2LED, LD, HEMT

LPE, HVPE, MOVPE, MBE

LEDGaAsAlGaAsGaPGaAsPAlGaInPGaInNGaAsGaAsGaPGaAs, GaPGaAsAl2O3LDInGaAsPAlGaAsAlGaInPGaInN(780nm)(650nm)(405nm)InPGaAsGaAsAl2O3

(1)(2)

(2)(3)(2),(3)()

6

1:Padyn/cm2

x,y,z

1dyn/cm2 = dyncm / cm3 = erg / cm3

zy

(epitaxial layer)(substrate)

epi subhomo-epitaxy GaAs/GaAs, GaP/GaP, Si/Si

episubhetero-epitaxy InGaAs/GaAs, GaN/Al2O3, SiGe/Si

500mm10mm

1epi.sub.epi.sub.aepi > asubaepi < asubasubasubaepiaepi

1asubaaasub

GaAsInPaRT[]5.65335.8687a[K-1]6.910-64.510-6