacific Northwest National Laboratorywww.pnl.govFNTF is a customized coating that preconcen-trates heavy metals in water, creating samplesthat increase the detection sensitivity of x-ray�uorescence (XRF) spectroscopy by up to1,000x. FNTF-coated XRF sampling disks canpreconcentrate selected heavy metals from liq-uid samples, which then presents a solid sam-ple to the XRF instrument.

GLAD, Glancing Angle Deposition−Micralyne, Inc.www.micralyne.comGLAD is a proprietary physical vapor deposi-tion (PVD) technology used to fabricateporous thin �lms composed of engineerednanostructures. GLAD combines a collimatedvapor stream, low adatom mobility, and com-puter-controlled substrate motion to formcolumnar thin �lms that can be sculpted intoa variety of nanostructures, including vertical-ly aligned nanorods, helices, and chevrons.

Hybrid Nano-CMOS Chips−Hewlett-PackardLaboratorieswww.hp.comField programmable nanowire interconnects(FPNI) consisting of 15-nm wide crossbar wires

combined with 45-nm CMOS have beendemonstrated. They improve upon the FPGAarchitecture by lifting the con�guration bit andassociated components out of the semiconduc-tor plane and replacing them in the interconnectwith nonvolatile switches. This decreases thearea and the power consumption of the circuit.

Invisicon Carbon Nanotube (CNT) Transparent Conductors−Eikos, Inc.www.eikos.comInvisicon is a �exible transparent conductivecoating based on single-wall CNTs that can beapplied to any surface using traditional wetatmospheric coating processes. The coating isformed from dispersions of highly puri�edCNTs in a fugitive �uid. The resulting coating ismore transparent than competitive systems,more �exible, has better abrasion resistance,and is stable to UV moisture and heat.

LithoParticles−Univ. of California at Los Angeleswww.ucla.eduLithoParticles are micro- or nanoscale �uores-cent particles made from solid polymeric mate-rials and dispersed in a liquid solution. Themicroparticles can be manufactured in anyshape displaying “exquisite �delity of theshapes.” The researchers also claim to have theability to make functional devices in solution.

Metal Infusion Surface Treatment (MIST)−C-3International, LLCwww.cccintl.comMIST is an advanced, low-cost infused coat-ing technology. The process takes any of 58desired periodic table elements, or combina-tions thereof, into a formulation, which is thenapplied to non-organic materials. With a sim-ple spray or dip and low heat treatment, thevarious elements and their unique propertiesare di�used into surfaces, along with a 0.1- to0.5-µm infusion coating. The result is a uni-form, durable nano-thin �lm treatment thatdelivers quantum physical improvements.

Metal Rubber Textiles−NanoSonic, Inc.www.nanosonic.comThese materials are novel, ultralow-weight,nearly transparent, electrically conductive,�exible textiles. They are made using an envi-ronmentally friendly, modi�ed electrostaticself-assembly process. The materials are

nanocomposites that contain �exible poly-mers and electrically conductive metal nan-oclusters. Included in the mixture are noblemetals, metal oxides, and metal alloy nan-oclusters, along with cage-structured mole-cules such as carbon nanotubes, buckyballs,and biomolecules.

Microcontact Insertion Printing−Pennsylvania State Univ.www.psu.eduMicrocontact insertion printing is a processfor creating patterns of individual moleculeson a surface that combines controlling self-assembling monolayers (SAMs) and soft lith-ography. The method builds surfaces thathave molecules with speci�c functions insert-ed at known intervals on the surface.

Molecular Vapor Deposition (MVD)−AppliedMicroStructures, Inc.www.appliedmst.comMVD is a surface engineering technologywhose primary bene�t is that speci�c character-istics can be imparted onto a substrate withoutaltering the bulk material traits. MVD is based onorganic and metal-organic vapors in a low-tem-perature process which ensures compatibilitywith any material. MVD is suited for emergingapplications where functional coatings act assurface lubricants in MEMS-based sensors andstructures, as release layers for lithography, or tocreate reactive surface sites in bio-chips.

Nanocomposites via Epitaxial, 3-D Self-Assembly of Nanodots of One Complex Materialwithin Another−Oak Ridge National Laboratorywww.ornl.govNanocomposites consisting of ordered 3-Darrays of nanodots of one complex ceramicmaterial coherently embedded in anotherceramic matrix comprise a novel class ofmaterials for wide-ranging applications. Suchmaterials are expected to exhibit novel physicalproperties tunable by adjusting the overallcomposition, concentration, feature size, andspatial ordering of the nanodots.

Nano eNabler System−BioForceNanosciences, Inc.www.bioforcenano.comThe Nano eNabler system is a benchtopmolecular printer for dispensing attoliter to

www.rdmag.com July 2007 R&D Magazine 33

2007 Micro/Nano 25 Winners

34 R&D Magazine July 2007 www.rdmag.com

M IC R ONANO

femtoliter volumes of various molecules forfunctionalizing biosensors and creatingpatterned surfaces. It is the �rst devicedesigned speci�cally to print user-de�nedpatterns of 1- to 30-µm spots and lines ontoa variety of surfaces with nanometerprecision.

Nanogenerators−Georgia Institute of Technologywww.gatech.eduThese nanometer-scale generators producecontinuous direct-current electricity byharvesting mechanical energy from suchenvironmental sources as ultrasonic waves,mechanical vibration, or blood �ow. Thedevices are based on arrays of verticallyaligned zinc-oxide nanowires that moveinside a novel zig-zag plate electrode. Theytake advantage of the unique coupledpiezoelectric and semiconducting propertiesof the zinc-oxide nanostructures.

Nano Imprint Lithography (NIL) Equipment, NPS300−SUSS MicroTec Lithography GmbHwww.suss.comNIL exists in two methods—UV-NIL and hotembossing. Both methods consist of printinga mold/stamp with nm-features onto apolymer, thus transferring the stamp patterninto that material. Curing of the polymer isthen performed with either UV light ortemperature. The uniqueness of the NPS300equipment is in the fact that it can handleboth technologies without any tradeo�s orshortened changeover capabilities.

Nano Indenter G200−MTS Systems Corp.www.mtsnano.comNano Indenter G200 is a next generationnanomechanical testing system. Whiletypically used to perform nano-indentationtests, the system also is capable ofquantitative nanomechanical microscopy (3-D topography), scratch and adhesion testing,microhardness testing, and mechanicaltesting of MEMS devices and structures.The system employs electromagneticactuation as the core technology.

nano-TA−Anasys Instrumentswww.anasysinstruments.comnano-TA is the �rst ever product that enablesquantitative local thermal analysis at the sub-100-nm size scales. The nano-TA moduleallows any atomic force microscope to per-form these local thermal analyses. The device

functions as a normal imaging AFM with aresolution of better than 30 nm, and, uponchoosing a region of interest, the user canreposition the probe tip and subject theregion to a thermal ramp.

nanoTensile 5000 Automated Test Instrument−Hysitron, Inc.www.hysitron.comThe nanoTensile 5000 is an automated, 3-Dsensing, nanometer-scale precision tensileinstrument for the testing of small-scale mate-rial specimens and miniaturized devices. Thisinstrument provides a 3-axis load measure-ment and is isolated from external force andacoustic and thermal disturbances. Its dis-placement resolution is �ve times better thanthe next best system.

Nerve Graft Materials−Univ. of California atBerkeleywww.berkeley.eduNerve graft materials composed of aligned,nanoscale polymer �bers that act as physicalguides for regenerating nerve �bers havebeen developed. These nano�bers becomebioactive by attaching various biochemicalsdirectly onto the surface of the nano�bers.The technology has been licensed to NanoN-erve, Inc.

Non-reflective Coating−RensselaerPolytechnic Institutewww.rpi.eduThree titanium dioxide nanorod layers andtwo silicon dioxide nanorod layers placedvia oblique-angle deposition on the surfaceof a transparent sheet of aluminum nitrideresult in a coated material that re�ects virtu-ally no light. The thin �lms are progressivelylayered more densely such that the bound-ary layers are more gradual, reducing there�ection of light.

NS Gold Oxidation Catalyst Technology−Nanostellar, Inc.www.nanostellar.comNS Gold is used as a coating in automotivecatalytic converter systems to reduce nox-ious emissions by 40% more than traditionalpure platinum catalyst materials at an equalcost. To develop the gold-platinum-palladi-um-based NS Gold, the performance ofnanoscale materials in diesel emission con-trol applications was targeted and re�nedusing a combination of computational model-ing and a rapid synthesis-analysis cycle.

PRINT Technology for Engineered DrugTherapies−Liquidia Technologies, Inc.www.liquidia.comPRINT is a nanoparticle fabricationtechnique that allows for the precise controlover particle size, shape, composition,modulus, and particle surface properties.PRINT nanoparticles have beenmanufactured containing biological, smallmolecular, and imaging agents. By expresslyengineering the surfaces for cell and tissuerecognition, the nanoparticles can targetcertain cell and tissue types.

RainMaker Humidification System (RHS)−RASIRCwww.rasirc.comThis is the �rst and only system to generateand deliver precise amounts of ultra-purewater vapor puri�ed for both ioniccontaminants and dissolved gases. Utilizinga non-porous membrane that excludesparticles, micro-droplets, volatile gases, andother opposite-charged species, the RHSadds controlled amounts of ultra pure watervapor directly into any carrier gas stream.

Self-Assembling Process for FabricatingTailored Thin Films−Sandia NationalLaboratorieswww.sandia.govThis simple, economical nanotechnologycoating process enables the development of nanoparticle thin �lms with architecturesand properties unattainable by any otherprocessing method. This nanoparticlesurface chemistry enables dispersal inreadily available commercial solvents,allowing easy and rapid production of �lmsthrough spin, dip, or spray coating underambient conditions.

Super CNT Fibers−Los Alamos National Laboratorywww.lanl.govSpun from 1-mm-long, double-wall carbonnanotubes (CNTs), Super CNT Fibers have10% of the density, and four to �ve times thespeci�c strength and speci�c sti�ness of thebest carbon �bers now used to makestructural composites. CNT yarns have beendirectly spun from CNT arrays, providinggood alignment and high CNT volumefractions.