96 U9321023 U9321010

GeO2

ROMRead Only MemoryFlash

-

Ge + 20ITO/Glass(3000rpm/15sec)(4000rpm/20sec)1:8(GeO2)

2500600700101.2.3. 47-cm 4.(Ge)(GeO2 )ITO/Glass

1.102. 10 3. ITO/Glass20 4.

-X

X600XRD(100)(101)ITO(110)(102)(111)(200)(Intensity)

X100XRD(101)(100)(110)(102)(200)(111)ITO(Intensity)

100700SEM

50060070075 500200100600700700600 500

200500

-

hard mask2mmptMetal-Insulator-Metal (MIM)

PtPtThin filmITOGlass

200700

200500

XRD100700 SEM AFM20010nm 200700