(E-GUN EVAPORATION)
2
||||
3|()
|(Physical Vapor DepositionPVD)
4|
5|
|
|
1~10-3 torr 10-3 ~10-7 torr 10-7 torr
6
7-
8-
9-
10
-
11
-CV-6S
12
-
13
-|
|1350
14
-|2
1.
2.
15
-|
1.
2.
16
-|
|
17
-||10-6torrMAIN PUMPING READY
1.
2.
18
-|
19
-|
|
20
-|KEYON
1. 3.2.
21
-
|Start7.3%
22
-|Shutter
|
23
-|Shutter
|
|
|
24
-|PUMPINGHVCP
1.
2.
3.
25
!!